Sequencing Wafer Handler Moves to Improve the Performance of Hybrid Cluster Tools

Cluster tools are highly integrated machines that can perform a sequence of semiconductor manufacturing processes. The sequence of wafer handler moves affects the total time needed to process a set of wafers. Reducing this time can reduce cycle time, reduce tool utilization, and increase tool capacity. This paper introduces the cluster tool scheduling problem for hybrid cluster tools, which are multiple-stage tools that have at least one stage with two or more parallel chambers. This paper presents algorithms that can find superior sequences of wafer handler moves. Experimental results show that the tool performance can be improved significantly if the wafer handler follows a cyclic sequence instead of using a dispatching rule

Advancement in robot programming with specific reference to graphical methods

This research study is concerned with the derivation of advanced robot programming methods. The methods include the use of proprietary simulation modelling and design software tools for the off-line programming of industrial robots. The study has involved the generation of integration software to facilitate the co-operative operation of these software tools. The three major researcli'themes7of "ease of usage", calibration and the integration of product design data have been followed to advance robot programming. The "ease of usage" is concerned with enhancements in the man-machine interface for robo t simulation systems in terms of computer assisted solid modelling and computer assisted task generation. Robot simulation models represent an idealised situation, and any off-line robot programs generated from'them may contain'discrepancies which could seriously effect thq programs' performance; Calibration techniques have therefore been investigated as 'a method of overcoming discrepancies between the simulation model and the real world. At the present time, most computer aided design systems operate as isolated islands of computer technology, whereas their product databases should be used to support decision making processes and ultimately facilitate the generation of machine programs. Thus the integration of product design data has been studied as an important step towards truly computer integrated manufacturing. The functionality of the three areas of study have been generalised and form the basis for recommended enhancements to future robot programming systems

Conference on Intelligent Robotics in Field, Factory, Service, and Space (CIRFFSS 1994), volume 1

The AIAA/NASA Conference on Intelligent Robotics in Field, Factory, Service, and Space (CIRFFSS '94) was originally proposed because of the strong belief that America's problems of global economic competitiveness and job creation and preservation can partly be solved by the use of intelligent robotics, which are also required for human space exploration missions. Individual sessions addressed nuclear industry, agile manufacturing, security/building monitoring, on-orbit applications, vision and sensing technologies, situated control and low-level control, robotic systems architecture, environmental restoration and waste management, robotic remanufacturing, and healthcare applications

Sequencing Wafer Handler Moves to Improve the Performance of Sequential Cluster Tools

Cluster tools are highly integrated machines that can perform a sequence of semiconductor manufacturing processes. The sequence of wafer handler moves affects the total time needed to process a set of wafers. Reducing this time can reduce cycle time, reduce tool utilization, and increase tool capacity. This paper introduces the cluster tool scheduling problem for sequential cluster tools and describes a branch-and-bound algorithm that can find an optimal sequence of wafer handler moves. In addition, we enumerate the set of 1-unit cyclic sequences for two- and three-stage sequential cluster tools. Experimental results show that the tool performance can be improved significantly if the wafer handler follows a cyclic sequence instead of using a dispatching rule

The Sixth Annual Workshop on Space Operations Applications and Research (SOAR 1992)

This document contains papers presented at the Space Operations, Applications, and Research Symposium (SOAR) hosted by the U.S. Air Force (USAF) on 4-6 Aug. 1992 and held at the JSC Gilruth Recreation Center. The symposium was cosponsored by the Air Force Material Command and by NASA/JSC. Key technical areas covered during the symposium were robotic and telepresence, automation and intelligent systems, human factors, life sciences, and space maintenance and servicing. The SOAR differed from most other conferences in that it was concerned with Government-sponsored research and development relevant to aerospace operations. The symposium's proceedings include papers covering various disciplines presented by experts from NASA, the USAF, universities, and industry

First Annual Workshop on Space Operations Automation and Robotics (SOAR 87)

Several topics relative to automation and robotics technology are discussed. Automation of checkout, ground support, and logistics; automated software development; man-machine interfaces; neural networks; systems engineering and distributed/parallel processing architectures; and artificial intelligence/expert systems are among the topics covered

The Federal Conference on Intelligent Processing Equipment

Research and development projects involving intelligent processing equipment within the following U.S. agencies are addressed: Department of Agriculture, Department of Commerce, Department of Energy, Department of Defense, Environmental Protection Agency, Federal Emergency Management Agency, NASA, National Institutes of Health, and the National Science Foundation

Uses and applications of artificial intelligence in manufacturing

The purpose of the THESIS is to provide engineers and personnels with a overview of the concepts that underline Artificial Intelligence and Expert Systems. Artificial Intelligence is concerned with the developments of theories and techniques required to provide a computational engine with the abilities to perceive, think and act, in an intelligent manner in a complex environment. Expert system is branch of Artificial Intelligence where the methods of reasoning emulate those of human experts. Artificial Intelligence derives it\u27s power from its ability to represent complex forms of knowledge, some of it common sense, heuristic and symbolic, and the ability to apply the knowledge in searching for solutions. The Thesis will review : The components of an intelligent system, The basics of knowledge representation, Search based problem solving methods, Expert system technologies, Uses and applications of AI in various manufacturing areas like Design, Process Planning, Production Management, Energy Management, Quality Assurance, Manufacturing Simulation, Robotics, Machine Vision etc. Prime objectives of the Thesis are to understand the basic concepts underlying Artificial Intelligence and be able to identify where the technology may be applied in the field of Manufacturing Engineering

Research reports: 1990 NASA/ASEE Summer Faculty Fellowship Program

Reports on the research projects performed under the NASA/ASEE Summer Faculty Fellowship Program are presented. The program was conducted by The University of Alabama and MSFC during the period from June 4, 1990 through August 10, 1990. Some of the topics covered include: (1) Space Shuttles; (2) Space Station Freedom; (3) information systems; (4) materials and processes; (4) Space Shuttle main engine; (5) aerospace sciences; (6) mathematical models; (7) mission operations; (8) systems analysis and integration; (9) systems control; (10) structures and dynamics; (11) aerospace safety; and (12) remote sensin