22 research outputs found

    Development of a Prototype Miniature Silicon Microgyroscope

    Get PDF
    A miniature vacuum-packaged silicon microgyroscope (SMG) with symmetrical and decoupled structure was designed to prevent unintended coupling between drive and sense modes. To ensure high resonant stability and strong disturbance resisting capacity, a self-oscillating closed-loop circuit including an automatic gain control (AGC) loop based on electrostatic force feedback is adopted in drive mode, while, dual-channel decomposition and reconstruction closed loops are applied in sense mode. Moreover, the temperature effect on its zero bias was characterized experimentally and a practical compensation method is given. The testing results demonstrate that the useful signal and quadrature signal will not interact with each other because their phases are decoupled. Under a scale factor condition of 9.6 mV/°/s, in full measurement range of ± 300 deg/s, the zero bias stability reaches 15°/h with worse-case nonlinearity of 400 ppm, and the temperature variation trend of the SMG bias is thus largely eliminated, so that the maximum bias value is reduced to one tenth of the original after compensation from -40 °C to 80 °C

    Temperature Effects and Compensation-Control Methods

    Get PDF
    In the analysis of the effects of temperature on the performance of microgyroscopes, it is found that the resonant frequency of the microgyroscope decreases linearly as the temperature increases, and the quality factor changes drastically at low temperatures. Moreover, the zero bias changes greatly with temperature variations. To reduce the temperature effects on the microgyroscope, temperature compensation-control methods are proposed. In the first place, a BP (Back Propagation) neural network and polynomial fitting are utilized for building the temperature model of the microgyroscope. Considering the simplicity and real-time requirements, piecewise polynomial fitting is applied in the temperature compensation system. Then, an integral-separated PID (Proportion Integration Differentiation) control algorithm is adopted in the temperature control system, which can stabilize the temperature inside the microgyrocope in pursuing its optimal performance. Experimental results reveal that the combination of microgyroscope temperature compensation and control methods is both realizable and effective in a miniaturized microgyroscope prototype

    Degree-per-hour mode-matched micromachined silicon vibratory gyroscopes

    Get PDF
    The objective of this research dissertation is to design and implement two novel micromachined silicon vibratory gyroscopes, which attempt to incorporate all the necessary attributes of sub-deg/hr noise performance requirements in a single framework: large resonant mass, high drive-mode oscillation amplitudes, large device capacitance (coupled with optimized electronics), and high-Q resonant mode-matched operation. Mode-matching leverages the high-Q (mechanical gain) of the operating modes of the gyroscope and offers significant improvements in mechanical and electronic noise floor, sensitivity, and bias stability. The first micromachined silicon vibratory gyroscope presented in this work is the resonating star gyroscope (RSG): a novel Class-II shell-type structure which utilizes degenerate flexural modes. After an iterative cycle of design optimization, an RSG prototype was implemented using a multiple-shell approach on (111) SOI substrate. Experimental data indicates sub-5 deg/hr Allan deviation bias instability operating under a mode-matched operating Q of 30,000 at 23ºC (in vacuum). The second micromachined silicon vibratory gyroscope presented in this work is the mode-matched tuning fork gyroscope (M2-TFG): a novel Class-I tuning fork structure which utilizes in-plane non-degenerate resonant flexural modes. Operated under vacuum, the M2-TFG represents the first reported high-Q perfectly mode-matched operation in Class-I vibratory microgyroscope. Experimental results of device implemented on (100) SOI substrate demonstrates sub-deg/hr Allan deviation bias instability operating under a mode-matched operating Q of 50,000 at 23ºC. In an effort to increase capacitive aspect ratio, a new fabrication technology was developed that involved the selective deposition of doped-polysilicon inside the capacitive sensing gaps (SPD Process). By preserving the structural composition integrity of the flexural springs, it is possible to accurately predict the operating-mode frequencies while maintaining high-Q operation. Preliminary characterization of vacuum-packaged prototypes was performed. Initial results demonstrated high-Q mode-matched operation, excellent thermal stability, and sub-deg/hr Allan variance bias instability.Ph.D.Committee Chair: Dr. Farrokh Ayazi; Committee Member: Dr. Mark G. Allen; Committee Member: Dr. Oliver Brand; Committee Member: Dr. Paul A. Kohl; Committee Member: Dr. Thomas E. Michael

    NASA Tech Briefs, February 2005

    Get PDF
    Topics discussed include: Instrumentation for Sensitive Gas Measurements; Apparatus for Testing Flat Specimens of Thermal Insulation; Quadrupole Ion Mass Spectrometer for Masses of 2 to 50 Da; Miniature Laser Doppler Velocimeter for Measuring Wall Shear; Coherent Laser Instrument Would Measure Range and Velocity; Printed Microinductors for Flexible Substrates; Digital Receiver for Microwave Radiometry; Printed Antennas Made Reconfigurable by Use of MEMS Switches; Traffic-Light-Preemption Vehicle-Transponder Software Module; Intersection-Controller Software Module; Central-Monitor Software Module; Estimating Effects of Multipath Propagation on GPS Signals; Parallel Adaptive Mesh Refinement Library; Predicting Noise From Aircraft Turbine-Engine Combustors; Generating Animated Displays of Spacecraft Orbits; Diagnosis and Prognosis of Weapon Systems; Training Software in Artificial-Intelligence Computing Techniques; APGEN Version 5.0; Single-Command Approach and Instrument Placement by a Robot on a Target; Three-Dimensional Audio Client Library; Isogrid Membranes for Precise, Singly Curved Reflectors; Nickel-Tin Electrode Materials for Nonaqueous Li-Ion Cells; Photocatalytic Coats in Glass Drinking-Water Bottles; Fast Laser Shutters With Low Vibratory Disturbances; Series-Connected Buck Boost Regulators; Space Physics Data Facility Web Services; Split-Resonator, Integrated-Post Vibratory Microgyroscope; Blended Buffet-Load-Alleviation System for Fighter Airplane; Gifford-McMahon/Joule-Thomson Refrigerator Cools to 2.5 K; High-Temperature, High-Load-Capacity Radial Magnetic Bearing; Fabrication of Spherical Reflectors in Outer Space; Automated Rapid Prototyping of 3D Ceramic Parts; Tissue Engineering Using Transfected Growth-Factor Genes; Automation of Vapor-Diffusion Growth of Protein Crystals; Atom Skimmers and Atom Lasers Utilizing Them; Gears Based on Carbon Nanotubes; Patched Off-Axis Bending/Twisting Actuators for Thin Mirrors; and Improving Control in a Joule-Thomson Refrigerator

    MEMS Gyroscopes for Consumers and Industrial Applications

    Get PDF
    none2mixedAntonello, Riccardo; Oboe, RobertoAntonello, Riccardo; Oboe, Robert

    Modeling of a folded spring supporting MEMS gyroscope

    Get PDF
    Microelectromechanical systems (MEMS) are integrated mechanical and electrical devices that are fabricated with features micrometers in size. MEMS are used as chemical laboratories on a chip, actuators, sensors, etc. To increase their operational capability, various MEMS sensors are being integrated into sensor systems, whose functionality may not decrease when their size decreases. However, before more advancement can be made in the sensor systems, behavior of individual sensors must be better understood. Without the basic knowledge of how and why MEMS sensors react the way they do, it is impossible to determine how MEMS sensor systems will behave. Out of the many sensors that can be included in the system, a MEMS gyroscope was selected for consideration in this paper. More specifically, the effects that suspension has on the topography of the microgyroscopes were studied. In this thesis, the folded springs that support the MEMS gyroscopes were modeled using analytical and computational methods, whose results were verified using experimentation. The analytical results correlated well with the computational and experimental results. The analytical and computational results for the deformations of the cantilever compared within 0.1%. The differences between the analytical and experimental results were on the order of 10%. Knowledge gained from these studies will help in the development of a through methodology for modeling the microgyroscope. This methodology will facilitate insertion of the microgyroscopes into the sensor systems

    HYPERSPECTRAL IMAGING USING SILICON MICROMACHINED VIBRATORY GRATING SCANNERS

    Get PDF
    Ph.DDOCTOR OF PHILOSOPH

    NASA Tech Briefs, September 1997

    Get PDF
    Topics include: Data Acquisition and Analysis; Electronic Components and Circuits; Electronic Systems; Physical Sciences; Materials; Computer Software; Mechanics; Machinery/Automation; Manufacturing/Fabrication; Mathematics and Information Sciences

    NASA Tech Briefs, June 2000

    Get PDF
    Topics include: Computer-Aided Design and Engineering; Electronic Components and Circuits; Electronic Systems; Test and Measurement; Physical Sciences; Materials; Computer Programs; Computers and Peripherals

    Three Dimensional Microfabrication and Micromoulding

    Get PDF
    Master'sMASTER OF ENGINEERIN
    corecore