47 research outputs found

    MME2010 21st Micromechanics and Micro systems Europe Workshop : Abstracts

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    Fully integrated transducer platform with cavity optomechanical readout

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    Research and development of transducers based on cavity optomechanics is a topic of high interest particularly because these transducers enable measurement of mechanical motion down to the fundamental limit of precision imposed by quantum mechanics. The development of an on-chip cavity optomechanical transducer platform that combines high bandwidth and sensitivity near the standard quantum limit with compactness, robustness, small size, and potential for low cost batch fabrication inherent in MEMS is demonstrated as a proof of concept study. Design, fabrication and characterization of fully integrated and fiber pigtailed transducers is presented. The devices combine high sensitivity (0.14 - 40 fm·Hz^(-1/2), high bandwidth optomechanical readout and built-in thermal and electrostatic actuation. It is implemented by a double-side wafer-scale microfabrication process combining one e-beam, six stepper, and three contact mask aligner lithography steps. The SiN probes can be actuated using an electrical signal supplied to an integrated thermal or electrostatic actuator. The probe is evanescently coupled to a high-Q (10^5 - 2 x 10^6) optical whispering gallery mode of the optical microdisk cavity and the motion is detected by measuring the resonance frequency shift of the optical cavity mode. The actuator can be used to dynamically move the probe as well as to tune the distance between the cantilever and the optical cavity, to change the sensitivity and range of measurement of the cantilever. One side of the probe overhangs the edge of the chip, where it can be easily coupled to a variety of off-chip samples and physical systems of interest. The modular design of the transducer allows for parallelization, which enables the possibility of sensor arrays for simultaneous detection of multiple forces or other physical properties. Parallelization is shown on a 2x1 array, which can be easily extended to larger array architectures. The application of the probe arrays and single probes in a commercial scanning probe microscope is shown. In addition the flexibility of this transducer approach is demonstrated with membrane transducers and acceleration sensors. The performance of all presented transducers is studied, focusing on displacement sensitivity, frequency stability and readout gain tuning.Forschung und Entwicklung von Wandlern basierend auf kavität- optomechanischen Elementen ist ein Forschungsgebiet von hohem Interesse. Sie kombiniert hohe Bandbreiten und Empfindlichkeit nahe dem Standardquantumlimit mit Kompaktheit, Robustheit, kleinen Abmessungen und dem Potential für eine wirtschaftliche Massenproduktion systemimmanent bei mikroelektromechanischen Systemen. Vollintegrierte Wandler erlauben demnach Bewegungsmessungen bis hin zum fundamentalen Quantenlimit. In dieser Arbeit werden Design, Herstellung und Charakterisierung eines vollintegrierten und glasfasergekoppelten Wandlers in einer Machbarkeitsstudie dargestellt. Das System kombiniert hohe Verschiebungsauflösungen 0.14 - 40 fm· Hz^(-1/2), optomechanische Detektion mit hoher Bandbreite und eine eingebaute thermische und elektrostatische Anregung. Die Herstellung erfolgt in einem doppelseitigen mikro- und nanotechnischen Fertigungsverfahren auf Waferbasis, in einer Kombination aus einem Elektronenstrahllithographieschritt, sechs Projektionslithographieschritten und drei Kontaktlithographie Schritten. Die Siliziumnitrid-Sonden können mittels eines elektrischen Signals, angelegt an den integrierten thermischen oder elektrostatischen Aktuator, angeregt werden. Sie sind optisch über das evanecente Feld mit einer optischen Kavität hoher Güte (10^5 - 2 x 10^6) gekoppelt. Die Bewegung der Sonde wird detektiert über eine Veränderung der Resonanzfrequenz der Kavität. Die eingebauten Aktuatoren ermöglichen die Einstellung des Abstandes zwischen Sonde und optischer Kavität, welche die Einstellung der Sensitivität ermöglicht. Eine Seite der Sonde steht über die Kante des Siliziumchips, um die Kopplung mit einer Vielzahl von Proben und physikalischen Systemen zu erlauben. Die modulare Bauweise des Wandlers schafft die Grundlage zur Parallelisierung der Sonden für die gleichzeitige Messung mehrerer Kräfte oder physikalischer Eigenschaften. Die Parallelisierung wird in dieser Arbeit am Beispiel eines 2x1 Array gezeigt, welche mit geringem Aufwand auf größere Arrayarchitekturen angepasst werden kann. Zur Demonstration der Funktion von Einzelsonden und Sondenarrays, wird die Sondenanwendung in der Rasterkraftmikroskopie präsentiert. Des Weiteren wird die Flexibilität der Wandlerbauweise an der Herstellung von Membrane- und Beschleunigungswandlern belegt. Das Verhalten aller hergestellten Wandler wird hinsichtlich der Bewegungsempfindlichkeit, Frequenzstabilität, und Einstellbarkeit der Auslesung analysiert

    Nano-opto-mechanical sensors for semiconductor metrology

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    Developing germanium on nothing (GON) nanowire arrays

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    Advanced crystal growth techniques enable novel devices and circuit designs to further scale and integrate heterogeneous structures for CMOS, MEMS/NEMS, and optoelectronic applications. In particular, nanowires (NW) are among the promising structures derived from these developments. Research has demonstrated the utility of NWs as a channel material for gate-all-around transistors, high sensitivity biological/chemical sensors, photodetectors, as well as a whole spectrum of LEDs and lasers. However, NW based devices are not without their fabrication challenges. Relatively simple structures for CMOS or MEMS/NEMS processes are difficult to reproduce when many NW based devices rely on a dropcast process. This thesis demonstrates a method for producing Germanium on Nothing (GON) NW arrays on a Si substrate that forgoes dropcasting and, instead, creates NWs via selective material removal methods commonly utilized by industry. GON NW arrays are formed through the sequential use of E-beam lithography, selective wet chemical etching, and reactive ion etching. Global oxide thinning in BOE leaves a thin masking layer that protects the underlying Si, preventing etching in a TMAH solution. GON regions are defined by E-beam lithography and are subject to a RIE which creates release points in the remaining SiO2. Unmasked Si is then etched by a TMAH solution, undercutting the Ge lines, leaving an array of suspended Ge wires. NW dimensions are reached by thinning the Ge wire diameter with a H2O2 solution. NWs with ~50 nm diameters and ~ 200 nm lengths, as well as 10 [micron] by 10 [micron] membranes of Ge/SiO2, have been demonstrated in this thesis

    Laser-probe analysis of modern electroacoustic microwave devices

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    In this thesis, devices based on surface acoustic waves (SAWs) and microelectromechanical systems (MEMS) are investigated using laser-probe measurements. The type of SAW and MEMS devices studied here are typically used, for example, in mobile phones as radio frequency components, such as filters and reference oscillators. The dissertation focuses on measuring and analyzing vibration fields in the devices using the scanning Michelson laser interferometer developed at TKK. The interferometer as such detects out-of-plane vibrations, i.e., vibrations perpendicular to the surface of the device, with minimum detectable vibration amplitude reaching down to 0.3 pm for a detection bandwidth of 1 kHz. The spatial resolution in the scanning plane of the interferometer is better than 1 µm and the detectable vibration frequencies range from 1 MHz to 2.5 GHz. In the thesis, a novel detection method to measure also in-plane vibrations is presented and applied to the analysis of a square-plate MEMS resonator. In the first part of the thesis, operation of novel SAW devices, such as a longitudinal leaky SAW (LLSAW) resonator, a double resonance filter and a piston-mode filter with transverse mode suppression are thoroughly analyzed by combining the interferometric measurement results with numerical simulations and data from electrical measurements. The measurements of the vibration fields in the LLSAW resonator reveal side radiation of Rayleigh waves, which constitutes an acoustic loss mechanism for the resonator. The analysis of the piston-mode filter indicates that one of the parameters for the transverse mode suppression has been underestimated in the filter design. In the second part of the thesis, vibration modes in a square-plate MEMS resonator are analyzed. Comparing the laser-probe measurements with simulations, it can be concluded that the main in-plane vibration mode is companioned by a parasitic out-of-plane mode, that may affect the quality factor of the main mode. The laser-probe measurements enable studying directly the vibrations in SAW and MEMS devices and hence provide new information on the physics and operation of these devices, not obtainable from the electrical measurements or simulations alone. The measurements provide support for the development of new SAW and MEMS components satisfying stringent specifications

    Nonlinear dynamics and applications of MEMS and NEMS resonators.

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    Rich nonlinear behaviours have been observed in microelectromechanical and nanoelectromechanical systems (MEMS and NEMS) resonators. This dissertation has performed a systematic study of nonlinear dynamics in various MEMS and NEMS resonators that appear to be single, two coupled, arrayed, parametric driven and coupled with multiple-fields, with the aim of exploring novel applications. New study on dynamic performance of a single carbon nanotube resonator taking account of the surface induced initial stress has been performed. It is found that the initial stress causes the jumping points, the whirling and chaotic motions to appear at higher driving forces. Chaotic synchronization of two identical MEMS resonators has been theoretically achieved using Open-Plus-Closed-Loop (OPCL) method, and the coupled resonating system is designed as a mass detector that is believed to possess high resistance to noise. The idea of chaotic synchronization is then popularized into wireless sensor networks for the purpose of achieving secure communication. The arising of intrinsic localised mode has been studied in microelectromechanical resonators array that is designed intentionally for an energy harvester, which could potentially be used to achieve high/concentrated energy output. Duffing resonators with negative and positive spring constants can exhibit chaotic behaviour. Systematic calculations have been performed for these two systems driven by parametric pumps to unveil the controllability of chaos. Based on the principle of nanomechanical transistor and quantum shuttle mechanism, a high sensitive mass sensor that consists of two mechanically coupled NEMS resonators has been postulated, and the mass sensor which can be realized in large-scale has also been investigated and verified. Furthermore, an novel transistor that couples three physical fields at the same time, i.e. mechanical, optical and electrical, has been designed, and the coupled opto-electro-mechanical simulation has been performed. It is shown from the dynamic analysis that the stable working range of the transistor is much wider than that of the optical wave inside the cavity

    Microelectromechanical Systems and Devices

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    The advances of microelectromechanical systems (MEMS) and devices have been instrumental in the demonstration of new devices and applications, and even in the creation of new fields of research and development: bioMEMS, actuators, microfluidic devices, RF and optical MEMS. Experience indicates a need for MEMS book covering these materials as well as the most important process steps in bulk micro-machining and modeling. We are very pleased to present this book that contains 18 chapters, written by the experts in the field of MEMS. These chapters are groups into four broad sections of BioMEMS Devices, MEMS characterization and micromachining, RF and Optical MEMS, and MEMS based Actuators. The book starts with the emerging field of bioMEMS, including MEMS coil for retinal prostheses, DNA extraction by micro/bio-fluidics devices and acoustic biosensors. MEMS characterization, micromachining, macromodels, RF and Optical MEMS switches are discussed in next sections. The book concludes with the emphasis on MEMS based actuators

    MICROMANIPULATOR-RESONATOR SYSTEM FOR SELECTIVE WEIGHING OF INDIVIDUAL MICROPARTICLES

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    Over the past decade, MEMS-based cantilever sensors have been widely used in the detection of biomolecules, environmental pollutants, chemicals and pathogens. Cantilever-based sensors rely on attachment of target entities on their surface. The attachment causes either change in surface stress or resonance frequency of the cantilever, which is detected using various schemes that range from optical to piezoelectric. The majority of these sensors rely on probabilistic attachment of multiple target entities to the sensor surface. This introduces uncertainties since the location of the adsorbed target entity can modify the signal generated by the sensor. In addition, it does not allow the measurement of individually selected target entities. The goal of this dissertation is to exploit the cantilever-based sensors\u27 mass sensing capability to develop a supermarket weight scale for the micro world: a scheme that can enable the user to pick an individual target entity and weigh only that particular entity by precisely positioning it on a micro- weight scale
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