An analytical approach to integral resonant control of second-order systems

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A robust loop-shaping approach to fast and accurate nanopositioning

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A Modified Positive Velocity and Position Feedback scheme with delay compensation for improved nanopositioning performance

Acknowledgments This paper was sponsored by the Spanish FPU12/00984 Program (Ministerio de Educacion, Cultura y Deporte). It was also sponsored by the Spanish Government Research Program with the Project DPI2012-37062-CO2-01 (Ministerio de Economia y Competitividad) and by the European Social Fund.Peer reviewedPostprin

Optimal integral force feedback and structured PI tracking control : application for objective lens positioner

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Fractional Repetitive Control of Nanopositioning Stages for High-Speed Scanning Using Low-Pass FIR Variable Fractional Delay Filter

This work was supported by the National Natural Science Foundation of China under Grant 51975375, the Binks Trust Visiting Research Fellowship (2018) (University of Aberdeen, UK) awarded to Dr. Sumeet S. Aphale and the SJTU overseas study grant awarded to Linlin Li. The authors would like to thank Mr. Wulin Yan for his assistance with the experiments.Peer reviewedPostprin

Sinteza H-beskonačno regulatora s unaprijednom granom za kompenzaciju histereze kod piezoelektričnih aktuatora

Piezoelectric actuators, widely used in different micro/nanopositioning applications, generally exhibit nonlinear hysteresis characteristics. The compensation of hysteretic behavior of piezoelectric actuators is mandatory for precise micro/nanopositioning. In this paper, nonlinear hysteresis effect is first characterized using the Prandtl-Ishlinskii hysteresis model. The inverse of the Prandtl-Ishlinskii hysteresis model is employed as a feed-forward controller to compensate for hysteresis nonlinearities of the piezoelectric actuator. Slight hysteresis nonlinearity is still observed in the experimental results due to small mismatch between the identified hysteresis model and the measured hysteresis loop. To further enhance the performance of the piezoelectric actuator in terms of mitigation of hysteresis nonlinearity and precise reference tracking, advanced robust full-order as well as fixed-order H-infinity feedback controllers are designed and applied to this actuator in the presence of feed-forward compensator. The experimental results verify the effectiveness of the proposed control scheme in achieving the improved tracking performance with peak-to-peak tracking error of less than 1% for the desired displacement of 12 um with tracking frequency of 10 Hz.Piezoelektrični aktuatori, rasprostranjeni u različitim primjenama mikro/nanopozicioniranja, općenito su izloženi nelinearnim histereznim karakteristikama. Kompenzacija histereznog ponašanja piezoelektričnih aktuatora nužna je za precizno mikro/nanopozicioniranje. Inverzni Prandtl-Ishlinskii histerezni model korišten je za unaprijednu kompenzaciju histereznih nelinearnosti piezoelektričnog aktuatora. Neznatna histerezna nelinearnost još uvijek je vidljiva u eksperimentalnim rezultatima zbog malog neslaganja između identificiranog histereznog modela i mjerene histerezne petlje. Za daljnje poboljšanje performansi piezoelektričnog aktuatora u smislu smanjenja histerezne nelinearnosti i preciznog slijeđenja reference, napredni robusni H-beskonačno regulatori punog i određenog reda sintetizirani su i primijenjeni na ovaj aktuator uz prisutnost unaprijednog kompenzatora. Eksperimentalni rezultati potvrđuju efektivnost predložene upravljačke strukture u postizanju poboljšanih performansi slijeđenja, uz vršnu vrijednost pogreške manju od 1% za ciljani pomak od 12 um s frekvencijom slijeđenja od 10 Hz

High-bandwidth nanopositioning via active control of system resonance

Acknowledgements This work was supported in part by the National Natural Science Foundation of China (Grant Nos. U2013211 and 51975375), the Open Foundation of the State Key Laboratory of Fluid Power and Mechatronic Systems, China (Grant No. GZKF-202003), and the Binks Trust Visiting Research Fellowship (2018), University of Aberdeen, UK, awarded to Dr. Sumeet S. Aphale.Peer reviewedPublisher PD

A dual-loop tracking control approach to precise nanopositioning

The author(s) received no financial support for the research, authorship, and/or publication of this article.Peer reviewedPostprin