Compact modeling of thin-film silicon transistors fabricated on glass

The semiconductor industry, now entering its seventh decade, continues to innovate and evolve at a breakneck pace. E. O. Wilson, the famous Harvard biologist who is an expert on ants, estimates that there are 1017 ants on earth. The semiconductor industry is now shipping 100 transistors per ant every year. In addition, the pace of growth means we are building more electronics in a year than existed on January 1st of that year! A major driver for this growth in recent years is the portable consumer electronics market which includes cell phones, personal digital assistants, and tablets. The focus of this dissertation is centered on a new thin-film silicon technology on glass introduced by Corning Inc., and targeted to meet the needs of the portable product display market. The work presented in this dissertation revolves around a new technology developed by Corning Inc. known as Silicon on Glass or SiOG which permits the transfer of a thin single-crystal silicon film to a glass substrate. This technology coupled with a low-temperature CMOS process has the potential to create devices with performance characteristics rivaling those developed using conventional bulk CMOS processes. These higher performing devices permit an increased level of circuit integration directly on the glass substrate and have the potential to enable new display technologies such as OLED (Organic Light Emitting Diode). The SiOG CMOS devices are distinctly different from traditional thin-film, silicon-on-insulator, and bulk CMOS devices in that they rely on both surface and bulk conduction. Furthermore, their current-voltage characteristics are heavily influenced by fringing electric fields in the glass substrate. This dissertation presents an overview of display technology as well as a review of computer- aided design tools for integrated circuit development with a focus on compact modeling. In addition, some early work on developing advanced OLED display driver circuits using SiOG technology is presented.The bulk of this dissertation is focused on the development of compact models which properly describe the electrical characteristics of SiOG CMOS devices. For all but the most trivial cases, the set of coupled nonlinear partial differential equations that describe semiconductor device behavior has not been solved analytically. Even when the semiconductor equations that represent current flow, charge distribution, and potential distribution are decoupled and device-specific simplifications are applied, analytic solutions remain elusive. Two different methods for developing compact models for the SiOG CMOS devices are presented with distinct methods for developing approximate solutions. In addition, a model for the fringing electric field is developed using conformal mapping techniques, and its effect on drain current is explored. Finally, a new technique for solving the nonlinear semiconductor equations is explored. The application of a new mathematical technique known as the Homotopy Analysis Method (HAM) is presented as it relates to the general Poisson\u27s equation for semiconductor devices

Semiconductor Device Modeling and Simulation for Electronic Circuit Design

This chapter covers different methods of semiconductor device modeling for electronic circuit simulation. It presents a discussion on physics-based analytical modeling approach to predict device operation at specific conditions such as applied bias (e.g., voltages and currents); environment (e.g., temperature, noise); and physical characteristics (e.g., geometry, doping levels). However, formulation of device model involves trade-off between accuracy and computational speed and for most practical operation such as for SPICE-based circuit simulator, empirical modeling approach is often preferred. Thus, this chapter also covers empirical modeling approaches to predict device operation by implementing mathematically fitted equations. In addition, it includes numerical device modeling approaches, which involve numerical device simulation using different types of commercial computer-based tools. Numerical models are used as virtual environment for device optimization under different conditions and the results can be used to validate the simulation models for other operating conditions

Two dimensional quantum and reliability modelling for lightly doped nanoscale devices

The downscaling of MOSFET devices leads to well-studied short channel effects and more complex quantum mechanical effects. Both quantum and short channel effects not only alter the performance but they also affect the reliability. This continued scaling of the MOS device gate length puts a demand on the reduction of the gate oxide thickness and the substrate doping density. Quantum mechanical effects give rise to the quantization of energy in the conduction band, which consequently creates a larger effective bandgap and brings a displacement of the inversion layer charge out of the Si/SiO2 interface. Such a displacement of charge is equivalent to an increase in the effective oxide layer thickness, a growth in the threshold voltage, and a decrease in the current level. Therefore, using the classical analysis approach without including the quantum effects may lead to perceptible errors in the prognosis of the performance of modern deep submicron devices. In this work, compact Verilog-A compatible 2D models including quantum short channel effects and confinement for the potential, threshold voltage, and the carrier charge sheet density for symmetrical lightly doped double-gate MOSFETs are developed. The proposed models are not only applicable to ultra-scaled devices but they have also been derived from analytical 2D Poisson and 1D Schrodinger equations including 2D electrostatics, in order to incorporate quantum mechanical effects. Electron and hole quasi-Fermi potential effects were considered. The models were further enhanced to include negative bias temperature instability (NBTI) in order to assess the reliability of the device. NBTI effects incorporated into the models constitute interface state generation and hole-trapping. The models are continuous and have been verified by comparison with COMSOL and BALMOS numerical simulations for channel lengths down to 7nm; very good agreement within ±5% has been observed for silicon thicknesses ranging from 3nm to 20nm at 1 GHz operation after 10 years

Intrinsic variability of nanoscale CMOS technology for logic and memory.

The continuous downscaling of CMOS technology, the main engine of development of the semiconductor Industry, is limited by factors that become important for nanoscale device size, which undermine proper device operation completely offset gains from scaling. One of the main problems is device variability: nominally identical devices are different at the microscopic level due to fabrication tolerance and the intrinsic granularity of matter. For this reason, structures, devices and materials for the next technology nodes will be chosen for their robustness to process variability, in agreement with the ITRS (International Technology Roadmap for Semiconductors). Examining the dispersion of various physical and geometrical parameters and the effect these have on device performance becomes necessary. In this thesis, I focus on the study of the dispersion of the threshold voltage due to intrinsic variability in nanoscale CMOS technology for logic and for memory. In order to describe this, it is convenient to have an analytical model that allows, with the assistance of a small number of simulations, to calculate the standard deviation of the threshold voltage due to the various contributions

Analytical predictive 2d modeling of pinch-off behavior in nanoscale multi-gate mosfets

In this thesis the pinch-off behavior in nanoscale Multi-Gate MOSFETs was reviewed and with compact models described. For this a 2D approach with Schwarz-Christoffel conformal mapping technique was used. A model to calculate the current in single gate MOSFETs was derived and compared to device simulations from TCAD Sentaurus down to 50nm. For the DoubleGate MOSFET a new way to define the saturation point was found. A fully 2D closed-form model to locate this point was created. It was also found that with quantum mechanics effects a pinch-off point can occur and can be described with the same model. Furthermore the model was extended to describe the coupled pinch-off points in an asymmetrical biased DoubleGate MOSET with an even an odd mode. Also the saturation point behavior in FinFETs was examinated

Variability analysis of FinFET AC/RF performances through efficient physics-based simulations for the optimization of RF CMOS stages

A nearly insatiable appetite for the latest electronic device enables the electronic technology sector to maintain research momentum. The necessity for advancement with miniaturization of electronic devices is the need of the day. Aggressive downscaling of electronic devices face some fundamental limits and thus, buoy up the change in device geometry. MOSFETs have been the leading contender in the electronics industry for years, but the dire need for miniaturization is forcing MOSFET to be scaled to nano-scale and in sub-50 nm scale. Short channel effects (SCE) become dominant and adversely affect the performance of the MOSFET. So, the need for a novel structure was felt to suppress SCE to an acceptable level. Among the proposed devices, FinFETs (Fin Field Effect Transistors) were found to be most effective to counter-act SCE in electronic devices. Today, many industries are working on electronic circuits with FinFETs as their primary element.One of limitation which FinFET faces is device variability. The purpose of this work was to study the effect that different sources of parameter fluctuations have on the behavior and characteristics of FinFETs. With deep literature review, we have gained insight into key sources of variability. Different sources of variations, like random dopant fluctuation, line edge roughness, fin variations, workfunction variations, oxide thickness variation, and source/drain doping variations, were studied and their impact on the performance of the device was studied as well. The adverse effect of these variations fosters the great amount of research towards variability modeling. A proper modeling of these variations is required to address the device performance metric before the fabrication of any new generation of the device on the commercial scale. The conventional methods to address the characteristics of a device under variability are Monte-Carlo-like techniques. In Monte Carlo analysis, all process parameters can be varied individually or simultaneously in a more realistic approach. The Monte Carlo algorithm takes a random value within the range of each process parameter and performs circuit simulations repeatedly. The statistical characteristics are estimated from the responses. This technique is accurate but requires high computational resources and time. Thus, efforts are being put by different research groups to find alternative tools. If the variations are small, Green’s Function (GF) approach can be seen as a breakthrough methodology. One of the most open research fields regards "Variability of FinFET AC performances". One reason for the limited AC variability investigations is the lack of commercially available efficient simulation tools, especially those based on accurate physics-based analysis: in fact, the only way to perform AC variability analysis through commercial TCAD tools like Synopsys Sentaurus is through the so-called Monte Carlo approach, that when variations are deterministic, is more properly referred to as incremental analysis, i.e., repeated solutions of the device model with varying physical parameters. For each selected parameter, the model must be solved first in DC operating condition (working point, WP) and then linearized around the WP, hence increasing severely the simulation time. In this work, instead, we used GF approach, using our in-house Simulator "POLITO", to perform AC variability analysis, provided that variations are small, alleviating the requirement of double linearization and reducing the simulation time significantly with a slight trade-off in accuracy. Using this tool we have, for the first time addressed the dependency of FinFET AC parameters on the most relevant process variations, opening the way to its application to RF circuits. This work is ultimately dedicated to the successful implementation of RF stages in commercial applications by incorporating variability effects and controlling the degradation of AC parameters due to variability. We exploited the POLITO (in-house simulator) limited to 2D structures, but this work can be extended to the variability analysis of 3D FinFET structure. Also variability analysis of III-V Group structures can be addressed. There is also potentiality to carry out the sensitivity analysis for the other source of variations, e.g., thermal variations

Compact modeling of the rf and noise behavior of multiple-gate mosfets

La reducción de la tecnología MOSFET planar ha sido la opción tecnológica dominante en las últimas décadas. Sin embargo, hemos llegado a un punto en el que los materiales y problemas en los dispositivos surgen, abriendo la puerta para estructuras alternativas de los dispositivos. Entre estas estructuras se encuentran los dispositivos DG, SGT y Triple-Gate. Estas tres estructuras están estudiadas en esta tesis, en el contexto de rducir las dimensiones de los dispositivos a tamaños tales que los mecanismos cuánticos y efectos de calan coro deben tenerse n cuenta. Estos efectos vienen con una seria de desafíos desde el pun to de vista de modelación, unos de los más grandes siendo el tiempo y los recursos comprometidos para ejecutar las simulaciones. para resolver este problema, esta tesis propone modelos comlets analíticos y compactos para cada una de las geometrías, validos desde DC hasta el modo de operación en Rf para los nodos tecnológicos futuros. Dichos modelos se han extendido para analizar el ruido de alta frecuencia en estos diapositivos

Charge-based compact model of gate-all-around floating gate nanowire with variable oxide thickness for flash memory cell

Due to high gate electrostatic control and introduction of punch and plug process technology, the gate-all-around (GAA) transistor is very promising in, and apparently has been utilized for, flash memory applications. However, GAA Floating Gate (GAA-FG) memory cell still requires high programming voltage that may be susceptible to cell-to-cell interference. Scaling down the tunnel oxide can reduce the Program/Erase (P/E) voltage but degrades the data retention capability. By using Technology-Computer-Aided-Design (TCAD) tools, the concept of tunnel barrier engineering using Variable Oxide Thickness (VARIOT) of low-k/high-k stack is utilized in compensating the trade-off between P/E operation and retention characteristics. Four high-k dielectrics (Si3N4, Al2O3, HfO2 and ZrO2) that are commonly used in semiconductor process technology are examined with SiO2 as its low-k dielectric. It is found that by using SiO2/Al2O3 as the tunnel layer, both the P/E and retention characteristics of GAA-FG can be compensated. About 30% improvement in memory window than conventional SiO2 is obtained and only 1% of charge-loss is predicted after 10 years of applying gate stress of -3.6V. Compact model of GAA-FG is initiated by developing a continuous explicit core model of GAA transistor (GAA Nanowire MOSFET (GAANWFET) and Juntionless Nanowire Transitor (JNT)). The validity of the theory and compact model is identified based on sophisticated numerical TCAD simulator for under 10% maximum error of surface potential. It is revealed that with the inclusion of partial-depletion conduction, the accuracy of the core model for GAANWFET is improved by more than 50% in the subthreshold region with doping-geometry ratio can be as high as about 0.86. As for JNT, despite the model being accurate for doping-geometry ratio upto 0.6, it is also independent of fitting parameters that may vary under different terminal biases or doping-geometry cases. The compact model of GAA-FG is completed by incorperating Charge Balance Model (CBM) into GAA transistor core model where good agreement is obtained with TCAD simulation and published experimental work. The CBM gives better accuracy than the conventional capacitive coupling approach under subthreshold region with approximately 10% error of floating gate potential. Therefore, the proposed compact model can be used to assist experimental work in extracting experimental data