Miniaturized Transistors, Volume II

In this book, we aim to address the ever-advancing progress in microelectronic device scaling. Complementary Metal-Oxide-Semiconductor (CMOS) devices continue to endure miniaturization, irrespective of the seeming physical limitations, helped by advancing fabrication techniques. We observe that miniaturization does not always refer to the latest technology node for digital transistors. Rather, by applying novel materials and device geometries, a significant reduction in the size of microelectronic devices for a broad set of applications can be achieved. The achievements made in the scaling of devices for applications beyond digital logic (e.g., high power, optoelectronics, and sensors) are taking the forefront in microelectronic miniaturization. Furthermore, all these achievements are assisted by improvements in the simulation and modeling of the involved materials and device structures. In particular, process and device technology computer-aided design (TCAD) has become indispensable in the design cycle of novel devices and technologies. It is our sincere hope that the results provided in this Special Issue prove useful to scientists and engineers who find themselves at the forefront of this rapidly evolving and broadening field. Now, more than ever, it is essential to look for solutions to find the next disrupting technologies which will allow for transistor miniaturization well beyond silicon’s physical limits and the current state-of-the-art. This requires a broad attack, including studies of novel and innovative designs as well as emerging materials which are becoming more application-specific than ever before

Vertical InAs Nanowire Devices and RF Circuits

Recent decades have seen an exponential increase in the functionality of electronic circuits, allowing for continuous innovation, which benefits society. This increase in functionality has been facilitated by scaling down the dimensions of the most important electronic component in modern electronics: the Si-based MOSFET. By reducing the size of the device, more transistors per chip area is possible. Smaller MOSFETs are also faster and more energy-efficient. In state of the art MOSFETs, the key dimensions are only few nanometers, rapidly approaching a point where the current scaling scheme may not be maintained. Research is ongoing to improve the device performance, mainly focusing on material and structural improvements to the existing MOSFET architecture. In this thesis, MOSFETs based on nanowires, are investigated. Taking advantage of the nanowire geometry, the gate can be wrapped all-around the nanowires for excellent control of the channel. The nanowires are made in a high-mobility III-V semiconductor, InAs, allowing for faster electrons and higher currents than Si. This device type is a potential candidate to either replace or complement Si-based MOSFETs in digital and analogue applications. Single balanced down-conversion mixer circuits were fabricated, consisting of three vertically aligned InAs nanowire MOSFETs and two nanowire resistors. These circuits are shown to operate with voltage gain in the GHz-regime. Individual transistors demonstrated operation with gain at several tens of GHz. A method to characterise the resistivity and metal-semiconductor contact quality has been developed, using the transmission line method adapted for vertical nanowires. This method has successfully been applied to InAs nanowires and shown that low-resistance contacts to these nanowires are possible. To optimise the performance of the device and reach as close to intrinsic operation as possible, parasitic capacitances and resistances in the device structure need to be minimised. A novel self-aligned gate-last fabrication method for vertical InAs nanowire transistors has been developed, that allows for an optimum design of the channel and the contact regions. Transistors fabricated using this method exhibit the best DC performance, in terms of a compromise between the normalised transconductance and sub-threshold swing, of any previously reported vertical nanowire MOSFET

Journal of Telecommunications and Information Technology, 2007, nr 3

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DEFECTS AND LIFETIME PREDICTION OF GERMANIUM MOSFETS

To continue improving device speed, much effort has been made to replace Si by high mobility semiconductors. Ge is considered as a strong candidate for pMOSFETs due to the high hole mobility. Two approaches have been demonstrated: high-k/Si-cap/Ge and high-k/GeO2/Ge. Negative Bias Temperature Instability (NBTI) is still one of the main reliability issues, limiting the device lifetime. In this project, it is found that the conventional lifetime prediction method developed for Si is inapplicable to Ge devicesand defect properties in Ge and Si MOSFETs are different.The threshold voltage degradation in Ge can be nearly 100% recovered under a much lower temperature than that in Si devices. The defect losses observed in Si devices were absent in Ge/GeO2/Al2O3. The generation of interface states is insignificant and the positive charges in GeO2/Al2O3 on Ge dominate the NBTI. These positive charges do not follow the same model as those in SiON/Si and an energy-alternating model has been proposed: there are a spread of energy levels of neutral hole traps below Ev andthey lift up after charging, and return below Ev after neutralization.The energy distribution of positive charges in the Al2O3/GeO2/Ge gate stack was studied by the Discharge-based Multi-pulse (DMP) Technique. The different stress-time dependence of defects below Ev and around Ec indicates that they originate from different defects. Quantization effect, Fermi level pinning, and discharge voltage step were considered. The defect differences in terms of the energy level were investigated by using the DMP technique and the energy alternating model is verified by the defect energy distribution.Based on the understanding of different defect behavior, a new NBTI lifetime prediction method was developed for Ge MOSFETs. Energy alternating defects were separated from as-grown hole traps (AHT), which enables to restore the power law for NBTI kinetics with a constant power exponent. The newly developed Ge method was applicable for NBTI lifetime prediction of the state-of-the-art Si-cap/Ge and GeO2/Ge MOSFETs. When compared with SiON/Si, the optimized Si-cap/Ge shows superior reliability, while GeO2/Ge is inferior and needs further optimization. Preliminary characterization was also carried out to investigate the impacts of energy levels and characteristic times of different defects on the frequency and duty factor dependence of AC NBTI degradation

Strained Si heterojunction bioploar transistors

This dissertation addresses the world’s first demonstration of strained Si Heterojunction Bipolar Transistors (sSi HBTs). The conventional SiGe Heterojunction Bipolar Transistor (SiGe HBT), which was introduced as a commercial product in 1999 (after its first demonstration in 1988), has become an established device for high-speed applications. This is due to its excellent RF performance and compatibility with CMOS processing. It has enabled silicon-based technology to penetrate the rapidly growing market for wide bandwidth and wireless telecommunications once reserved for more expensive III–V technologies. SiGe HBTs is realised by the pseudomorphic growth of SiGe on a Si substrate, which allows engineering of the base region to improve performance. In this way the base has a smaller energy band gap than the emitter, which increases the gain. The energy band gap of SiGe reduces with increasing Ge composition, but the maximum Ge composition is limited by the amount of strain that can be accommodated within a given base layer thickness. Therefore, a new innovation is necessary to overcome this limitation and meet the continuous demand for high speed devices. Growing the SiGe base layer over a relaxed SiGe layer (Strain Relaxed Buffer) can increase the amount of Ge that can be incorporated in the base, hence, increasing the device performance. In this thesis, experimental data is presented to demonstrate the realisation of sSi HBTs. The performance of this novel device has been also investigated and explained using TCAD tool.EThOS - Electronic Theses Online ServiceEngineering and Physical Sciences Research CouncilGBUnited Kingdo

The SuperCam Instrument Suite on the Mars 2020 Rover: Science Objectives and Mast-Unit Description

On the NASA 2020 rover mission to Jezero crater, the remote determination of the texture, mineralogy and chemistry of rocks is essential to quickly and thoroughly characterize an area and to optimize the selection of samples for return to Earth. As part of the Perseverance payload, SuperCam is a suite of five techniques that provide critical and complementary observations via Laser-Induced Breakdown Spectroscopy (LIBS), Time-Resolved Raman and Luminescence (TRR/L), visible and near-infrared spectroscopy (VISIR), high-resolution color imaging (RMI), and acoustic recording (MIC). SuperCam operates at remote distances, primarily 2-7 m, while providing data at sub-mm to mm scales. We report on SuperCam's science objectives in the context of the Mars 2020 mission goals and ways the different techniques can address these questions. The instrument is made up of three separate subsystems: the Mast Unit is designed and built in France; the Body Unit is provided by the United States; the calibration target holder is contributed by Spain, and the targets themselves by the entire science team. This publication focuses on the design, development, and tests of the Mast Unit; companion papers describe the other units. The goal of this work is to provide an understanding of the technical choices made, the constraints that were imposed, and ultimately the validated performance of the flight model as it leaves Earth, and it will serve as the foundation for Mars operations and future processing of the data.In France was provided by the Centre National d'Etudes Spatiales (CNES). Human resources were provided in part by the Centre National de la Recherche Scientifique (CNRS) and universities. Funding was provided in the US by NASA's Mars Exploration Program. Some funding of data analyses at Los Alamos National Laboratory (LANL) was provided by laboratory-directed research and development funds