Actuation Techniques For Frequency Modulated MEMS Gyroscopes

This thesis focuses on the design and implementation of an analog actuation circuit for a novel frequency-modulated MEMS gyroscope. The gyroscope detects angular rotations as the difference between the natural frequencies of two closely spaced drive and sense modes rather than the magnitude of displacement in the sense direction. Furthermore, the actuation system features a resonant drive (RLC) circuit that amplifies the gyroscope actuation signal. The input to the circuit is an amplitude-modulated (AM) signal composed of a carrier signal modulated with a base signal that excites the gyroscope drive mode. The carrier frequency corresponds to the electrical resonance frequency of the drive circuit. This research develops techniques for the stabilization of the circuit output through close loop feedback. First, we attempt to increase the signal-to-noise ratio of the modulating signal by implementing feedback and feedforward control loops (AGC). The feedback controller closes the loop on the entire conditioning circuit for the modulating signal while the feedforward controller acts on the input signal to the conditioning circuit. The feedforward and the feedback controllers derive an error signal representing the signal noise by comparing the input and output signal, respectively, with a reference signal. However, we find that the breadboard circuit implementations of our control strategies performed similar to a baseline uncontrolled function generator due to the additional noise input from the breadboard and the additional components used to implement the controller, such as the amplifiers. Next, we develop a single-harmonic amplitude-stabilized actuation scheme for the gyroscope to minimize multi-frequency excitations and reduce amplitude fluctuations to improve the gyroscope precision. A low pass filter is applied to the AM signal to obtain a single sideband full carrier (SSB-FC) signal. Since the capacitance of RLC circuit changes due to the vibration of the gyroscope, this variation in capacitance causes a shift in the frequency response of the RLC circuit, resulting in variation in the circuit gain. Three feedback control topologies are implemented to stabilize the signal by first detecting the change in signal level, and then amplifying or attenuating the signal level in order to maintain a constant gyroscope actuation level. The control strategy with the best performance involves feeding back the RMS of the output signal to control the amplitude of the carrier signal and feeding back the average of the output signal’s envelope to control the bias level of the modulating signal. Using control this strategy, the peak magnitude at the carrier frequency dropped approximately 2% as the capacitance is varied from 15 pF to 16 pF, awhile the other two control strategies changed 9% and 6%

Inertial MEMS: readout, test and application

This thesis moves towards the investigation of Micro Electro-Mechanical Systems (MEMS) intertial sensors from different perspectives and points of view: readout, test and application. Chapter 1 deals with the state-of-the-art for the interfaces usually employed for 3- axes micromachined gyroscopes. Several architecture based on multiplexing schemes in order to extremely simplify the analog front-end which can be based on a single charge amplifier are analysed and compared. A novel solution that experiments an innovative readout technique based on a special analog-Code Division Multiplexing Access (CDMA) is presented; this architecture can reach a considerable reduction of the Analog Front-End (AFE) with reference to other multiplexing schemes. Many family codes have been considered in order to find the best trade-off between performance and complexity. System-level simulations prove the effectiveness of this technique in processing all the required signals. A case study is also analysed: a comparison with the SD740 micro-machined integrated inertial module with tri-axial gyroscope by SensorDynamics AG is provided. MEMS accelerometers are widely used in the automotive and aeronautics fields and are becoming extremely popular in a wide range of consumer electronics products. The cost of testing is a major one within the manufacturing process, because MEMS accelerometer characterization requires a series of tests that include physical stimuli. The calibration and the functional testing are the most challenging and a wide selection of Automatic Test Equipments (ATEs) is available on the market for this purpose; those equipments provide a full characterization of the Device Under Test (DUT), from low-g to high-g levels, even over temperature. Chapter 2 presents a novel solution that experiments an innovative procedure to perform a characterization at medium-g levels. The presented approach can be applied to low-cost ATEs obtaining challenging results. The procedure is deeply investigated and an experimental setup is described. A case study is also analysed: some already trimmed Three Degrees of Freedom (3DoF)-Inertial Measurement Unit (IMU) modules (three-axes accelerometer integrated with a mixed signal ASIC), from SensorDynamics AG are tested with the experimental setup and analysed, for the first time, at medium-g levels. Standard preprocessing techniques for removing the ground response from vehicle- mounted Ground Penetrating Radar (GPR) data may fail when used on rough terrain. In Chapter 3, a Laser Imaging Detection and Ranging (LIDAR) system and a Global Positioning System (GPS)/IMU is integrated into a prototype system with the GPR and provided high-resolution measurements of the ground surface. Two modifications to preprocessing were proposed for mitigating the ground bounce based on the available LIDAR data. An experiment is carried out on a set of GPR/LIDAR data collected with the integrated prototype vehicle over lanes with artificially rough terrain, consisting of targets buried under or near mounds, ruts and potholes. A stabilization technique for multi-element vehicle-mounted GPR is also presented

Multimodal Wearable Sensors for Human-Machine Interfaces

Certain areas of the body, such as the hands, eyes and organs of speech production, provide high-bandwidth information channels from the conscious mind to the outside world. The objective of this research was to develop an innovative wearable sensor device that records signals from these areas more conveniently than has previously been possible, so that they can be harnessed for communication. A novel bioelectrical and biomechanical sensing device, the wearable endogenous biosignal sensor (WEBS), was developed and tested in various communication and clinical measurement applications. One ground-breaking feature of the WEBS system is that it digitises biopotentials almost at the point of measurement. Its electrode connects directly to a high-resolution analog-to-digital converter. A second major advance is that, unlike previous active biopotential electrodes, the WEBS electrode connects to a shared data bus, allowing a large or small number of them to work together with relatively few physical interconnections. Another unique feature is its ability to switch dynamically between recording and signal source modes. An accelerometer within the device captures real-time information about its physical movement, not only facilitating the measurement of biomechanical signals of interest, but also allowing motion artefacts in the bioelectrical signal to be detected. Each of these innovative features has potentially far-reaching implications in biopotential measurement, both in clinical recording and in other applications. Weighing under 0.45 g and being remarkably low-cost, the WEBS is ideally suited for integration into disposable electrodes. Several such devices can be combined to form an inexpensive digital body sensor network, with shorter set-up time than conventional equipment, more flexible topology, and fewer physical interconnections. One phase of this study evaluated areas of the body as communication channels. The throat was selected for detailed study since it yields a range of voluntarily controllable signals, including laryngeal vibrations and gross movements associated with vocal tract articulation. A WEBS device recorded these signals and several novel methods of human-to-machine communication were demonstrated. To evaluate the performance of the WEBS system, recordings were validated against a high-end biopotential recording system for a number of biopotential signal types. To demonstrate an application for use by a clinician, the WEBS system was used to record 12‑lead electrocardiogram with augmented mechanical movement information

Design of electronic systems for automotive sensor conditioning

This thesis deals with the development of sensor systems for automotive, mainly targeting the exploitation of the new generation of Micro Electro-Mechanical Sensors (MEMS), which achieve a dramatic reduction of area and power consumption but at the same time require more complexity in the sensor conditioning interface. Several issues concerning the development of automotive ASICs are presented, together with an overview of automotive electronics market and its main sensor applications. The state of the art for sensor interfaces design (the generic sensor interface concept), consists in sharing the same electronics among similar sensor applications, thus saving cost and time-to-market but also implementing a sub-optimal system with area and power overheads. A Platform Based Design methodology is proposed to overcome the limitations of generic sensor interfaces, by keeping the platform generality at the highest design layers and pursuing the maximum optimization and performances in the platform customization for a specific sensor. A complete design flow is presented (up to the ASIC implementation for gyro sensor conditioning), together with examples regarding IP development for reuse and low power optimization of third party designs. A further evolution of Platform Based Design has been achieved by means of implementation into silicon of the ISIF (Intelligent Sensor InterFace) platform. ISIF is a highly programmable mixed-signal chip which allows a substantial reduction of design space exploration time, as it can implement in a short time a wide class of sensor conditioning architectures. Thus it lets the designers evaluate directly on silicon the impact of different architectural choices, as well as perform feasibility studies, sensor evaluations and accurate estimation of the resulting dedicated ASIC performances. Several case studies regarding fast prototyping possibilities with ISIF are presented: a magneto-resistive position sensor, a biosensor (which produces pA currents in presence of surface chemical reactions) and two capacitive inertial sensors, a gyro and a low-g YZ accelerometer. The accelerometer interface has also been implemented in miniboards of about 3 cm2 (with ISIF and sensor dies bonded together) and a series of automatic trimming and characterization procedures have been developed in order to evaluate sensor and interface behaviour over the automotive temperature range, providing a valuable feedback for the implementation of a dedicated accelerometer interface

Quaternionic Attitude Estimation with Inertial Measuring Unit for Robotic and Human Body Motion Tracking using Sequential Monte Carlo Methods with Hyper-Dimensional Spherical Distributions

This dissertation examined the inertial tracking technology for robotics and human tracking applications. This is a multi-discipline research that builds on the embedded system engineering, Bayesian estimation theory, software engineering, directional statistics, and biomedical engineering. A discussion of the orientation tracking representations and fundamentals of attitude estimation are presented briefly to outline the some of the issues in each approach. In addition, a discussion regarding to inertial tracking sensors gives an insight to the basic science and limitations in each of the sensing components. An initial experiment was conducted with existing inertial tracker to study the feasibility of using this technology in human motion tracking. Several areas of improvement were made based on the results and analyses from the experiment. As the performance of the system relies on multiple factors from different disciplines, the only viable solution is to optimize the performance in each area. Hence, a top-down approach was used in developing this system. The implementations of the new generation of hardware system design and firmware structure are presented in this dissertation. The calibration of the system, which is one of the most important factors to minimize the estimation error to the system, is also discussed in details. A practical approach using sequential Monte Carlo method with hyper-dimensional statistical geometry is taken to develop the algorithm for recursive estimation with quaternions. An analysis conducted from a simulation study provides insights to the capability of the new algorithms. An extensive testing and experiments was conducted with robotic manipulator and free hand human motion to demonstrate the improvements with the new generation of inertial tracker and the accuracy and stability of the algorithm. In addition, the tracking unit is used to demonstrate the potential in multiple biomedical applications including kinematics tracking and diagnosis instrumentation. The inertial tracking technologies presented in this dissertation is aimed to use specifically for human motion tracking. The goal is to integrate this technology into the next generation of medical diagnostic system

Low Power Cmos Circuit Design And Reliability Analysis For Wireless Me

A sensor node \u27AccuMicroMotion\u27 is proposed that has the ability to detect motion in 6 degrees of freedom for the application of physiological activity monitoring. It is expected to be light weight, low power, small and cheap. The sensor node may collect and transmit 3 axes of acceleration and 3 axes of angular rotation signals from MEMS transducers wirelessly to a nearby base station while attached to or implanted in human body. This dissertation proposes a wireless electronic system-on-a-single-chip to implement the sensor in a traditional CMOS process. The system is low power and may operate 50 hours from a single coin cell battery. A CMOS readout circuit, an analog to digital converter and a wireless transmitter is designed to implement the proposed system. In the architecture of the \u27AccuMicroMotion\u27 system, the readout circuit uses chopper stabilization technique and can resolve DC to 1 KHz and 200 nV signals from MEMS transducers. The base band signal is digitized using a 10-bit successive approximation register analog to digital converter. Digitized outputs from up to nine transducers can be combined in a parallel to serial converter for transmission by a 900 MHz RF transmitter that operates in amplitude shift keying modulation technique. The transmitter delivers a 2.2 mW power to a 50 Ù antenna. The system consumes an average current of 4.8 mA from a 3V supply when 6 sensors are in operation and provides an overall 60 dB dynamic range. Furthermore, in this dissertation, a methodology is developed that applies accelerated electrical stress on MOS devices to extract BSIM3 models and RF parameters through measurements to perform comprehensive study, analysis and modeling of several analog and RF circuits under hot carrier and breakdown degradation

Platform-based design, test and fast verification flow for mixed-signal systems on chip

This research is providing methodologies to enhance the design phase from architectural space exploration and system study to verification of the whole mixed-signal system. At the beginning of the work, some innovative digital IPs have been designed to develop efficient signal conditioning for sensor systems on-chip that has been included in commercial products. After this phase, the main focus has been addressed to the creation of a re-usable and versatile test of the device after the tape-out which is close to become one of the major cost factor for ICs companies, strongly linking it to model’s test-benches to avoid re-design phases and multi-environment scenarios, producing a very effective approach to a single, fast and reliable multi-level verification environment. All these works generated different publications in scientific literature. The compound scenario concerning the development of sensor systems is presented in Chapter 1, together with an overview of the related market with a particular focus on the latest MEMS and MOEMS technology devices, and their applications in various segments. Chapter 2 introduces the state of the art for sensor interfaces: the generic sensor interface concept (based on sharing the same electronics among similar applications achieving cost saving at the expense of area and performance loss) versus the Platform Based Design methodology, which overcomes the drawbacks of the classic solution by keeping the generality at the highest design layers and customizing the platform for a target sensor achieving optimized performances. An evolution of Platform Based Design achieved by implementation into silicon of the ISIF (Intelligent Sensor InterFace) platform is therefore presented. ISIF is a highly configurable mixed-signal chip which allows designers to perform an effective design space exploration and to evaluate directly on silicon the system performances avoiding the critical and time consuming analysis required by standard platform based approach. In chapter 3 we describe the design of a smart sensor interface for conditioning next generation MOEMS. The adoption of a new, high performance and high integrated technology allow us to integrate not only a versatile platform but also a powerful ARM processor and various IPs providing the possibility to use the platform not only as a conditioning platform but also as a processing unit for the application. In this chapter a description of the various blocks is given, with a particular emphasis on the IP developed in order to grant the highest grade of flexibility with the minimum area occupation. The architectural space evaluation and the application prototyping with ISIF has enabled an effective, rapid and low risk development of a new high performance platform achieving a flexible sensor system for MEMS and MOEMS monitoring and conditioning. The platform has been design to cover very challenging test-benches, like a laser-based projector device. In this way the platform will not only be able to effectively handle the sensor but also all the system that can be built around it, reducing the needed for further electronics and resulting in an efficient test bench for the algorithm developed to drive the system. The high costs in ASIC development are mainly related to re-design phases because of missing complete top-level tests. Analog and digital parts design flows are separately verified. Starting from these considerations, in the last chapter a complete test environment for complex mixed-signal chips is presented. A semi-automatic VHDL-AMS flow to provide totally matching top-level is described and then, an evolution for fast self-checking test development for both model and real chip verification is proposed. By the introduction of a Python interface, the designer can easily perform interactive tests to cover all the features verification (e.g. calibration and trimming) into the design phase and check them all with the same environment on the real chip after the tape-out. This strategy has been tested on a consumer 3D-gyro for consumer application, in collaboration with SensorDynamics AG

Estudio y diseño de dos placas de intercambio de datos de inclinación y posición entre dos cubesats

El grupo de investigación DISEN con sede en el Campus de Terrassa de la UPC está intentando impulsar el proyecto de la implementación de una infraestructura de comunicaciones basada en el enlace óptico de CubeSats. Mediante este tipo de comunicación, se podría obtener un mayor data-rate y un menor consumo de potencia que en los actuales sistemas de radiofrecuencia. Para poder realizar este enlace óptico, es necesario que el rayo láser proveniente de uno de los satélites se centre de forma muy precisa en el foto-detector del otro satélite. Para realizar dicho centrado, ambos satélites deberán conocer a priori la posición e inclinación de ambos, información que deberán intercambiarse mediante radiofrecuencia. El presente TFG versa sobre el diseño del subsistema de intercambio de datos de posición e inclinación entre dos CubeSats. Concretamente, el diseño de dos placas PCB formadas por un módulo GPS, para obtener la posición de los CubeSats; un módulo IMU, para obtener sus actitudes; un módulo de radio UHF, para enviar datos entre los dos CubeSats por radiofrecuencia; y un módulo Bluetooth para poder enlazar el sistema con el ordenador de base. Además, las placas cuentan con un microcontrolador para procesar y almacenar la información de dichos módulos