Degree-per-hour mode-matched micromachined silicon vibratory gyroscopes

The objective of this research dissertation is to design and implement two novel micromachined silicon vibratory gyroscopes, which attempt to incorporate all the necessary attributes of sub-deg/hr noise performance requirements in a single framework: large resonant mass, high drive-mode oscillation amplitudes, large device capacitance (coupled with optimized electronics), and high-Q resonant mode-matched operation. Mode-matching leverages the high-Q (mechanical gain) of the operating modes of the gyroscope and offers significant improvements in mechanical and electronic noise floor, sensitivity, and bias stability. The first micromachined silicon vibratory gyroscope presented in this work is the resonating star gyroscope (RSG): a novel Class-II shell-type structure which utilizes degenerate flexural modes. After an iterative cycle of design optimization, an RSG prototype was implemented using a multiple-shell approach on (111) SOI substrate. Experimental data indicates sub-5 deg/hr Allan deviation bias instability operating under a mode-matched operating Q of 30,000 at 23ºC (in vacuum). The second micromachined silicon vibratory gyroscope presented in this work is the mode-matched tuning fork gyroscope (M2-TFG): a novel Class-I tuning fork structure which utilizes in-plane non-degenerate resonant flexural modes. Operated under vacuum, the M2-TFG represents the first reported high-Q perfectly mode-matched operation in Class-I vibratory microgyroscope. Experimental results of device implemented on (100) SOI substrate demonstrates sub-deg/hr Allan deviation bias instability operating under a mode-matched operating Q of 50,000 at 23ºC. In an effort to increase capacitive aspect ratio, a new fabrication technology was developed that involved the selective deposition of doped-polysilicon inside the capacitive sensing gaps (SPD Process). By preserving the structural composition integrity of the flexural springs, it is possible to accurately predict the operating-mode frequencies while maintaining high-Q operation. Preliminary characterization of vacuum-packaged prototypes was performed. Initial results demonstrated high-Q mode-matched operation, excellent thermal stability, and sub-deg/hr Allan variance bias instability.Ph.D.Committee Chair: Dr. Farrokh Ayazi; Committee Member: Dr. Mark G. Allen; Committee Member: Dr. Oliver Brand; Committee Member: Dr. Paul A. Kohl; Committee Member: Dr. Thomas E. Michael

Development of a Prototype Miniature Silicon Microgyroscope

A miniature vacuum-packaged silicon microgyroscope (SMG) with symmetrical and decoupled structure was designed to prevent unintended coupling between drive and sense modes. To ensure high resonant stability and strong disturbance resisting capacity, a self-oscillating closed-loop circuit including an automatic gain control (AGC) loop based on electrostatic force feedback is adopted in drive mode, while, dual-channel decomposition and reconstruction closed loops are applied in sense mode. Moreover, the temperature effect on its zero bias was characterized experimentally and a practical compensation method is given. The testing results demonstrate that the useful signal and quadrature signal will not interact with each other because their phases are decoupled. Under a scale factor condition of 9.6 mV/°/s, in full measurement range of ± 300 deg/s, the zero bias stability reaches 15°/h with worse-case nonlinearity of 400 ppm, and the temperature variation trend of the SMG bias is thus largely eliminated, so that the maximum bias value is reduced to one tenth of the original after compensation from -40 °C to 80 °C

Thin-Film AlN-on-Silicon Resonant Gyroscopes: Design, Fabrication, and Eigenmode Operation

Resonant MEMS gyroscopes have been rapidly adopted in various consumer, industrial, and automotive applications thanks to the significant improvements in their performance over the past decade. The current efforts in enhancing the performance of high-precision resonant gyroscopes are mainly focused on two seemingly contradictory metrics, larger bandwidth and lower noise level, to push the technology towards navigation applications. The key enabling factor for the realization of low-noise high-bandwidth resonant gyroscopes is the utilization of a strong electromechanical transducer at high frequencies. Thin-film piezoelectric-on-silicon technology provides a very efficient transduction mechanism suitable for implementation of bulk-mode resonant gyroscopes without the need for submicron capacitive gaps or large DC polarization voltages. More importantly, in-air operation of piezoelectric devices at moderate Q values allows for the cointegration of mode-matched gyroscopes and accelerometers on a common substrate for inertial measurement units. This work presents the design, fabrication, characterization, and method of mode matching of piezoelectric-on-silicon resonant gyroscopes. The degenerate in-plane flexural vibration mode shapes of the resonating structure are demonstrated to have a strong gyroscopic coupling as well as a large piezoelectric transduction coefficient. Eigenmode operation of resonant gyroscopes is introduced as the modal alignment technique for the piezoelectric devices independently of the transduction mechanism. Controlled displacement feedback is also employed as the frequency matching technique to accomplish complete mode matching of the piezoelectric gyroscopes.Ph.D

Self-induced parametric amplification arising from nonlinear elastic coupling in a micromechanical resonating disk gyroscope

Parametric amplification, resulting from intentionally varying a parameter in a resonator at twice its resonant frequency, has been successfully employed to increase the sensitivity of many micro- and nano-scale sensors. Here, we introduce the concept of self-induced parametric amplification, which arises naturally from nonlinear elastic coupling between the degenerate vibration modes in a micromechanical disk-resonator, and is not externally applied. The device functions as a gyroscope wherein angular rotation is detected from Coriolis coupling of elastic vibration energy from a driven vibration mode into a second degenerate sensing mode. While nonlinear elasticity in silicon resonators is extremely weak, in this high quality-factor device, ppm-level nonlinear elastic effects result in an order-of-magnitude increase in the observed sensitivity to Coriolis force relative to linear theory. Perfect degeneracy of the primary and secondary vibration modes is achieved through electrostatic frequency tuning, which also enables the phase and frequency of the parametric coupling to be varied, and we show that the resulting phase and frequency dependence of the amplification follow the theory of parametric resonance. We expect that this phenomenon will be useful for both fundamental studies of dynamic systems with low dissipation and for increasing signal-to-noise ratio in practical applications such as gyroscopes

Advanced interface systems for readout, control, and self-calibration of MEMS resonant gyroscopes

MEMS gyroscopes have become an essential component in consumer, industrial and automotive applications, owing to their small form factor and low production cost. However, their poor stability, also known as drift, has hindered their penetration into high-end tactical and navigation applications, where highly stable bias and scale factor are required over long period of time to avoid significant positioning error. Improving the long-term stability of MEMS gyroscopes has created new challenges in both the physical sensor design and fabrication, as well as the system architecture used for interfacing with the physical sensor. The objective of this research is to develop interface circuits and systems for in-situ control and self-calibration of MEMS resonators and resonant gyroscopes to enhance the stability of bias and scale factor without the need for any mechanical rotary stage, or expensive bulky lab characterization equipment. The self-calibration techniques developed in this work provide 1-2 orders of magnitude improvement in the drift of bias and scale factor of a resonant gyroscope over temperature and time.Ph.D

Advanced single-chip temperature stabilization system for silicon MEMS resonators and gyroscopes

The main objective of this research is to develop temperature and frequency stabilization techniques for silicon MEMS oven-controlled crystal oscillators (MEMS OCXO) with high-frequency stability. The device was built upon an ovenized platform that used a micro-heater to adjust the temperature of the resonator. Structural resistance-based (Rstruc) temperature sensing was used to improve the self-temperature monitoring accuracy of the silicon MEMS resonator. An analog feedback micro-oven control loop and a feedforward digital calibration scheme were developed for a 77MHz MEMS oscillator, which achieved a ±0.3ppm frequency stability from -25°C to 85°C. An AC heating scheme was also developed to enable tighter integration of the resonator, temperature sensor (Rstruc) and heaters. This temperature stabilization technique was also applied to silicon MEMS mode-matched vibratory x/y-axis and z-axis gyroscopes on a single chip. The temperature-induced frequency change, scale factor and output bias variations were all reduced significantly. The complete interface circuit for the single-chip three axes gyroscopes were also developed with an innovative trans-impedance amplifier to reduce the input-referred noise. For the first time, the simultaneous operation of mode-matched vibratory 3-axis MEMS gyroscopes on a single chip was demonstrated.Ph.D

Track detection in railway sidings based on MEMS gyroscope sensors

The paper presents a two-step technique for real-time track detection in single-track railway sidings using low-cost MEMS gyroscopes. The objective is to reliably know the path the train has taken in a switch, diverted or main road, immediately after the train head leaves the switch. The signal delivered by the gyroscope is first processed by an adaptive low-pass filter that rejects noise and converts the temporal turn rate data in degree/second units into spatial turn rate data in degree/meter. The conversion is based on the travelled distance taken from odometer data. The filter is implemented to achieve a speed-dependent cut-off frequency to maximize the signal-to-noise ratio. Although direct comparison of the filtered turn rate signal with a predetermined threshold is possible, the paper shows that better detection performance can be achieved by processing the turn rate signal with a filter matched to the rail switch curvature parameters. Implementation aspects of the track detector have been optimized for real-time operation. The detector has been tested with both simulated data and real data acquired in railway campaigns.Peer ReviewedPostprint (published version

High performance 3-folded symmetric decoupled MEMS gyroscopes

This thesis reports, for the first time, on a novel design and architecture for realizing inertial grade gyroscope based on Micro-Electro-Mechanical Systems (MEMS) technology. The proposed device is suitable for high-precision Inertial Navigation Systems (INS). The new design has been investigated analytically and numerically by means of Finite Element Modeling (FEM) of the shapes, resonance frequencies and decoupling of the natural drive and sense modes of the various implementations. Also, famous phenomena known as spring softening and spring hardening are studied. Their effect on the gyroscope operation is modeled numerically in Matlab/Simulink platform. This latter model is used to predict the drive/sense mode matching capability of the proposed designs. Based on the comparison with the best recently reported performance towards inertial grade operation, it is expected that the novel architecture further lowers the dominant Brownian (thermo-mechanical) noise level by more than an order of magnitude (down to 0.08º/hr). Moreover, the gyroscope\u27s figure of merit, such as output sensitivity (150 mV/º/s), is expected to be improved by more than two orders of magnitude. This necessarily results in a signal to noise ratio (SNR) which is up to three orders of magnitude higher (up to 1,900mV/ º/hr). Furthermore, the novel concept introduced in this work for building MEMS gyroscopes allows reducing the sense parasitic capacitance by up to an order of magnitude. This in turn reduces the drive mode coupling or quadrature errors in the sensor\u27s output signal. The new approach employs Silicon-on-Insulator (SOI) substrates that allows the realization of large mass (\u3e1.6mg), large sense capacitance (\u3e2.2pF), high quality factors (\u3e21,000), large drive amplitude (~2-4 µm) and low resonance frequency (~3-4 KHz) as well as the consequently suppressed noise floor and reduced support losses for high-performance vacuum operation. Several challenges were encountered during fabrication that required developing high aspect ratio (up to 1:20) etching process for deep trenches (up to 500 µm). Frequency Response measurement platform was built for devices characterization. The measurements were performed at atmospheric pressures causing huge drop of the devices performance. Therefore, various MEMS gyroscope packaging technologies are studied. Wafer Level Packaging (WLP) is selected to encapsulate the fabricated devices under vacuum by utilizing wafer bonding. Through Silicon Via (TSV) technology was developed (as connections) to transfer the electrical signals (of the fabricated devices) outside the cap wafers

1-Bit processing based model predictive control for fractionated satellite missions

In this thesis, a 1-bit processing based Model Predictive Control (OBMPC) structure is proposed for a fractionated satellite attitude control mission. Despite the appealing advantages of the MPC algorithm towards constrained MIMO control applications, implementing the MPC algorithm onboard a small satellite is certainly challenging due to the limited onboard resources. The proposed design is based on the 1-bit processing concept, which takes advantage of the affine relation between the 1-bit state feedback and multi-bit parameters to implement a multiplier free MPC controller. As multipliers are the major power consumer in online optimization, the OBMPC structure is proven to be more efficient in comparison to the conventional MPC implementation in term of power and circuit complexity. The system is in digital control nature, affected by quantization noise introduced by Δ∑ modulators. The stability issues and practical design criteria are also discussed in this work. Some other aspects are considered in this work to complete the control system. Firstly, the implementation of the OBMPC system relies on the 1-bit state feedbacks. Hence, 1-bit sensing components are needed to implement the OBMPC system. While the ∆∑ modulator based Microelectromechanical systems (MEMS) gyroscope is considered in this work, it is possible to implement this concept into other sensing components. Secondly, as the proposed attitude mission is based on the wireless inter-satellite link (ISL), a state estimator is required. However, conventional state estimators will once again introduce multi-bit signals, and compromise the simple, direct implementation of the OBMPC controller. Therefore, the 1-bit state estimator is also designed in this work to satisfy the requirements of the proposed fractionated attitude control mission. The simulation for the OBMPC is based on a 2U CubeSat model in a fractionated satellite structure, in which the payload and actuators are separated from the controller and controlled via the ISL. Matlab simulations and FPGA implementation based performance analysis shows that the OBMPC is feasible for fractionated satellite missions and is advantageous over the conventional MPC controllers

1-Bit processing based model predictive control for fractionated satellite missions

In this thesis, a 1-bit processing based Model Predictive Control (OBMPC) structure is proposed for a fractionated satellite attitude control mission. Despite the appealing advantages of the MPC algorithm towards constrained MIMO control applications, implementing the MPC algorithm onboard a small satellite is certainly challenging due to the limited onboard resources. The proposed design is based on the 1-bit processing concept, which takes advantage of the affine relation between the 1-bit state feedback and multi-bit parameters to implement a multiplier free MPC controller. As multipliers are the major power consumer in online optimization, the OBMPC structure is proven to be more efficient in comparison to the conventional MPC implementation in term of power and circuit complexity. The system is in digital control nature, affected by quantization noise introduced by Δ∑ modulators. The stability issues and practical design criteria are also discussed in this work. Some other aspects are considered in this work to complete the control system. Firstly, the implementation of the OBMPC system relies on the 1-bit state feedbacks. Hence, 1-bit sensing components are needed to implement the OBMPC system. While the ∆∑ modulator based Microelectromechanical systems (MEMS) gyroscope is considered in this work, it is possible to implement this concept into other sensing components. Secondly, as the proposed attitude mission is based on the wireless inter-satellite link (ISL), a state estimator is required. However, conventional state estimators will once again introduce multi-bit signals, and compromise the simple, direct implementation of the OBMPC controller. Therefore, the 1-bit state estimator is also designed in this work to satisfy the requirements of the proposed fractionated attitude control mission. The simulation for the OBMPC is based on a 2U CubeSat model in a fractionated satellite structure, in which the payload and actuators are separated from the controller and controlled via the ISL. Matlab simulations and FPGA implementation based performance analysis shows that the OBMPC is feasible for fractionated satellite missions and is advantageous over the conventional MPC controllers