MEMS micropump for a Micro Gas Analyzer

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2009.Cataloged from PDF version of thesis.Includes bibliographical references (p. 164-177).This thesis presents a MEMS micro-vacuum pump designed for use in a portable gas analysis system. It is designed to be pneumatically-driven and as such does not have self-contained actuation (the focus of future work). This research was carried out through a series of modeling, design, fabrication, and experimental testing tasks. Non-linear stress modeling tools characterizing the structural deformations of the micropump pistons and tethers, and fluid-flow modeling tools characterizing the vacuum generation and pumping rates were developed. A systematic design procedure based on these tools enabled the design and prediction of different valve and pump layouts to satisfy the stress limitations, and flow and power consumption requirements set forth by the MIT Micro Gas Analyzer project. The micropumps were fabricated using MEMS fabrication techniques, comprised of silicon and pyrex micromachining and bonding. Fabrication challenges, in particular the deep-reactive ion etching (DRIE) of the drive pistons and membrane structures, were overcome, and a completely computer controlled pneumatic testing platform for the rapid characterization of valve and micropump performance at different actuation pressures and frequencies was developed. Valve leakage data for various valve designs was collected and compared with models, and a micropump capable of generating 258Torr of vacuum below atmosphere was demonstrated at 0.75Hz operation. The maximum frequency of operation for these devices was experimentally measured to be just above 2Hz, which was consistent with fluid flow models.(cont.) This thesis presents vacuum generating micropump performance that comparables well with the best published to date, and explores future micropump designs and modeling/testing approaches that could improve overall performance and bring us closer to meeting the specifications set forth by the MGA project. Finally, general guidelines for micropump design and fabrication for any application are also presented.by Vikas Sharma.Ph.D

Magnetohydrodynamics (MHD) Engineering Test Facility (ETF) 200 MWe power plant Conceptual Design Engineering Report (CDER)

The reference conceptual design of the magnetohydrodynamic (MHD) Engineering Test Facility (ETF), a prototype 200 MWe coal-fired electric generating plant designed to demonstrate the commercial feasibility of open cycle MHD, is summarized. Main elements of the design, systems, and plant facilities are illustrated. System design descriptions are included for closed cycle cooling water, industrial gas systems, fuel oil, boiler flue gas, coal management, seed management, slag management, plant industrial waste, fire service water, oxidant supply, MHD power ventilatin

Solar gamma ray monitor for OSO-H (0.3-10 MeV)

A gamma ray experiment to be flown aboard the OSO-7 spacecraft is described along with a history of the development of the experiment, a description of the gamma ray detector and its operation, and a short preliminary review of the scientific information obtained during the instruments' lifetime. The gamma ray detector operated an average of 18 hours a day for approximately 15 months. The majority of the data was collected in the solar and antisolar direction, but data at right angles to the spacecraft-sun line was also accumulated. In all, at least two full scans of the celestial sphere were completed

Lunar Module/Abort Guidance System /LM/AGS/ design survey. NASA/ERC design criteria program, guidance and control

Abort guidance system for Apollo lunar modul

NASA Tech Briefs, Spring 1977

Topics: NASA TU Services: Technology Utilization services that can assist you in learning about and applying NASA technology; New Product Ideas: A summary of sel~ted innovations of value to manufacturers for the development of new products; Electronic Components and Circuits; Electronic Systems; Physical Sciences; Materials; Life Sciences; Mechanics; Machinery; Fabrication Technology; Mathematics and Information Sciences

Voyager capsule, preliminary design, phase B. Volume III - Surface laboratory system. Section I - Surface laboratory Final report

Surface Laboratory preliminary configuration for Voyager mission - space capsul

The design and development of a 64-Bit Linux based single board computer specifically for visible light positioning

Thesis (MEng)--Stellenbosch University, 2022.ENGLISH SUMMARY: The University of Stellenbosch and Katholieke Universiteit Leuven currently utilise freely available single board computers (SBC) for teaching and research purposes, but updates in future hardware iterations may render current software incompatible. A custom SBC is designed specifically for the needs of both institutions. This SBC is based on the NXP i.MX8MQ ARM processor. The processor has 4 high performance ARM Cortex-A53 cores and 1 high efficiency ARM Cortex-M4F core. This work successfully implements the i.MX8MQ processor alongside 2GB of LPDDR4 memory and SD card storage. This SBC has an analogue to digital converter (ADC), 2 46-pin expansion connectors, 100Mbps Ethernet, HDMI, 2 USB 3.0 and a UART-to-USB serial debug port. The power system of this SBC provides 16 voltage rails and is capable of delivering up to 50W . This design is implemented on a 6-layer 86.36mm x 55.88mm printed circuit board (PCB). The PCB has 4mi l/4mi l minimum width and spacing and 0.2mm via holes. The layer stackup of the PCB is custom designed to meet required impedance-, crosstalk- and timing constraints. The stackup has 4 signal layers, 1 power layer and 1 ground layer. The PCB is manufactured and sub-assembled in China and completed at the University of Stellenbosch. Debugging is performed and the design is deemed to function well. A custom Linux image is compiled, loaded and found to function reliably.AFRIKAANSE OPSMMING: Die Universiteit van Stellenbosch en Katholieke Universiteit Leuven gebruik tans kommersiële enkelbordrekenaars vir onderrig- en navorsingsdoeleindes, maar toekomstige opdateering van hardeware kan bestaande sagteware onbruikbaar maak. ’n Doelgemaakte enkelbordrekenaar is spesifiek ontwerp vir die behoeftes van beide instansies. Hierdie enkelbordrekenaar is gebaseer op die NXP i.MX8MQ ARM verwerker. Die verwerker het 4 hoë krag ARM Cortex-A53 kerne en 1 hoë effektiwiteit ARM Cortex-M4F kern. Die navorsingsprojek implementeer die i.MX8MQ verwerker suksesvol tesame met 2GB LPDDR4 geheue en SD kaartberging. Hierdie enkelbordrekenaar het ’n analoog na digitaal omsetter, 2 46-pen uitbreidingsverbindings, 100Mbps Ethernet, HDMI, 2 USB 3.0 en ’n UART-na-USB ontfoutingspoort. Die kragstelsel van hierdie enkelbordrekenaar lewer 16 spanningsvlakke en is in staat om tot en met 50W te verskaf. Die ontwerp is geïmplementeer op ’n 6-laag 86.36mm x 55.88mm etsbord. Die etsbord het 4mi l/4mi l minimum wydte en spasiëring en 0.2mm via gate. Die laagstapel van die etsbord is spesiaal ontwerp om aan die vereiste impedansie-, kruiskoppeling- en tydsbeperkings te voldoen. Die laagstapel het 4 seinlae, 1 kraglaag en 1 grondlaag. Die etsbord is in Sjina vervaardig en gedeeltelik aanmekaar gesit en dan by die Universiteit van Stellenbosch voltooi. Ontfouting is gedoen en daar is gevind dat die ontwerp goed funksioneer. ’n Doelgemaakte Linux bedryfstelsel is gebou, gelaai en gevind om betroubaar werk.Master

NASA Tech Briefs, Fall 1976

Topics include: NASA TU Services: Technology Utilization services that can assist you in learning about and applying NASA technology; New Product Ideas: A summary of seloc.ted Innovations of value to manufacturers for the development of new products; Electronic Components and Circuits; Electronic Systems; Physical Sciences; Materials; Life Sciences; Mechanics; Machinery; Fabrication Technology; Mathematics and Information Sciences

NASA Tech Briefs, September/October 1986

Topics include: NASA TU Services; New Product Ideas; Electronic Components and Circuits; Electronic Systems; Physical Sciences; Materials; Computer Programs; Mechanics; Fabrication Technology; Machinery; Mathematics and Information Sciences; Life Sciences