FUNDAMENTAL ISSUE IN SPACE ELECTRONICS RELIABILITY: NEGATIVE BIAS TEMPERATURE INSTABILITY

Negative Bias Temperature Instability (NBTI) in silicon based metal-oxide-semiconductor-field-effect-transistors (MOSFETs) has been recognized as a critical reliability issue for advanced space qualified electronics. The phenomenon manifests itself as a modification of threshold voltage (Vth) resulting in degraded signal timing paths, and ultimately circuit failure. Despite the obvious importance of the issue, a standard measurement protocol has yet to be determined. This is a consequence of a large amount of complexity introduced by the strong dependencies of NBTI on temperature, electric field, frequency, duty cycle, and gate dielectric composition. We have improved upon the traditional measurement techniques which suffered from an underestimation of the magnitude of Vth shifts because they failed to account for trapped charge relaxation. Specifically, we have developed a means for measuring the maximum effect of NBTI by virtue of a method that can continuously monitor the Vth(t) without having to remove the stressing voltage. The interpretation methodology for this technique is explained in detail and the relevant approximations are justified. We have evidenced temperature and vertical electric field dependent Vth shifts in SiO2 and HfSiON devices. Furthermore, we have collected substantial evidence that the traditional \uf044Vth=At\uf061 analysis fails to explain the experimental data in the early time domain. Finally, we have discovered that \uf044Vth(t) on p-channel field effect transistors with HfSiON gate dielectrics is dependent upon the magnitude of Vds during the stressing cycle. To our knowledge this is not anticipated by any prior modeling attempts. We justify the exclusion of short channel effects as a possibility, leading us to conclude that positive charge in the dielectric stack is laterall

Negative Bias Temperature Instability (NBTI) Monitoring and Mitigation Technique for MOSFET

修士論

A Discharge-Based Pulse Technique for Probing the Energy Distribution of Positive Charges in Gate Dielectric

Characterizing positive charges and its energy distribution in gate dielectric is useful for process qualification. A discharge-based technique is introduced to extract their energy distribution both within and beyond substrate band gap. This work investigates the difficulties in its implementation on typical industrial parameter analyzer and provides solutions. For the first time, we demonstrate the technique’s applicability to the advanced 22 nm fabrication process and its capability in evaluating the impact of different strains on the energy distribution. The test time is within several hours. This, together with its implementation on industrial parameter analyzer, makes it a useful tool in the semiconductor manufacturing foundries for process monitoring and optimization

NEGATIVE BIAS TEMPERATURE INSTABILITY STUDIES FOR ANALOG SOC CIRCUITS

Negative Bias Temperature Instability (NBTI) is one of the recent reliability issues in sub threshold CMOS circuits. NBTI effect on analog circuits, which require matched device pairs and mismatches, will cause circuit failure. This work is to assess the NBTI effect considering the voltage and the temperature variations. It also provides a working knowledge of NBTI awareness to the circuit design community for reliable design of the SOC analog circuit. There have been numerous studies to date on the NBTI effect to analog circuits. However, other researchers did not study the implication of NBTI stress on analog circuits utilizing bandgap reference circuit. The reliability performance of all matched pair circuits, particularly the bandgap reference, is at the mercy of aging differential. Reliability simulation is mandatory to obtain realistic risk evaluation for circuit design reliability qualification. It is applicable to all circuit aging problems covering both analog and digital. Failure rate varies as a function of voltage and temperature. It is shown that PMOS is the reliabilitysusceptible device and NBTI is the most vital failure mechanism for analog circuit in sub-micrometer CMOS technology. This study provides a complete reliability simulation analysis of the on-die Thermal Sensor and the Digital Analog Converter (DAC) circuits and analyzes the effect of NBTI using reliability simulation tool. In order to check out the robustness of the NBTI-induced SOC circuit design, a bum-in experiment was conducted on the DAC circuits. The NBTI degradation observed in the reliability simulation analysis has given a clue that under a severe stress condition, a massive voltage threshold mismatch of beyond the 2mV limit was recorded. Bum-in experimental result on DAC proves the reliability sensitivity of NBTI to the DAC circuitry

Design of a reliability methodology: Modelling the influence of temperature on gate Oxide reliability

An Integrated Reliability Methodology (IRM) is presented that encompasses the changes that technology growth has brought with it and includes several new device degradation models. Each model is based on a physics of failure approach and includes on the effects of temperature. At all stages the models are verified experimentally on modern deep sub-micron devices. The research provides the foundations of a tool which gives the user the opportunity to make appropriate trade-offs between performance and reliability, and that can be implemented in the early stages of product development

Transistor Degradations in Very Large-Scale-Integrated CMOS Technologies

The historical evolution of hot carrier degradation mechanisms and their physical models are reviewed and an energy-driven hot carrier aging model is verified that can reproduce 62-nm-gate-long hot carrier degradation of transistors through consistent aging-parameter extractions for circuit simulation. A long-term hot carrier-resistant circuit design can be realized via optimal driver strength controls. The central role of the V GS ratio is emphasized during practical case studies on CMOS inverter chains and a dynamic random access memory (DRAM) word-line circuit. Negative bias temperature instability (NBTI) mechanisms are also reviewed and implemented in a hydrogen reaction-diffusion (R-D) framework. The R-D simulation reproduces time-dependent NBTI degradations interpreted into interface trap generation, Δ N it with a proper power-law dependency on time. The experimental evidence of pre-existing hydrogen-induced Si–H bond breakage is also proven by the quantifying R-D simulation. From this analysis, a low-pressure end-of-line (EOL) anneal can reduce the saturation level of NBTI degradation, which is believed to be caused by the outward diffusion of hydrogen from the gate regions and therefore prevents further breakage of Si–H bonds in the silicon-oxide interfaces

Cross-Layer Resiliency Modeling and Optimization: A Device to Circuit Approach

The never ending demand for higher performance and lower power consumption pushes the VLSI industry to further scale the technology down. However, further downscaling of technology at nano-scale leads to major challenges. Reduced reliability is one of them, arising from multiple sources e.g. runtime variations, process variation, and transient errors. The objective of this thesis is to tackle unreliability with a cross layer approach from device up to circuit level

On variability and reliability of poly-Si thin-film transistors

In contrast to conventional bulk-silicon technology, polysilicon (poly-Si) thin-film transistors (TFTs) can be implanted in flexible substrate and can have low process temperature. These attributes make poly-Si TFT technology more attractive for new applications, such as flexible displays, biosensors, and smart clothing. However, due to the random nature of grain boundaries (GBs) in poly-Si film and self-heating enhanced negative bias temperature instability (NBTI), the variability and reliability of poly-Si TFTs are the main obstacles that impede the application of poly-Si TFTs in high-performance circuits. The primary focus of this dissertation is to develop new design methodologies and modeling techniques for facilitating new applications of poly-Si TFT technology. In order to do that, a physical model is first presented to characterize the GB-induced transistor threshold voltage (V th)variations considering not only the number but also the position and orientation of each GB in 3-D space. The fast computation time of the proposed model makes it suitable for evaluation of GB-induced transistor Vthvariation in the early design phase. Furthermore, a self-consistent electro-thermal model that considers the effects of device geometry, substrate material, and stress conditions on NBTI is proposed. With the proposed modeling methodology, the significant impacts of device geometry, substrate, and supply voltage on NBTI in poly-Si TFTs are shown. From a circuit design perspective, a voltage programming pixel circuit is developed for active-matrix organic light emitting diode (AMOLED) displays for compensating the shift of Vth and mobility in driver TFTs as well as compensating the supply voltage degradation. In addition, a self-repair design methodology is proposed to compensate the GB-induced variations for liquid crystal displays (LCDs) and AMOLED displays. Based on the simulation results, the proposed circuit can decrease the required supply voltage by 20% without performance and yield degradation. In the final section of this dissertation, an optimization methodology for circuit-level reliability tests is explored. To effectively predict circuit lifetime, accelerated aging (i.e. elevated voltage and temperature) is commonly applied in circuit-level reliability tests, such as constant voltage stress (CVS) and ramp voltage stress (RVS) tests. However, due to the accelerated aging, shifting of dominant degradation mechanism might occur leading to the wrong lifetime prediction. To get around this issue, we proposed a technique to determine the proper stress range for accelerated aging tests

Probing technique for energy distribution of positive charges in gate dielectrics and its application to lifetime prediction

The continuous reduction of the dimensions of CMOS devices has increased the negative bias temperature instability (NBTI) of pMOSFETs to such a level that it is limiting their lifetime. This increase of NBTI is caused mainly by three factors: an increase of nitrogen concentration in gate dielectric, a higher operation electrical field, and a higher temperature. Despite of many years’ research work, there are questions on the correctness of the NBTI lifetime predicted through voltage acceleration and extrapolation. The conventional lifetime prediction technique measures the degradation slowly and it typically takes 10 ms or longer to record one threshold voltage shift. It has been reported that NBTI can recover substantially in this time and the degradation is underestimated. To minimize the recovery, ultra-fast technique has been developed and the measurement time has been reduced to the order of microseconds. Once the recovery is suppressed, however, the degradation no longer follows a power law and there is no industry-wide accepted method for lifetime prediction. The objective of this project is to overcome this challenge and to develop a reliable NBTI lifetime prediction technique after freezing the recovery. To achieve this objective, it is essential to have an in-depth knowledge on the defects responsible for the recovery. It has been generally accepted that the NBTI recovery is dominated by the discharge of trapped holes. For the thin dielectric (e.g. < 3 nm) used by current industry, all hole traps are within direct tunnelling distance from the substrate and their discharging is mainly controlled by their energy levels against the Fermi level at the substrate interface. As a result, it is crucial to have the energy distribution of positive charges (PC) in the gate dielectric, but there is no technique available for probing this energy profile. A major achievement of this project is to develop a new technique that can probe the energy distribution of PCs both within and beyond the silicon energy gap. After charging up the hole traps, they are allowed to discharge progressively by changing the gate bias, Vg, in the positive direction in steps. This allows the Fermi level at the interface to be swept from a level below the valence band edge to a level above the conduction band edge, giving the required energy profile. Results show that PCs can vary by one order of magnitude with energy level. The PCs in different energy regions clearly originate from different defects. The PCs below the valence band edge are as-grown hole traps which are insensitive to stress time and temperature, and substantially higher in thermal SiON. The PCs above the valence band edge are from the created defects. The PCs within bandgap saturate for either longer stress time or higher stress temperature. In contrast, the PCs above conduction band edge, namely the anti-neutralization positive charges, do not saturate and their generation is clearly thermally accelerated. This energy profile technique is applicable to both SiON and high-k/SiON stack. It is found that both of them have a high level of as-grown hole traps below the valence band edge and their main difference is that there is a clear peak in the energy density near to the conduction band edge for the High-k/SiON stack, but not for the SiON. Based on this newly developed energy profile technique and the improved understanding, a new lifetime prediction technique has been proposed. The principle used is that a defect must be chargeable at an operation voltage, if it is to be included in the lifetime prediction. At the stress voltage, some as-grown hole traps further below Ev are charged, but they are neutral under an operation bias and must be excluded in the lifetime prediction. The new technique allows quantitative determination of the correct level of as-grown hole trapping to be included in the lifetime prediction. A main advantage of the proposed technique is that the contribution of as-grown hole traps is experimentally measured, avoiding the use of trap-filling models and the associated fitting parameters. The successful separation of as-grown hole trapping from the total degradation allows the extraction of generated defects and restores the power-law kinetics. Based on this new lifetime prediction technique, it is concluded that the maximum operation voltage for a 10 years lifetime is substantially overestimated by the conventional prediction technique. This new lifetime prediction technique has been accepted for presentation at the 2013 International Electron Devices Meeting (IEDM)