Towards Single-Chip Nano-Systems

Important scientific discoveries are being propelled by the advent of nano-scale sensors that capture weak signals from their environment and pass them to complex instrumentation interface circuits for signal detection and processing. The highlight of this research is to investigate fabrication technologies to integrate such precision equipment with nano-sensors on a single complementary metal oxide semiconductor (CMOS) chip. In this context, several demonstration vehicles are proposed. First, an integration technology suitable for a fully integrated flexible microelectrode array has been proposed. A microelectrode array containing a single temperature sensor has been characterized and the versatility under dry/wet, and relaxed/strained conditions has been verified. On-chip instrumentation amplifier has been utilized to improve the temperature sensitivity of the device. While the flexibility of the array has been confirmed by laminating it on a fixed single cell, future experiments are necessary to confirm application of this device for live cell and tissue measurements. The proposed array can potentially attach itself to the pulsating surface of a single living cell or a network of cells to detect their vital signs

High Quality Factor Silicon Cantilever Driven by PZT Actuator for Resonant Based Mass Detection

A high quality factor (Q-factor) piezoelectric lead zirconat titanate (PZT) actuated single crystal silicon cantilever was proposed in this paper for resonant based ultra-sensitive mass detection. Energy dissipation from intrinsic mechanical loss of the PZT film was successfully compressed by separating the PZT actuator from resonant structure. Excellent Q-factor, which is several times larger than conventional PZT cantilever, was achieved under both atmospheric pressure and reduced pressures. For a 30 micrometer-wide 100 micrometer-long cantilever, Q-factor was measured as high as 1113 and 7279 under the pressure of 101.2 KPa and 35 Pa, respectively. Moreover, it was found that high-mode vibration can be realized by the cantilever for the pursuit of great Q-factor, while support loss became significant because of the increased vibration amplitude at the actuation point. An optimized structure using node-point actuation was suggested then to suppress corresponding energy dissipation.Comment: Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838

MEMS Technology for Biomedical Imaging Applications

Biomedical imaging is the key technique and process to create informative images of the human body or other organic structures for clinical purposes or medical science. Micro-electro-mechanical systems (MEMS) technology has demonstrated enormous potential in biomedical imaging applications due to its outstanding advantages of, for instance, miniaturization, high speed, higher resolution, and convenience of batch fabrication. There are many advancements and breakthroughs developing in the academic community, and there are a few challenges raised accordingly upon the designs, structures, fabrication, integration, and applications of MEMS for all kinds of biomedical imaging. This Special Issue aims to collate and showcase research papers, short commutations, perspectives, and insightful review articles from esteemed colleagues that demonstrate: (1) original works on the topic of MEMS components or devices based on various kinds of mechanisms for biomedical imaging; and (2) new developments and potentials of applying MEMS technology of any kind in biomedical imaging. The objective of this special session is to provide insightful information regarding the technological advancements for the researchers in the community

Flexible Mems: A Novel Technology To Fabricate Flexible Sensors And Electronics

This dissertation presents the design and fabrication techniques used to fabricate flexible MEMS (Micro Electro Mechanical Systems) devices. MEMS devices and CMOS(Complementary Metal-Oxide-Semiconductor) circuits are traditionally fabricated on rigid substrates with inorganic semiconductor materials such as Silicon. However, it is highly desirable that functional elements like sensors, actuators or micro fluidic components to be fabricated on flexible substrates for a wide variety of applications. Due to the fact that flexible substrate is temperature sensitive, typically only low temperature materials, such as polymers, metals, and organic semiconductor materials, can be directly fabricated on flexible substrates. A novel technology based on XeF2(xenon difluoride) isotropic silicon etching and parylene conformal coating, which is able to monolithically incorporate high temperature materials and fluidic channels, was developed at Wayne State University. The technology was first implemented in the development of out-of-plane parylene microneedle arrays that can be individually addressed by integrated flexible micro-channels. These devices enable the delivery of chemicals with controlled temporal and spatial patterns and allow us to study neurotransmitter-based retinal prosthesis. The technology was further explored by adopting the conventional SOI-CMOS processes. High performance and high density CMOS circuits can be first fabricated on SOI wafers, and then be integrated into flexible substrates. Flexible p-channel MOSFETs (Metal-Oxide-Semiconductor Field-Effect-Transistors) were successfully integrated and tested. Integration of pressure sensors and flow sensors based on single crystal silicon has also been demonstrated. A novel smart yarn technology that enables the invisible integration of sensors and electronics into fabrics has been developed. The most significant advantage of this technology is its post-MEMS and post-CMOS compatibility. Various high-performance MEMS devices and electronics can be integrated into flexible substrates. The potential of our technology is enormous. Many wearable and implantable devices can be developed based on this technology

A self-powered single-chip wireless sensor platform

Internet of things” require a large array of low-cost sensor nodes, wireless connectivity, low power operation and system intelligence. On the other hand, wireless biomedical implants demand additional specifications including small form factor, a choice of wireless operating frequencies within the window for minimum tissue loss and bio-compatibility This thesis describes a low power and low-cost internet of things system suitable for implant applications that is implemented in its entirety on a single standard CMOS chip with an area smaller than 0.5 mm2. The chip includes integrated sensors, ultra-low-power transceivers, and additional interface and digital control electronics while it does not require a battery or complex packaging schemes. It is powered through electromagnetic (EM) radiation using its on-chip miniature antenna that also assists with transmit and receive functions. The chip can operate at a short distance (a few centimeters) from an EM source that also serves as its wireless link. Design methodology, system simulation and optimization and early measurement results are presented

SYSTEM-LEVEL APPROACHES FOR IMPROVING PERFORMANCE OF CANTILEVER-BASED CHEMICAL SENSORS

This work presents the development of different technologies and techniques for enhancing the performance of cantilever-based MEMS chemical sensors. The developed methods address specifically the sensor metrics of sensitivity, selectivity, and stability. Different techniques for improving the quality and uniformity of deposited sorbent polymer films onto MEMS-based micro-cantilever chemical sensors are presented. A novel integrated recess structure for constraining the sorbent polymer layer to a fixed volume with uniform thickness was developed. The recess structure is used in conjunction with localized polymer deposition techniques, such as inkjet printing and spray coating using shadow masking, to deposit controlled, uniform sorbent layers onto specific regions of chemical sensors, enhancing device performance. The integrated recess structure enhances the stability of a cantilever-based sensor by constraining the deposited polymer layers away from high-strain regions of the device, reducing Q-factor degradation. Additionally, the integrated recess structure enhances the sensitivity of the sensor by replacing chemically-inert silicon mass with ‘active’ sorbent polymer mass. Finally, implementation of localized polymer deposition enables the use of sensor arrays, where each sensor in the array is coated with a different sorbent, leading to improved selectivity. In addition, transient signal generation and analysis for mass-sensitive chemical sensing of volatile organic compounds (VOCs) in the gas phase is investigated. It is demonstrated that transient signal analysis can be employed to enhance the selectivity of individual sensors leading to improved analyte discrimination. As an example, elements of a simple alcohol series and elements of a simple aromatic ring series are distinguished with a single sensor (i.e. without an array) based solely on sorption transients. Transient signals are generated by the rapid switching of mechanical valves, and also by thermal methods. Thermally-generated transients utilize a novel sensor design which incorporates integrated heating units onto the cantilever and enables transient signal generation without the need for an external fluidic system. It is expected that the thermal generation of transient signals will allow for future operation in a pulsed mode configuration, leading to reduced drift and enhanced stability without the need for a reference device. Finally, A MEMS-based micro thermal pre-concentration (µTPC) system for improving sensor sensitivity and selectivity is presented. The µTPC enhances sensor sensitivity by amplifying low-level chemical concentrations, and is designed to enable coarse pre-filtering (e.g. for injection into a GC system) by means of arrayed and individually-addressable µTPC devices. The system implements a suspended membrane geometry, enhancing thermal isolation and enabling high temperature elevations even for low levels of heating power. The membranes have a large surface area-to-volume ratio but low thermal mass (and therefore, low thermal time constant), with arrays of 3-D high aspect-ratio features formed via DRIE of silicon. Integrated onto the membrane are sets of diffused resistors designed for performing thermal desorption (via joule heating) and for measuring the temperature elevation of the device due to the temperature-dependent resistivity of doped silicon. The novel system features integrated real-time chemical sensing technology, which allows for reduced sampling time and a reduced total system dead volume of approximately 10 µL. The system is capable of operating in both a traditional flow-through configuration and also a diffusion-based quasi-static configuration, which requires no external fluidic flow system, thereby enabling novel measurement methods and applications. The ability to operate without a forced-flow fluidic system is a distinct advantage and can considerably enhance the portability of a sensing system, facilitating deployment on mobile airborne platforms as well as long-term monitoring stations in remote locations. Initial tests of the system have demonstrated a pre-concentration factor of 50% for toluene.Ph.D

EUROSENSORS XVII : book of abstracts

Fundação Calouste Gulbenkien (FCG).Fundação para a Ciência e a Tecnologia (FCT)