Steep-slope Hysteresis-free Negative Capacitance MoS2 Transistors

The so-called Boltzmann Tyranny defines the fundamental thermionic limit of the subthreshold slope (SS) of a metal-oxide-semiconductor field-effect transistor (MOSFET) at 60 mV/dec at room temperature and, therefore, precludes the lowering of the supply voltage and the overall power consumption. Adding a ferroelectric negative capacitor to the gate stack of a MOSFET may offer a promising solution to bypassing this fundamental barrier. Meanwhile, two-dimensional (2D) semiconductors, such as atomically thin transition metal dichalcogenides (TMDs) due to their low dielectric constant, and ease of integration in a junctionless transistor topology, offer enhanced electrostatic control of the channel. Here, we combine these two advantages and demonstrate for the first time a molybdenum disulfide (MoS2) 2D steep slope transistor with a ferroelectric hafnium zirconium oxide layer (HZO) in the gate dielectric stack. This device exhibits excellent performance in both on- and off-states, with maximum drain current of 510 {\mu}A/{\mu}m, sub-thermionic subthreshold slope and is essentially hysteresis-free. Negative differential resistance (NDR) was observed at room temperature in the MoS2 negative capacitance field-effect-transistors (NC-FETs) as the result of negative capacitance due to the negative drain-induced-barrier-lowering (DIBL). High on-current induced self-heating effect was also observed and studied.Comment: 23 pages, 14 figure

Dielectric relaxation and Charge trapping characteristics study in Germanium based MOS devices with HfO2 /Dy2O3 gate stacks

In the present work we investigate the dielectric relaxation effects and charge trapping characteristics of HfO2 /Dy2O3 gate stacks grown on Ge substrates. The MOS devices have been subjected to constant voltage stress (CVS) conditions at accumulation and show relaxation effects in the whole range of applied stress voltages. Applied voltage polarities as well as thickness dependence of the relaxation effects have been investigated. Charge trapping is negligible at low stress fields while at higher fields (>4MV/cm) it becomes significant. In addition, we give experimental evidence that in tandem with the dielectric relaxation effect another mechanism- the so-called Maxwell-Wagner instability- is present and affects the transient current during the application of a CVS pulse. This instability is also found to be field dependent thus resulting in a trapped charge which is negative at low stress fields but changes to positive at higher fields.Comment: 27pages, 10 figures, 3 tables, regular journal contribution (accepted in IEEE TED, Vol.50, issue 10

Degradation characteristics of metal/Al2O3/n-InGaAs capacitors

Implementation of new materials in Metal-Oxide-Semiconductor stacks requires capabilities to predict long-time degradation as well as the impact of process changes on degradation processes. In this work, the degradation under constant voltage stress of metal gate/Al2O3/InGaAs stacks is studied for different pre-dielectric deposition treatments. The results show that the degradation, particularly under negative bias, is strongly affected by the oxide-semiconductor surface treatment of the samples. Two contributions (interface states and bulk traps) dominate depending on the stress conditions. Surface treatment with NH4OH shows a better quality of the interface in term of interface states; however, it contributes to generation of positive charge on the dielectric layer.Fil: Palumbo, Félix Roberto Mario. Technion - Israel Institute of Technology; Israel. Consejo Nacional de Investigaciones Científicas y Técnicas; ArgentinaFil: Inbar, Moshe. Technion - Israel Institute of Technology; Israel. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentin

Physics of thin-film ferroelectric oxides

This review covers the important advances in recent years in the physics of thin film ferroelectric oxides, the strongest emphasis being on those aspects particular to ferroelectrics in thin film form. We introduce the current state of development in the application of ferroelectric thin films for electronic devices and discuss the physics relevant for the performance and failure of these devices. Following this we cover the enormous progress that has been made in the first principles computational approach to understanding ferroelectrics. We then discuss in detail the important role that strain plays in determining the properties of epitaxial thin ferroelectric films. Finally, we look at the emerging possibilities for nanoscale ferroelectrics, with particular emphasis on ferroelectrics in non conventional nanoscale geometries.Comment: This is an invited review for Reviews of Modern Physics. We welcome feedback and will endeavour to incorporate comments received promptly into the final versio

Gate Stack Dielectric Degradation of Rare-Earth Oxides Grown on High Mobility Ge Substrates

We report on the dielectric degradation of Rare-Earth Oxides (REOs), when used as interfacial buffer layers together with HfO2 high-k films (REOs/HfO2) on high mobility Ge substrates. Metal-Oxide-Semiconductor (MOS) devices with these stacks,show dissimilar charge trapping phenomena under varying levels of Constant- Voltage-Stress (CVS) conditions, which also influences the measured densities of the interface (Nit) and border (NBT) traps. In the present study we also report on C-Vg hysteresis curves related to Nit and NBT. We also propose a new model based on Maxwell-Wagner instabilities mechanism that explains the dielectric degradations (current decay transient behavior) of the gate stack devices grown on high mobility substrates under CVS bias from low to higher fields, and which is unlike to those used for other MOS devices. Finally, the time dependent degradation of the corresponding devices revealed an initial current decay due to relaxation, followed by charge trapping and generation of stress-induced leakage which eventually lead to hard breakdown after long CVS stressing.Comment: 19pages (double space), 7 figures, original research article, Submitted to JAP (AIP

Aatomkihtsadestatud tsirkooniumipõhiste nanolaminaatide ja segukilede magnetilised, elektrilised ja struktuursed omadused

Väitekirja elektrooniline versioon ei sisalda publikatsiooneDoktoritöös kasutati aatomkihtsadestamise meetodit, eesmärgiga valmistada multiferroidne nanoskaalas kile, ehk paarikümne nanomeetri paksune materjalikiht. Multiferroid on selline materjal, mis on üheaegselt nii ferromagnetiline kui ka ferroelektriline, st polariseerub nii välises magnet- kui ka elektriväljas ning on võimeline mõlemat polarisatsiooni säilitama ka välise välja eemaldamisel. Sellist materjali oleks võimalik kasutada uue põlvkonna nanoelektroonikas, näiteks mäluseadmete valmistamiseks. Aatomkihtsadestamise meetod valiti, kuna see on ennast tõestanud, kui üks sobivamaid viise üliõhukeste tahkiskihtide valmistamiseks ühtlase paksuse ja koostisega üle suure pinna. Kirjandusallikate põhjal oli teada, et materjali valmistamine, mis oleks üheaegselt nii ferromagnetiline kui ka ferroelektriline, ei ole lihtne ülesanne. Nimetatud nähtusi on tuvastatud ühe materjali samas faasis ainult ülimadalatel temperatuuridel ja/või suurtes materjalitükkides. Autorile teadaolevalt ei ole multiferroidi suudetud valmistada õhukese materjalikihina ning toimivana ka toatemperatuuril või kõrgemal. Mõlemad nimetatud tingimused on kindlasti tarvilikud, et rääkida võimalikest praktilistest rakendustest. Erinevates ZrO2 sisaldavates kiledes demonstreeriti osa kilede puhul ferromagnetilist hüstereesi ning osa käitus elektriväljas ferroelektrikule sarnaselt. Ühel juhul tuvastati ferromagnetiline ja ferroelektriline polariseeritavus samas kilenäidises. Järeldati, et kuigi traditsioonilisest ferromagnetismist rääkimiseks ei ole nanoskaalas metalloksiidkilede puhul põhjust, siis teatud juhtudel võivad siiski defektid, nagu näiteks hapnikuvakantsid, materjali ferromagnetilist käitumist põhjustada. Kuigi defektid raskendavad ferroelektrilise polarisatsiooni mõõtmist, võib leida nö. tasakaalupunkti piisava hulga defektide vahel, et saavutada ferromagnetiline polarisatsioon ja piisavalt vähese hulga defektide vahel, et ferroelektriline efekt ei jää veel täielikult piirpindadel tekkiva lekkevoolust tingitud polarisatsiooni varju. Autori arvates tuvastati selline olukord, kui defektirohke ferromagnetiline ZrO2 segati vähem defektse materjaliga HfO2, mille puhul võis kirjandusele toetudes oodata ferroelektrilisust.The main goal was to fabricate a multiferroic nanoscale film using atomic layer deposition. Multiferroic is a material that is both ferromagnetic and ferroelectric, that is, polarizes in both magnetic and electric fields, and retains that polarization after removing the external field. Such a material could be used in novel nanoelectronics applications, such as memory devices or sensors. Atomic layer deposition was chosen to fabricate the films, because this is the method actually used in modern nanoelectronics to deposit ultrathin films, and the only method which can provide conformal films over a large substrate area and at the same time provide thickness control at the nanometer level. It was known beforehand, from literature, that a material possessing ferromagnetic and ferroelectric behavior in the same sample in the same phase will be a difficult task. This phenomenon has been observed in bulk materials and/or very low temperatures, but not in thin films and at room temperature, which are both necessary, if one wishes to consider an actual nanoelectronics application. In various ZrO2-based thin films, it was shown that some films showed ferromagnetic hysteresis and some exhibited behavior resembling ferroelectric response. In one case, ferromagnetic and ferroelectric behavior were observed in the same material sample. It was concluded that although one cannot speak of ferromagnetism in the traditional sense, when thin metal oxide films are studied, but in certain cases, ferromagnetism may still arise from the defects of a material, such as oxygen vacancies. Although these defects make the detection of ferroelectricity harder, a reasonable trade-off can be found between enough defects to induce ferromagnetism and not so much to overwhelm the signs of ferroelectricity completely. The author believes such as case was found, when a defective material, which was found ferromagnetic in all cases, namely ZrO2, was mixed with a less defective material, HfO2, known already in literature to be ferroelectric in some cases.https://www.ester.ee/record=b536107