Analysis and control of monolithic piezoelectric nano-actuator

The study of the monolithic piezoelectric actuator, the dominant type of micropositioner is an attractive and challenging area, where realtime control theory and digital signal processing are effectively applied. The actuator can be applied in precision instruments and precision control, such as microscopes, medical and optics instruments because of the piezoelectric ceramic\u27s high resolution, fast transient response, and potential low cost. However, hysteresis nonlinearity and lightly damped vibration exist in the system, which limit the actuator applications. This work focuses on the hysteresis characteristics in time and frequency domains along with experimental and simulated results to verify the effectiveness of the model in describing the hysteresis phenomena. The analytic expressions of the hysteresis harmonics are further applied in hysteresis parameter estimation. A reduced order nonlinear hysteresis observer compensator is proposed, and the stability of the compensated system is discussed. The compensator reduces the hysteresis effect significantly under simulated and experimental conditions. Furthermore, an adaptive hysteresis observer compensator is further presented to compensate the slowly changed hysteresis parameters. Time division multi-control strategy is proposed to implement fast transient response, low vibration and high resolution. Extensive numerical simulation and real-time experiment are carried out to verify the control strategies. GUI is developed to implement the communication between the code in DSP memory and Labview, which improves the efficiency in system test

Sliding-mode control of a flexure based mechanism using piezoelectric actuators

The position control of designed 3 PRR flexure based mechanism is examined in this paper. The aims of the work are to eliminate the parasitic motions of the stage, misalignments of the actuators, errors of manufacturing and hysteresis of the system by having a redundant mechanism with the implementation of a sliding mode control and a disturbance observe. x-y motion of the end-effector is measured by using a laser position sensor and the necessary references for the piezoelectric actuators are calculated using the pseudo inverse of the transformation matrix coming from the experimentally determined kinematics of the mechanism. The effect of the observer and closed loop control is presented by comparing the results with open loop control. The system is designed to be redundant to enhance the position control. In order to see the effects of the redundant system firstly the closed loop control for active 2 piezoelectric actuators experiments then for active 3 piezoelectric actuators experiments are presented. As a result, our redundant mechanism tracks the desired trajectory accurately and its workspace is bigger

Model reference control for ultra-high precision positioning systems

Due to the increasing demands of high-density semiconductors, molecular biology, optoelectronics, and MEMS/NEMS in the past decades, control of ultra-high precision positioning using piezoelectricity has become an important area because of its high displacement resolution, wide bandwidth, low power consumption, and potential low cost. However, the relatively small displacement range limits its application. This work proposed a practical ultra-high precision piezoelectric positioning system with a complementary high displacement range actuation technology. Solenoids are low cost, high speed electromagnetic actuators which are commonly used in on-off mode only because of the inherent high nonlinear force-stroke characteristics and unipolar forces (push/pull) generated by the magnetic fields. In this work, an integrated positioning system based on a monolithic piezoelectric positioner and a set of push-pull dual solenoid actuators is designed for high speed and high precision positioning applications. The overall resolution can be sub-nanometer while the moving range is in millimeters, a three order of magnitude increase from using piezoelectric positioner alone. The dynamic models of the dual solenoid actuator and piezoelectric nanopositioner are derived. The main challenge of designing such positioning systems is to maintain the accuracy and stability in the presence of un-modeled dynamics, plant variations, and parasitic nonlinearities, specifically in this work, the friction and forcestroke nonlinearities of the dual solenoid actuator, and the friction, hysteresis and coupling effects of piezoelectric actuator, which are impossible to be modeled accurately and even time-varying. A model reference design approach is presented to attenuate linear as well as nonlinear uncertainties, with a fixed order controller augmenting a reference model that embeds the nominal dynamics of the plant. To improve transient characteristics, a Variable Model Reference Zero Vibration (VMRZV) control is also proposed to stabilize the system and attenuate the adverse effect of parasitic nonlinearities of micro-/nano- positioning actuators and command-induced vibrations. The speed of the ultra-high precision system with VMRZV control can also be quantitatively adjusted by systematically varying the reference model. This novel control method improves the robustness and performance significantly. Preliminary experimental data on dual solenoid system confirm the feasibility of the proposed method

Potentialities of optimal design methods and associated numerical tools for the development of new micro- and nanointelligent systems based on structural compliance - An example -

11 pagesInternational audienceThis paper deals with the interest and potential use of intelligent structures mainly based on compliant mechanisms (and optionally including smart materials), for the development of new micro- and nano-robotics devices. The state of the art in optimal design methods for the synthesis of intelligent compliant structures is briefly done. Then, we present the optimal method developed at CEA LIST, called FlexIn, and its new and still in development functionalities, which will be illustrated by a few simple design examples. An opening will be given about the possibility to address the field of Nanorobotics, while adding functionalities to the optimal design method

Microsystems technology: objectives

This contribution focuses on the objectives of microsystems technology (MST). The reason for this is two fold. First of all, it should explain what MST actually is. This question is often posed and a simple answer is lacking, as a consequence of the diversity of subjects that are perceived as MST. The second reason is that a map of the somewhat chaotic field of MST is needed to identify sub-territories, for which standardization in terms of system modules an interconnections is feasible. To define the objectives a pragmatic approach has been followed. From the literature a selection of topics has been chosen and collected that are perceived as belonging to the field of MST by a large community of workers in the field (more than 250 references). In this way an overview has been created with `applications¿ and `generic issues¿ as the main characteristics

Strain-Tuning of the Optical Properties of Semiconductor Nanomaterials by Integration onto Piezoelectric Actuators

The tailoring of the physical properties of semiconductor nanomaterials by strain has been gaining increasing attention over the last years for a wide range of applications such as electronics, optoelectronics and photonics. The ability to introduce deliberate strain fields with controlled magnitude and in a reversible manner is essential for fundamental studies of novel materials and may lead to the realization of advanced multi-functional devices. A prominent approach consists in the integration of active nanomaterials, in thin epitaxial films or embedded within carrier nanomembranes, onto Pb(Mg1/3Nb2/3)O3-PbTiO3-based piezoelectric actuators, which convert electrical signals into mechanical deformation (strain). In this review, we mainly focus on recent advances in strain-tunable properties of self-assembled InAs quantum dots embedded in semiconductor nanomembranes and photonic structures. Additionally, recent works on other nanomaterials like rare-earth and metal-ion doped thin films, graphene and MoS2 or WSe2 semiconductor two-dimensional materials are also reviewed. For the sake of completeness, a comprehensive comparison between different procedures employed throughout the literature to fabricate such hybrid piezoelectric-semiconductor devices is presented. Very recently, a novel class of micro-machined piezoelectric actuators have been demonstrated for a full control of in-plane stress fields in nanomembranes, which enables producing energy-tunable sources of polarization-entangled photons in arbitrary quantum dots. Future research directions and prospects are discussed.Comment: review manuscript, 78 pages, 27 figure

PKM mechatronic clamping adaptive device

This study proposes a novel adaptive fixturing device based on active clamping systems for smart micropositioning of thin-walled precision parts. The modular architecture and the structure flexibility make the system suitable for various industrial applications. The proposed device is realized as a Parallel Kinematic Machine (PKM), opportunely sensorized and controlled, able to perform automatic error-free workpiece clamping procedures, drastically reducing the overall fixturing set-up time. The paper describes the kinematics and dynamics of this mechatronic system. A first campaign of experimental trails has been carried out on the prototype, obtaining promising results

Redesign of the MMOC microgripper piezoactuator using a new topological optimization method.

International audienceThis paper presents a new method developed for the optimal design of piezoactive compliant mechanisms. It is based on a flexible building blocks method, called FlexIn, which uses an evolutionary approach, to optimize a truss-like structure made of passive and active piezoelectric building blocks. An electromechanical approach, based on a mixed finite element method, is used to establish the model of the piezoelectric blocks. A planar monolithic compliant microactuator is synthetized by the optimization method, based on the specifications drawn from a piezoelectric microgripper prototype (MMOC). Finally, some performances comparisons between the optimally FlexIn synthetized gripper and the previous gripping system demonstrate the interests of the proposed optimization method for the design of microactuators, microrobots, and more generally for adaptronic structrures

Workshop on "Control issues in the micro / nano - world".

International audienceDuring the last decade, the need of systems with micro/nanometers accuracy and fast dynamics has been growing rapidly. Such systems occur in applications including 1) micromanipulation of biological cells, 2) micrassembly of MEMS/MOEMS, 3) micro/nanosensors for environmental monitoring, 4) nanometer resolution imaging and metrology (AFM and SEM). The scale and requirement of such systems present a number of challenges to the control system design that will be addressed in this workshop. Working in the micro/nano-world involves displacements from nanometers to tens of microns. Because of this precision requirement, environmental conditions such as temperature, humidity, vibration, could generate noise and disturbance that are in the same range as the displacements of interest. The so-called smart materials, e.g., piezoceramics, magnetostrictive, shape memory, electroactive polymer, have been used for actuation or sensing in the micro/nano-world. They allow high resolution positioning as compared to hinges based systems. However, these materials exhibit hysteresis nonlinearity, and in the case of piezoelectric materials, drifts (called creep) in response to constant inputs In the case of oscillating micro/nano-structures (cantilever, tube), these nonlinearities and vibrations strongly decrease their performances. Many MEMS and NEMS applications involve gripping, feeding, or sorting, operations, where sensor feedback is necessary for their execution. Sensors that are readily available, e.g., interferometer, triangulation laser, and machine vision, are bulky and expensive. Sensors that are compact in size and convenient for packaging, e.g., strain gage, piezoceramic charge sensor, etc., have limited performance or robustness. To account for these difficulties, new control oriented techniques are emerging, such as[d the combination of two or more ‘packageable' sensors , the use of feedforward control technique which does not require sensors, and the use of robust controllers which account the sensor characteristics. The aim of this workshop is to provide a forum for specialists to present and overview the different approaches of control system design for the micro/nano-world and to initiate collaborations and joint projects

Scaled bilateral teleoperation using discrete-time sliding mode controller

In this paper, the design of a discrete-time slidingmode controller based on Lyapunov theory is presented along with a robust disturbance observer and is applied to a piezostage for high-precision motion. A linear model of a piezostage was used with nominal parameters to compensate the disturbance acting on the system in order to achieve nanometer accuracy. The effectiveness of the controller and disturbance observer is validated in terms of closed-loop position performance for nanometer references. The control structure has been applied to a scaled bilateral structure for the custom-built telemicromanipulation setup. A piezoresistive atomic force microscope cantilever with a built-in Wheatstone bridge is utilized to achieve the nanonewtonlevel interaction forces between the piezoresistive probe tip and the environment. Experimental results are provided for the nanonewton-range force sensing, and good agreement between the experimental data and the theoretical estimates has been demonstrated. Force/position tracking and transparency between the master and the slave has been clearly demonstrated after necessary scalin