Untethered Microrobots of the Rolling, Jumping & Flying kinds

In this dissertation we study microrobot design for three modes of locomotion, namely rolling, jumping, and flying. This work covers power electronics, actuator and mechanical transmission design for these types of microrobots along with power source selection. Though interesting, we do not cover the sensors, controllers/computers, communications and useful payloads for these bots. This remains a topic for future work. Piezoelectric and electrostatic actuators generally have been the actuators of choice for researchers working in microrobotics, since conventional electromagnetic motor designs don't scale down well. Here we design an electromagnetic actuator in a way that significantly reduces its scaling down disadvantages, while still retaining its original advantages. This has enabled us to achieve untethered operation for our bots, which is one of the coveted goals for researchers working in this domain. Though untethered rolling and jumping is demonstrated, the untethered flying bot reported in this dissertation remains underpowered and doesn't take flight yet. First a micro-ratcheting mechanism is developed as a means to convert small periodic motions of actuators to continuous rotational motion. A supercapacitor, a fixed frequency H-bridge, and a low-voltage electromagnetic actuator is then used to drive this micro-ratchet to achieve untethered rolling motion for 8 seconds at 27mm/s. At 130mg mass, this is the lightest and fastest untethered rolling microrobot reported yet. The same continuous rotation mechanism developed for the rolling bot is then used to load a spring in an energy storage mechanism that can then release the stored energy rapidly and passively, via use of magnets, after the stored energy crosses a certain threshold. In this case, the continuous rotation mechanism is driven using laser-powered photovoltaic cells and untethered jumping up to heights of 8mm is demonstrated. At 75mg mass, it is the lightest untethered jumping microrobot with onboard power source. Next, a highly efficient resonant low-voltage electromagnetic actuator is developed to generate insect-like flapping wing motion. It is demonstrated to produce 90% of its weight in lift. Further light-weight and power-efficient power electronics are developed to power this actuator using laser-powered photovoltaic cells. The designed power electronics are an order of magnitude lighter and two orders of magnitude more efficient than all other power electronics units reported yet for flying microrobots. While sufficient lift for flight is not achieved, due to the actuator being underpowered because of power source overheating, untethered flapping wing motion is demonstrated. To provide inspiration to future generations of microroboticists, a fruit fly scale flapping winged robot is developed. At 0.7mg mass, even though tethered, it is the lightest and smallest bot to demonstrate flapping wing kinematics

Novel Integrated System Architecture for an Autonomous Jumping Micro-Robot

As the capability and complexity of robotic platforms continue to evolve from the macro to micro-scale, innovation of such systems is driven by the notion that a robot must be able to sense, think, and act [1]. The traditional architecture of a robotic platform consists of a structural layer upon which, actuators, controls, power, and communication modules are integrated for optimal system performance. The structural layer, for many micro-scale platforms, has commonly been implemented using a silicon die, thus leading to robotic platforms referred to as "walking chips" [2]. In this thesis, the first-ever jumping microrobotic platform is demonstrated using a hybrid integration approach to assemble on-board sensing and power directly onto a polymer chassis. The microrobot detects a change in light intensity and ignites 0.21mg of integrated nanoporous energetic silicon, resulting in 246µJ of kinetic energy and a vertical jump height of 8cm

Power-Scavenging MEMS Robots

This thesis includes the design, modeling, and testing of novel, power-scavenging, biologically inspired MEMS microrobots. Over one hundred 500-μm and 990-μm microrobots with two, four, and eight wings were designed, fabricated, characterized. These microrobots constitute the smallest documented attempt at powered flight. Each microrobot wing is comprised of downward-deflecting, laser-powered thermal actuators made of gold and polysilicon; the microrobots were fabricated in PolyMUMPs® (Polysilicon Multi-User MEMS Processes). Characterization results of the microrobots illustrate how wing-tip deflection can be maximized by optimizing the gold-topolysilicon ratio as well as the dimensions of the actuator-wings. From these results, an optimum actuator-wing configuration was identified. It also was determined that the actuator-wing configuration with maximum deflection and surface area yet minimum mass had the greatest lift-to-weight ratio. Powered testing results showed that the microrobots successfully scavenged power from a remote 660-nm laser. These microrobots also demonstrated rapid downward flapping, but none achieved flight. The results show that the microrobots were too heavy and lacked sufficient wing surface area. It was determined that a successfully flying microrobot can be achieved by adding a robust, light-weight material to the optimum actuator-wing configuration—similar to insect wings. The ultimate objective of the flying microrobot project is an autonomous, fully maneuverable flying microrobot that is capable of sensing and acting upon a target. Such a microrobot would be capable of precise lethality, accurate battle-damage assessment, and successful penetration of otherwise inaccessible targets

Bioinspired reorientation strategies for application in micro/nanorobotic control

Engineers have recently been inspired by swimming methodologies of microorganisms in creating micro-/nanorobots for biomedical applications. Future medicine may be revolutionized by the application of these small machines in diagnosing, monitoring, and treating diseases. Studies over the past decade have often concentrated on propulsion generation. However, there are many other challenges to address before the practical use of robots at the micro-/nanoscale. The control and reorientation ability of such robots remain as some of these challenges. This paper reviews the strategies of swimming microorganisms for reorientation, including tumbling, reverse and flick, direction control of helical-path swimmers, by speed modulation, using complex flagella, and the help ofmastigonemes. Then, inspired by direction change in microorganisms,methods for orientation control for microrobots and possible directions for future studies are discussed. Further, the effects of solid boundaries on the swimming trajectories of microorganisms and microrobots are examined. In addition to propulsion systems for artificial microswimmers, swimming microorganisms are promising sources of control methodologies at the micro-/nanoscale