Design and Analysis of a Fibre-Shaped Micro-Actuator for Robotic Gripping

A prototype of an automatic micropositioning system was developed. This prototype uses a shape memory alloy (SMA) actuator, a dedicated PI controller and a piece of software to command a desired motion profile for the actuator. The proposed micropositioning system is characterized by a 4 mm stroke, a 1 μm resolution and a 70 g nominal force and can be commanded directly from a personal computer and without human retroaction. The closed loop positioning resolution (1 μm) is obtained in spite of inaccurate system behaviour during its movement

A microgripper for single cell manipulation

This thesis presents the development of an electrothermally actuated microgripper for the manipulation of cells and other biological particles. The microgripper has been fabricated using a combination of surface and bulk micromachining techniques in a three mask process. All of the fabrication details have been chosen to enable a tri-layer, polymer (SU8) - metal (Au) - polymer (SU8), membrane to be released from the substrate stress free and without the need for sacrificial layers. An actuator design, which completely eliminates the parasitic resistance of the cold arm, is presented. When compared to standard U-shaped actuators, it improves the thermal efficiency threefold. This enables larger displacements at lower voltages and temperatures. The microgripper is demonstrated in three different configurations: normally open mode, normally closed mode, and normally open/closed mode. It has-been modelled using two coupled analytical models - electrothermal and thermomechanical - which have been custom developed for this application. Unlike previously reported models, the electrothermal model presented here includes the heat exchange between hot and cold arms of the actuators that are separated by a small air gap. A detailed electrothermomechanical characterisation of selected devices has permitted the validation of the models (also performed using finite element analysis) and the assessment of device performance. The device testing includes electrical, deflection, and temperature measurements using infrared (IR) thermography, its use in polymeric actuators reported here for the first time. Successful manipulation experiments have been conducted in both air and liquid environments. Manipulation of live cells (mice oocytes) in a standard biomanipulation station has validated the microgripper as a complementary and unique tool for the single cell experiments that are to be conducted by future generations of biologists in the areas of human reproduction and stem cell research

Micro-manufacturing : research, technology outcomes and development issues

Besides continuing effort in developing MEMS-based manufacturing techniques, latest effort in Micro-manufacturing is also in Non-MEMS-based manufacturing. Research and technological development (RTD) in this field is encouraged by the increased demand on micro-components as well as promised development in the scaling down of the traditional macro-manufacturing processes for micro-length-scale manufacturing. This paper highlights some EU funded research activities in micro/nano-manufacturing, and gives examples of the latest development in micro-manufacturing methods/techniques, process chains, hybrid-processes, manufacturing equipment and supporting technologies/device, etc., which is followed by a summary of the achievements of the EU MASMICRO project. Finally, concluding remarks are given, which raise several issues concerning further development in micro-manufacturing

Magnetic Levitation of Polymeric Photo-thermal Microgrippers

Precise manipulation of micro objects became great interest in engineering and science with the advancements in microengineering and microfabrication. In this thesis, a magnetically levitated microgripper is presented for microhandling tasks. The use of magnetic levitation for positioning reveals the problems associated with modeling of complex surface forces and the use of jointed parts or wires. The power required for the levitation of the microgripper is generated by an external drive unit that makes further minimization of the gripper possible. The gripper is made of a biocompatible material and can be activated remotely. These key features make the microgripper a great candidate for manipulation of micro components and biomanipulation. In order to achieve magnetic levitation of microrobots, the magnetic field generated by the magnetic levitation setup is simulated. The magnetic flux density in the air gap region is improved by the integration of permanent magnets and an additional electromagnet to the magnetic loop assembly. The levitation performance is evaluated with millimeter size permanent magnets. An eddy current damping method is implemented and the levitation accuracy is doubled by reducing the positioning error to 20.3 µm. For a MEMS-compatible microrobot design, the electrodeposition of Co-Ni-Mn-P magnetic thin films is demonstrated. Magnetic films are deposited on silicon substrate to form the magnetic portion of the microrobot. The electrodeposited films are extensively characterized. The relationship between the deposition parameters and structural properties is discussed leading to an understanding of the effect of deposition parameters on the magnetic properties. It is shown that both in-plane and out-of-plane magnetized films can be obtained using electrodeposition with slightly differentiated deposition parameters. The levitation of the electrodeposited magnetic samples shows a great promise toward the fabrication of levitating MEMS devices. The end-effector tool of the levitating microrobot is selected as a microgripper that can achieve various manipulation operations such as pulling, pushing, tapping, grasping and repositioning. The microgripper is designed based on a bent-beam actuation technique. The motion of the gripper fingers is achieved by thermal expansion through laser heat absorption. This technique provided non-contact actuation for the levitating microgripper. The analytical model of the displacement of the bent-beam actuator is developed. Different designs of microgripper are fabricated and thoroughly characterized experimentally and numerically. The two microgripper designs that lead to the maximum gripper deflection are adapted for the levitating microrobot. The experimental results show that the levitating microrobot can be positioned in a volume of 3 x 3 x 2 cm^3. The positioning error is measured as 34.3 µm and 13.2 µm when electrodeposited magnets and commercial permanent magnets are used, respectively. The gripper fingers are successfully operated on-the-fly by aligning a visible wavelength laser beam on the gripper. Micromanipulation of 100 µm diameter electrical wire, 125 µm diameter optical fiber and 1 mm diameter cable strip is demonstrated. The microgripper is also positioned in a closed chamber without sacrificing the positioning accuracy

An overview of novel actuators for soft robotics

In this systematic survey, an overview of non-conventional actuators particularly used in soft-robotics is presented. The review is performed by using well-defined performance criteria with a direction to identify the exemplary and potential applications. In addition to this, initial guidelines to compare the performance and applicability of these novel actuators are provided. The meta-analysis is restricted to five main types of actuators: shape memory alloys (SMAs), fluidic elastomer actuators (FEAs), shape morphing polymers (SMPs), dielectric electro-activated polymers (DEAPs), and magnetic/electro-magnetic actuators (E/MAs). In exploring and comparing the capabilities of these actuators, the focus was on eight different aspects: compliance, topology-geometry, scalability-complexity, energy efficiency, operation range, modality, controllability, and technological readiness level (TRL). The overview presented here provides a state-of-the-art summary of the advancements and can help researchers to select the most convenient soft actuators using the comprehensive comparison of the suggested quantitative and qualitative criteria

Design and realization of a microassembly workstation

With the miniaturization of products to the levels of micrometers and the recent developments in microsystem fabrication technologies, there is a great need for an assembly process for the formation of complex hybrid microsystems. Integration of microcomponents made up of different materials and manufactured using different micro fabrication techniques is still a primary challenge since some of the fundamental problems originating from the small size of parts to be manipulated, high precision necessity and specific problems of the microworld in that field are still not fully investigated. In this thesis, design and development of an open-architecture and reconfigurable microassembly workstation for efficient and reliable assembly of micromachined parts is presented. The workstation is designed to be used as a research tool for investigation of the problems in microassembly. The development of such a workstation includes the design of: (i) a manipulation system consisting of motion stages providing necessary travel range and precision for the realization of assembly tasks, (ii) a vision system to visualize the microworld and the determination of the position and orientation of micro components to be assembled, (iii) a robust control system and necessary fixtures for the end effectors that allow easy change of manipulation tools and make the system ready for the desired task. In addition tele-operated and semi-automated assembly concepts are implemented. The design is verified by implementing tasks in various ranges for micro-parts manipulation. The versatility of the workstation is demonstrated and high accuracy of positioning is shown

In-Mold Assembly of Multi-Functional Structures

Combining the recent advances in injection moldable polymer composites with the multi-material molding techniques enable fabrication of multi-functional structures to serve multiple functions (e.g., carry load, support motion, dissipate heat, store energy). Current in-mold assembly methods, however, cannot be simply scaled to create structures with miniature features, as the process conditions and the assembly failure modes change with the feature size. This dissertation identifies and addresses the issues associated with the in-mold assembly of multi-functional structures with miniature components. First, the functional capability of embedding actuators is developed. As a part of this effort, computational modeling methods are developed to assess the functionality of the structure with respect to the material properties, process parameters and the heat source. Using these models, the effective material thermal conductivity required to dissipate the heat generated by the embedded small scale actuator is identified. Also, the influence of the fiber orientation on the heat dissipation performance is characterized. Finally, models for integrated product and process design are presented to ensure the miniature actuator survivability during embedding process. The second functional capability developed as a part of this dissertation is the in-mold assembly of multi-material structures capable of motion and load transfer, such as mechanisms with compliant hinges. The necessary hinge and link design features are identified. The shapes and orientations of these features are analyzed with respect to their functionality, mutual dependencies, and the process cost. The parametric model of the interface design is developed. This model is used to minimize both the final assembly weight and the mold complexity as the process cost measure. Also, to minimize the manufacturing waste and the risk of assembly failure due to unbalanced mold filling, the design optimization of runner systems used in multi-cavity molds for in-mold assembly is developed. The complete optimization model is characterized and formulated. The best method to solve the runner optimization problem is identified. To demonstrate the applicability of the tools developed in this dissertation towards the miniaturization of robotic devices, a case study of a novel miniature air vehicle drive mechanism is presented

Prototyping for Research and Industry

In this thesis we want to present some of the activities carried out during the PhD studies held at the PhD School "L. da Vinci" in the period from January 2012 to December 2014. The activities were held in the fields of robotics and mechanical engineering, and the main theme was the prototyping of new concepts, as well as the activity of conceptual design in its different phases, from generation of the idea, to the realization and testing of prototypes. The conceptual design phase is of fundamental importance to structure the process of generation of new ideas. Sometimes it is a process that is carried out unconsciously by the inventor. Providing a tool that allows to guide him in the various stages of idea generation can lead to advantages that let the inventor to explore areas from which take inspiration, which otherwise would not have been taken into account. An aspect of fundamental importance in the development of new prototypes is a process that goes in the opposite direction of the idea generation phase. Initially the conceptual design tends to provide tools to generate as many ideas as possible, but at some point there is the need to select a limited number of cases to investigate. Through the selection phase, which can be structured at levels more or less structured, and more or less qualitative/quantitative, the inventor tends to identify, case by case, which are the ideas in which is worth investing time and resources, before moving to the following stages. Prototyping, as well as its previous phase, now commonly called pretotyping, are mandatory steps for those who want to develop any new idea. The success of the final product or service may depend from the analysis of the pretotype first, and of the prototype later, since it allows to detect limits and possible improvements of the concept before moving to the final implementation phase