Modeling and Reduction with Applications to Semiconductor Processing

This thesis consists of several somewhat distinct but connected parts, withan underlying motivation in problems pertaining to control and optimizationof semiconductor processing. The first part (Chapters 3 and 4) addressesproblems in model reduction for nonlinear state-space control systems. In1993, Scherpen generalized the balanced truncation method to the nonlinearsetting. However, the Scherpen procedure is not easily computable and hasnot yet been applied in practice. We offer a method for computing a workingapproximation to the controllability energy function, one of the mainobjects involved in the method. Moreover, we show that for a class ofsecond-order mechanical systems with dissipation, under certain conditionsrelated to the dissipation, an exact formula for the controllabilityfunction can be derived. We then present an algorithm for a numericalimplementation of the Morse-Palais lemma, which produces a local coordinatetransformation under which a real-valued function with a non-degeneratecritical point is quadratic on a neighborhood of the critical point.Application of the algorithm to the controllabilty function plays a key rolein computing the balanced representation. We then apply our methods andalgorithms to derive balanced realizations for nonlinear state-space modelsof two example mechanical systems: a simple pendulum and a double pendulum. The second part (Chapter 5) deals with modeling of rapid thermal chemicalvapor deposition (RTCVD) for growth of silicon thin films, viafirst-principles and empirical analysis. We develop detailedprocess-equipment models and study the factors that influence depositionuniformity, such as temperature, pressure, and precursor gas flow rates,through analysis of experimental and simulation results. We demonstratethat temperature uniformity does not guarantee deposition thicknessuniformity in a particular commercial RTCVD reactor of interest. In thethird part (Chapter 6) we continue the modeling effort, specializing to acontrol system for RTCVD heat transfer. We then develop and apply ad-hocversions of prominent model reduction approaches to derive reduced modelsand perform a comparative study

Modeling, analysis and control of robot-object nonsmooth underactuated Lagrangian systems: A tutorial overview and perspectives

International audienceSo-called robot-object Lagrangian systems consist of a class of nonsmooth underactuated complementarity Lagrangian systems, with a specific structure: an "object" and a "robot". Only the robot is actuated. The object dynamics can thus be controlled only through the action of the contact Lagrange multipliers, which represent the interaction forces between the robot and the object. Juggling, walking, running, hopping machines, robotic systems that manipulate objects, tapping, pushing systems, kinematic chains with joint clearance, crawling, climbing robots, some cable-driven manipulators, and some circuits with set-valued nonsmooth components, belong this class. This article aims at presenting their main features, then many application examples which belong to the robot-object class, then reviewing the main tools and control strategies which have been proposed in the Automatic Control and in the Robotics literature. Some comments and open issues conclude the article

Investigation of Trajectory and Control Designs for a Solar Sail to the Moon

NASA’s Artemis program and other government and commercial projects are working toward establishing a sustainable human presence on the moon. This thesis investigates the technical feasibility of a solar sail-based spacecraft (sailcraft) as a low-cost method of delivering cargo or science instruments to the moon and demonstrates how this sailcraft could be controlled to change its orbit. The concept is a low-cost, commercial launch vehicle-deployable, CubeSat-based sailcraft with a square sail, assumed attitude control, and a small payload traversing from low-Earth orbit toward the moon with zero propellant use. In this thesis, methods for sailcraft to increase altitude, the trajectory design process, and zero-propellant attitude control actuator options are explored. Three increasingly complex mathematical models were built in MATLAB around thrust vector control designs to get the concept sailcraft from Earth orbit toward the moon and transit simulations conducted. The third and most promising model developed a linear quadratic regulator controller to follow a logarithmic spiral reference trajectory and ensure the stability of the solution. As a result, a robust thrust vector control solution to minimize error from the reference trajectory was found and a solution method to assign the control gain matrix was developed

Modelling and Adaptive Control; Proceedings of an IIASA Conference, Sopron, Hungary, July 1986

One of the main purposes of the workshop on Modelling and Adaptive Control at Sopron, Hungary, was to give an overview of both traditional and recent approaches to the twin theories of modelling and control which ultimately must incorporate some degree of uncertainty. The broad spectrum of processes for which solutions of some of these problems were proposed was itself a testament to the vitality of research on these fundamental issues. In particular, these proceedings contain new methods for the modelling and control of discrete event systems, linear systems, nonlinear dynamics and stochastic processes

Operational modal analysis - Theory and aspects of application in civil engineering

In recent years the demand on dynamic analyses of existing structures in civil engineering has remarkably increased. These analyses are mainly based on numerical models. Accordingly, the generated results depend on the quality of the used models. Therefore it is very important that the models describe the considered systems such that the behaviour of the physical structure is realistically represented. As any model is based on assumptions, there is always a certain degree of uncertainty present in the results of a simulation based on the respective numerical model. To minimise these uncertainties in the prediction of the response of a structure to a certain loading, it has become common practice to update or calibrate the parameters of a numerical model based on observations of the structural behaviour of the respective existing system. The determination of the behaviour of an existing structure requires experimental investigations. If the numerical analyses concern the dynamic response of a structure it is sensible to direct the experimental investigations towards the identification of the dynamic structural behaviour which is determined by the modal parameters of the system. In consequence, several methods for the experimental identification of modal parameters have been developed since the 1980ies. Due to various technical restraints in civil engineering which limit the possibilities to excitate a structure with economically reasonable effort, several methods have been developed that allow a modal identification form tests with an ambient excitation. The approach of identifying modal parameters only from measurements of the structural response without precise knowledge of the excitation is known as output-only or operational modal analysis. Since operational modal analysis (OMA) can be considered as a link between numerical modelling and simulation on the one hand and the dynamic behaviour of an existing structure on the other hand, the respective algorithms connect both the concepts of structural dynamics and mathematical tools applied within the processing of experimental data. Accordingly, the related theoretical topics are revised after an introduction into the topic. Several OMA methods have been developed over the last decades. The most established algorithms are presented here and their application is illustrated by means of both a small numerical and an experimental example. Since experimentally obtained results always underly manifold influences, an appropriate postprocessing of the results is necessary for a respective quality assessment. This quality assessment does not only require respective indicators but should also include the quantification of uncertainties. One special feature in modal testing is that it is common to instrument the structure in different sensor setups to improve the spacial resolution of identified mode shapes. The modal information identified from tests in several setups needs to be merged a posteriori. Algorithms to cope with this problem are also presented. Due to the fact that the amount of data generated in modal tests can become very large, manual processing can become extremely expensive or even impossible, for example in the case of a long-term continuous structural monitoring. In these situations an automated analysis and postprocessing are essential. Descriptions of respective methodologies are therefore also included in this work. Every structural system in civil engineering is unique and so also every identification of modal parameters has its specific challenges. Some aspects that can be faced in practical applications of operational modal analysis are presented and discussed in a chapter that is dedicated specific problems that an analyst may have to overcome. Case studies of systems with very close modes, with limited accessibility as well as the application of different OMA methods are described and discussed. In this context the focus is put on several types of uncertainty that may occur in the multiple stages of an operational modal analysis. In literature only very specific uncertainties at certain stages of the analysis are addressed. Here, the topic of uncertainties has been considered in a broader sense and approaches for treating respective problems are suggested. Eventually, it is concluded that the methodologies of operatinal modal analysis and related technical solutions have been well-engineered already. However, as in any discipline that includes experiments, a certain degree of uncertainty always remains in the results. From these conclusions has been derived a demand for further research and development that should be directed towards the minimisation of these uncertainties and to a respective optimisation of the steps and corresponding parameters included in an operational modal analysis

Development of damage detection algorithms for structural systems based on structural dynamic data

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