Compact Modeling of Parasitic Internal Fringe Capacitance Effects on the Threshold Voltage of High-K Gate Dielectric Nanoscale SOI MOSFETs

A compact model for the effect of parasitic internal fringe capacitance on threshold voltage in high-K gate dielectric SOI MOSFETs is developed. Our model includes the effects of the gate dielectric permittivity, spacer oxide permittivity, spacer width, gate length and width of MOS structure. A simple expression for parasitic internal fringe capacitance from the bottom edge of the gate electrode is obtained and the charges induced in the source and drain regions due to this capacitance are considered. We demonstrate an increase in surface potential along the channel due to these charges resulting in a decrease in the threshold voltage with increase in gate dielectric permittivity. The accuracy of the results obtained using our analytical model is verified using 2-D device simulations.Comment: Journal Pape

Analysis of Dynamic Logic Circuits in Deep Submicron CMOS Technologies

Dynamic logic circuits are utilized to minimize the delay in the critical path of high-performance designs such as the datapath circuits in state-of-the-art microprocessors. However, as integrated circuits (ICs) scale to the very deep submicron (VDSM) regime, dynamic logic becomes susceptible to a variety of failure modes due to decreasing noise margins and increasing leakage currents. The objective of this thesis is to characterize the performance of dynamic logic circuits in VDSM technologies and to evaluate various design strategies to mitigate the effects of leakage currents and small noise margins

NMOS DEVICE OPTIMIZATION AND FABRICATION USING ATHENA & ATLAS SIMULATION SOFTWARE

Experiment has proven that NMOS performs better than PMOS due to higher drive current, higher mobility, easier to implement scaling technology and low power consumption. However, there is still room for further optimization as the technology trend for the miniaturization ofNMOS and integrated devices continue to grow. In this project, several objectives have been outlined to be completed within 2 semester period. These include detailed understanding of fabrication aspect and NMOS properties, optimizing NMOS by reducing threshold voltage, minimizing off-stage leakage, reducing gate length, increasing switching speed and designing a mixed mode circuit. However, the cost required to perform experimental analysis and optimization of semiconductor devices using fabrication process can be very expensive especially when involving purchase of expensive electrical testing equipment. Thus, it is recommended to perform optimization and analysis using simulation. One ofthe best device process and simulation tool is Silvaco ATHENA & ATLAS simulation software. It provides user with various capability in process and electrical testing. After manipulating and improving process parameters, the optimized device has recorded significant improvement over the predecessor. Optimizations include better threshold voltage extraction (0.2v), drain current rise beyond pinch off, better drain current extraction, higher switching speed at 2Ghz, better device structure after ion implantation due to tilted implantation, lower off-stage leakage current (1.2589 x 10' A/um) and minimization ofjunction breakdown effect

Design and simulation of strained-Si/strained-SiGe dual channel hetero-structure MOSFETs

With a unified physics-based model linking MOSFET performance to carrier mobility and drive current, it is shown that nearly continuous carrier mobility increase has been achieved by introduction of process-induced and global-induced strain, which has been responsible for increase in device performance commensurately with scaling. Strained silicon-germanium technology is a hot research area, explored by many different research groups for present and future CMOS technology, due to its high hole mobility and easy process integration with silicon. Several heterostructure architectures for strained Si/SiGe have been shown in the literature. A dual channel heterostructure consisting of strained Si/Si1-xGex on a relaxed SiGe buffer provides a platform for fabricating MOS transistors with high drive currents, resulting from high carrier mobility and carrier velocity, due to presence of compressively strained silicon germanium layer. This works reports the design, modeling and simulation of NMOS and PMOS transistors with a tensile strained Si channel layer and compressively strained SiGe channel layer for a 65 nm logic technology node. Since most of the recent work on development of strained Si/SiGe has been experimental in nature, developments of compact models are necessary to predict the device behavior. A unified modeling approach consisting of different physics-based models has been formulated in this work and their ability to predict the device behavior has been investigated. In addition to this, quantum mechanical simulations were performed in order to investigate and model the device behavior. High p/n-channel drive currents of 0.43 and 0.98 mA/Gm, respectively, are reported in this work. However with improved performance, ~ 10% electrostatic degradation was observed in PMOS due to buried channel device

Modeling and Simulation of Subthreshold Characteristics of Short-Channel Fully-Depleted Recessed-Source/Drain SOI MOSFETs

Non-conventional metal-oxide-semiconductor (MOS) devices have attracted researchers‟ attention for future ultra-large-scale-integration (ULSI) applications since the channel length of conventional MOS devices approached the physical limit. Among the non-conventional CMOS devices which are currently being pursued for the future ULSI, the fully-depleted (FD) SOI MOSFET is a serious contender as the SOI MOSFETs possess some unique features such as enhanced short-channel effects immunity, low substrate leakage current, and compatibility with the planar CMOS technology. However, due to the ultra-thin source and drain regions, FD SOI MOSFETs possess large series resistance which leads to the poor current drive capability of the device despite having excellent short-channel characteristics. To overcome this large series resistance problem, the source/drain area may be increased by extending S/D either upward or downward. Hence, elevated-source/drain (E-S/D) and recessed-source/drain (Re-S/D) are the two structures which can be used to minimize the series resistance problem. Due to the undesirable issues such as parasitic capacitance, current crowding effects, etc. with E-S/D structure, the Re-S/D structure is a better choice. The FD Re-S/D SOI MOSFET may be an attractive option for sub-45nm regime because of its low parasitic capacitances, reduced series resistance, high drive current, very high switching speed and compatibility with the planar CMOS technology. The present dissertation is to deal with the theoretical modeling and computer-based simulation of the FD SOI MOSFETs in general, and recessed source/drain (Re-S/D) ultra-thin-body (UTB) SOI MOSFETs in particular. The current drive capability of Re-S/D UTB SOI MOSFETs can be further improved by adopting the dual-metal-gate (DMG) structure in place of the conventional single-metal-gate-structure. However, it will be interesting to see how the presence of two metals as gate contact changes the subthreshold characteristics of the device. Hence, the effects of adopting DMG structure on the threshold voltage, subthreshold swing and leakage current of Re-S/D UTB SOI MOSFETs have been studied in this dissertation. Further, high-k dielectric materials are used in ultra-scaled MOS devices in order to cut down the quantum mechanical tunneling of carriers. However, a physically thick gate dielectric causes fringing field induced performance degradation. Therefore, the impact of high-k dielectric materials on subthreshold characteristics of Re-S/D SOI MOSFETs needs to be investigated. In this dissertation, various subthreshold characteristics of the device with high-k gate dielectric and metal gate electrode have been investigated in detail. Moreover, considering the variability problem of threshold voltage in ultra-scaled devices, the presence of a back-gate bias voltage may be useful for ultimate tuning of the threshold voltage and other characteristics. Hence, the impact of back-gate bias on the important subthreshold characteristics such as threshold voltage, subthreshold swing and leakage currents of Re-S/D UTB SOI MOSFETs has been thoroughly analyzed in this dissertation. The validity of the analytical models are verified by comparing model results with the numerical simulation results obtained from ATLAS™, a device simulator from SILVACO Inc

Modelling and analysis of crosstalk in scaled CMOS interconnects

The development of a general coupled RLC interconnect model for simulating scaled bus structures m VLSI is presented. Several different methods for extracting submicron resistance, inductance and capacitance parameters are documented. Realistic scaling dimensions for deep submicron design rules are derived and used within the model. Deep submicron HSPICE device models are derived through the use of constant-voltage scaling theory on existing 0.75µm and 1.0µm models to create accurate interconnect bus drivers. This complete model is then used to analyse crosstalk noise and delay effects on multiple scaling levels to determine the dependence of crosstalk on scaling level. Using this data, layout techniques and processing methods are suggested to reduce crosstalk in system

Devenlopment of Compact Small Signal Quasi Static Models for Multiple Gate Mosfets

En esta tesis hemos desarrollado los modelos compactos explícitos de carga y de capacitancia adaptados para los dispositivos dopados y no dopados de canal largo (DG MOSFETs dopados, DG MOSFETs no dopados, UTB MOSFETs no dopados y SGT no dopados) de un modelo unificado del control de carga derivado de la ecuación de Poisson. El esquema de modelado es similar en todos estos dispositivos y se adapta a cada geometría. Los modelos de la C.C. y de la carga son completamente compatibles. Las expresiones de la capacitancia se derivan del modelo de la carga. La corriente, la carga total y las capacitancias se escriben en términos de las densidades móviles de la carga en los extremos de fuente y drenador del canal. Las expresiones explícitas e infinitamente continuas se utilizan para las densidades móviles de la carga en la fuente y drenador. Las capacitancias modeladas demuestran el acuerdo excelente con las simulaciones numéricas 2D y 3D (SGT), en todos los regímenes de funcionamiento. Por lo tanto, el modelo es muy prometedor para ser utilizado en simuladores del circuito. Desafortunadamente, no mucho trabajo se ha dedicado a este dominio de modelado. Las cargas analíticas y las capacitancias, asociadas a cada terminal se prefieren en la simulación de circuito. Con respecto al SGT MOSFET, nuestro grupo fue el primero en desarrollar y publicar un modelo de las cargas y de las capacitancias intrínsecas, que es también analítico y explícito. La tesis es organizada como sigue: el capítulo (1) presenta el estado del arte, capítulo (2) el modelado compacto de los cuatro dispositivos: DG MOSFETs dopados, DG MOSFETs no dopados, UTB MOSFETs no dopados y SGT no dopados; en el capítulo (3) estudiamos las capacitancias de fricción en MuGFETs. Finalmente el capítulo (4) resuma el trabajo hecho y los futuros objetivos que necesitan ser estudiados. Debido a la limitación de los dispositivos optimizados disponibles para el análisis, la simulación numérica fue utilizada como la herramienta principal del análisis. Sin embargo, cuando estaban disponibles, medidas experimentales fueron utilizadas para validar nuestros resultados. Por ejemplo, en la sección 2A, en el caso de DG MOSFETs altamente dopados podríamos comparar nuestros resultados con datos experimentales de FinFETs modelados como DG MOSFETs. La ventaja principal de este trabajo es el carácter analítico y explícito del modelo de la carga y de la capacitancia que las hace fácil de implementar en simuladores de circuitos. El modelo presenta los resultados casi perfectos para diversos casos del dopaje y para diversas estructuras no clásicas del MOSFET (los DG MOSFETs, los UTB MOSFETs y los SGTs). La variedad de las estructuras del MOSFET en las cuales se ha incluido nuestro esquema de modelado y los resultados obtenidos, demuestran su validez absoluta. En el capítulo 3, investigamos la influencia de los parámetros geométricos en el funcionamiento en RF de los MuGFETs. Demostramos el impacto de parámetros geométricos importantes tales como el grosor de la fuente y del drenador o, el espaciamiento de las fins, la anchura del espaciador, etc. en el componente parásito de la capacitancia de fricción de los transistores de la múltiple-puerta (MuGFET). Los resultados destacan la ventaja de disminuir el espaciamiento entre las fins para MuGFETs y la compensación entre la reducción de las resistencias parásitas de fuente y drenador y el aumento de capacitancias de fricción cuando se introduce la tecnología del crecimiento selectivo epitaxial (SEG). La meta de nuestro estudio y trabajo es el uso de nuestros modelos en simuladores de circuitos. El grupo de profesor Aranda, de la Universidad de Granada ha puesto el modelo actual de SGT en ejecución en el simulador Agilent ADS y buenos resultados fueron obtenidos.In this thesis we have developed explicit compact charge and capacitance models adapted for doped and undoped long-channel devices (doped Double-Gate (DG) MOSFETs, undoped DG MOSFETs, undoped Ultra-Thin-Body (UTB) MOSFETs and undoped Surrounding Gate Transistor (SGT)) from a unified charge control model derived from Poisson's equation. The modelling scheme is similar in all these devices and is adapted to each geometry. The dc and charge models are fully compatible. The capacitance expressions are derived from the charge model. The current, total charges and capacitances are written in terms of the mobile charge sheet densities at the source and drain ends of the channel. Explicit and infinitely continuous expressions are used for the mobile charge sheet densities at source and drain. As a result, all small signal parameters will have an infinite order of continuity. The modeled capacitances show excellent agreement with the 2D and 3D (SGT) numerical simulations, in all operating regimes. Therefore, the model is very promising for being used in circuit simulators. Unfortunately, not so much work has been dedicated to this modelling domain. Analytical charges and capacitances, associated with each terminal are preferred in circuit simulation. Regarding the surrounding-gate MOSFET, our group was the first to develop and publish a model of the charges and intrinsic capacitances, which is also analytic and explicit. The thesis is organized as follows: Chapter (1) presents the state of the art, Chapter (2) the compact modeling of the four devices: doped DG MOSFETs, undoped DG MOSFETs, undoped UTB MOSFETs and undoped SGT; in Chapter (3) we study the fringing capacitances in MuGFETs. Finally Chapter (4) summarizes the work done and the future points that need to be studied. Due to the limitation of available optimized devices for analysis, numerical simulation was used as the main analysis tool. However, when available, measurements were used to validate our results. The experimental part was realised at the Microelectronics Laboratory, Université Catholique de Louvain, Louvain-la Neuve, Belgium. For example, in section 2A, in the case of highly-doped DG MOSFETs we could compare our results with experimental data from FinFETs modeled as DG MOSFETs. The main advantage of this work is the analytical and explicit character of the charge and capacitance model that makes it easy to implement in circuit simulators. The model presents almost perfect results for different cases of doping (doped/undoped devices) and for different non classical MOSFET structures (DG MOSFET, UTB MOSFETs and SGT). The variety of the MOSFET structures in which our modeling scheme has been included and the obtained results, demonstrate its absolute validity. In chapter 3, we investigate the influence of geometrical parameters on the RF performance in MuGFETs. We show the impact of important geometrical parameters such as source and drain thickness, fin spacing, spacer width, etc. on the parasitic fringing capacitance component of multiple-gate field-effect transistors (MuGFET). Results highlight the advantage of diminishing the spacing between fins for MuGFETs and the trade-off between the reduction of parasitic source and drain resistances and the increase of fringing capacitances when Selective Epitaxial Growth (SEG) technology is introduced. The goal of our study and work is the usage of our models in circuit simulators. This part, of implementing and testing our models of these multi gate MOSFET devices in circuit simulators has already begun. The group of Professor Aranda, from the University of Granada has implemented the SGT current model in the circuit simulator Agilent ADS and good results were obtained

SOI Technology: An Opportunity for RF Designers?, Journal of Telecommunications and Information Technology, 2009, nr 4

This last decade silicon-on-insulator (SOI) MOS-FET technology has demonstrated its potentialities for high frequency (reaching cutoff frequencies close to 500 GHz for n-MOSFETs) and for harsh environments (high temperature, radiation) commercial applications. For RF and system-onchip applications, SOI also presents the major advantage of providing high resistivity substrate capabilities, leading to substantially reduced substrate losses. Substrate resistivity values higher than 1 kΩ cm can easily be achieved and high resistivity silicon (HRS) is commonly foreseen as a promising substrate for radio frequency integrated circuits (RFIC) and mixed signal applications. In this paper, based on several experimental and simulation results the interest, limitations but also possible future improvements of the SOI MOS technology are presented

5nm 이하 3D Transistors의 Self-Heating 및 전열특성분석 연구

학위논문(박사) -- 서울대학교대학원 : 공과대학 전기·컴퓨터공학부, 2021.8. 신형철.In this thesis, Self-Heating Effect (SHE) is investigated using TCAD simulations in various Sub-10-nm node Field Effect Transistor (FET). As the node decreases, logic devices have evolved into 3D MOSFET structures from Fin-FET to Nanosheet-FET. In the case of 3D MOSFET, there are thermal reliability issues due to the following reasons: ⅰ) The power density of the channel is high, ⅱ) The channel structure surrounded by SiO2, ⅲ) The overall low thermal conductivity characteristics due to scaling down. Many papers introduce the analysis and prediction of temperature rise by SHE in the device, but there are no papers presenting the content of mitigation of temperature rise. Therefore, we have studied the methods of decreasing the maximum lattice temperature (TL,max) such as shallow trench isolation (STI) composition engineering in Fin-FET, thermal analysis according to DC/AC/duty cycle in nanowire-FET, and active region ( e.g., gate metal thickness, channel width, channel number etc..) optimization in nanosheet-FET. In addition, lifetime affected by hot carrier injection (HCI) / bias-temperature instability (BTI) is also analyzed according to various thermal relaxation methods presented.이 논문에서는 다양한 Sub-10nm 노드 전계 효과 트랜지스터 (FET)에서 TCAD 시뮬레이션을 사용하여 자체 발열 효과 (SHE)를 조사합니다. 노드가 감소함에 따라 논리 장치는 Fin-FET에서 Nanosheet-FET로 3D MOSFET 구조로 진화했습니다. 3D MOSFET의 경우 ⅰ) 채널의 전력 밀도가 높음, ⅱ) SiO2로 둘러싸인 채널 구조, ⅲ) 축소로 인해 전체적으로 낮은 열전도 특성 등 다음과 같은 이유로 열 신뢰성 문제가 있습니다. 한편, 많은 논문이 device에서 SHE에 의한 온도 상승의 분석 및 예측을 소개하지만 온도 상승 완화의 내용을 제시하는 논문은 거의 없습니다. 따라서 Fin-FET의 STI (Shallow Trench Isolation) 구성 공학, nanowire-FET의 DC / AC / 듀티 사이클에 따른 열 분석, nanosheet-FET에서 소자의 중요영역(예: 게이트 금속 두께, 채널 폭, 채널 번호 등)의 최적화를 통해서 최대 격자 온도 (TL,max)를 낮추는 방법등을 연구했습니다. 또한 더 나아가서 HCI (Hot Carrier Injection) / BTI (Bias-Temperature Instability)의 영향을 받는 수명도 제시된 다양한 열 완화 방법에 따라 분석하여 소자의 제작에 있어 열적 특성과 수명을 좋게 만드는 지표를 제시합니다 .Chapter 1 Introduction 1 1.1. Development of Semconductor structure 1 1.2. Self-Heating Effect issues in semiconductor devices 3 Chapter 2 Thermal-Aware Shallow Trench Isolation Design Optimization for Minimizing Ioff in Various Sub-10-nm 3-D Transistor 7 2.1. Introduction 7 2.2. Device Structure and Simulation Condition 7 2.3. Results and Discussion 12 2.4. Summary 27 Chapter 3 Analysis of Self Heating Effect in DC/AC Mode in Multi-channel GAA-Field Effect Transistor 32 3.1. Introduction 32 3.2. Multi-Channel Nanowire FET and Back End Of Line 33 3.3. Work Flow and Calibration Process 35 3.4. More Detailed Thermal Simulation of Nanowire-FET 37 3.5. Performance Analysis by Number of Channels 38 3.6. DC Characteristic of SHE in Nanowire-FETs 40 3.7. AC Characteristics of SHE in Nanowire-FETs 43 3.8. Summary 51 Chapter 4 Self-Heating and Electrothermal Properties of Advanced Sub-5-nm node Nanoplate FET 56 4.1. Introduction 56 4.2. Device Structure and Simulation Condition 57 4.3. Thermal characteristics by channel number and width 62 4.4. Thermal characteristics by inter layer-metal thickness (TM) 64 4.5. Life Time Prediction 65 4.6. Summary 67 Chapter 5 Study on Self Heating Effect and life time in Vertical-channel Field Effect Transistor 72 5.1. Introduction 72 5.2. Device Structure and Simulation Condition 72 5.3. Temperature and RTH according to channel width(TW) 76 5.4. Thermal properties according to air spacers and air gap 77 5.5. Ion boosting according to Channel numbers 81 5.6. Temperature imbalance of multi-channel VFETs 82 5.7. Mitigation of the channel temperature imbalance 86 5.8. Life time depending on various analysis conditions 88 5.9. Summary 89 Chapter 6 Conclusions 93 Appendix A. A Simple and Accurate Modeling Method of Channel Thermal Noise Using BSIM4 Noise Models 95 A.1. Introduction 95 A.2. Overall Schematic of the RF MOSFET Model 97 A.3. Verification of the DC Characteristics of the RF MOSFET Model 98 A.4. Verification of the MOSFET Model with Measured Y-parameters 100 A.5. Verification of the MOSFET Model with Measured Noise Parameters 101 A.6. Thermal Noise Extraction and Modeling (TNOIMOD = 0) 103 A.7. Verification of the Enhanced Model with Noise Parameters 112 A.8. Holistic Model (TNOIMOD = 1) 114 A.9. Evaluation the validity of the model for drain bias 115 A.10. Conclusion 117 Abstract in Korean 122박