439 research outputs found

    Fuzzy Logic-based Adaptive Extended Kalman Filter Algorithm for GNSS Receivers

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    Designing robust carrier tracking algorithms that are operable in strident environmental conditions for global navigation satellite systems (GNSS) receivers is the discern task. Major contribution in weakening the GNSS signals are ionospheric scintillations. The effect of scintillation can be known by amplitude scintillation index S4 and phase scintillation index sf parameters. The proposed fuzzy logic based adaptive extended Kalman filter (AEKF) method helps in modelling the signal amplitude and phase dynamically by Auto-Regressive Exogenous (ARX) analysis using Sugeno fuzzy logic inference system. The algorithm gave good performance evaluation for synthetic Cornell scintillation monitor (CSM) data and real-time strong scintillated PRN 12 L1 C/A data on October 24th, 2012 around 21:30 h, Brazil local time collected by GNSS software navigation receiver (GSNRโ€™x). Fuzzy logic algorithm is implemented for selecting the ARX orders based on estimated amplitude and phase ionospheric scintillation observations. Fuzzy based AEKF algorithm has the capability to mitigate ionospheric scintillations under both geomagnetic quiet and disturbed conditions

    Fish scale remover machine

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    Laksa, sata and fish ball is a fish based food. Fish belong to groups of coldblooded animals. Fish lives in water, breathe through gills and use fins to move. According to the dictionary, scales are layered flaky skin on the surface of the fish skin. Scales function as a tool of defending them from their enemies. Hardness of fish scales are different depending on the types of fish being used for productio

    On the smoothness of nonlinear system identification

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    We shed new light on the \textit{smoothness} of optimization problems arising in prediction error parameter estimation of linear and nonlinear systems. We show that for regions of the parameter space where the model is not contractive, the Lipschitz constant and ฮฒ\beta-smoothness of the objective function might blow up exponentially with the simulation length, making it hard to numerically find minima within those regions or, even, to escape from them. In addition to providing theoretical understanding of this problem, this paper also proposes the use of multiple shooting as a viable solution. The proposed method minimizes the error between a prediction model and the observed values. Rather than running the prediction model over the entire dataset, multiple shooting splits the data into smaller subsets and runs the prediction model over each subset, making the simulation length a design parameter and making it possible to solve problems that would be infeasible using a standard approach. The equivalence to the original problem is obtained by including constraints in the optimization. The new method is illustrated by estimating the parameters of nonlinear systems with chaotic or unstable behavior, as well as neural networks. We also present a comparative analysis of the proposed method with multi-step-ahead prediction error minimization

    Highly computationally efficient state filter based on the delta operator

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    The Kalman filter is not suitable for the state estimation of linear systems with multistate delays, and the extended state vector Kalman filtering algorithm results in heavy computational burden because of the large dimension of the state estimation covariance matrix. Thus, in this paper, we develop a novel state estimation algorithm for enhancing the computational efficiency based on the delta operator. The computation analysis and the simulation example show the performance of the proposed algorithm

    A dedicated state space for power system modeling and frequency and unbalance estimation

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    International audienceOver the last decades, a great deal of research has been focused on power quality issues in electrical energy transportation. We present a state-space representation to model dynamical power systems like electrical distribution systems. The proposed model is able to take into account all the dynamic behavior of a multiphase power system. It has been applied to model a typical three-phase power system and its unbalance, i.e., an electrical grid which can be perturbed by nonlinear loads and distributed renewable energy generation which is a typical changing system. Associated with an extended Kalman filter, the state-space model is used to iteratively estimate power quality parameters. Indeed, the symmetrical components of the power system, i.e., their amplitude and phase angle values, and the fundamental frequency can be calculated at each iteration without any prior knowledge. The proposed estimation technique is an evolving and adaptive method able to handle the changing power system. Its effectiveness has been evaluated by several tests. Results have been compared to other methods. They show the efficiency and better performance of the proposed method. The fundamental frequency and the symmetrical components are precisely estimated even under disturbed and time-varying conditions. This state-space representation can therefore be used in active power filtering schemes and in load frequency control strategies

    Phase-Distortion-Robust Voice-Source Analysis

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    This work concerns itself with the analysis of voiced speech signals, in particular the analysis of the glottal source signal. Following the source-filter theory of speech, the glottal signal is produced by the vibratory behaviour of the vocal folds and is modulated by the resonances of the vocal tract and radiation characteristic of the lips to form the speech signal. As it is thought that the glottal source signal contributes much of the non-linguistic and prosodical information to speech, it is useful to develop techniques which can estimate and parameterise this signal accurately. Because of vocal tract modulation, estimating the glottal source waveform from the speech signal is a blind deconvolution problem which necessarily makes assumptions about the characteristics of both the glottal source and vocal tract. A common assumption is that the glottal signal and/or vocal tract can be approximated by a parametric model. Other assumptions include the causality of the speech signal: the vocal tract is assumed to be a minimum phase system while the glottal source is assumed to exhibit mixed phase characteristics. However, as the literature review within this thesis will show, the error criteria utilised to determine the parameters are not robust to the conditions under which the speech signal is recorded, and are particularly degraded in the common scenario where low frequency phase distortion is introduced. Those that are robust to this type of distortion are not well suited to the analysis of real-world signals. This research proposes a voice-source estimation and parameterisation technique, called the Power-spectrum-based determination of the Rd parameter (PowRd) method. Illustrated by theory and demonstrated by experiment, the new technique is robust to the time placement of the analysis frame and phase issues that are generally encountered during recording. The method assumes that the derivative glottal flow signal is approximated by the transformed Liljencrants-Fant model and that the vocal tract can be represented by an all-pole filter. Unlike many existing glottal source estimation methods, the PowRd method employs a new error criterion to optimise the parameters which is also suitable to determine the optimal vocal-tract filter order. In addition to the issue of glottal source parameterisation, nonlinear phase recording conditions can also adversely affect the results of other speech processing tasks such as the estimation of the instant of glottal closure. In this thesis, a new glottal closing instant estimation algorithm is proposed which incorporates elements from the state-of-the-art techniques and is specifically designed for operation upon speech recorded under nonlinear phase conditions. The new method, called the Fundamental RESidual Search or FRESS algorithm, is shown to estimate the glottal closing instant of voiced speech with superior precision and comparable accuracy as other existing methods over a large database of real speech signals under real and simulated recording conditions. An application of the proposed glottal source parameterisation method and glottal closing instant detection algorithm is a system which can analyse and re-synthesise voiced speech signals. This thesis describes perceptual experiments which show that, iunder linear and nonlinear recording conditions, the system produces synthetic speech which is generally preferred to speech synthesised based upon a state-of-the-art timedomain- based parameterisation technique. In sum, this work represents a movement towards flexible and robust voice-source analysis, with potential for a wide range of applications including speech analysis, modification and synthesis

    Modelling and control of dynamic platelet aggregation under disturbed blood flow

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    Diagnosis of platelet function is fundamental for identifying blood disorders of patients, assessing the impact of antiplatelet agents, and enabling the appropriate titration of individual antithrombotic treatments. Following the advancement of new technologies such as microfluidic devices and the use of control engineering methods, new devices have the potential to offer new opportunities in point-of-care diagnosis of platelet function. Such new devices may have significant utility in the development of more tailored antiplatelet therapies. The aim of this thesis is to investigate modelling and control systems which support the study of the dynamic relationship between newly discovered mechanisms of platelet aggregation and disturbed blood flow, using state-of-the-art micro-engineered technologies. In order to observe the dynamics of platelet aggregation under disturbed blood flow, blood perfusion experiments carried out on a device mimicking a scenario of severe vessel narrowing are presented. The resulting biological response, that is the aggregation of platelets, is monitored in real-time and synthesised through novel measures developed using image processing techniques. A mechanistic model identifying four distinct stages observed in the formation of the aggregate is formulated, describing the nonlinear relationship between blood flow dynamics and platelet aggregation. The observed effect of disturbed blood flow on the aggregation of platelets is then modelled mathematically employing System Identification methods. A detailed account of a novel approach for the generation of experimental data is presented, as well as the formulation of tailored mathematical model structures and the calculation of their parameters using collected data. The proposed models replicate experimental results with low variation, and the reduced number of model parameters is suggested as a novel systematic measure of platelet aggregation dynamics in the presence of blood flow disturbances. In order to stabilise, optimise, and automate the measurement of platelet function in response to disturbed blood flow, custom-made control algorithms based on principles of Sliding Mode Control and Pulse-Width Modulation are developed. Moreover, the control algorithms are developed to handle the large variability of the aggregation responses from blood types with platelet hyper- and hypo-function. Simulation results illustrate the robustness of the control algorithms in the presence of time-varying nonlinearities and model uncertainty, and indicate the possibility to regulate the extent of aggregation in the device through modulation of the blood flow rate in the microchannel. The main contribution of this thesis is the development of dynamic models and control systems that allow a systematic measurement of platelet function in response to rapid changes in the blood flow (shear rate micro-gradients), in a microfluidics device containing a scenario of disturbed blood flow. Analysis of the platelet aggregation dynamics revealed that although the aggregate growth appears to be constant at times, measuring its mean fluorescence intensity indicates an increase in the dynamics of platelet density. This densification process appears fundamental for the development of an amplification phase in the aggregation response. The proposed mathematical models and control algorithms facilitate the systematic measurement of platelet function in vitro, pioneering the development of a novel framework for automated blood disorder diagnosis

    Design of a Controller for a Precision Positioning Machine

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    System identification was used to build an accurate model of a high-precision measurement system. The model built by system identification was compared to modeling by first laws and showed extremely similar results. Pole-placement control design based on the identified system was used to place the systems\u27 dominant poles. The necessary gains to achieve the desired system response were determined by using the identified model and knowledge of the controller structure. The performance of the model-based controller was compared to actual data of the system and showed that control based on the identified model can be used to accurately control the precision measuring machine

    ํ”Œ๋ผ์ฆˆ๋งˆ ์‹๊ฐ ์žฅ์น˜๋ฅผ ์œ„ํ•œ ์ ์‘๋ชจ๋ธ์˜ˆ์ธก์ œ์–ด๊ธฐ์˜ ์„ค๊ณ„

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    ํ•™์œ„๋…ผ๋ฌธ (๋ฐ•์‚ฌ)-- ์„œ์šธ๋Œ€ํ•™๊ต ๋Œ€ํ•™์› : ๊ณต๊ณผ๋Œ€ํ•™ ํ™”ํ•™์ƒ๋ฌผ๊ณตํ•™๋ถ€(์—๋„ˆ์ง€ํ™˜๊ฒฝ ํ™”ํ•™์œตํ•ฉ๊ธฐ์ˆ ์ „๊ณต), 2019. 2. ์ด์œค์šฐ.The semiconductor etching process, which is one of the most critical processes in the manufacturing of semiconductors and one that comprises numerous steps, requires higher sophistication as 10 nm semiconductors are mass produced. Currently, the semiconductor etching process is mostly done by physical and/or chemical etching with plasma. In addition, the plasma etching is getting increasingly popular with the miniaturization of the process to a scale of less than 10 nm. The result of a plasma etching process is represented in the form of an etch profile which is determined by the plasma variables. Therefore, the performance of the process depends on these variables, and it is essential to measure and control them in real time. Although research on the control of plasma etching processes has been actively carried out, the plasma etching process strongly relies on the experience and skill level of seasoned engineers at the industry level. This is because a plasma-based system is very complicated and sensitive, and has a time-varying characteristics. However, even though previous studies show excellent results, they employed invasive diagnostic tools, and have single variable control schemes where a counter change of another plasma variable during control actions for other variables might occur due to the highly interactive plasma characteristics. Moreover, they did not consider the time-varying characteristics of plasma-based systems. Therefore, this thesis proposes a multivariable control strategy which can cope with interaction effects and a design of an adaptive model predictive controller which maintains its performance wherein systems vary with time. At first, the plasma variables which are considered as controlled variables were selected as the electron density and the electron temperature. This is because one of the etch profile, especially etch rate, can be expressed as functions of those plasma variables and the variables can be measured by the optical emission spectroscopy which is a non-invasive diagnostic tool. The plasma variables were paired with instrumental variables through singular value decomposition and relative gain array for constructing the optimal multivariable system model. Two parallel proportional integral derivative (PID) controllers were designed based on the output errors then conducted plasma variable control simulations. Through the simulations, the exist of interaction between the variables was obviously verified. For resolving the interaction effectively, decoupler controllers were applied to the PID controllers. As it performed the control experiment of the Ar plasma electron density and electron temperature excellently, the possibility of multivariable control of plasma-based system is demonstrated. In spite of the meaningful control results using the PID controllers, there are obvious limitations in relation to the exquisiteness and to the characteristics of decoupler controllers as it highly dependent to the accuracy of the system model. In order to maintain performance even in the case of a system change, an advanced control strategy is required and model predictive control can be an alternative. Therefore, a model predictive controller was designed where the Bayesian optimization is used as tuning method for the maximization of the exquisiteness. The controller verified its capability as it conducted Ar plasma electron density control in a drift-free system. However, the performance of it deteriorated in control simulations of time-varying systems and in a control experiment performed in a system where O2 plasma was injected into an Ar plasma system inducing the high nonlinearity. Therefore, a more advanced control strategy which can overcome the difficulty was required. In an adaptive control method, once the information from the system is entered into the adjustment mechanism part, the part makes a decision to deliver it to the controller. Then the controller is modified in accordance with the decision and releases the optimal control action. The typical adaptive control algorithm, which is the recursive least squares algorithm, was used in this thesis. Using the algorithm with Kalman filter interpretation, the time-delay effect which comes from the plasma etching reactor can be considered. The recursive model parameter estimator utilizing this algorithm was tuned by Bayesian optimization. When the recursive model parameter estimator detects changes of the system model parameters in real time and transmits it to the model predictive controller, the controller calculates the optimal manipulated variable based on the modified model. The adaptive model predictive controller performed the same simulations and experiment as those performed by the model predictive controller. Unlike the model predictive controller, the proposed controller performed control excellently even when the system changes over time. Numerically, it showed the improved control ability by 24.7% and 30.4% in terms of the mean absolute percentage error and the number of deviated sample, respectively compared to the conventional model predictive controller. These results demonstrate that the adaptive model predictive controller designed in this theses is invaluable for plasma-based system control and is the effective controller for the plasma etching reactor. It is expected to make a significant contribution to plasma-based processes that require high sophistication and flexibility.์ˆ˜ ๋งŽ์€ ๊ณต์ •์œผ๋กœ ์ด๋ฃจ์–ด์ง„ ๋ฐ˜๋„์ฒด ์ œ์กฐ ๊ณต์ • ๋‚ด์—์„œ ๊ฐ€์žฅ ํฐ ๋น„์ค‘์„ ์ฐจ์ง€ํ•˜๊ณ  ์žˆ๋Š” ๋ฐ˜๋„์ฒด ์‹๊ฐ ๊ณต์ •์€ ์ตœ๊ทผ 10 nm๊ธ‰ ๋ฐ˜๋„์ฒด์˜ ์–‘์‚ฐ์ด ์ด๋ค„์ง์— ๋”ฐ๋ผ ์‹๊ฐ์˜ ๋†’์€ ์ •๊ต์„ฑ์ด ์š”๊ตฌ๋˜๊ณ  ์žˆ๋‹ค. ๋ฐ˜๋„์ฒด ์‹๊ฐ ๊ณต์ •์€ ํ˜„์žฌ ์‚ฐ์—…๊ณ„์—์„  ํ”Œ๋ผ์ฆˆ๋งˆ๋ฅผ ์ด์šฉํ•˜์—ฌ ๋ฌผ๋ฆฌ์ , ํ™”ํ•™์  ์‹๊ฐ์„ ์ผ์œผํ‚ค๋Š” ๋ฐฉ๋ฒ•์„ ํ†ตํ•ด ์ด๋ฃจ์–ด์ง€๊ณ  ์žˆ์œผ๋ฉฐ, ๊ณต์ •์ด 10 nm ๊ธ‰ ์ดํ•˜ ์Šค์ผ€์ผ๋กœ ๋ฏธ์„ธํ™”๋œ ํ›„๋กœ ์ด ๋ฐฉ๋ฒ•์ด ๋”์šฑ ๊ฐ๊ด‘ ๋ฐ›๊ณ  ์žˆ๋‹ค. ๊ณต์ •์˜ ๊ฒฐ๊ณผ๋Š” ์‹๊ฐ ํ”„๋กœํ•„์„ ๊ธฐ์ค€์œผ๋กœ ๊ฒฐ์ •๋˜๋Š” ๋ฐ ์ด ์‹๊ฐ ํ”„๋กœํ•„์ด ํ”Œ๋ผ์ฆˆ๋งˆ ๋ณ€์ˆ˜๋“ค์— ํฌ๊ฒŒ ์˜์กดํ•จ์ด ์ž…์ฆ๋จ์— ๋”ฐ๋ผ ์ด ๋ณ€์ˆ˜๋“ค์„ ์‹ค์‹œ๊ฐ„์œผ๋กœ ์ธก์ •ํ•˜๊ณ  ์ œ์–ดํ•˜๋Š” ๊ฒƒ์ด ๊ณต์ •์˜ ํ•ต์‹ฌ์ด ๋˜์—ˆ๋‹ค. ๊ทธ๋™์•ˆ ํ”Œ๋ผ์ฆˆ๋งˆ ๋ณ€์ˆ˜ ์ œ์–ด์— ๊ด€ํ•œ ์—ฐ๊ตฌ๋“ค์ด ํ™œ๋ฐœํžˆ ์ง„ํ–‰๋˜์–ด ์™”์œผ๋‚˜ ์•„์ง๊นŒ์ง€ ์‚ฐ์—…๊ณ„์—์„  ๊ทธ ์ด๋ก ๋“ค์„ ๋ฐ”๋กœ ํ™œ์šฉํ•˜์ง€ ๋ชปํ•˜๊ณ  ๊ฒฝํ—˜ ๋งŽ์€ ์—”์ง€๋‹ˆ์–ด์˜ ๊ฐ์— ์˜์กดํ•˜๊ณ  ์žˆ๋‹ค. ๊ทธ ์ด์œ ๋Š” ๊ทผ๋ณธ์ ์œผ๋กœ ์‹œ์Šคํ…œ์ด ๋งค์šฐ ๋ณต์žกํ•˜๊ณ  ์˜ˆ๋ฏผํ•  ๋ฟ ์•„๋‹ˆ๋ผ ์‹œ๊ฐ„์— ๋”ฐ๋ผ ๋ณ€ํ•˜๋Š” ํŠน์„ฑ์„ ๊ฐ–๊ณ  ์žˆ๊ธฐ ๋•Œ๋ฌธ์ด๋‹ค. ๊ทธ๋Ÿฌ๋‚˜ ์ด์ „์˜ ์—ฐ๊ตฌ๋“ค์€ ํ›Œ๋ฅญํ•œ ๊ฒฐ๊ณผ๋ฅผ ๋ณด์˜€์Œ์—๋„ ๋ถˆ๊ตฌํ•˜๊ณ , ํ”Œ๋ผ์ฆˆ๋งˆ ์‹œ์Šคํ…œ์— ์ง์ ‘์ ์œผ๋กœ ์˜ํ–ฅ์„ ๋ฏธ์น˜๋Š” ์นจํˆฌ์„ฑ ์„ผ์„œ๋ฅผ ์ด์šฉํ–ˆ๊ฑฐ๋‚˜, ํ”Œ๋ผ์ฆˆ๋งˆ ๋ณ€์ˆ˜๋“ค๊ณผ ์žฅ์น˜ ๋ณ€์ˆ˜๋“ค์ด ์„œ๋กœ ๋ณต์žกํ•˜๊ฒŒ ์–ฝํ˜€ ์žˆ์–ด ์•ผ๊ธฐ๋˜๋Š” ์ƒํ˜ธ์ž‘์šฉ์„ ๊ฐ„๊ณผํ•  ์ˆ˜๋ฐ–์— ์—†๋Š” ๋‹จ๋ณ€์ˆ˜ ์ œ์–ด๋ฅผ ์ˆ˜ํ–‰ํ•œ ๋ฐ์— ๊ทธ์น˜๊ณ  ์žˆ๋‹ค. ๊ฒŒ๋‹ค๊ฐ€ ์™ธ๋ž€ ๋•Œ๋ฌธ์— ๋ฐœ์ƒ๋˜๋Š” ์‹œ๊ฐ„์— ๋”ฐ๋ผ ๋ณ€ํ•˜๋Š” ํŠน์„ฑ์„ ๊ณ ๋ คํ•˜์ง€ ๋ชปํ•˜๊ณ  ์žˆ๋‹ค. ๋”ฐ๋ผ์„œ, ๋ณธ ํ•™์œ„๋…ผ๋ฌธ์—์„œ๋Š” ๋ณ€์ˆ˜๊ฐ„ ์ƒํ˜ธ์ž‘์šฉ์„ ์ตœ์†Œํ™”ํ•˜๋Š” ๋‹ค๋ณ€์ˆ˜ ์ œ์–ด ์ „๋žต๊ณผ ์‹œ์Šคํ…œ์ด ์‹œ๊ฐ„์— ๋”ฐ๋ผ ๋ณ€ํ•˜๋Š” ์ƒํ™ฉ์—์„œ๋„ ์„ฑ๋Šฅ์ด ์•…ํ™”๋˜์ง€ ์•Š๋Š” ์ ์‘๋ชจ๋ธ์˜ˆ์ธก์ œ์–ด๊ธฐ์˜ ์„ค๊ณ„๋ฅผ ์ œ์•ˆํ•œ๋‹ค. ๋จผ์ €, ์ „์ž ๋ฐ€๋„์™€ ์ „์ž ์˜จ๋„๊ฐ€ ์ œ์–ด ๋Œ€์ƒ์ด ๋˜๋Š” ํ”Œ๋ผ์ฆˆ๋งˆ ๋ณ€์ˆ˜๋กœ ์„ ์ •๋˜์—ˆ๋‹ค. ์ด๋Š” ์‹๊ฐ ํ”„๋กœํ•„, ํŠนํžˆ ์‹๊ฐ๋ฅ ์ด ์ด ๋ณ€์ˆ˜๋“ค์— ๋Œ€ํ•œ ํ•จ์ˆ˜๋กœ ํ‘œํ˜„๋  ์ˆ˜ ์žˆ์œผ๋ฉฐ, ์ด ๋ณ€์ˆ˜๋“ค์€ ์นจํˆฌ์„ฑ ์„ผ์„œ์ธ ๊ด‘ํ•™์  ๋ฐœ๊ด‘ ๋ถ„๊ด‘๋ฒ•์„ ํ†ตํ•ด ์ธก์ •๋  ์ˆ˜ ์žˆ๊ธฐ ๋•Œ๋ฌธ์ด๋‹ค. ๊ทธ ๋‹ค์Œ์—, ์ตœ์ ์˜ ๋‹ค๋ณ€์ˆ˜ ์‹œ์Šคํ…œ ์ •์˜๋ฅผ ์œ„ํ•ด ํŠน์ด์น˜ ๋ถ„์„๊ณผ ์ƒ๋Œ€์ด๋“๋ฐฐ์—ด์„ ์ด์šฉํ•˜์—ฌ ๊ฐ€์žฅ ํšจ๊ณผ์ ์œผ๋กœ ์ œ์–ด๋ฅผ ์ˆ˜ํ–‰ํ•  ์ˆ˜ ์žˆ๋Š” ์žฅ์น˜ ๋ณ€์ˆ˜ ์„ ์ •์ด ์ด๋ฃจ์–ด์กŒ๋‹ค. ์ด๋ฅผ ๋ฐ”ํƒ•์œผ๋กœ ๋‘ ๊ฐœ์˜ ๋ณ‘๋ ฌ๋กœ ์—ฐ๊ฒฐ๋œ ๋น„๋ก€์ ๋ถ„๋ฏธ๋ถ„์ œ์–ด๊ธฐ๋ฅผ ์„ค๊ณ„, ์•„๋ฅด๊ณค ํ”Œ๋ผ์ฆˆ๋งˆ ์ „์ž ๋ฐ€๋„์™€ ์ „์ž ์˜จ๋„์˜ ์ œ์–ด ์‹œ๋ฎฌ๋ ˆ์ด์…˜์„ ์ˆ˜ํ–‰ํ•˜์˜€๋‹ค. ํ•ด๋‹น ์‹œ๋ฎฌ๋ ˆ์ด์…˜์—์„œ ๋ณ€์ˆ˜๋“ค ๊ฐ„ ์ƒํ˜ธ ์ž‘์šฉ์ด ํ™•์—ฐํ•จ์„ ์ž…์ฆํ•˜์˜€์œผ๋ฉฐ ์ด๋ฅผ ํšจ๊ณผ์ ์œผ๋กœ ํ•ด๊ฒฐํ•˜๊ธฐ ์œ„ํ•ด ๋””์ปคํ”Œ๋Ÿฌ ์ œ์–ด๊ธฐ๊ฐ€ ๋น„๋ก€์ ๋ถ„๋ฏธ๋ถ„์ œ์–ด๊ธฐ์— ๊ฒฐํ•ฉ๋˜์—ˆ๋‹ค. ์ด ์ œ์–ด๊ธฐ๋Š” ์•„๋ฅด๊ณค ํ”Œ๋ผ์ฆˆ๋งˆ์˜ ์ „์ž ๋ฐ€๋„์™€ ์ „์ž ์˜จ๋„ ์ œ์–ด๋ฅผ ํ›Œ๋ฅญํ•˜๊ฒŒ ์ˆ˜ํ–‰ํ•จ์œผ๋กœ์จ ๋‹ค๋ณ€์ˆ˜ ํ”Œ๋ผ์ฆˆ๋งˆ ์‹œ์Šคํ…œ์˜ ์ œ์–ด ๊ฐ€๋Šฅ์„ฑ์„ ๋ถ„๋ช…ํ•˜๊ฒŒ ์ž…์ฆํ•˜์˜€๋‹ค. ๋‹ค๋ณ€์ˆ˜ ํ”Œ๋ผ์ฆˆ๋งˆ ์‹œ์Šคํ…œ์˜ ์ œ์–ด ๊ฐ€๋Šฅ์„ฑ์ด ์ž…์ฆ ๋์Œ์—๋„ ๋ถˆ๊ตฌํ•˜๊ณ , ์ด ์ œ์–ด ์ „๋žต์€ ๋น„๋ก€์ ๋ถ„๋ฏธ๋ถ„์ œ์–ด๊ธฐ์˜ ์ •๊ต์„ฑ ์ธก๋ฉด์—์„œ์˜ ํ•œ๊ณ„์™€ ๋””์ปคํ”Œ๋Ÿฌ ์ œ์–ด๊ธฐ์˜ ์‹œ์Šคํ…œ ๋ชจ๋ธ์— ๋Œ€ํ•œ ๋†’์€ ์˜์กด๋„ ํŠน์„ฑ์œผ๋กœ ์ธํ•œ ํ•œ๊ณ„๊ฐ€ ์กด์žฌํ•œ๋‹ค. ์‹œ์Šคํ…œ์ด ๋ณ€ํ•˜๋Š” ์ƒํ™ฉ์—์„œ๋„ ์„ฑ๋Šฅ์„ ์œ ์ง€ํ•˜๊ธฐ ์œ„ํ•ด์„  ๋”์šฑ ์ˆ˜์ค€ ๋†’์€ ์ œ์–ด ์ „๋žต์ด ์š”๊ตฌ๋˜๋ฉฐ, ๋ชจ๋ธ์˜ˆ์ธก์ œ์–ด๊ฐ€ ๊ทธ ๋Œ€์•ˆ์ด ๋  ์ˆ˜ ์žˆ๋‹ค. ๋ชจ๋ธ์˜ˆ์ธก์ œ์–ด๊ธฐ์˜ ์„ค๊ณ„๋Š” ์ œ์–ด์˜ ์ •๊ต์„ฑ์„ ๊ทน๋Œ€ํ™” ์‹œํ‚ค๊ธฐ ์œ„ํ•ด ๋ฒ ์ด์‹œ์•ˆ ์ตœ์ ํ™” ๊ธฐ๋ฒ•์„ ํ†ตํ•ด ์ด๋ฃจ์–ด์กŒ๋‹ค. ์ด ๋ชจ๋ธ์˜ˆ์ธก์ œ์–ด๊ธฐ๋Š” ์ธ์œ„์ ์ธ ์™ธ๋ž€์ด ์ ์šฉ๋˜์ง€ ์•Š์€ ์ˆœ์ˆ˜ ์•„๋ฅด๊ณค ํ”Œ๋ผ์ฆˆ๋งˆ ์‹œ์Šคํ…œ์—์„œ์˜ ์ „์ž ๋ฐ€๋„ ์ œ์–ด๋ฅผ ํ›Œ๋ฅญํ•˜๊ฒŒ ์ˆ˜ํ–‰ํ•จ์œผ๋กœ์จ ๊ทธ ์„ฑ๋Šฅ์„ ์ž…์ฆํ•˜์˜€๋‹ค. ํ•˜์ง€๋งŒ, ์‹œ์Šคํ…œ์ด ์‹œ๊ฐ„์— ๋”ฐ๋ผ ๋ณ€ํ•˜๋Š” ์ƒํ™ฉ์„ ๋ชจ์‚ฌํ•œ ์‹œ๋ฎฌ๋ ˆ์ด์…˜๊ณผ ์‚ฐ์†Œ ํ”Œ๋ผ์ฆˆ๋งˆ๊ฐ€ ์•„๋ฅด๊ณค ํ”Œ๋ผ์ฆˆ๋งˆ ์‹œ์Šคํ…œ์— ์ฃผ์ž…๋˜์–ด ์‹œ์Šคํ…œ ๋ณ€ํ™”๋ฅผ ์•ผ๊ธฐ์‹œํ‚ค๋Š” ์ƒํ™ฉ์—์„œ ์ˆ˜ํ–‰๋œ ์ œ์–ด ์‹คํ—˜์—์„œ ์ œ์–ด๊ธฐ์˜ ์„ฑ๋Šฅ์ด ํ™•์—ฐํžˆ ์•…ํ™”๋จ์„ ํ™•์ธํ•  ์ˆ˜ ์žˆ์—ˆ๋‹ค. ๋”ฐ๋ผ์„œ ์ด๋ฅผ ๊ทน๋ณตํ•  ์ˆ˜ ์žˆ๋Š” ๋”์šฑ ๋ฐœ์ „๋œ ์ œ์–ด ์ „๋žต์ด ์š”๊ตฌ๋˜์—ˆ๋‹ค. ์ ์‘ ์ œ์–ด ๊ธฐ๋ฒ•์€ ์‹œ์Šคํ…œ์—์„œ ์–ป์–ด์ง„ ์ •๋ณด๋ฅผ ์กฐ์ ˆ ๋ฉ”์ปค๋‹ˆ์ฆ˜ ๋ถ€๋ถ„์œผ๋กœ ๋ณด๋‚ด ์‹ค์‹œ๊ฐ„์œผ๋กœ ์ œ์–ด๊ธฐ์˜ ์ˆ˜์ • ์‚ฌํ•ญ์„ ๊ฒฐ์ •ํ•˜์—ฌ ์ด๋ฅผ ๋ฐ”ํƒ•์œผ๋กœ ์ œ์–ด๋ฅผ ์ˆ˜ํ–‰ํ•˜๋Š” ๊ธฐ๋ฒ•์ด๋‹ค. ๋ณธ ํ•™์œ„๋…ผ๋ฌธ์—์„œ๋Š” ๋Œ€ํ‘œ์ ์ธ ์ ์‘ ์ œ์–ด ์•Œ๊ณ ๋ฆฌ์ฆ˜์ธ ์ˆœํ™˜ํ˜• ์ตœ์†Œ์ž์Šน๋ฒ• ์•Œ๊ณ ๋ฆฌ์ฆ˜์„ ํ™œ์šฉํ•˜์˜€๋‹ค. ์ด ์•Œ๊ณ ๋ฆฌ์ฆ˜์— ์นผ๋งŒ ํ•„ํ„ฐ ํ•ด์„์„ ์ ‘๋ชฉ์‹œํ‚ด์— ๋”ฐ๋ผ, ํ”Œ๋ผ์ฆˆ๋งˆ ์‹๊ฐ ์žฅ์น˜๋กœ๋ถ€ํ„ฐ ๋น„๋กฏ๋˜๋Š” ์‹œ๊ฐ„ ์ง€์—ฐ์˜ ํšจ๊ณผ๋ฅผ ๊ณ ๋ คํ•  ์ˆ˜ ์žˆ๊ฒŒ ํ•˜์˜€๋‹ค. ์ด ์•Œ๊ณ ๋ฆฌ์ฆ˜์ด ํƒ‘์žฌ๋œ ์ˆœํ™˜ํ˜• ๋ชจ๋ธ ํŒŒ๋ผ๋ฏธํ„ฐ ์ถ”์ •๊ธฐ๋Š” ๋ฒ ์ด์‹œ์•ˆ ์ตœ์ ํ™” ๊ธฐ๋ฒ•์„ ํ†ตํ•ด ํŠœ๋‹๋˜์—ˆ๋‹ค. ์ˆœํ™˜ํ˜• ๋ชจ๋ธ ํŒŒ๋ผ๋ฏธํ„ฐ ์ถ”์ •๊ธฐ๊ฐ€ ์‹ค์‹œ๊ฐ„์œผ๋กœ ๊ฐ์ง€ํ•˜๋Š” ๋ชจ๋ธ ํŒŒ๋ผ๋ฏธํ„ฐ์˜ ๋ณ€ํ™”๋ฅผ ๋ชจ๋ธ์˜ˆ์ธก์ œ์–ด๊ธฐ์— ์ „๋‹ฌํ•˜๋ฉด ์ˆ˜์ •๋œ ๋ชจ๋ธ์„ ๊ธฐ๋ฐ˜์œผ๋กœ ์ œ์–ด๊ธฐ๋Š” ์ตœ์ ์˜ ์กฐ์ ˆ ๋ณ€์ˆ˜๋ฅผ ๊ณ„์‚ฐํ•œ๋‹ค. ์ด๋ ‡๊ฒŒ ์„ค๊ณ„๋œ ์ ์‘๋ชจ๋ธ์˜ˆ์ธก์ œ์–ด๊ธฐ๋Š” ์•ž์„œ ๋ชจ๋ธ์˜ˆ์ธก์ œ์–ด๊ธฐ๊ฐ€ ์ˆ˜ํ–‰ํ•œ ๊ฒƒ๊ณผ ๋™์ผํ•œ ์‹œ๋ฎฌ๋ ˆ์ด์…˜๊ณผ ์‹คํ—˜์„ ์ˆ˜ํ–‰ํ•˜์˜€๋‹ค. ๋ชจ๋ธ์˜ˆ์ธก์ œ์–ด๊ธฐ์™€ ๋‹ฌ๋ฆฌ ์ ์‘๋ชจ๋ธ์˜ˆ์ธก์ œ์–ด๊ธฐ๋Š” ์‹œ๊ฐ„์— ๋”ฐ๋ผ ์‹œ์Šคํ…œ์ด ๋ณ€ํ•˜๋Š” ์ƒํ™ฉ์—์„œ๋„ ํ›Œ๋ฅญํ•œ ์ œ์–ด๋ฅผ ์ˆ˜ํ–‰ํ•˜์˜€์œผ๋ฉฐ, ํ‰๊ท ์ ˆ๋Œ€์˜ค์ฐจ์œจ์„ ๊ธฐ์ค€์œผ๋กœ ํ–ˆ์„ ๋•Œ ๊ธฐ์กด์˜ ๋ชจ๋ธ์˜ˆ์ธก์ œ์–ด๊ธฐ๋ณด๋‹ค 24.7%์˜ ํ–ฅ์ƒ๋œ ์ œ์–ด ์„ฑ๋Šฅ์„ ๋ณด์—ฌ์ฃผ์—ˆ๋‹ค. ์ด ๊ฒฐ๊ณผ๋Š” ๋ณธ ํ•™์œ„๋…ผ๋ฌธ์—์„œ ์ œ์•ˆํ•˜๊ณ  ์žˆ๋Š” ์ ์‘๋ชจ๋ธ์˜ˆ์ธก์ œ์–ด๊ธฐ๊ฐ€ ์‹œ์Šคํ…œ์˜ ๋ณ€ํ™”๊ฐ€ ๋นˆ๋ฒˆํ•œ ํ”Œ๋ผ์ฆˆ๋งˆ ์‹œ์Šคํ…œ์—์„œ์˜ ์ œ์–ด์— ๋งค์šฐ ๊ฐ€์น˜ ์žˆ์Œ๊ณผ ๋”๋ถˆ์–ด ํ”Œ๋ผ์ฆˆ๋งˆ ์‹๊ฐ ์žฅ์น˜์— ์œ ํšจํ•œ ์ œ์–ด๊ธฐ๋ผ๋Š” ๊ฒƒ์„ ๋ฐ˜์ฆํ•œ๋‹ค. ์ด ๊ฒฐ๊ณผ๊ฐ€ ํ”Œ๋ผ์ฆˆ๋งˆ ๊ธฐ๋ฐ˜ ์‹œ์Šคํ…œ์„ ๋Œ€์ƒ์œผ๋กœ ํ•˜๋Š” ๋ชจ๋“  ์ œ์–ด ๊ณต์ •์˜ ๋ฐœ์ „์— ํฌ๊ฒŒ ์ด๋ฐ”์ง€ํ•  ๊ฒƒ์„ ๊ธฐ๋Œ€ํ•˜๋Š” ๋ฐ”์ด๋‹ค.Abstract i Contents v List of Figures viii List of Tables xii CHAPTER 1. Introduction 1 1.1. Research motivation 1 1.2. Research objectives 4 1.3. Description of the equipment used in this thesis 5 1.4. Outline of the thesis 9 CHAPTER 2. Design of Multi-Input Multi-Output Controller for Plasma-based System 10 2.1. Introduction 10 2.2. Theoretical backgrounds 13 2.2.1. Estimation of plasma variables from optical emission spectroscopy 13 2.2.2. The influence of oxygen in plasma etching reactor 16 2.2.3. Singular value decomposition and condition number 18 2.2.4. Relative gain array method 21 2.2.5. Multi-loop control system 23 2.3. MIMO control results in the Ar plasma system 31 2.3.1. Variable selection and pairing 31 2.3.2. Disturbance rejection control results for SISO systems 37 2.3.3. Simulation of multi-loop control scheme and decoupling control scheme 41 2.3.4. Set-point tracking control experiment of multi-loop controller with decoupler controllers 58 2.4. Concluding remarks 62 CHAPTER 3. Disturbance Rejection Control of Plasma Electron Density by Model Predictive Controller 64 3.1. Introduction 64 3.2. Model predictive control 68 3.2.1. Concept of model predictive control 68 3.2.2. Description of model predictive control algorithm 71 3.2.2.1. State estimation algorithm 71 3.2.2.2. Optimization algorithm 76 3.3. Design of model predictive controller for Ar plasma system 78 3.3.1. System identification of Ar plasma system 78 3.3.2. Optimal MPC weight parameters from integral squared error based Bayesian optimization 80 3.3.3. Experimental results of Ar plasma electron density control 84 3.4. Disturbance rejection control using model predictive controller 86 3.4.1. Development of time-varying system model for control simulation 86 3.4.2. Design of model predictive controller for disturbance rejection control 91 3.4.3. Experimental result of disturbance rejection control in Ar/O2 plasma system 101 3.5. Concluding remarks 104 CHAPTER 4. Design of Adaptive Model Predictive Controller for Plasma Etching Reactor 106 4.1. Introduction 106 4.2. Recursive model parameter estimation 112 4.2.1. Recursive least squares algorithm with forgetting factor 113 4.2.2. Recursive least squares algorithm with Kalman filter interpretation 116 4.3. Adaptive model predictive control algorithm 119 4.4. Time-varying system control using adaptive model predictive controller 123 4.4.1. Initial system identification (Scaling method) 123 4.4.2. Design of adaptive model predictive controller for time-varying system 125 4.4.3. Set-point tracking control results in drifted system 143 4.5. Concluding remarks 152 CHAPTER 5. Conclusion 154 5.1. Summary of contributions 154 5.2. Future work 157 Nomenclature 159 References 167 Abstract in Korean (๊ตญ๋ฌธ์ดˆ๋ก) 174Docto
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