50 research outputs found

    Polymer based microfabrication and its applications in optical MEMS and bioMEMS

    Get PDF
    Due to its ease of fabrication, low cost and great variety of functionalities, polymer has become an important material in microfabrication. MEMS devices with polymer as the structure material have found applications in various fields, especially in BioMEMS and optical MEMS. In this dissertation, three polymer based microfabricated devices/components have been developed and tested. Various polymer based fabrication techniques, such as high aspect ratio SU-8 photolithography, three dimensional polydimethylsiloxane (PDMS) soft lithography, multi-layer soft lithography and PDMS double casting technique have been developed/studied and employed in the device fabrication process. The main contribution of this dissertation includes: (1) Developed two novel methods for the fabrication of out-of-plane microlens. The PDMS and UV curable polymer (NOA73) replication technique made possible the fast replication of out-of-plane microlens and broaden the lens material selection. The in-situ pneumatical microlens fabrication technique, on the other hand, provides feasible method to integrate out-of-plane microlens into microfluidic chips requiring minimal design footprint and fabrication complexity. (2) Design, fabrication and test of a microchip flow cytometer with 3-D hydrofocusing chamber and integrated out-of-plane microlens as on-chip optical detection component. The developed micro flow cytometer offers 3-D hydrofocusing like conventional cytometer cuvette, and has on-chip microlens for optical signal collection to improve the detection efficiency. With the latest design improvement, the hydrofocusing chamber can focus the sample stream down to less than 10 m in diameter in both vertical and horizontal directions. (3) Development of a PDMS microchip based platform for multiplex immunoassay applications. Integrated micro valves were employed for manipulation of fluidic reagents in the microchannel network. PDMS surface was used as the solid phase substrate for immuno-reactions. Preliminary results showed that, even with low cost polyclonal goat anti-mouse IgG as the reporter antibody, the detection limit of goat mouse IgG can reach as low as 5 ng/mL (about 33 pM). With the continuous advance in microfabrcation technique and polymer science, polymer based microfabrication and polymer MEMS devices will keep to evolve. In the future, more work needs to be done in this field with great potential and endless innovations

    Optical Fluid-based Photonic And Display Devices

    Get PDF
    Conventional solid-state photonic devices exhibit an ultra-high optical performance and durability, but minimal adaptability. Recently, optical fluid-based photonic and display devices are emerging. By dynamically manipulating the optical interface formed by liquids, the optical output can be reconfigured or adaptively tuned in real time. Such devices exhibit some unique characteristics that are not achievable in conventional solid-state photonic devices. Therefore, they open a gateway for new applications, such as image and signal processing, optical communication, sensing, and lab-on-a-chip, etc. Different operation principles of optical fluidbased photonic devices have been proposed, for instance fluidic pressure, electrochemistry, thermal effect, environmentally adaptive hydrogel, electro-wetting and dielectrophoresis. In this dissertation, several novel optical fluid-based photonic and display devices are demonstrated. Their working principles are described and electro-optic properties investigated. The first part involves photonic devices based on fluidic pressure. Here, we present a membrane-encapsulated liquid lens actuated by a photo-activated polymer. This approach paves a way to achieve non-mechanical driving and easy integration with other photonic devices. Next, we develop a mechanical-wetting lens for visible and short-wavelength infrared applications. Such a device concept can be extended to longer wavelength if proper liquids are employed. In the second part, we reveal some new photonic and display devices based on dielectrophoretic effects. We conceive a dielectric liquid microlens with well-shaped electrode for fixing the droplet position and lowering the operating voltage. To widen the dynamic range, we demonstrate an approach to enable focus tuning from negative to positive or vice versa in a single dielectric lens without any moving part. The possibility of fabricating microlens arrays iv with different aperture and density using a simple method is also proposed. Furthermore, the fundamental electro-optic characteristics of dielectric liquid droplets are studied from the aspects of operating voltage, frequency and droplet size. In addition to dielectric liquid lenses, we also demonstrate some new optical switches based on dielectrophoretic effect, e.g., optical switch based on voltage-stretchable liquid crystal droplet, variable aperture or position-shifting droplet. These devices work well in the visible and near infrared spectral ranges. We also extend this approach to display and show a polarizer-free and color filter-free display. Simple fabrication, low power consumption, polarization independence, relatively low operating voltage as well as reasonably fast switching time are their key features

    Back-end processing of scanning mirrors with scratch drive actuators

    Get PDF
    The use of micro-electro-mechanical system (MEMS) processes in fabrication of micr- electro-mechanical devices for optical applications has been widespread. The invention of digital light processing (DLP) technology by Texas Instruments Inc. popularized the use of micro-mirrors. One of the applications of the micro-mirrors is in the form of scanners for biomedical imaging. The small size of mirrors and actuators makes them a good candidate for in vivo measurements/imaging. Various techniques in bulk- and surface-micromachining, and various actuators have been used to fabricate scanning mirrors. The scanning mirrors used in this work make use of scratch drive actuators (SDA) for their scanning motion. Both surface- and bulk-micromachining technologies are used to fabricate the devices. Surface-micromachining (Multi User MEMS Processes or MUMPsยฎ) is used to fabricate scanning mirrors, and bulk-micromachining is used to separate dies, to create sloped sidewalls for efficient packaging and to make grooves for optical fibers. This work describes the techniques used in the post-MUMPs processing of the devices. The main features of the post-MUMPs processing are substrate etching and formation of insulating links. The presence of devices on the front side necessitates the use of a protection method in the substrate etching step. Polymers have drawn attention in recent years as protective materials due to their chemical stability as well as the ease of use. This thesis work utilizes poly dimethylsiloxane (PDMS) as a protection material, and examines the effect of PDMS process conditions on the quality of the protection. Protection for at least 10 hours was achieved in this work. The scanning mirror devices of this thesis work require non-conductive links between the actuators and the mirror. Thick photoresists such as AZ 4620, AZ 9260, SU-8 etc, are a good choice due to the ease in their patterning as well as their excellent insulating properties. This thesis documents the processes followed to achieve optimal link structures using thick photoresist (AZ 9260). The resist was optimally hard baked to make it chemically inert to common organic solvents

    Actuation Of Droplets Using Transparent Graphene Electrodes For Tunable Lenses And Biomedical Applications

    Get PDF
    Variable focal length liquid microlenses are the next candidate for a wide variety of applications. Driving mechanism of the liquid lenses can be categorized into mechanical and electrical actuation. Among different actuation mechanisms, EWOD is the most common tool for actuation of the liquid lenses. In this dissertation, we have demonstrated versatile and low-cost miniature liquid lenses with graphene as electrodes. Tunable focal length is achieved by changing both curvature of the droplet using electrowetting on dielectric (EWOD) and applied pressure. Ionic liquid and KCl solution are utilized as lens liquid on the top of a flexible Teflon-coated PDMS/parylene membrane. Transparent and flexible, graphene allows transmission of visible light as well as large deformation of the polymer membrane to achieve requirements for different lens designs and to increase the field of view without damaging of electrodes. Another advantage of graphene compared to non-transparent electrodes is the larger lens aperture. The tunable range for the focal length is between 3 and 7 mm for a droplet with a volume of 3 ฮผL. The visualization of bone marrow dendritic cells is demonstrated by the liquid lens system with a high resolution (more than 456 lp/mm). The Spherical aberration analysis is performed using COMSOL software to investigate the optical properties of the lens under applied voltages and pressure. We propose a prototype of compound eye with specific design of the electrodes using both tunable lenses and tunable supporting membrane. The design has many advantages including large field of view, compact size and fast response time. This work maybe applicable in the development of the next generation of cameras, endoscopes, cell phones on flexible platform. We also proposed here the design and concept of self-powered wireless sensor based on the graphene radio-frequency (RF) components, which are transparent, flexible, and monolithically integrated on biocompatible soft substrate. We show that a quad-ring circuit based on graphene transistors may simultaneously offer sensing and frequency modulation functions. This battery-free and transparent sensors based on newly discovered 2D nanomaterials may benefit versatile wireless sensing and internet-of-things applications, such as smart contact lenses/glasses and microscope slides

    ๋””์Šคํ”Œ๋ ˆ์ด ๋ฐ ์ด๋ฏธ์ง• ์‹œ์Šคํ…œ์œผ๋กœ์˜ ์‘์šฉ์„ ์œ„ํ•œ 3D ํ”„๋ฆฐํŒ… ๊ธฐ๋ฐ˜ ๋งž์ถคํ˜• ๊ด‘ํ•™ ์š”์†Œ์˜ ๊ฐœ๋ฐœ

    Get PDF
    ํ•™์œ„๋…ผ๋ฌธ (๋ฐ•์‚ฌ) -- ์„œ์šธ๋Œ€ํ•™๊ต ๋Œ€ํ•™์› : ๊ณต๊ณผ๋Œ€ํ•™ ์ „๊ธฐยท์ •๋ณด๊ณตํ•™๋ถ€, 2021. 2. ํ™์šฉํƒ.์ผ๋ฐ˜์ ์œผ๋กœ ์ œ์กฐ ๊ณต์ •์€ ์ ˆ์‚ญ ๋ฐฉ์‹๊ณผ ์ ์ธต ๋ฐฉ์‹์œผ๋กœ ๊ตฌ๋ถ„๋œ๋‹ค. ์ด ์ค‘์—์„œ ์ ์ธต ๋ฐฉ์‹ ๊ณต์ •์€ ์ €๋น„์šฉ ๋ฐ ๋‹จ์‹œ๊ฐ„์œผ๋กœ ๋ณต์žกํ•œ ํ˜•ํƒœ์˜ ๊ตฌ์กฐ๋ฅผ ๋งŒ๋“ค ์ˆ˜ ์žˆ์–ด์„œ ์ด์— ๋Œ€ํ•œ ์—ฐ๊ตฌ์™€ ๊ฐœ๋ฐœ์ด ๊พธ์ค€ํžˆ ์ง„ํ–‰๋˜์–ด์™”๋‹ค. ํŠนํžˆ 3D ํ”„๋ฆฐํŒ…์€ ์ ์ธต ๋ฐฉ์‹ ๊ณต์ • ์ค‘์—์„œ ๊ฐ€์žฅ ๋Œ€ํ‘œ์ ์ธ ๋ฐฉ๋ฒ•์œผ๋กœ, ๊ธฐ๊ณ„ ๋ถ€ํ’ˆ ๋ฐ ์ƒ์ฒด ๊ธฐ๊ด€ ์ œ์กฐ ๋“ฑ์˜ ๋ถ„์•ผ์—์„œ๋Š” ์ด๋ฏธ ์ƒ์šฉํ™”๊ฐ€ ์ง„ํ–‰๋˜๊ณ  ์žˆ๋‹ค. ํ•˜์ง€๋งŒ ์ „์ž ์†Œ์ž ๋ฐ ๊ด‘ํ•™ ์š”์†Œ ๋ถ„์•ผ์—์„œ์˜ 3D ํ”„๋ฆฐํŒ…์˜ ํ™œ์šฉ์€ ์—ฌ์ „ํžˆ ์—ฐ๊ตฌ ๊ฐœ๋ฐœ ๋˜๋Š” ์‹œ์ œํ’ˆ ์ œ์ž‘ ๋‹จ๊ณ„์— ๋จธ๋ฌด๋ฅด๊ณ  ์žˆ๋‹ค. ํŠนํžˆ ๋งˆ์ดํฌ๋กœ ๋ Œ์ฆˆ, ์ปฌ๋Ÿฌ ํ•„ํ„ฐ ๋“ฑ์ด 3D ํ”„๋ฆฐํŒ…์œผ๋กœ ์‘์šฉํ•  ์ˆ˜ ์žˆ๋Š” ๊ฐ€์žฅ ๊ฐ€๋Šฅ์„ฑ ์žˆ๋Š” ๊ด‘ํ•™ ์š”์†Œ๋กœ์„œ ๋””์Šคํ”Œ๋ ˆ์ด ๋ฐ ์ด๋ฏธ์ง• ์‹œ์Šคํ…œ์— ๋„๋ฆฌ ์‚ฌ์šฉ๋  ๊ฒƒ์œผ๋กœ ์˜ˆ์ƒ๋˜์ง€๋งŒ ์—ฌ์ „ํžˆ ์ƒ์šฉํ™”๋ฅผ ์œ„ํ•œ ์—ฐ๊ตฌ๊ฐ€ ์ง„ํ–‰ ์ค‘์ด๋‹ค. ๋˜ํ•œ 3D ํ”„๋ฆฐํŒ…์„ ์ด์šฉํ•œ ๊ด‘ํ•™ ์š”์†Œ์˜ ์ œ์ž‘์€ ์†Œ์žฌ, ๊ธธ์ด ์Šค์ผ€์ผ, ํ˜•์ƒ ๋ฐ ์‘์šฉ ๋ฐฉ์•ˆ ๋“ฑ์—์„œ๋„ ์ œํ•œ์ด ๋งŽ์€ ์ƒํ™ฉ์ด๋‹ค. ๋”ฐ๋ผ์„œ ์ด๋Ÿฌํ•œ ๋ฌธ์ œ๋ฅผ ๊ทน๋ณตํ•˜๊ธฐ ์œ„ํ•ด์„œ๋Š” ๋””์Šคํ”Œ๋ ˆ์ด ๋ฐ ์ด๋ฏธ์ง• ์‹œ์Šคํ…œ์—์„œ์˜ 3D ํ”„๋ฆฐํŒ… ๋œ ๊ด‘ํ•™ ์š”์†Œ์˜ ์œ ์šฉ์„ฑ์„ ํ™•์žฅํ•ด์•ผ ํ•˜๋ฉฐ, ๋‹ค์Œ๊ณผ ๊ฐ™์ด ์„ธ ๊ฐ€์ง€ ์ธก๋ฉด์—์„œ ํ–ฅ์ƒ๋œ ์„ฑ๋Šฅ์„ ๋‹ฌ์„ฑํ•ด์•ผ ํ•œ๋‹ค. ์ฒซ์งธ, ๋‹ค์–‘ํ•œ ๋ฐฉ์‹์˜ 3D ํ”„๋ฆฐํŒ… ๋ฐฉ๋ฒ•์„ ํ†ตํ•ด ๋งˆ์ดํฌ๋กœ๋ฏธํ„ฐ์—์„œ ์„ผํ‹ฐ๋ฏธํ„ฐ๊นŒ์ง€ ๊ด‘๋ฒ”์œ„์˜ ๊ธธ์ด ์Šค์ผ€์ผ์„ ๊ฐ€์ง€๋Š” ๊ตฌ์กฐ๋ฌผ์˜ ์ œ์ž‘์ด ๊ฐ€๋Šฅํ•ด์•ผ ํ•œ๋‹ค. ๋‘˜์งธ, ์ž„์˜์˜ ๊ณก๋ฉด, ๊ณ„์ธต์  ๊ตฌ์กฐ ๋“ฑ ๋ณต์žกํ•œ ํ˜•์ƒ์˜ ๊ตฌ์กฐ๋ฌผ์„ ์‰ฝ๊ฒŒ ์ œ์ž‘ํ•  ์ˆ˜ ์žˆ์–ด์•ผ ํ•œ๋‹ค. ์…‹์งธ, ๋‹จ๋‹จํ•œ ์†Œ์žฌ ๋Œ€์‹  ํƒ„์„ฑ์ฒด์™€ ๊ฐ™์€ ์†Œํ”„ํŠธ ์†Œ์žฌ๋ฅผ ์ด์šฉํ•˜์—ฌ ๊ด‘ํ•™์ ์ธ ๊ธฐ๋Šฅ์„ ์šฉ์ดํ•˜๊ฒŒ ์กฐ์ ˆํ•  ์ˆ˜ ์žˆ์–ด์•ผ ํ•œ๋‹ค. ์ด์™€ ๊ฐ™์€ ๋™๊ธฐ๋ฅผ ๋ฐ”ํƒ•์œผ๋กœ ๋ณธ ํ•™์œ„ ๋…ผ๋ฌธ์—์„œ๋Š” ๋””์Šคํ”Œ๋ ˆ์ด ๋ฐ ์ด๋ฏธ์ง• ์‹œ์Šคํ…œ์œผ๋กœ์˜ ์‘์šฉ์„ ์œ„ํ•œ 3D ํ”„๋ฆฐํŒ… ๊ธฐ๋ฐ˜ ๋งž์ถคํ˜• ๊ด‘ํ•™ ์š”์†Œ์˜ ๊ฐœ๋ฐœ์— ๋Œ€ํ•œ ๋‚ด์šฉ์„ ๋ณด๊ณ ํ•œ๋‹ค. 3D ํ”„๋ฆฐํŒ… ๊ธฐ๋ฐ˜ ๊ด‘ํ•™ ์š”์†Œ๋ฅผ ๋งคํฌ๋กœ ์Šค์ผ€์ผ, ๋งˆ์ดํฌ๋กœ ์Šค์ผ€์ผ ๊ทธ๋ฆฌ๊ณ  ๋งคํฌ๋กœ ๋ฐ ๋งˆ์ดํฌ๋กœ ์Šค์ผ€์ผ์ด ํ˜ผํ•ฉ๋œ ๊ณ„์ธต์  ๊ตฌ์กฐ ๋“ฑ ์„ธ ๊ฐ€์ง€ ์œ ํ˜•์œผ๋กœ ๋ถ„๋ฅ˜ํ•˜๊ณ  ๊ฐ๊ฐ์— ๋Œ€ํ•œ ์‘์šฉ ๋ถ„์•ผ๋ฅผ ์ œ์‹œํ•œ๋‹ค. ๋งคํฌ๋กœ ์Šค์ผ€์ผ์˜ ๊ด‘ํ•™ ์š”์†Œ๋กœ๋Š” ๊ฐ€์žฅ ๊ธฐ๋ณธ์ ์ธ ์š”์†Œ์ธ ๋ Œ์ฆˆ์™€ ๊ฑฐ์šธ์„ ์„ ํƒํ•œ๋‹ค. ๋ Œ์ฆˆ๋Š” ๊ณต์••์‹ ๋””์ŠคํŽœ์‹ฑ ๋ฐฉ๋ฒ•์„ ์ด์šฉํ•˜์—ฌ ์‹ค๋ฆฐ๋“œ๋ฆฌ์ปฌ ์Œ ํ˜•ํƒœ๋กœ ์ œ์ž‘๋˜์—ˆ์œผ๋ฉฐ, ์‹ฌ๋ฆฌ์Šค ๋ชจ๋“ˆ๋Ÿฌ ํ‰ํŒ์‹ ๋””์Šคํ”Œ๋ ˆ์ด์˜ ๊ตฌํ˜„์„ ์œ„ํ•ด ์ ์šฉ๋œ๋‹ค. ๋˜ํ•œ ์šฉ์œต ์ ์ธต ๋ฐฉ์‹์˜ 3D ํ”„๋ฆฐํŒ…์œผ๋กœ ๋งŒ๋“ค์–ด์ง„ ๋ชฐ๋“œ๋ฅผ ์ด์šฉํ•˜์—ฌ ๊ฑฐ์šธ์„ ์ œ์ž‘ํ•˜๊ณ , ์ด๋ฅผ ์ด์šฉํ•˜์—ฌ ์‹ฌ๋ฆฌ์Šค ๋ชจ๋“ˆ๋Ÿฌ ์ปค๋ธŒ๋“œ ์—ฃ์ง€ ๋””์Šคํ”Œ๋ ˆ์ด๋ฅผ ๊ตฌํ˜„ํ•œ๋‹ค. ์ด์™€ ๊ฐ™์ด ๋ชจ๋“ˆ๋Ÿฌ ๋””์Šคํ”Œ๋ ˆ์ด์˜ ์ด์Œ์ƒˆ ๋ถ€๋ถ„์— 3D ํ”„๋ฆฐํŒ…์œผ๋กœ ์ œ์ž‘๋œ ๋ Œ์ฆˆ ๋˜๋Š” ๊ฑฐ์šธ์„ ๋ถ€์ฐฉํ•˜๋Š” ๋ฐฉ์‹์œผ๋กœ ํ™”๋ฉด์„ ์‹ฌ๋ฆฌ์Šค๋กœ ํ™•์žฅํ•˜๋Š” ๊ธฐ์ˆ ์„ ์ œ์‹œํ•˜๊ณ , ๋‹ค์–‘ํ•œ ํ˜•ํƒœ์˜ ๋””์Šคํ”Œ๋ ˆ์ด์— ์ ์šฉํ•  ์ˆ˜ ์žˆ๋Š” ๊ฐ€๋Šฅ์„ฑ์„ ๋ณด์—ฌ์ค€๋‹ค. ๋งˆ์ดํฌ๋กœ ์Šค์ผ€์ผ์˜ ๊ด‘ํ•™ ์š”์†Œ๋กœ๋Š” ๋ฐœ๊ด‘ ๋‹ค์ด์˜ค๋“œ์—์„œ ์ƒ‰ ๋ณ€ํ™˜๊ณผ ๊ด‘ ์ถ”์ถœ ๊ธฐ๋Šฅ์„ ๋™์‹œ์— ๋‚˜ํƒ€๋‚ด๋Š” ์ƒ‰ ๋ณ€ํ™˜ ๋งˆ์ดํฌ๋กœ ๋ Œ์ฆˆ๋ฅผ ์„ ํƒํ•œ๋‹ค. ์–‘์ž ์ /๊ด‘ ๊ฒฝํ™”์„ฑ ๊ณ ๋ถ„์ž ๋ณตํ•ฉ์ฒด์˜ ์ „๊ธฐ์ˆ˜๋ ฅํ•™์  ํ”„๋ฆฐํŒ…์„ ํ†ตํ•ด ์–‘์ž ์ ์ด ๋‚ด์žฅ๋œ ๋‹ค์–‘ํ•œ ํ˜•ํƒœ์˜ ์ƒ‰ ๋ณ€ํ™˜ ๋งˆ์ดํฌ๋กœ ๋ Œ์ฆˆ๋ฅผ ์ œ์ž‘ํ•˜๋ฉฐ, ์ด๋ฅผ ์ฒญ์ƒ‰ ๋งˆ์ดํฌ๋กœ ๋ฐœ๊ด‘ ๋‹ค์ด์˜ค๋“œ ์–ด๋ ˆ์ด์˜ ๋ฐœ๊ด‘๋ถ€ ์ƒ์— ์ ์šฉํ•˜์—ฌ ํ’€ ์ปฌ๋Ÿฌ ๋งˆ์ดํฌ๋กœ ๋ฐœ๊ด‘ ๋‹ค์ด์˜ค๋“œ ๋””์Šคํ”Œ๋ ˆ์ด๋กœ์˜ ์‘์šฉ ๊ฐ€๋Šฅ์„ฑ์„ ์ œ์‹œํ•œ๋‹ค. ๋งˆ์ง€๋ง‰์œผ๋กœ ๋งคํฌ๋กœ ๋ฐ ๋งˆ์ดํฌ๋กœ ์Šค์ผ€์ผ์ด ํ˜ผํ•ฉ๋œ ๊ณ„์ธต์  ๊ตฌ์กฐ์˜ ๊ด‘ํ•™ ์š”์†Œ๋กœ์„œ ๋””์ŠคํŽœ์‹ฑ ๋ฐ ๊ฑด์‹ ๋Ÿฌ๋น™ ๊ณผ์ •์˜ ์กฐํ•ฉ์œผ๋กœ ์ œ์ž‘๋œ ๊ฒน๋ˆˆ ํ˜•ํƒœ๋ฅผ ๋ชจ์‚ฌํ•œ ๋ Œ์ฆˆ ๊ตฌ์กฐ๋ฅผ ์ œ์‹œํ•œ๋‹ค. ๋ฐ˜๊ตฌ ํ˜•ํƒœ์˜ ๋งคํฌ๋กœ ๋ Œ์ฆˆ๋ฅผ ๋””์ŠคํŽœ์‹ฑ์œผ๋กœ ํ˜•์„ฑํ•˜๊ณ , ๋งคํฌ๋กœ ๋ Œ์ฆˆ์˜ ๊ณก๋ฉด ์ƒ์— ๋‹จ์ธต์˜ ๋งˆ์ดํฌ๋กœ ์ž…์ž์˜ ๋ฐฐ์—ด์„ ์–ป๊ธฐ ์œ„ํ•ด ๊ฑด์‹ ๋Ÿฌ๋น™ ๊ณต์ •์„ ์ง„ํ–‰ํ•œ๋‹ค. ์ด๋Ÿฌํ•œ ๋ฐฉ์‹์œผ๋กœ ํ˜•์„ฑ๋œ ๊ณ„์ธต์  ๊ตฌ์กฐ๊ฐ€ ์†Œํ”„ํŠธํ•œ ์†Œ์žฌ๋กœ ๋ณต์ œ๋˜์–ด์„œ ์‹ ์ถ•์„ฑ์„ ๊ฐ€์ง€๋Š” ๊ฒน๋ˆˆ ํ˜•ํƒœ ๋ชจ์‚ฌ ๊ตฌ์กฐ๊ฐ€ ์™„์„ฑ๋œ๋‹ค. ๋งˆ์ดํฌ๋กœ ๋ Œ์ฆˆ ์–ด๋ ˆ์ด๋Š” ๋งคํฌ๋กœ ๋ Œ์ฆˆ์˜ ํ‘œ๋ฉด์„ ๋”ฐ๋ผ ํ˜•์„ฑ๋˜๊ณ  ๋ฆฌ์ง€๋“œ ์•„์ผ๋žœ๋“œ๋กœ ์—ญํ• ์„ ํ•˜์—ฌ, ์ „์ฒด ๊ณ„์ธต์  ๊ตฌ์กฐ์— ๊ธฐ๊ณ„์  ๋ณ€ํ˜•์ด ๊ฐ€ํ•ด์ ธ ๋งคํฌ๋กœ ๋ Œ์ฆˆ์˜ ๋ชจ์–‘์ด ๋ณ€ํ˜•๋˜์–ด๋„ ๋งˆ์ดํฌ๋กœ ๋ Œ์ฆˆ๋Š” ํ˜•์ƒ๊ณผ ํ•ด์ƒ๋„, ์ดˆ์  ๊ฑฐ๋ฆฌ ๋“ฑ์˜ ๊ด‘ํ•™์  ํŠน์„ฑ์„ ์œ ์ง€ํ•  ์ˆ˜ ์žˆ๋‹ค. ๋ณธ ํ•™์œ„ ๋…ผ๋ฌธ์€ 3D ํ”„๋ฆฐํŒ…์„ ์ด์šฉํ•˜์—ฌ ๋‹ค์–‘ํ•œ ํ˜•ํƒœ์™€ ์Šค์ผ€์ผ์˜ ๊ด‘ํ•™ ์š”์†Œ๋ฅผ ์ œ์ž‘ํ•˜๊ณ  ๋””์Šคํ”Œ๋ ˆ์ด ๋ฐ ์ด๋ฏธ์ง• ์‹œ์Šคํ…œ์œผ๋กœ์˜ ์—ฌ๋Ÿฌ ์‘์šฉ์„ ๋ณด์—ฌ์คŒ์œผ๋กœ์„œ ์•ž์œผ๋กœ์˜ ์ƒˆ๋กœ์šด ์—ฐ๊ตฌ ๋ฐ ๊ฐœ๋ฐœ ๋ฐฉํ–ฅ์„ฑ์„ ์ œ์‹œํ•˜๋Š” ๊ฒƒ์„ ์ฃผ์š” ๋ชฉ์ ์œผ๋กœ ํ•œ๋‹ค. 3D ํ”„๋ฆฐํŒ… ์„ค๋น„์˜ ๋‹จ๊ฐ€๊ฐ€ ๋‚ฎ์•„์ง€๊ณ  ์ •๋ฐ€๋„ ๋ฐ ํ•ด์ƒ๋„๊ฐ€ ๋†’์•„์ง€๋Š” ์ถ”์„ธ์— ๋”ฐ๋ผ, ๊ด‘ํ•™ ์š”์†Œ๋ฅผ ์‰ฝ๊ฒŒ ๋งŒ๋“ค๊ณ  ์‘์šฉํ•  ์ˆ˜ ์žˆ๋Š” ๋งž์ถคํ˜• ๊ด‘ํ•™ ๋˜๋Š” ์Šค์Šค๋กœ ๊ตฌํ˜„ํ•˜๋Š” ๊ด‘ํ•™ ๋ถ„์•ผ๊ฐ€ ๋ณ€ํ˜• ๊ฐ€๋Šฅํ•˜๊ณ  ๋ฉ€ํ‹ฐ ์Šค์ผ€์ผ์˜ ๊ด‘ํ•™๊ณ„๋กœ ์ ์ฐจ ํ™•๋Œ€๋  ๊ฒƒ์œผ๋กœ ์˜ˆ์ƒ๋œ๋‹ค. ๊ถ๊ทน์ ์œผ๋กœ๋Š” ์ฐจ์„ธ๋Œ€ ๋””์Šคํ”Œ๋ ˆ์ด ๋ฐ ์ด๋ฏธ์ง• ์‹œ์Šคํ…œ์— ํ•„์š”ํ•œ ๊ด‘ํ•™ ์š”์†Œ๋ฅผ ์œ„ํ•œ ๊ธฐ์ˆ ์˜ ์ €๋ณ€์„ ๋„“ํžˆ๊ณ , ์ด๋ฅผ ์‚ฐ์—… ์ „๋ฐ˜์— ์‘์šฉํ•  ์ˆ˜ ์žˆ๋Š” ๊ธฐ๋ฐ˜์„ ๋งˆ๋ จํ•˜๊ณ ์ž ํ•œ๋‹ค.Generally, the manufacturing process is divided into the subtractive (top-down) type and additive type (bottom-up). Among them, the additive manufacturing process has attracted a lot of attention because it can manufacture products with complex shapes in a low-cost and short-time process. In particular, three-dimensional (3D) printing is a representative method, which has already been commercialized in the field of mechanical components and biomedical organ. However, it remains in the research and development step in the field of electronic devices and optical components. Especially, although 3D printed optical components including microlens and color filter are expected to be widely used in display and imaging systems, it is still under investigation for commercialized products, and there are limitations in terms of materials, length scale, shape, and practical applications of components. Therefore, to overcome these issues, it is required for investigating and expanding the potential usefulness for 3D printed optical components in display and imaging systems to achieve better performance, productivity, and usability in three aspects. First, it should be possible to manufacture structures with a wide range of length scales from micrometer to centimeter through various 3D printing methods. Second, complex shapes such as free-from curved surfaces and hierarchical structures should be easily fabricated. Third, it is necessary to add functionality by manufacturing structures in which tunable functions are introduced using soft materials like an elastomer. Based on the above motivations, 3D printing-based customized optical components for display and imaging system applications are introduced in this dissertation. 3D printed optical components are classified into three types and their applications are showed to verify the scalability of 3D printing: macro-scale, microscale, and hierarchical macro/micro-scale. As macro-scale printed optical components, lens and mirror which are the most basic optical components are selected. The lens is fabricated by a pneumatic-type dispensing method with the form of a cylindrical pair and adopted for demonstration of seamless modular flat panel display. Besides, a seamless modular curved-edge display is also demonstrated with a mirror, which is fabricated from fused deposition modeling (FDM)-type 3D printed mold. By simply attaching a printed lens or mirror onto the seam of the modular display, it is possible to secure seamless screen expansion technology with the various form factor of the display panel. In the case of micro-scale printed optical components, the color-convertible microlens is chosen, which act as a color converter and light extractor simultaneously in a light-emitting diode (LED). By electrohydrodynamic (EHD) printing of quantum dot (QD)/photocurable polymer composite, QD-embedded hemispherical lens shape structures with various sizes are fabricated by adjusting printing conditions. Furthermore, it is applied to a blue micro-LED array for full-color micro-LED display applications. Finally, a tunable bio-inspired compound (BIC) eyes structure with a combination of dispensing and a dry-phase rubbing process is suggested as a hierarchical macro/micro-scale printed optical components. A hemispherical macrolens is formed by the dispensing method, followed by a dry-phase rubbing process for arranging micro particles in monolayer onto the curved surface of the macrolens. This hierarchical structure is replicated in soft materials, which have intrinsic stretchability. Microlens array is formed on the surface of the macrolens and acts as a rigid island, thereby maintaining lens shape, resolution, and focal length even though the mechanical strain is applied to overall hierarchical structures and the shape of the macrolens is changed. The primary purposes of this dissertation are to introduce new concepts of the enabling technologies for 3D printed optical components and to shed new light on them. Optical components can be easily made as 3D printing equipment becomes cheaper and more precise, so the field of Consumer optics or Do it yourself (DIY) optics will be gradually expanded on deformable and multi-scale optics. It is expected that this dissertation can contribute to providing a guideline for utilizing and customizing 3D printed optical components in next-generation display and imaging system applications.Chapter 1. Introduction 1 1.1. Manufacturing Process 1 1.2. Additive Manufacturing 4 1.3. Printed Optical Components 8 1.4. Motivation and Organization of Dissertation 11 Chapter 2. Macro-scale Printed Optical Components 15 2.1. Introduction 15 2.2. Seamless Modular Flat Display with Printed Lens 20 2.2.1. Main Concept 20 2.2.2. Experimental Section 23 2.2.3. Results and Discussion 26 2.3. Seamless Modular Curved-edge Display with Printed Mirror 32 2.3.1. Main Concept 32 2.3.2. Experimental Section 33 2.3.3. Results and Discussion 36 2.4. Conclusion 46 Chapter 3. Micro-scale Printed Optical Components 47 3.1. Introduction 47 3.2. Full-color Micro-LED Array with Printed Color-convertible Microlens 52 3.2.1. Main Concept 52 3.2.2. Experimental Section 54 3.2.3. Results and Discussion 57 3.3. Conclusion 65 Chapter 4. Hierarchical Macro/Micro-scale Printed Optical Components 66 4.1. Introduction 66 4.2. Tunable Bio-inspired Compound Eye with Printing and Dry-phase Rubbing Process 69 4.2.1. Main Concept 69 4.2.2. Experimental Section 71 4.2.3. Results and Discussion 73 4.3. Conclusion 79 Chapter 5. Conclusion 80 5.1. Summary 80 5.2. Limitations and Suggestions for Future Researches 83 References 88 Abstract in Korean (๊ตญ๋ฌธ ์ดˆ๋ก) 107Docto

    Materials jetting for advanced optoelectronic interconnect: technologies and application

    Get PDF
    This report covers the work carried out on Teaching Company Scheme No. 2275 "Materials Jetting for Advanced Interconnect" between February 1998 and February 2000. The project was conducted at the Harlow laboratories of Nortel Networks with the support of the Department of Manufacturing Engineering of Loughborough University. Technical direction and supervision has been provided by Mr Paul Conway, Reader, at Loughborough University, Professor Ken Snowdon and Mr Chris Tanner of Nortel Networks. The aim of the project was to produce and deposit minute and precise volumes of a range of materials, such as metallic alloys, glasses and polymers, onto a variety of substrates commonly used in the electronics and optoelectronics fields. The technology, which is analogous to ink-jet printing, firstly had to be refined to accommodate higher processing temperatures of up to 350ยฐC. The ultimate project deliverable was to produce a specification for jetting equipment suited towards volume manufacturing. [Continues.

    Bio-Micro-Systems for Diagnostic Applications, Disease Prevention and Creating Tools for Biological Research

    Full text link
    This thesis, divided into two parts, describes the development of 5 novel Bio-Micro-System devices. The term Bio-Micro-System has been used here to describe BioMEMS and 3D printed devices, with the dimensions of key components ranging from micrometers to a millimeter. Part A is focused on โ€˜Medicalโ€™ Micro-System devices that can potentially solve common medical problems. Part B is focused on โ€˜Biologicalโ€™ Micro-System devices/tools for facilitating/enabling biological research. Specifically, Part A describes two implantable, electronics-free intraocular pressure (IOP) microsensors for the medical management of glaucoma: 1) Near Infrared Fluorescence-based Optomechanical (NiFO) technology - Consists of an implantable, pressure sensor that โ€˜optically encodesโ€™ pressure in the near infrared (NIR) regime. A non-implantable, portable and compact optical head is used to excite the sensor and collect the emitted NIR light. The thesis discusses optimized device architecture and microfabrication approaches for best performance commercialization. 2) Displacement based Contrast Imaging (DCI) technology - A proof of concept, fluid pressure sensing scheme is shown to operate over a pressure range of 0โ€“100 mbar (โˆผ2 mbar resolution between 0โ€“20 mbar,โˆผ10 mbar resolution between 20โ€“100 mbar), with a maximum error of <7% throughout its dynamic range. The thesis introduces the DCI technology and discusses its application as an IOP sensor. Moreover, Part A also describes a Touch-activated Sanitizer Dispensing (TSD) system for combating community acquired infections. The TSD can be mounted on any surface that is exposed to high human traffic and consists of an array of human-powered, miniaturized valves that deliver a small amount of disinfectant when touch actuated. The device disinfects the personโ€™s hand that is touching it while being self-sterilized at the same time. The thesis describes the design and implementation of a proof of concept TSD that can disinfect an area equivalent to the size of a thumb. A significant (~ 10 fold) reduction in microbiological load is demonstrated on the fingertip and device surface within the first 24 hours. The size and footprint of the TSD can be scaled up as needed to improve hand hygiene compliance. In Part B, we developed a micro๏ฌ‚uidic chip for immobilizing Drosophila melanogaster larva by creating a cold micro-environment around the larva. After characterizing on chip temperature distribution and larval body movement, results indicate that the method is appropriate for repetitive and reversible, short-term (several minutes) immobilization. The method offers the added advantage of using the same chip to accommodate and immobilize larvae across all developmental stages (1st instar-late 3rd instar). Besides the demonstrated applications of the chip in high resolution observation of sub cellular events such as mitochondrial trafficking in neurons and neuro-synaptic growth, we envision the use of this method in a wide variety of biological imaging studies employing the Drosophila larval system, including cellular development and other studies. Finally, Part B also describes a 3D printed millifluidic device for CO2 immobilization of Caenorhabditis elegans populations. We developed a novel 3D printed device for immobilizing populations of Caenorhabditis elegans by creating a localized CO2 environment while the animals are maintained on the surface of agar. The results indicate that the method is easy to implement, is appropriate for short-term (20 minutes) immobilization and allows recovery within a few minutes. We envision its use in a wide variety of biological studies in Caenorhabditis elegan, including cellular development and neuronal regeneration studies.PHDBiomedical EngineeringUniversity of Michigan, Horace H. Rackham School of Graduate Studieshttps://deepblue.lib.umich.edu/bitstream/2027.42/144050/1/amritarc_1.pd

    Design and development of a microfluidic platform for use with colorimetric gold nanoprobe assays

    Get PDF
    Due to the importance and wide applications of the DNA analysis, there is a need to make genetic analysis more available and more affordable. As such, the aim of this PhD thesis is to optimize a colorimetric DNA biosensor based on gold nanoprobes developed in CEMOP by reducing its price and the needed volume of solution without compromising the device sensitivity and reliability, towards the point of care use. Firstly, the price of the biosensor was decreased by replacing the silicon photodetector by a low cost, solution processed TiO2 photodetector. To further reduce the photodetector price, a novel fabrication method was developed: a cost-effective inkjet printing technology that enabled to increase TiO2 surface area. Secondly, the DNA biosensor was optimized by means of microfluidics that offer advantages of miniaturization, much lower sample/reagents consumption, enhanced system performance and functionality by integrating different components. In the developed microfluidic platform, the optical path length was extended by detecting along the channel and the light was transmitted by optical fibres enabling to guide the light very close to the analysed solution. Microfluidic chip of high aspect ratio (~13), smooth and nearly vertical sidewalls was fabricated in PDMS using a SU-8 mould for patterning. The platform coupled to the gold nanoprobe assay enabled detection of Mycobacterium tuberculosis using 3 8l on DNA solution, i.e. 20 times less than in the previous state-of-the-art. Subsequently, the bio-microfluidic platform was optimized in terms of cost, electrical signal processing and sensitivity to colour variation, yielding 160% improvement of colorimetric AuNPs analysis. Planar microlenses were incorporated to converge light into the sample and then to the output fibre core increasing 6 times the signal-to-losses ratio. The optimized platform enabled detection of single nucleotide polymorphism related with obesity risk (FTO) using target DNA concentration below the limit of detection of the conventionally used microplate reader (i.e. 15 ng/ฮผl) with 10 times lower solution volume (3 ฮผl). The combination of the unique optical properties of gold nanoprobes with microfluidic platform resulted in sensitive and accurate sensor for single nucleotide polymorphism detection operating using small volumes of solutions and without the need for substrate functionalization or sophisticated instrumentation. Simultaneously, to enable on chip reagents mixing, a PDMS micromixer was developed and optimized for the highest efficiency, low pressure drop and short mixing length. The optimized device shows 80% of mixing efficiency at Re = 0.1 in 2.5 mm long mixer with the pressure drop of 6 Pa, satisfying requirements for the application in the microfluidic platform for DNA analysis.Portuguese Science Foundation - (SFRH/BD/44258/2008), โ€œSMART-ECโ€ projec

    Nanoimprint Lithography

    Get PDF
    corecore