Design and Analysis of Low-power Millimeter-Wave SiGe BiCMOS Circuits with Application to Network Measurement Systems

Interest in millimeter (mm-) wave frequencies covering the spectrum of 30-300 GHz has been steadily increasing. Advantages such as larger absolute bandwidth and smaller form-factor have made this frequency region attractive for numerous applications, including high-speed wireless communication, sensing, material science, health, automotive radar, and space exploration. Continuous development of silicon-germanium heterojunction bipolar transistor (SiGe HBT) and associated BiCMOS technology has achieved transistors with fT/fmax of 505/720 GHz and integration with 55 nm CMOS. Such accomplishment and predictions of beyond THz performance have made SiGe BiCMOS technology the most competitive candidate for addressing the aforementioned applications. Especially for mobile applications, a critical demand for future mm-wave applications will be low DC power consumption (Pdc), which requires a substantial reduction of supply voltage and current. Conventionally, reducing the supply voltage will lead to HBTs operating close to or in the saturation region, which is typically avoided in mm-wave circuits due to expectated performance degradation and often inaccurate models. However, due to only moderate speed reduction at the forward-biased base-collector voltage (VBC) up to 0.5 V and the accuracy of the compact model HICUM/L2 also in saturation, low-power mm-wave circuits with SiGe HBTs operating in saturation offer intriguing benefits, which have been explored in this thesis based on 130 nm SiGe BiCMOS technologies: • Different low-power mm-wave circuit blocks are discussed in detail, including low-noise amplifiers (LNAs), down-conversion mixers, and various frequency multipliers covering a wide frequency range from V-band (50-75 GHz) to G-band (140-220 GHz). • Aiming at realizing a better trade-off between Pdc and RF performance, a drastic decrease in supply voltage is realized with forward-biased VBC, forcing transistors of the circuits to operate in saturation. • Discussions contain the theoretical analysis of the key figure of merits (FoMs), topology and bias selection, device sizing, and performance enhancement techniques. • A 173-207 GHz low-power amplifier with 23 dB gain and 3.2 mW Pdc, and a 72-108 GHz low-power tunable amplifier with 10-23 dB gain and 4-21 mW Pdc were designed. • A 97 GHz low-power down-conversion mixer was presented with 9.6 dB conversion gain (CG) and 12 mW Pdc. • For multipliers, a 56-66 GHz low-power frequency quadrupler with -3.6 dB peak CG and 12 mW Pdc, and a 172-201 GHz low-power frequency tripler with -4 dB peak CG and 10.5 mW Pdc were realized. By cascading these two circuits, also a 176-193 GHz low-power ×12 multiplier was designed, achieving -11 dBm output power with only 26 mW Pdc. • An integrated 190 GHz low-power receiver was designed as one receiving channel of a G-band frequency extender specifically for a VNA-based measurement system. Another goal of this receiver is to explore the lowest possible Pdc while keeping its highly competitive RF performance for general applications requiring a wide LO tuning range. Apart from the low-power design method of circuit blocks, the careful analysis and distribution of the receiver FoMs are also applied for further reduction of the overall Pdc. Along this line, this receiver achieved a peak CG of 49 dB with a 14 dB tunning range, consuming only 29 mW static Pdc for the core part and 171 mW overall Pdc, including the LO chain. • All designs presented in this thesis were fabricated and characterized on-wafer. Thanks to the accurate compact model HICUM/L2, first-pass access was achieved for all circuits, and simulation results show excellent agreement with measurements. • Compared with recently published work, most of the designs in this thesis show extremely low Pdc with highly competitive key FoMs regarding gain, bandwidth, and noise figure. • The observed excellent measurement-simulation agreement enables the sensitivity analysis of each design for obtaining a deeper insight into the impact of transistor-related physical effects on critical circuit performance parameters. Such studies provide meaningful feedback for process improvement and modeling development.:Table of Contents Kurzfassung . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ii Abstract . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . iv Table of Contents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . vii 1 Introduction 1 1.1 Motivation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 1.2 Objectives . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4 List of symbols and acronyms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 2 Technology 7 2.1 Fabrication Technologies . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7 2.1.1 SiGe HBT performance . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7 2.1.2 B11HFC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8 2.1.3 SG13G2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10 2.1.4 SG13D7 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11 2.2 Commonly Used Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12 2.2.1 Grounded-sidewall-shielded microstrip line . . . . . . . . . . . . . . . . . . 12 2.2.2 Zero-impedance Transmission Line . . . . . . . . . . . . . . . . . . . . . . 15 2.2.3 Balun . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18 2.2.3.1 Active Balun . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19 2.2.3.2 Passive Balun . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22 2.3 Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24 3 Low-power Low-noise Amplifiers 25 3.1 173-207 GHz Ultra-low-power Amplifier . . . . . . . . . . . . . . . . . . . . . . . 25 3.1.1 Topology Selection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25 3.1.2 Bias Dependency of the Small-signal Performance . . . . . . . . . . . . . 27 3.1.2.1 Bias . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28 3.1.2.2 Bias vs Gain . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30 3.1.2.3 Bias vs Noise . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31 3.1.2.4 Bias vs Stability . . . . . . . . . . . . . . . . . . . . . . . . . . . 34 3.1.3 Bias selection and Device sizing . . . . . . . . . . . . . . . . . . . . . . . . 36 3.1.3.1 Bias Selection . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36 3.1.3.2 Device Sizing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37 3.1.4 Performance Enhancement Technologies . . . . . . . . . . . . . . . . . . . 41 3.1.4.1 Gm-boosting Inductors . . . . . . . . . . . . . . . . . . . . . . . 41 3.1.4.2 Stability Enhancement . . . . . . . . . . . . . . . . . . . . . . . 43 3.1.4.3 Noise Improvement . . . . . . . . . . . . . . . . . . . . . . . . . 45 3.1.5 Circuit Realization . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46 3.1.5.1 Layout Scheme . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46 3.1.5.2 Inductors Design . . . . . . . . . . . . . . . . . . . . . . . . . . . 47 3.1.5.3 Dual-band Matching Network . . . . . . . . . . . . . . . . . . . 48 3.1.5.4 Circuit Implementation . . . . . . . . . . . . . . . . . . . . . . . 50 3.1.6 Results and Discussions . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51 3.1.6.1 Measurement Setup . . . . . . . . . . . . . . . . . . . . . . . . . 51 3.1.6.2 Measurement Results . . . . . . . . . . . . . . . . . . . . . . . . 51 3.1.6.3 Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54 3.2 72-108 GHz Low-Power Tunable Amplifier . . . . . . . . . . . . . . . . . . . . . . 55 3.2.1 Configuration, Sizing, and Bias Tuning Range . . . . . . . . . . . . . . . . 55 3.2.2 Regional Matching Network . . . . . . . . . . . . . . . . . . . . . . . . . . 57 3.2.2.1 Impedance Variation . . . . . . . . . . . . . . . . . . . . . . . . . 57 3.2.2.2 Regional Matching Network Design . . . . . . . . . . . . . . . . 60 3.2.3 Circuit Implementation . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65 3.2.4 Results and Discussion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65 3.2.4.1 Results . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65 3.2.4.2 Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68 3.3 Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71 4 Low-power Down-conversion Mixers 73 4.1 97 GHz Low-power Down-conversion Mixer . . . . . . . . . . . . . . . . . . . . . 74 4.1.1 Mixer Design and Implementation . . . . . . . . . . . . . . . . . . . . . . 74 4.1.1.1 Mixer Topology . . . . . . . . . . . . . . . . . . . . . . . . . . . 74 4.1.1.2 Bias Selection and Device Sizing . . . . . . . . . . . . . . . . . . 77 4.1.1.3 Mixer Implementation . . . . . . . . . . . . . . . . . . . . . . . . 79 4.1.2 Results and Discussion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 80 4.1.2.1 Measurement Results . . . . . . . . . . . . . . . . . . . . . . . . 80 4.1.2.2 Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 82 4.2 Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 83 5 Low-power Multipliers 87 5.1 General Design Flow . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 88 5.2 56-66 GHz Low-power Frequency Quadrupler . . . . . . . . . . . . . . . . . . . . 89 5.3 172-201 GHz Low-power Frequency Tripler . . . . . . . . . . . . . . . . . . . . . 93 5.4 176-193 GHz Low-power ×12 Frequency Multiplier . . . . . . . . . . . . . . . . . 96 5.5 Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 100 6 Low-power Receivers 101 6.1 Receiver Performance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 101 6.2 LO Chain (×12) Integrated 190 GHz Low-Power Receiver . . . . . . . . . . . . . 104 6.2.1 Receiver Architecture . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 105 6.2.2 Low-power Considerations . . . . . . . . . . . . . . . . . . . . . . . . . . . 107 6.2.3 Building Blocks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 108 6.2.3.1 LNA and LO DA . . . . . . . . . . . . . . . . . . . . . . . . . . 108 6.2.3.2 Tunable Mixer and IF BA . . . . . . . . . . . . . . . . . . . . . 111 6.2.3.3 65 GHz (V-band) Quadrupler . . . . . . . . . . . . . . . . . . . 116 6.2.3.4 G-band Tripler . . . . . . . . . . . . . . . . . . . . . . . . . . . . 120 6.2.4 Receiver Results and Discussion . . . . . . . . . . . . . . . . . . . . . . . 123 6.2.5 Measurement Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 124 6.2.6 Results . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 124 6.3 Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 131 7 Conclusions 133 7.1 Summaries . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 133 7.2 Outlook . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 134 Bibliography 135 List of Figures 149 List of Tables 157 A Derivation of the Gm 159 A.1 Gm of standard cascode stage . . . . . . . . . . . . . . . . . . . . . . . . . . . . 159 A.2 Gm of cascode stage with Lcas . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 160 A.3 Gm of cascode stage with Lb . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 161 B Derivation of Yin in the stability analysis 163 C Derivation of Zin and Zout 165 C.1 Zin . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 165 C.2 Zout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 167 D Derivation of the cascaded oP1dB 169 E Table of element values for the designed circuits 17

Radiometer-on-a-chip: a path toward super-compact submillimeter-wave imaging arrays

A novel approach for submillimeter-wave heterodyne imaging arrays is presented in this paper. By utilizing diverse technologies such as GaAs membrane based terahertz diodes, wafer bonding, bulk Si micromachining, micro-lens optics, and CMOS 3-D chip architectures, a super-compact low-mass submillimeter-wave imaging array is envisioned. A fourwafer based silicon block for a working W-band power amplifier MMIC is demonstrated. This module drastically reduces mass and volume associated with metal block implementations without sacrificing performance. A path towards super compact array receivers in the 500-600 GHz range is described in detail

A comprehensive survey on antennas on-chip based on metamaterial, metasurface, and substrate integrated waveguide principles for millimeter-waves and terahertz integrated circuits and systems

Antennas on-chip are a particular type of radiating elements valued for their small footprint. They are most commonly integrated in circuit boards to electromagnetically interface free space, which is necessary for wireless communications. Antennas on-chip radiate and receive electromagnetic (EM) energy as any conventional antennas, but what distinguishes them is their miniaturized size. This means they can be integrated inside electronic devices. Although on-chip antennas have a limited range, they are suitable for cell phones, tablet computers, headsets, global positioning system (GPS) devices, and WiFi and WLAN routers. Typically, on-chip antennas are handicapped by narrow bandwidth (less than 10%) and low radiation efficiency. This survey provides an overview of recent techniques and technologies investigated in the literature, to implement high performance on-chip antennas for millimeter-waves (mmWave) and terahertz (THz) integrated-circuit (IC) applications. The technologies discussed here include metamaterial (MTM), metasurface (MTS), and substrate integrated waveguides (SIW). The antenna designs described here are implemented on various substrate layers such as Silicon, Graphene, Polyimide, and GaAs to facilitate integration on ICs. Some of the antennas described here employ innovative excitation mechanisms, for example comprising open-circuited microstrip-line that is electromagnetically coupled to radiating elements through narrow dielectric slots. This excitation mechanism is shown to suppress surface wave propagation and reduce substrate loss. Other techniques described like SIW are shown to significantly attenuate surface waves and minimise loss. Radiation elements based on the MTM and MTS inspired technologies are shown to extend the effective aperture of the antenna without compromising the antenna’s form factor. Moreover, the on-chip antennas designed using the above technologies exhibit significantly improved impedance match, bandwidth, gain and radiation efficiency compared to previously used technologies. These features make such antennas a prime candidate for mmWave and THz on-chip integration. This review provides a thorough reference source for specialist antenna designers.This work was supported in part by the Universidad Carlos III de Madrid and the European Union's Horizon 2020 Research and Innovation Programme under the Marie Sklodowska-Curie Grant 801538, in part by the Icelandic Centre for Research (RANNIS) under Grant 206606, and in part by the National Science Centre of Poland under Grant 2018/31/B/ST7/02369

Développement d'une architecture innovante de récepteur radar à 77 GHz et démonstration en CMOS 28 nm FDSOI

Grâce à sa capacité à détecter des cibles éloignées malgré une mauvaise visibilité, le radar automobile à 77 GHz joue un rôle important dans l'aide à la conduite. L'utilisation des fréquences millimétriques offre une bonne résolution et une importante capacité d'intégration des circuits. C'est aussi un défi car il faut satisfaire un cahier des charges exigeant sur le bruit et la linéarité du récepteur. Les technologies SiGe BiCMOS ont été les premières utilisées pour la conception de récepteurs radar à 77 GHz. De bons résultats ont été obtenus en se basant sur des architectures utilisant des mélangeurs actifs. Cependant l'utilisation des technologie BiCMOS se traduisait par une consommation élevée, une faible capacité d'intégration et des coûts de production importants. Récemment, l'intégration des procédés CMOS menant à l'augmentation des fréquences de transition rend ces technologies plus attractives pour les applications nécessitant un faible coût et la cointégration de plusieurs fonctions au sein d'une même puce. La littérature sur les récepteurs radars en technologie CMOS à 77 GHz montre que les architectures inspirées par les technologies BiCMOS ne sont pas pertinentes pour cette application. Le but de cette thèse et de montrer que l'utilisation de techniques propres aux technologie CMOS comme l'échantillonnage et l'utilisation de portes logiques permet d'obtenir de très bonnes performances. Dans ce travail, deux nouvelles architectures de récepteurs radars basées sur le principe d'échantillonnage sont proposées. La première architecture est basée sur un mélangeur passif échantillonné qui permet d'obtenir un très bon compromis bruit/linéarité. La seconde exploite les propriétés des mélangeurs sous-échantillonnés afin utiliser une fréquence d'OL trois fois inférieure à la fréquence RF offrant ainsi de très intéressantes simplifications au niveau de la chaîne de distribution du signal d'OL du récepteur. Le contexte de cette étude est expliqué dans le 1er chapitre qui présente les exigences de conception liées à l'application radar et fourni une analyse de l'état de l'art des récepteurs à 77 GHZ. Le chapitre suivant décrit le principe de fonctionnement et l'implémentation d'un mélangeur échantillonné à 77 GHz en technologie CMOS 28- nm FDSOI. Une topologie de mélangeur sous-échantillonné utilisant une fréquence d'OL de 26 GHz pour convertir des signaux RF autour de 77 GHz est ensuite détaillée dans le chapitre 3. Le chapitre 4 conclut cette étude en détaillant l'intégration des mélangeurs étudiés dans les chapitres précédents avec un amplificateur faible bruit dans différents récepteurs radars. Ces architectures de récepteurs basées sur l'échantillonnage sont ensuite comparées entre elles et avec l'état de l'art montrant ainsi leurs avantages et inconvénients. Les résultats de cette comparaison confirment l'intérêt des techniques d'échantillonnage pour la conversion de fréquence dans le cadre de l'application radar.With its ability to detect distant targets under harsh visibility conditions, the 77 GHz automotive radar plays a key role in driving safety. Using mm-wave frequencies allow a good range resolution, a better circuit integration and a wide modulation bandwidth. This is also a challenge for circuit designers who must fulfill stringent requirements especially on the receiver front-end. First 77 GHz radar receivers were manufactured with SiGe BiCMOS processes benefiting from the high transition frequency and high breakdown voltage of Hetero-junction Bipolar Transistors (HBT). Good results have been achieved with active-mixer-based architectures, but these technologies suffer from high power consumptions, limited integration capacity and large production cost. More recently, the scaling down of CMOS processes (coming together with the increase of the transition frequency of the transistors) makes CMOS a good candidate for 77 GHz circuit design, especially when cost target requires single chip solutions. The literature related to CMOS radar receivers highlights that receivers based on BiCMOS architectures generally show poor performances. The aim of this work is to demonstrate that using CMOS specific technics such as sampling and the use of high-speed digital gates should enhance the performance of the receivers. In this work, two innovative radar receiver architectures based on the sampling principle are proposed. The first one shows that this principle can be extended to millimeter wave frequencies to benefit from a very good noise/linearity trade-off. While the second one uses this principle to converts a 77 GHz RF signal by using a 26 GHz LO frequency thus simplifying the LO distribution chain of the receiver. The background of this study is introduced in the chapter 1 presenting the design trade-off related to the 77 GHz radar receiver and provides a review of the existing solutions. The following chapter describes the sampling mixer principle and the implementation of a 77 GHz sampling mixer in 28-nm FDSOI CMOS technology. Then, a sub- sampling mixer topology allowing to convert an RF signal around 77 GHz using a 26 GHz LO frequency is detailed in the chapter 3. The chapter 4 draws the conclusion of this study by showing the implementation of the two proposed sampling-based mixers with a low noise amplifier in 77 GHz front ends. These receiver architectures are compared with the state of the art highlighting the strengths and weaknesses of the proposed solutions. The results of this study demonstrates that using sampling for down conversion can be convenient to address millimeter-wave frequency applications