Micro position control of a designed 3-PRR compliant mechanism using experimental models

A new compliant stage based on 3-PRR kinematic structure is designed to be used as a planar micro positioner. The mechanism is actuated by using piezoelectric actuators and center position of the stage is measured using a dual laser position sensor. It's seen that manufactured mechanism has unpredictable motion errors due to manufacturing and assembly faults. Thus, sliding mode control with disturbance observer is chosen to be implemented as position control in x-y axes of the center of the mechanism. Instead of piezoelectric actuator models, experimental models are extracted for each actuation direction in order to be used as nominal plants for the disturbance observer. The position control results are compared with the previous position control using linear piezoelectric actuator models and it's seen that the implemented control methodology is better in terms of errors in x and y axes. Besides, the position errors are lowered down to ±0.06 microns, which is the accuracy of the dual laser position sensor

Development of a passive compliant mechanism for measurement of micro/nano-scale planar three DOF motions

This paper presents the design, optimization, and computational and experimental performance evaluations of a passively actuated, monolithic, compliant mechanism. The mechanism is designed to be mounted on or built into any precision positioning stage which produces three degree of freedom (DOF) planar motions. It transforms such movements into linear motions which can then be measured using laser interferometry based sensing and measurement techniques commonly used for translational axes. This methodology reduces the introduction of geometric errors into sensor measurements, and bypasses the need for increased complexity sensing systems. A computational technique is employed to optimize the mechanism’s performance, in particular to ensure the kinematic relationships match a set of desired relationships. Computational analysis is then employed to predict the performance of the mechanism throughout the workspace of a coupled positioning stage, and the errors are shown to vary linearly with the input position. This allows the errors to be corrected through calibration. A prototype is manufactured and experimentally tested, confirming the ability of the proposed mechanism to permit measurements of three DOF motions

Micro position control of a 3-RRR compliant mechanism

A 3-RRR compliant mechanism is designed to be used as a micro positioning stage. The stage displacements are analyzed by using structural FEA. However the experimental results for the manufactured mechanism are not compatible with the FEA which are mostly accepted as ideal while designing. A position control using Sliding Mode Control with Disturbance Observer is proposed for the reference tracking of the center of the stage. The motion of the center is measured by using a laser position sensor and the necessary references for the piezoelectric actuators are calculated using the pseudo inverse of the transformation matrix coming from the experimentally determined kinematics of the mechanism. Piezoelectric actuator linear models are used for disturbance rejection. Finally, the position control of the mechanism is succeeded although it has big errors in manufacturing, assembly etc

Model-Free Adaptive Sensing and Control for a Piezoelectrically Actuated System

Since the piezoelectrically actuated system has nonlinear and time-varying behavior, it is difficult to establish an accurate dynamic model for a model-based sensing and control design. Here, a model-free adaptive sliding controller is proposed to improve the small travel and hysteresis defects of piezoelectrically actuated systems. This sensing and control strategy employs the functional approximation technique (FAT) to establish the unknown function for eliminating the model-based requirement of the sliding-mode control. The piezoelectrically actuated system’s nonlinear functions can be approximated by using the combination of a finite number of weighted Fourier series basis functions. The unknown weighted vector can be estimated by an updating rule. The important advantage of this approach is to achieve the sliding-mode controller design without the system dynamic model requirement. The update laws for the coefficients of the Fourier series functions are derived from a Lyapunov function to guarantee the control system stability. This proposed controller is implemented on a piezoelectrically actuated X-Y table. The dynamic experimental result of this proposed FAT controller is compared with that of a traditional model-based sliding-mode controller to show the performance improvement for the motion tracking performance

Global fast non-singular terminal sliding-mode control for high-speed nanopositioning

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Robust fractional-order fast terminal sliding mode control with fixed-time reaching law for high-performance nanopositioning

Open Access via the Wiley Agreement ACKNOWLEDGEMENTS This work is supported by the China Scholarship Council under Grant No. 201908410107 and by the National Natural Science Foundation of China under Grant No. 51505133. The authors also thank the anonymous reviewers for their insightful and constructive comments.Peer reviewedPublisher PD