Energy efficient control of electrostatically actuated MEMS

Plenty of Micro-electro-mechanical Systems (MEMS) devices are actuated using electrostatic forces, and specially, parallel-plate actuators are extensively used, due to the simplicity of their design. Nevertheless, parallel-plate actuators have some limitations due to the nonlinearity of the generated force. The dissertation analyzes the dynamics of the lumped electrostatically actuated nonlinear system, in order to obtain insight on its characteristics, define desired performance goals and implement a controller for energy efficient robustly stable actuation of MEMS resonators. In the first part of the dissertation, the modeling of the electromechanical lumped system is developed. From a complete distributed parameters model for MEMS devices which rely on electrostatic actuation, a concentrated parameters simplification is derived to be used for analysis and control design. Based on the model, energy analysis of the pull-in instability is performed. The classic approach is revisited to extend the results to models with a nonlinear springs. Analysis of the effect of dynamics is studied as an important factor for the stability of the system. From this study, the Resonant Pull-in Condition for parallel-plate electrostatically actuated MEMS resonators is defined and experimentally validated. Given the importance of the nonlinear dynamics and its richness in behaviors, Harmonic Balance is chosen as a tool to characterize the steady-state oscillation of the resonators. This characterization leads to the understanding of the key factors for large and stable oscillation of resonators. An important conclusion is reached, Harmonic Balance predicts that any oscillation amplitude is possible for any desired frequency if the appropriate voltage is applied to the resonator. And the energy consumption is dependent on this chosen oscillation frequency. Based on Harmonic Balance results, four main goals are defined for the control strategy: Stable oscillation with large amplitudes of motion; Robust oscillation independently of MEMS imperfections; Pure sinus-like oscillation for high-grade sensing; and Low energy consumption. The second part of the dissertation deals with the controller selection, design and verification. A survey of prior work on MEMS control confirms that existing control approaches cannot provide the desired performance. Consequently, a new three-stage controller is proposed to obtain the desired oscillation with the expected stability and energy efficiency. The controller has three different control loops. The first control loop includes a Robust controller designed using on µ-synthesis, to deal with MEMS resonators uncertainties. The second control loop includes an Internal-Model-Principle Resonant controller, to generate the desired control action to obtain the desired oscillation. And the third control loop handles the energy consumption minimization through an Extremum Seeking Controller, which selects the most efficient working frequency for the desired oscillation. The proposed controller is able to automatically generate the needed control voltage, as predicted by the Harmonic Balance analysis, to operate the parallel-plate electrostatically actuated MEMS resonator at the desired oscillation. Performance verification of stability, robustness, sinus-like oscillation and energy efficiency is carried out through simulation. Finally, the needed steps for a real implementation are analyzed. Independent two-sided actuation for full-range amplitude oscillation is introduced to overcome the limitations of one-sided actuation. And a modification of standard Electromechanical Amplitude Modulation is analyzed and validated for position feedback implementation. With these improvements, a MEMS resonator with the desired specifications for testing the proposed control is designed for fabrication. Based on this design, testing procedure is discussed as future work.Molts microsistemes (MEMS) són actuats amb forces electrostàtiques, i especialment, els actuadors electrostàtics de plaques paral.leles són molt usats, degut a la simplicitat del seu disseny. Tot i això, aquests actuadors tenen limitacions degut a la no-linealitat de les forces generades. La tesi analitza el sistema mecànic no-lineal actuat electrostàticament que forma el MEMS, per tal d'entendre'n les característiques, definir objectius de control de l'oscil.lació, i implementar un controlador robust, estable i eficient energèticament. A la primera part de la tesi es desenvolupa el modelat del sistema electromecànic complert. A partir de la formulació de paràmetres distribuïts aplicada a dispositius MEMS amb actuació electrostàtica, es deriva una formulació de paràmetres concentrats per a l'anàlisi i el disseny del control. Basat en aquest model, s'analitza energèticament la inestabilitat anomenada Pull-in, ampliant els resultats de l'enfocament clàssic al model amb motlles no-lineals. Dins de l'anàlisi, l'evolució dinàmica s'estudia per ser un factor important per a l'estabilitat. D'aquest estudi, la Resonant Pull-in Condition per a actuadors electrostàtics de plaques paral.leles es defineix i es valida experimentalment. Donada la importància de la dinàmica no-lineal del sistema i la seva riquesa de comportaments, s'utilitza Balanç d'Harmònics per tal de caracteritzar les oscil.lacions en estacionari. Aquesta caracterització permet entendre els factors claus per a obtenir oscil.lacions estables i d'amplitud elevada. El Balanç d'Harmònics dóna una conclusió important: qualsevol amplitud d'oscil.lació és possible per a qualsevol freqüència desitjada si s'aplica el voltatge adequat al ressonador. I el consum energètic associat a aquesta oscil.lació depèn de la freqüència triada. Llavors, basat en aquests resultats, quatre objectius es plantegen per a l'estratègia de control: oscil.lació estable amb amplituds elevades; robustesa de l'oscil.lació independentment de les imperfeccions dels MEMS; oscil.lació sinusoïdal sense harmònics per a aplicacions d'alta precisió; i baix consum energètic. La segona part de la tesi tracta la selecció, disseny i verificació dun controlador adequat per a aquests objectius. La revisió dels treballs existents en control de MEMS confirma que cap dels enfocaments actuals permet obtenir els objectius desitjats. En conseqüència, es proposa el disseny d'un nou controlador amb tres etapes per tal d'obtenir l'oscil.lació desitjada amb estabilitat i eficiència energètica. El controlador té tres llaços de control. Al primer llaç, un controlador robust dissenyat amb µ-síntesis gestiona les incertes es dels MEMS. El segon llaç inclou un controlador Ressonant, basat en el Principi del Model Intern, per a generar l'acció de control necessària per a obtenir l'oscil.lació desitjada. I el tercer llaç de control gestiona la minimització de l'energia consumida mitjançant un controlador basat en Extremum Seeking, el qual selecciona la freqüència de treball més eficient energèticament per a l'oscil.lació triada. El controlador proposat és capaç de generar automàticament el voltatge necessari, igual al previst pel Balanç d'Harmònics, per tal d'operar electrostàticament amb plaques paral.leles els ressonadors MEMS. Mitjançant simulació se'n verifica l'estabilitat, robustesa, inexistència d'harmònics i eficiència energètica de l'oscil.lació. Finalment, la implementació real és analitzada. En primer lloc, un nou esquema d'actuació per dos costats amb voltatges independents es proposa per aconseguir l'oscil.lació del ressonador en tot el rang d'amplituds. I en segon lloc, una modificació del sensat amb Modulació d'Amplitud Electromecànica s'utilitza per tancar el llaç de control de posició. Amb aquestes millores, un ressonador MEMS es dissenya per a ser fabricat i validar el control. Basat en aquest disseny, es proposa un procediment de test plantejat com a treball futur.Postprint (published version

All-propulsion design of the drag-free and attitude control of the European satellite GOCE

This paper concerns the drag-free and attitude control (DFAC) of the European Gravity field and steady-state Ocean Circulation Explorer satellite (GOCE), during the science phase. GOCE aims to determine the Earth's gravity field with high accuracy and spatial resolution, through complementary space techniques such as gravity gradiometry and precise orbit determination. Both techniques rely on accurate attitude and drag-free control, especially in the gradiometer measurement bandwidth (5-100mHz), where non-gravitational forces must be counteracted down to micronewton, and spacecraft attitude must track the local orbital reference frame with micro-radian accuracy. DFAC aims to enable the gravity gradiometer to operate so as to determine the Earth's gravity field especially in the so-called measurement bandwidth (5-100mHz), making use of ion and micro-thruster actuators. The DFAC unit has been designed entirely on a simplified discrete-time model (Embedded Model) derived from the fine dynamics of the spacecraft and its environment; the relevant control algorithms are implemented and tuned around the Embedded Model, which is the core of the control unit. The DFAC has been tested against uncertainties in spacecraft and environment and its code has been the preliminary model for final code development. The DFAC assumes an all-propulsion command authority, partly abandoned by the actual GOCE control system because of electric micro-propulsion not being fully developed. Since all-propulsion authority is expected to be imperative for future scientific and observation missions, design and simulated results are believed to be of interest to the space communit

Vertical polymer tunneling sensor platform by hot embossing technique

Recent development in microfabrication technology has brought much attention to the development of miniaturized, inexpensive and high-accuracy MEMS devices and microsystems. The ultimate goal of our project is to develop a versatile, three-dimensional, high precision sensor platform, which can be used for displacement, velocity or acceleration measurement. The first step, on which this dissertation is based, is to fabricate a one-dimensional (parallel with the Z axis) tunneling sensor, which in turn can be developed into two- and three-dimensional sensor platforms through structural and functional integration. Since the invention of mini-structured high-sensitivity silicon-based tunneling sensor in 1993, the synthesis and fabrication of PMMA-based tunneling sensors still remains an over-looked area. Compared with traditional silicon-based tunneling sensors, PMMA is less expensive, has little stiffness, and is easier to work with micro-machining process. Moreover, this all-PMMA-based tunneling sensor is one of the first generations of functional micro-sensors/devices for organic compatible applications. The hot embossing technique, one of the most widely used micromachining approaches in “soft-lithography”, was chosen for its fast turnaround, fewer processing parameters, and simplicity. Because the mold can be used repeatedly, the potential of mass-production is further highlighted in this dissertation. All-PMMA-based tunneling vertical sensors have been successfully fabricated. The overall size of the packaged sensor is 8 mm x 8 mm x 1 mm, with the measurement circuits bounded together. The natural frequency of the sensor structure is 133 Hz. The bandwidth of the feedback system is 6.3 kHz with voltage over acceleration sensitivity of 20.6 V/g. The resolution at 192 Hz is 0.2485 μg/[special characters omitted]. Compared with the silicon-based tunneling sensor, the PMMA sensor\u27s apparent advantages are: low cost, less processing time, less processing instruments, high yields, wider bandwidth, and theoretically lower noise level. Given all our research results, we can expect that the PMMA-based tunneling sensor platform to become the base for the next generation of highly sensitive micro-sensors in many important areas, notably in chemical, magnetic, infrared, and organic applications

Planning and control for microassembly of structures composed of stress-engineered MEMS microrobots

We present control strategies that implement planar microassembly using groups of stress-engineered MEMS microrobots (MicroStressBots) controlled through a single global control signal. The global control signal couples the motion of the devices, causing the system to be highly underactuated. In order for the robots to assemble into arbitrary planar shapes despite the high degree of underactuation, it is desirable that each robot be independently maneuverable (independently controllable). To achieve independent control, we fabricated robots that behave (move) differently from one another in response to the same global control signal. We harnessed this differentiation to develop assembly control strategies, where the assembly goal is a desired geometric shape that can be obtained by connecting the chassis of individual robots. We derived and experimentally tested assembly plans that command some of the robots to make progress toward the goal, while other robots are constrained to remain in small circular trajectories (orbits) until it is their turn to move into the goal shape. Our control strategies were tested on systems of fabricated MicroStressBots. The robots are 240–280 µm × 60 µm × 7–20 µm in size and move simultaneously within a single operating environment. We demonstrated the feasibility of our control scheme by accurately assembling five different types of planar microstructures

Linear-Quadratic Control of a MEMS Micromirror Using Kalman Filtering

The deflection limitations of electrostatic flexure-beam actuators are well known. Specifically, as the beam is actuated and the gap traversed, the restoring force necessary for equilibrium increases proportionally with the displacement to first order, while the electrostatic actuating force increases with the inverse square of the gap. Equilibrium, and thus stable open-loop voltage control, ceases at one-third the total gap distance, leading to actuator snap-in. A Kalman Filter is designed with an appropriately complex state dynamics model to accurately estimate actuator deflection given voltage input and capacitance measurements, which are then used by a Linear Quadratic controller to generate a closed-loop voltage control signal. The constraints of the latter are designed to maximize stable control over the entire gap. The design and simulation of the Kalman Filter and controller are presented and discussed, with static and dynamic responses analyzed, as applied to basic, 100 micrometer by 100 micrometer square, flexure-beam-actuated micromirrors fabricated by PolyMUMPs. Successful application of these techniques enables demonstration of smooth, stable deflections of 50% and 75% of the gap

Magnetic Actuators and Suspension for Space Vibration Control

The research on microgravity vibration isolation performed at the University of Virginia is summarized. This research on microgravity vibration isolation was focused in three areas: (1) the development of new actuators for use in microgravity isolation; (2) the design of controllers for multiple-degree-of-freedom active isolation; and (3) the construction of a single-degree-of-freedom test rig with umbilicals. Described are the design and testing of a large stroke linear actuator; the conceptual design and analysis of a redundant coarse-fine six-degree-of-freedom actuator; an investigation of the control issues of active microgravity isolation; a methodology for the design of multiple-degree-of-freedom isolation control systems using modern control theory; and the design and testing of a single-degree-of-freedom test rig with umbilicals

Fundamental design principles of novel MEMS based Landau switches, sensors, and actuators : Role of electrode geometry and operation regime

Microelectromechanical systems (MEMS) are considered as potential candidates for More-Moore and More-than-Moore applications due to their versatile use as sensors, switches, and actuators. Examples include accelerometers for sensing, RF-MEMS capacitive switches in communication, suspended-gate (SG) FETs in computation, and deformable mirrors in optics. In spite of the wide range of applications of MEMS in diverse fields, one of the major challenges for MEMS is their instability. Instability divides the operation into stable and unstable regimes and poses fundamental challenges for several applications. For example: Tuning range of deformable mirrors is fundamentally limited by pull-in instability, RF-MEMS capacitive switches suffer from the problem of hard landing, and intrinsic hysteresis of SG-FETs puts a lower bound on the minimum power dissipation. ^ In this thesis, we provide solutions to the application specific problems of MEMS and utilize operation in or close to unstable regime for performance enhancement in several novel applications. Specifically, we propose the following: (i) novel device concepts with nanostructured electrodes to address the aforementioned problems of instability, (ii) a switch with hysteresis-free ideal switching characteristics based on the operation in unstable regime, and (iii) a Flexure biosensor that operates at the boundary of the stable and unstable regimes to achieve improved sensitivity and signal-to-noise ratio. In general, we have advocated electrode geometry as a design variable for MEMS, and used MEMS as an illustrative example of Landau systems to advocate operation regime as a new design variabl

Second International Symposium on Magnetic Suspension Technology, part 2

In order to examine the state of technology of all areas of magnetic suspension and to review related recent developments in sensors and controls approaches, superconducting magnet technology, and design/implementation practices, the 2nd International Symposium on Magnetic Suspension Technology was held at the Westin Hotel in Seattle, WA, on 11-13 Aug. 1993. The symposium included 18 technical sessions in which 44 papers were presented. The technical sessions covered the areas of bearings, bearing modelling, controls, vibration isolation, micromachines, superconductivity, wind tunnel magnetic suspension systems, magnetically levitated trains (MAGLEV), rotating machinery and energy storage, and applications. A list of attendees appears at the end of the document

Optical MEMS

Optical microelectromechanical systems (MEMS), microoptoelectromechanical systems (MOEMS), or optical microsystems are devices or systems that interact with light through actuation or sensing at a micro- or millimeter scale. Optical MEMS have had enormous commercial success in projectors, displays, and fiberoptic communications. The best-known example is Texas Instruments’ digital micromirror devices (DMDs). The development of optical MEMS was impeded seriously by the Telecom Bubble in 2000. Fortunately, DMDs grew their market size even in that economy downturn. Meanwhile, in the last one and half decade, the optical MEMS market has been slowly but steadily recovering. During this time, the major technological change was the shift of thin-film polysilicon microstructures to single-crystal–silicon microsructures. Especially in the last few years, cloud data centers are demanding large-port optical cross connects (OXCs) and autonomous driving looks for miniature LiDAR, and virtual reality/augmented reality (VR/AR) demands tiny optical scanners. This is a new wave of opportunities for optical MEMS. Furthermore, several research institutes around the world have been developing MOEMS devices for extreme applications (very fine tailoring of light beam in terms of phase, intensity, or wavelength) and/or extreme environments (vacuum, cryogenic temperatures) for many years. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on (1) novel design, fabrication, control, and modeling of optical MEMS devices based on all kinds of actuation/sensing mechanisms; and (2) new developments of applying optical MEMS devices of any kind in consumer electronics, optical communications, industry, biology, medicine, agriculture, physics, astronomy, space, or defense