Adaptive Sliding Mode Control of MEMS AC Voltage Reference Source

The accuracy of physical parameters of a tunable MEMS capacitor, as the major part of MEMS AC voltage reference, is of great importance to achieve an accurate output voltage free of the malfunctioning noise and disturbance. Even though strenuous endeavors are made to fabricate MEMS tunable capacitors with desiderated accurate physical characteristics and ameliorate exactness of physical parameters’ values, parametric uncertainties ineluctably emerge in fabrication process attributable to imperfections in micromachining process. First off, this paper considers applying an adaptive sliding mode controller design in the MEMS AC voltage reference source so that it is capable of giving off a well-regulated output voltage in defiance of jumbling parametric uncertainties in the plant dynamics and also aggravating external disturbance imposed on the system. Secondly, it puts an investigatory comparison with the designed model reference adaptive controller and the pole-placement state feedback one into one’s prospective. Not only does the tuned adaptive sliding mode controller show remarkable robustness against slow parameter variation and external disturbance being compared to the pole-placement state feedback one, but also it immensely gets robust against the external disturbance in comparison with the conventional adaptive controller. The simulation results are promising

Automatic Control and Fault Diagnosis of MEMS Lateral Comb Resonators

Recent advancements in microfabrication of Micro Electro Mechanical Systems have made MEMS an important part of many applications such as safety and sensor/control devices. Miniature structure of MEMS makes them very sensitive to the environmental and operating conditions. In addition, fault in the device might change the parameters and result in unwanted behavioral variations. Therefore, imperfect device structure, fault and operating point dependencies suggest for active control of MEMS.;This research is focused on two main areas of control and fault diagnosis of MEMS devices. In the control part, the application of adaptive controllers is introduced for trajectory control of the device under health and fault conditions. Fault in different forms in the structure of the device are modeled and foundry manufactured for experimental verifications. Pull-in voltage effect in the MEMS Lateral Comb Resonators are investigated and controlled by variable structure controllers. Reliability of operation is enhanced by active control of the device under fault conditions.;The second part of this research is focused on the fault diagnosis of the MEMS devices. Fault is introduced and investigated for better understanding of the system behavioral changes. Modeling of the device in different operating conditions suggests for the multiple-model adaptive estimation (MMAE) fault diagnosis technique. Application of Kalman filters in MMAE is investigated and the performance of the fault diagnosis is compared with other techniques such as self-tuning and auto self-tuning techniques. According to the varying parameters of the system, online parameter identification systems are required to monitor the parameter variations and model the system accurately. Self-tuning banks are applied and combined with MMAE to provide accurate fault diagnosis systems. Different parameter identification techniques result in different system performances. In this regard, this research investigates the application of Recursive Least Square with Forgetting Factor. Different techniques for tuning of forgetting factor value are introduced and their results are compared for better performance. The organization of this dissertation is as follows:;Chapter I introduces the structure of the MEMS Lateral Comb Resonator; Chapter II introduces the application of control techniques and displacement feedback approach. Chapter III investigates the control approach and experimental results. In chapter IV, a new controller is introduced and designed for the MEMS trajectory controls. Chapter V is about the fault and different techniques of fault diagnosis in MEMS LCRs. Chapter 6 is the future work suggested through the current results and observations. Each chapter contains a section to summarize the concluding remarks

Energy efficient control of electrostatically actuated MEMS

Plenty of Micro-electro-mechanical Systems (MEMS) devices are actuated using electrostatic forces, and specially, parallel-plate actuators are extensively used, due to the simplicity of their design. Nevertheless, parallel-plate actuators have some limitations due to the nonlinearity of the generated force. The dissertation analyzes the dynamics of the lumped electrostatically actuated nonlinear system, in order to obtain insight on its characteristics, define desired performance goals and implement a controller for energy efficient robustly stable actuation of MEMS resonators. In the first part of the dissertation, the modeling of the electromechanical lumped system is developed. From a complete distributed parameters model for MEMS devices which rely on electrostatic actuation, a concentrated parameters simplification is derived to be used for analysis and control design. Based on the model, energy analysis of the pull-in instability is performed. The classic approach is revisited to extend the results to models with a nonlinear springs. Analysis of the effect of dynamics is studied as an important factor for the stability of the system. From this study, the Resonant Pull-in Condition for parallel-plate electrostatically actuated MEMS resonators is defined and experimentally validated. Given the importance of the nonlinear dynamics and its richness in behaviors, Harmonic Balance is chosen as a tool to characterize the steady-state oscillation of the resonators. This characterization leads to the understanding of the key factors for large and stable oscillation of resonators. An important conclusion is reached, Harmonic Balance predicts that any oscillation amplitude is possible for any desired frequency if the appropriate voltage is applied to the resonator. And the energy consumption is dependent on this chosen oscillation frequency. Based on Harmonic Balance results, four main goals are defined for the control strategy: Stable oscillation with large amplitudes of motion; Robust oscillation independently of MEMS imperfections; Pure sinus-like oscillation for high-grade sensing; and Low energy consumption. The second part of the dissertation deals with the controller selection, design and verification. A survey of prior work on MEMS control confirms that existing control approaches cannot provide the desired performance. Consequently, a new three-stage controller is proposed to obtain the desired oscillation with the expected stability and energy efficiency. The controller has three different control loops. The first control loop includes a Robust controller designed using on µ-synthesis, to deal with MEMS resonators uncertainties. The second control loop includes an Internal-Model-Principle Resonant controller, to generate the desired control action to obtain the desired oscillation. And the third control loop handles the energy consumption minimization through an Extremum Seeking Controller, which selects the most efficient working frequency for the desired oscillation. The proposed controller is able to automatically generate the needed control voltage, as predicted by the Harmonic Balance analysis, to operate the parallel-plate electrostatically actuated MEMS resonator at the desired oscillation. Performance verification of stability, robustness, sinus-like oscillation and energy efficiency is carried out through simulation. Finally, the needed steps for a real implementation are analyzed. Independent two-sided actuation for full-range amplitude oscillation is introduced to overcome the limitations of one-sided actuation. And a modification of standard Electromechanical Amplitude Modulation is analyzed and validated for position feedback implementation. With these improvements, a MEMS resonator with the desired specifications for testing the proposed control is designed for fabrication. Based on this design, testing procedure is discussed as future work.Molts microsistemes (MEMS) són actuats amb forces electrostàtiques, i especialment, els actuadors electrostàtics de plaques paral.leles són molt usats, degut a la simplicitat del seu disseny. Tot i això, aquests actuadors tenen limitacions degut a la no-linealitat de les forces generades. La tesi analitza el sistema mecànic no-lineal actuat electrostàticament que forma el MEMS, per tal d'entendre'n les característiques, definir objectius de control de l'oscil.lació, i implementar un controlador robust, estable i eficient energèticament. A la primera part de la tesi es desenvolupa el modelat del sistema electromecànic complert. A partir de la formulació de paràmetres distribuïts aplicada a dispositius MEMS amb actuació electrostàtica, es deriva una formulació de paràmetres concentrats per a l'anàlisi i el disseny del control. Basat en aquest model, s'analitza energèticament la inestabilitat anomenada Pull-in, ampliant els resultats de l'enfocament clàssic al model amb motlles no-lineals. Dins de l'anàlisi, l'evolució dinàmica s'estudia per ser un factor important per a l'estabilitat. D'aquest estudi, la Resonant Pull-in Condition per a actuadors electrostàtics de plaques paral.leles es defineix i es valida experimentalment. Donada la importància de la dinàmica no-lineal del sistema i la seva riquesa de comportaments, s'utilitza Balanç d'Harmònics per tal de caracteritzar les oscil.lacions en estacionari. Aquesta caracterització permet entendre els factors claus per a obtenir oscil.lacions estables i d'amplitud elevada. El Balanç d'Harmònics dóna una conclusió important: qualsevol amplitud d'oscil.lació és possible per a qualsevol freqüència desitjada si s'aplica el voltatge adequat al ressonador. I el consum energètic associat a aquesta oscil.lació depèn de la freqüència triada. Llavors, basat en aquests resultats, quatre objectius es plantegen per a l'estratègia de control: oscil.lació estable amb amplituds elevades; robustesa de l'oscil.lació independentment de les imperfeccions dels MEMS; oscil.lació sinusoïdal sense harmònics per a aplicacions d'alta precisió; i baix consum energètic. La segona part de la tesi tracta la selecció, disseny i verificació dun controlador adequat per a aquests objectius. La revisió dels treballs existents en control de MEMS confirma que cap dels enfocaments actuals permet obtenir els objectius desitjats. En conseqüència, es proposa el disseny d'un nou controlador amb tres etapes per tal d'obtenir l'oscil.lació desitjada amb estabilitat i eficiència energètica. El controlador té tres llaços de control. Al primer llaç, un controlador robust dissenyat amb µ-síntesis gestiona les incertes es dels MEMS. El segon llaç inclou un controlador Ressonant, basat en el Principi del Model Intern, per a generar l'acció de control necessària per a obtenir l'oscil.lació desitjada. I el tercer llaç de control gestiona la minimització de l'energia consumida mitjançant un controlador basat en Extremum Seeking, el qual selecciona la freqüència de treball més eficient energèticament per a l'oscil.lació triada. El controlador proposat és capaç de generar automàticament el voltatge necessari, igual al previst pel Balanç d'Harmònics, per tal d'operar electrostàticament amb plaques paral.leles els ressonadors MEMS. Mitjançant simulació se'n verifica l'estabilitat, robustesa, inexistència d'harmònics i eficiència energètica de l'oscil.lació. Finalment, la implementació real és analitzada. En primer lloc, un nou esquema d'actuació per dos costats amb voltatges independents es proposa per aconseguir l'oscil.lació del ressonador en tot el rang d'amplituds. I en segon lloc, una modificació del sensat amb Modulació d'Amplitud Electromecànica s'utilitza per tancar el llaç de control de posició. Amb aquestes millores, un ressonador MEMS es dissenya per a ser fabricat i validar el control. Basat en aquest disseny, es proposa un procediment de test plantejat com a treball futur.Postprint (published version

Design of a fuzzy PID controller for a MEMS tunable capacitor for noise reduction in a voltage reference source

This study presents a conventional Ziegler-Nichols (ZN) Proportional Integral Derivative (PID) controller, having reviewed the mathematical modeling of the Micro Electro Mechanical Systems (MEMS) Tunable Capacitors (TCs), and also proposes a fuzzy PID controller which demonstrates a better tracking performance in the presence of measurement noise, in comparison with conventional ZN-based PID controllers. Referring to importance and impact of this research, the proposed controller takes advantage of fuzzy control properties such as robustness against noise. TCs are responsible for regulating the reference voltage when integrated into Alternating Current (AC) Voltage Reference Sources (VRS). Capacitance regulation for tunable capacitors in VRS is carried out by modulating the distance of a movable plate. A successful modulation depends on maintaining the stability around the pull-in point. This distance regulation can be achieved by the proposed controller which guarantees the tracking performance of the movable plate in moving towards the pull-in point, and remaining in this critical position. The simulation results of the tracking performance and capacitance tuning are very promising, subjected to measurement nois

Design of a fuzzy PID controller for a MEMS tunable capacitor for noise reduction in a voltage reference source

This study presents a conventional Ziegler-Nichols (ZN) Proportional Integral Derivative (PID) controller, having reviewed the mathematical modeling of the Micro Electro Mechanical Systems (MEMS) Tunable Capacitors (TCs), and also proposes a fuzzy PID controller which demonstrates a better tracking performance in the presence of measurement noise, in comparison with conventional ZN-based PID controllers. Referring to importance and impact of this research, the proposed controller takes advantage of fuzzy control properties such as robustness against noise. TCs are responsible for regulating the reference voltage when integrated into Alternating Current (AC) Voltage Reference Sources (VRS). Capacitance regulation for tunable capacitors in VRS is carried out by modulating the distance of a movable plate. A successful modulation depends on maintaining the stability around the pull-in point. This distance regulation can be achieved by the proposed controller which guarantees the tracking performance of the movable plate in moving towards the pull-in point, and remaining in this critical position. The simulation results of the tracking performance and capacitance tuning are very promising, subjected to measurement noise. Article Highlights This article deals with MEMS tunable capacitor dynamics and modeling, considering measurement noise. It designs and applies fuzzy PID control system for regulating MEMS voltage reference output. This paper contributes to robustness increase in pull-in performance of the tunable capacitor

Optimized active disturbance rejection control for DC-DC buck converters with uncertainties using a reduced-order GPI observer

The output voltage regulation problem of a PWM- based DC-DC buck converter under various sources of uncertainties and disturbances is investigated in this paper via an optimized active disturbance rejection control (ADRC) approach. Aiming to practical implementation, a new reduced-order generalized proportional integral (GPI) observer is first designed to estimate the lumped (possibly time-varying) disturbances within the DC- DC circuit. By integrating the disturbance estimation information raised by the reduced-order GPI observer (GPIO) into the output prediction, an optimized ADRC method is developed to achieve optimized tracking performance even in the presence of distur- bances and uncertainties. It is shown that the proposed controller will guarantee the rigorous stability of closed-loop system, for any bounded uncertainties of the circuit, by appropriately choosing the observer gains and the bandwidthfactor. Experimental results illustrate that the proposed control solution is characterised by improved robustness performance against various disturbances and uncertainties compared to traditional ADRC and integral MPC approaches

Development of Novel Compound Controllers to Reduce Chattering of Sliding Mode Control

The robotics and dynamic systems constantly encountered with disturbances such as micro electro mechanical systems (MEMS) gyroscope under disturbances result in mechanical coupling terms between two axes, friction forces in exoskeleton robot joints, and unmodelled dynamics of robot manipulator. Sliding mode control (SMC) is a robust controller. The main drawback of the sliding mode controller is that it produces high-frequency control signals, which leads to chattering. The research objective is to reduce chattering, improve robustness, and increase trajectory tracking of SMC. In this research, we developed controllers for three different dynamic systems: (i) MEMS, (ii) an Exoskeleton type robot, and (iii) a 2 DOF robot manipulator. We proposed three sliding mode control methods such as robust sliding mode control (RSMC), new sliding mode control (NSMC), and fractional sliding mode control (FSMC). These controllers were applied on MEMS gyroscope, Exoskeleton robot, and robot manipulator. The performance of the three proposed sliding mode controllers was compared with conventional sliding mode control (CSMC). The simulation results verified that FSMC exhibits better performance in chattering reduction, faster convergence, finite-time convergence, robustness, and trajectory tracking compared to RSMC, CSMC, and NSFC. Also, the tracking performance of NSMC was compared with CSMC experimentally, which demonstrated better performance of the NSMC controller

Piezoelectric energy harvesting solutions

This paper reviews the state of the art in piezoelectric energy harvesting. It presents the basics of piezoelectricity and discusses materials choice. The work places emphasis on material operating modes and device configurations, from resonant to non-resonant devices and also to rotational solutions. The reviewed literature is compared based on power density and bandwidth. Lastly, the question of power conversion is addressed by reviewing various circuit solutions