Monolithic integration of Giant Magnetoresistance (GMR) devices onto standard processed CMOS dies

Giant Magnetoresistance (GMR) based technology is nowadays the preferred option for low magnetic fields sensing in disciplines such as biotechnology or microelectronics. Their compatibility with standard CMOS processes is currently investigated as a key point for the development of novel applications, requiring compact electronic readout. In this paper, such compatibility has been experimentally studied with two particular non-dedicated CMOS standards: 0.35 μm from AMS (Austria MicroSystems) and 2.5 μm from CNM (Centre Nacional de Microelectrònica, Barcelona) as representative examples. GMR test devices have been designed and fabricated onto processed chips from both technologies. In order to evaluate so obtained devices, an extended characterization has been carried out including DC magnetic measurements and noise analysis. Moreover, a 2D-FEM (Finite Element Method) model, including the dependence of the GMR device resistance with the magnetic field, has been also developed and simulated. Its potential use as electric current sensors at the integrated circuit level has also been demonstrated

Magnetic Field Sensors Based on Giant Magnetoresistance (GMR) Technology: Applications in Electrical Current Sensing

The 2007 Nobel Prize in Physics can be understood as a global recognition to the rapid development of the Giant Magnetoresistance (GMR), from both the physics and engineering points of view. Behind the utilization of GMR structures as read heads for massive storage magnetic hard disks, important applications as solid state magnetic sensors have emerged. Low cost, compatibility with standard CMOS technologies and high sensitivity are common advantages of these sensors. This way, they have been successfully applied in a lot different environments. In this work, we are trying to collect the Spanish contributions to the progress of the research related to the GMR based sensors covering, among other subjects, the applications, the sensor design, the modelling and the electronic interfaces, focusing on electrical current sensing applications

Magnetoresistive sensors based on the elasticity of domain walls

Magnetic sensors based on the magnetoresistance effects have a promising application prospect due to their excellent sensitivity and advantages in terms of the integration. However, competition between higher sensitivity and larger measuring range remains a problem. Here, we propose a novel mechanism for the design of magnetoresistive sensors: probing the perpendicular field by detecting the expansion of the elastic magnetic Domain Wall (DW) in the free layer of a spin valve or a magnetic tunnel junction. Performances of devices based on this mechanism, such as the sensitivity and the measuring range can be tuned by manipulating the geometry of the device, without changing the intrinsic properties of the material, thus promising a higher integration level and a better performance. The mechanism is theoretically explained based on the experimental results. Two examples are proposed and their functionality and performances are verified via micromagnetic simulation.Comment: 4 figures, 13 page

Integration of GMR sensors with different technologies

Less than thirty years after the giant magnetoresistance (GMR) effect was described, GMR sensors are the preferred choice in many applications demanding the measurement of low magnetic fields in small volumes. This rapid deployment from theoretical basis to market and state-of-the-art applications can be explained by the combination of excellent inherent properties with the feasibility of fabrication, allowing the real integration with many other standard technologies. In this paper, we present a review focusing on how this capability of integration has allowed the improvement of the inherent capabilities and, therefore, the range of application of GMR sensors. After briefly describing the phenomenological basis, we deal on the benefits of low temperature deposition techniques regarding the integration of GMR sensors with flexible (plastic) substrates and pre-processed CMOS chips. In this way, the limit of detection can be improved by means of bettering the sensitivity or reducing the noise. We also report on novel fields of application of GMR sensors by the recapitulation of a number of cases of success of their integration with different heterogeneous complementary elements. We finally describe three fully functional systems, two of them in the bio-technology world, as the proof of how the integrability has been instrumental in the meteoric development of GMR sensors and their applications.Peer ReviewedPostprint (published version

Giant Magnetoresistance Sensors Based on Ferrite Material and Its Applications

In recent decades, new magnetic sensors based on giant magnetoresistance (GMR) have been studied and developed intensively. GMR materials have great potential for next-generation magnetic field sensing devices. The GMR material has many attractive features, for example, its electric and magnetic properties can be varied in a very wide range, low power consumption, and small size. Therefore, GMR material has been developed into various applications of sensor based on magnetic field sensings, such as magnetic field sensor, a current sensor, linear and rotary position sensor, data storage, head recording, nonvolatile magnetic random access memory, and biosensor. In this chapter, the recent development of a GMR thin-film–based ferrite material will be reviewed. Furthermore, recent and future trend application of GMR sensor will be discussed

Recent Developments of Magnetoresistive Sensors for Industrial Applications

The research and development in the field of magnetoresistive sensors has played an important role in the last few decades. Here, the authors give an introduction to the fundamentals of the anisotropic magnetoresistive (AMR) and the giant magnetoresistive (GMR) effect as well as an overview of various types of sensors in industrial applications. In addition, the authors present their recent work in this field, ranging from sensor systems fabricated on traditional substrate materials like silicon (Si), over new fabrication techniques for magnetoresistive sensors on flexible substrates for special applications, e.g., a flexible write head for component integrated data storage, micro-stamping of sensors on arbitrary surfaces or three dimensional sensing under extreme conditions (restricted mounting space in motor air gap, high temperatures during geothermal drilling).DFG/CRC/653German Federal Ministry of Education and Researc

Magnetosensitive e-skins for interactive electronics

The rapid progress of electronics and computer science in the last years has brought humans and machines closer than ever before. Current trends like the Internet of Things and artificial intelligence are closing the gap even further, by providing ubiquitous data processing and sensing. As this ongoing revolution advances, novel forms of human-machine interactions are required in an ever more connected world. A crucial component to enable these interactions is the field of flexible electronics, which aims to establish a seamless link between living and artificial entities using electronic skins (e-skins). E-skins combine the functionality of commercial electronics with the soft, stretchable and biocompatible characteristics of human skin or tissue. Until lately, the focus had been to replicate the standard functions associated with human skin, such as, temperature, pressure and chemical detection. Yet, recent developments have also introduced non-standard sensing capabilities like magnetic field detection to create the field of magnetosensitive e-skins. The addition of a supplementary information channel—an electronic sixth sense—has sparked a wide range of applications in the fields of cognitive psychology and human-machine interactions. In this thesis, we expand the concept of magnetosensitive e-skins to include the notion of directionality, which utilizes the full interaction potential of the magnetic field vector. Also, we introduce the use of flexible magnetoelectronics in virtual/augmented reality and human-computer interfaces. Three main results are attained in the course of this work: (i) we first demonstrate how magnetosensitive e-skins can be used as humanmachine interfaces driven by permanent magnet sources in the range of 5 mT. (ii) Building upon this milestone, we realize the first magnetosensitive e-skins which are driven by the earth’s magnetic field of 50 μT. (iii) We fabricate magnetosensitive e-skins which push the detection limit below 1 μT. The magnetosensitive e-skins in this work open exciting possibilities for sensory substitution experiments and sensory processing disorder therapies. Futhermore, for human-machine interactions, they provide a new interactive platform for touchless and gestural control in virtual and augmented reality scenarios beyond the limitations of optics-based systems.Der rasante Fortschritt der Elektronik und der Informatik in den letzten Jahren hat Mensch und Maschine nähergebracht als je zuvor. Aktuelle Trends wie das Internet der Dinge und künstliche Intelligenz schließen die Lücke noch weiter, indem sie eine allgegenwärtige Datenverarbeitung und -erfassung ermöglichen. Mit fortschreitender Revolution sind neue Formen der Mensch-Maschine-Interaktion in einer immer vernetzter werdenden Welt erforderlich. Eine entscheidende Komponente, um diese Interaktionen zu ermöglichen, ist das Gebiet der flexiblen Elektronik, das darauf abzielt, mithilfe elektronischer Häute (e-skins) eine nahtlose Verbindung zwischen lebenden und künstlichen Entitäten herzustellen. E-skins verbinden die Funktionalität kommerzieller Elektronik mit den weichen, dehnbaren und biokompatiblen Eigenschaften menschlicher Haut oder menschlichen Gewebes. Bis vor kurzem lag der Schwerpunkt auf der Nachbildung der mit der menschlichen Haut verbundenen Standardfunktionen wie Temperatur-, Druck- und Chemikalienerkennung. Jüngste Entwicklungen haben jedoch auch nicht standardmäßige Erfassungsfähigkeiten wie die Magnetfelderkennung eingeführt, um das Feld magnetoempfindlicher e-skins zu erzeugen. Die Hinzufügung eines zusätzlichen Informationskanals - eines elektronischen sechsten Sinns - hat eine breite Palette von Anwendungen auf den Gebieten der kognitiven Psychologie und der Mensch-Maschine-Interaktionen ausgelöst. In dieser Arbeit erweitern wir das Konzept der magnetoempfindlichen e-skins um den Begriff der Richtwirkung, bei dem das volle Wechselwirkungspotential des Magnetfeldvektors genutzt wird. Außerdem führen wir die Verwendung flexibler Magnetoelektronik in der virtuellen Realität / erweiterten Realität und in Mensch-Computer-Schnittstellen ein. Im Verlauf dieser Arbeit werden drei Hauptergebnisse erzielt: (i) Wir demonstrieren erstmals, wie magnetoempfindliche e-skins als Mensch-Maschine-Schnittstellen verwendet werden können, die von Permanentmagnetquellen im Bereich von 5 mT angetrieben werden. (ii) Aufbauend auf diesem Meilenstein realisieren wir die ersten magnetoempfindlichen e-skins, die vom Erdmagnetfeld von 50 μT angetrieben werden. (iii) Wir fertigen magnetoempfindliche e-skins, bei denen die Nachweisgrenze unter 1 μT liegt. Die magnetoempfindlichen e-skins in dieser Arbeit eröffnen aufregende Möglichkeiten für sensorische Substitutionsexperimente und Therapien bei sensorischen Verarbeitungsstörungen. Darüber hinaus bieten sie für die Mensch-Maschine-Interaktion eine neue interaktive Plattform für die berührungslose und gestische Steuerung in virtuellen und Augmented Reality-Szenarien, die über die Grenzen optikbasierter Systeme hinausgehen

Magnetosensitive e-skins with directional perception for augmented reality

Electronic skins equipped with artificial receptors are able to extend our perception beyond the modalities that have naturally evolved. These synthetic receptors offer complimentary information on our surroundings and endow us with novel means of manipulating physical or even virtual objects. We realize highly compliant magnetosensitive skins with directional perception that enable magnetic cognition, body position tracking, and touchless object manipulation. Transfer printing of eight high-performance spin valve sensors arranged into two Wheatstone bridges onto 1.7-mm-thick polyimide foils ensures mechanical imperceptibility. This resembles a new class of interactive devices extracting information from the surroundings through magnetic tags. We demonstrate this concept in augmented reality systems with virtual knob-turning functions and the operation of virtual dialing pads, based on the interaction with magnetic fields. This technology will enable a cornucopia of applications from navigation, motion tracking in robotics, regenerative medicine, and sports and gaming to interaction in supplemented reality