Functional modelling and prototyping of electronic integrated kinetic energy harvesters

The aim of developing infinite-life autonomous wireless electronics, powered by the energy of the surrounding environment, drives the research efforts in the field of Energy Harvesting. Electromagnetic and piezoelectric techniques are deemed to be the most attractive technologies for vibrational devices. In the thesis, both these technologies are investigated taking into account the entire energy conversion chain. In the context of the collaboration with the STMicroelectronics, the project of a self-powered Bluetooth step counter embedded in a training shoe has been carried out. A cylindrical device 27 × 16mm including the transducer, the interface circuit, the step-counter electronics and the protective shell, has been developed. Environmental energy extraction occurs exploiting the vibration of a permanent magnet in response to the impact of the shoe on the ground. A self-powered electrical interface performs maximum power transfer through optimal resistive load emulation and load decoupling. The device provides 360 μJ to the load, the 90% of the maximum recoverable energy. The energy requirement is four time less than the provided and the effectiveness of the proposed device is demonstrated also considering the foot-steps variability and the performance spread due to prototypes manufacturing. In the context of the collaboration with the G2Elab of Grenoble and STMicroelectronics, the project of a piezoelectric energy arvester has been carried out. With the aim of exploiting environmental vibrations, an uni-morph piezoelectric cantilever beam 60×25×0.5mm with a proof mass at the free-end has been designed. Numerical results show that electrical interfaces based on SECE and sSSHI techniques allows increasing performance up to the 125% and the 115% of that in case of STD interface. Due to the better performance in terms of harvested power and in terms of electric load decoupling, a self-powered SECE interface has been prototyped. In response to 2 m/s2 56,2 Hz sinusoidal input, experimental power recovery of 0.56mW is achieved demonstrating that the device is compliant with standard low-power electronics requirements

Development of MEMS Piezoelectric Vibration Energy Harvesters with Wafer-Level Integrated Tungsten Proof-Mass for Ultra Low Power Autonomous Wireless Sensors

La génération d’énergie localisée et à petite échelle, par transformation de l’énergie vibratoire disponible dans l’environnement, est une solution attrayante pour améliorer l’autonomie de certains noeuds de capteurs sans-fil pour l’Internet des objets (IoT). Grâce à des microdispositifs inertiels résonants piézoélectriques, il est possible de transformer l’énergie mécanique en électricité. Cette thèse présente une étude exhaustive de cette technologie et propose un procédé pour fabriquer des microgénérateurs MEMS offrant des performances surpassant l’état de l’art. On présente d’abord une revue complète des limites physiques et technologiques pour identifier le meilleur chemin d’amélioration. En évaluant les approches proposées dans la littérature (géométrie, architecture, matériaux, circuits, etc.), nous suggérons des métriques pour comparer l’état de l’art. Ces analyses démontrent que la limite fondamentale est l’énergie absorbée par le dispositif, car plusieurs des solutions existantes répondent déjà aux autres limites. Pour un générateur linéaire résonant, l’absorption d’énergie dépend donc des vibrations disponibles, mais aussi de la masse du dispositif et de son facteur de qualité. Pour orienter la conception de prototypes, nous avons réalisé une étude sur le potentiel des capteurs autonomes dans une automobile. Nous avons évalué une liste des capteurs présents sur un véhicule pour leur compatibilité avec cette technologie. Nos mesures de vibrations sur un véhicule en marche aux emplacements retenus révèlent que l’énergie disponible pour un dispositif linéaire résonant MEMS se situe entre 30 à 150 Hz. Celui-ci pourrait produire autour de 1 à 10 μW par gramme. Pour limiter la taille d’un générateur MEMS pouvant produire 10 μW, il faut une densité supérieure à celle du silicium, ce qui motive l’intégration du tungstène. L’effet du tungstène sur la sensibilité du dispositif est évident, mais nous démontrons également que l’usage de ce matériau permet de réduire l’impact de l’amortissement fluidique sur le facteur de qualité mécanique Qm. En fait, lorsque l’amortissement fluidique domine, ce changement peut améliorer Qm d’un ordre de grandeur, passant de 103 à 104 dans l’air ambiant. Par conséquent, le rendement du dispositif est amélioré sans utiliser un boîtier sous vide. Nous proposons ensuite un procédé de fabrication qui intègre au niveau de la tranche des masses de tungstène de 500 μm d’épais. Ce procédé utilise des approches de collage de tranches et de gravure humide du métal en deux étapes. Nous présentons chaque bloc de fabrication réalisé pour démontrer la faisabilité du procédé, lequel a permis de fabriquer plusieurs prototypes. Ces dispositifs ont été testés en laboratoire, certains démontrant des performances records en terme de densité de puissance normalisée. Notre meilleur design se démarque par une métrique de 2.5 mW-s-1/(mm3(m/s2)2), soit le meilleur résultat répertorié dans l’état de l’art. Avec un volume de 3.5 mm3, il opère à 552.7 Hz et produit 2.7 μW à 1.6 V RMS à partir d’une accélération de 1 m/s2. Ces résultats démontrent que l’intégration du tungstène dans les microgénérateurs MEMS est très avantageuse et permet de s’approcher davantage des requis des applications réelles.Small scale and localized power generation, using vibration energy harvesting, is considered as an attractive solution to enhance the autonomy of some wireless sensor nodes used in the Internet of Things (IoT). Conversion of the ambient mechanical energy into electricity is most often done through inertial resonant piezoelectric microdevices. This thesis presents an extensive study of this technology and proposes a process to fabricate MEMS microgenerators with record performances compared to the state of the art. We first present a complete review of the physical and technological limits of this technology to asses the best path of improvement. Reported approaches (geometries, architectures, materials, circuits) are evaluated and figures of merit are proposed to compare the state of the art. These analyses show that the fundamental limit is the absorbed energy, as most proposals to date partially address the other limits. The absorbed energy depends on the level of vibrations available, but also on the mass of the device and its quality factor for a linear resonant generator. To guide design of prototypes, we conducted a study on the potential of autonomous sensors in vehicles. A survey of sensors present on a car was realized to estimate their compatibility with energy harvesting technologies. Vibration measurements done on a running vehicle at relevant locations showed that the energy available for MEMS devices is mostly located in a frequency range of 30 to 150 Hz and could generate power in the range of 1-10 μW per gram from a linear resonator. To limit the size of a MEMS generator capable of producing 10 μW, a higher mass density compared to silicon is needed, which motivates the development of a process that incorporates tungsten. Although the effect of tungsten on the device sensitivity is well known, we also demonstrate that it reduces the impact of the fluidic damping on the mechanical quality factor Qm. If fluidic damping is dominant, switching to tungsten can improve Qm by an order of magnitude, going from 103 to 104 in ambient air. As a result, the device efficiency is improved despite the lack of a vacuum package. We then propose a fabrication process flow to integrate 500 μm thick tungsten masses at the wafer level. This process combines wafer bonding with a 2-step wet metal etching approach. We present each of the fabrication nodes realized to demonstrate the feasibility of the process, which led to the fabrication of several prototypes. These devices are tested in the lab, with some designs demonstrating record breaking performances in term of normalized power density. Our best design is noteworthy for its figure of merit that is around 2.5 mW-s-1/(mm3(m/s2)2), which is the best reported in the state of the art. With a volume of 3.5 mm3, it operates at 552.7 Hz and produces 2.7 μW at 1.6 V RMS from an acceleration of 1 m/s2. These results therefore show that tungsten integration in MEMS microgenerators is very advantageous, allowing to reduce the gap with needs of current applications

Circuits and Systems for Energy Harvesting and Internet of Things Applications

The Internet of Things (IoT) continues its growing trend, while new “smart” objects are con-stantly being developed and commercialized in the market. Under this paradigm, every common object will be soon connected to the Internet: mobile and wearable devices, electric appliances, home electronics and even cars will have Internet connectivity. Not only that, but a variety of wireless sensors are being proposed for different consumer and industrial applications. With the possibility of having hundreds of billions of IoT objects deployed all around us in the coming years, the social implications and the economic impact of IoT technology needs to be seriously considered. There are still many challenges, however, awaiting a solution in order to realize this future vision of a connected world. A very important bottleneck is the limited lifetime of battery powered wireless devices. Fully depleted batteries need to be replaced, which in perspective would generate costly maintenance requirements and environmental pollution. However, a very plausible solution to this dilemma can be found in harvesting energy from the ambient. This dissertation focuses in the design of circuits and system for energy harvesting and Internet of Things applications. The first part of this dissertation introduces the research motivation and fundamentals of energy harvesting and power management units (PMUs). The architecture of IoT sensor nodes and PMUs is examined to observe the limitations of modern energy harvesting systems. Moreover, several architectures for multisource harvesting are reviewed, providing a background for the research presented here. Then, a new fully integrated system architecture for multisource energy harvesting is presented. The design methodology, implementation, trade-offs and measurement results of the proposed system are described. The second part of this dissertation focus on the design and implementation of low-power wireless sensor nodes for precision agriculture. First, a sensor node incorporating solar energy harvesting and a dynamic power management strategy is presented. The operation of a wireless sensor network for soil parameter estimation, consisting of four nodes is demonstrated. After that, a solar thermoelectric generator (STEG) prototype for powering a wireless sensor node is proposed. The implemented solar thermoelectric generator demonstrates to be an alternative way to harvest ambient energy, opening the possibility for its use in agricultural and environmental applications. The open problems in energy harvesting for IoT devices are discussed at the end, to delineate the possible future work to improve the performance of EH systems. For all the presented works, proof-of-concept prototypes were fabricated and tested. The measured results are used to verify their correct operation and performance

Characterization of advanced materials for low-frequency Vibrational Energy Harvesting (VEH)

openNowadays sensors are among the most exploited systems in everyday life, with several applications stimulating an increasing amount of research. They generally require external power, thus adding issues such as maintenance and size constraints. The most promising energy harvesting (EH) technology for miniaturization is Reverse Electro wetting on Dielectric (REWoD). It can provide high power density by exploiting the mechanical modulation of the capacity at the liquid/dielectric interface attaining, without any external bias, power densities of µW/cm2. With respect to other EH techniques, REWoD harvests energy from low frequency vibrations (< 10Hz, human motion). I exploited low-cost materials as proof of concept of the feasibility of vibrational EH, suitable for wearable devices, using highly hydrophobic Al and PVDF coated electrodes in combination with polyacrylamide (PAAm) hydrogels loaded with LiCl solutions. The morphology at the sub-micrometer scale and the composition of the outer layers of Al have been studied as a function of the chemical etching time and have been correlated with the surface wettability. The etched Al surfaces exhibit binary structures with nanoscale block-like convexes and hollows, providing more space for air trapping. The analysis shows not only that the change in wetting behaviour correlates with the amount of Al hydroxide at the surface, but also confirms the essential role of the adsorption of airborne carbon compounds. The hydrophobic behaviour depends therefore on the combined effects of surface morphology and surface chemical composition. To compensate for the degradation of the hydrogels with time due to the microstructure of the external oxide layer, an alternative bare Al electrode covered with PVDF has been tested: PAAm hydrogels show now no degradation with time while being able to provide, at frequencies lower than 10 Hz, a peak power/unity of 0.6 Watt, higher than 0.25 Watt, obtained by using the Al oxide electrode.openXXXIII CICLO - SCIENZE E TECNOLOGIE DELLA CHIMICA E DEI MATERIALI - Scienza e tecnologia dei materialiPaolini, Giuli

Chaotification as a Means of Broadband Vibration Energy Harvesting with Piezoelectric Materials

Computing advances and component miniaturization in circuits coupled with stagnating battery technology have fueled growth in the development of high efficiency energy harvesters. Vibration-to-electricity energy harvesting techniques have been investigated extensively for use in sensors embedded in structures or in hard-to-reach locations like turbomachinery, surgical implants, and GPS animal trackers. Piezoelectric materials are commonly used in harvesters as they possess the ability to convert strain energy directly into electrical energy and can work concurrently as actuators for damping applications. The prototypical harvesting system places two piezoelectric patches on both sides of the location of maximum strain on a cantilever beam. While efficient around resonance, performance drops dramatically should the driving frequency drift away from the beam\u27s fundamental frequency. To date, researchers have worked to improve harvesting capability by modifying material properties, using alternative geometries, creating more efficient harvesting circuits, and inducing nonlinearities. These techniques have partially mitigated the resonance excitation dependence for vibration-based harvesting, but much work remains. In this dissertation, an induced nonlinearity destabilizes a central equilibrium point, resulting in a bistable potential function governing the cantilever beam system. Depending on the environment, multiple stable solutions are possible and can coexist. Typically, researchers neglect chaos and assume that with enough energy in the ambient environment, large displacement trajectories can exist uniquely. When subjected to disturbances a system can fall to coexistent lower energy solutions including aperiodic, chaotic oscillations. Treating chaotic motion as a desirable behavior of the system allows frequency content away from resonance to produce motion about a theoretically infinite number of unstable periodic orbits that can be stabilized through control. The extreme sensitivity to initial conditions exhibited by chaotic systems paired with a pole placement control strategy pioneered by Ott, Grebogi, and Yorke permits small perturbations to an accessible system parameter to alter the system response dramatically. Periodic perturbation of the system trajectories in the vicinity of isolated unstable orbit points can therefore stabilize low-energy chaotic oscillations onto larger trajectory orbits more suitable for energy harvesting. The periodic perturbation-based control method rids the need of a system model. It only requires discrete displacement, velocity, or voltage time series data of the chaotic system driven by harmonic excitation. While the analysis techniques are not fundamentally limited to harmonic excitation, this condition permits the use of standard discrete mapping techniques to isolate periodic orbits of interest. Local linear model fits characterize the orbit and admit the necessary control perturbation calculations from the time series data. This work discusses the feasibility of such a method for vibration energy harvesting, displays stable solutions under various control algorithms, and implements a hybrid bench-top experiment using MATLAB and LabVIEW FPGA. In conclusion, this work discusses the limitations for wide-scale use and addresses areas of further work; both with respect to chaotic energy harvesting and parallel advances required within the field as a whole

Ferroelectrics

Ferroelectric materials exhibit a wide spectrum of functional properties, including switchable polarization, piezoelectricity, high non-linear optical activity, pyroelectricity, and non-linear dielectric behaviour. These properties are crucial for application in electronic devices such as sensors, microactuators, infrared detectors, microwave phase filters and, non-volatile memories. This unique combination of properties of ferroelectric materials has attracted researchers and engineers for a long time. This book reviews a wide range of diverse topics related to the phenomenon of ferroelectricity (in the bulk as well as thin film form) and provides a forum for scientists, engineers, and students working in this field. The present book containing 24 chapters is a result of contributions of experts from international scientific community working in different aspects of ferroelectricity related to experimental and theoretical work aimed at the understanding of ferroelectricity and their utilization in devices. It provides an up-to-date insightful coverage to the recent advances in the synthesis, characterization, functional properties and potential device applications in specialized areas

Energy Harvesting and Energy Storage Systems

This book discuss the recent developments in energy harvesting and energy storage systems. Sustainable development systems are based on three pillars: economic development, environmental stewardship, and social equity. One of the guiding principles for finding the balance between these pillars is to limit the use of non-renewable energy sources

Contributions to the design of energy harvesting systems for autonomous sensors in low power marine applications

Tesi en modalitat de compendi de publicacionsOceanographic sensor platforms provide biological and meteorological data to help understand changes in marine environment and help to preserve it. Lagrangian drifters are autonomous passive floating platforms used in climate research to obtain surface marine data. They are low-cost, versatile, easy-to-deploy and can cover large extensions of the ocean when deployed in group. These deployments can last for years, so one of the main design challenges is the autonomy of the drifter. Several energy harvesting (EH) sources are being explored to reduce costs in battery replacement maintenance efforts such as solar panels. Drifters must avoid the impact of the wind because this may compromise proper surface current tracking and therefore, should ideally be mostly submerged. This interferes with the feasibility of solar harvesting, so other EH sources are being explored such as the oscillatory movement of the drifter caused by ocean waves. Wave energy converters (WEC) are the devices that turn this movement into energy. The motion of the drifter can principally be described by 3 oscillatory degrees of freedom (DoF); surge, heave and pitch. The heave motion includes the buoyancy’s response of the drifter, which can be explained by a mass-spring-damping model. By including the wave’s hydrodynamic load in this model, it is converted into a nonlinear system whose frequency response includes the wave’s frequency and the natural frequencies from the linear system. A smart option to maximize the captured energy is to design the inner WEC with a natural frequency similar to that of the drifter's movement. In this thesis, a 4 DoF model is obtained. This model includes the heave, the surge and the pitch motion of the drifter in addition to the inner pendulum motion relative to the buoy. Simultaneously, different pendulum-type WECs for small-size oceanic drifters are proposed. One of these converters consists of an articulated double-pendulum arm with a proof mass that generates energy through its relative motion with the buoy. Different experimental tests are carried out, with a prototype below 10 cm in diameter and 300 g of total mass, proving the capability of harvesting hundreds of microwatts in standard sea conditions EH sources require an additional power management unit (PMU) to convert their variable output into a constant and clean source to be able to feed the sensor electronics. PMUs should also ensure that the maximum available energy is harvested with a maximum power point tracking (MPPT) algorithm. Some sources, such as WECs, require fast MPPT as its output can show relatively rapid variations. However, increasing the sampling rate may reduce the harvested energy. In this thesis, this trade-off is analyzed using the resistor-based fractional open circuit voltage-MPPT technique, which is appropriate for low-power EH sources. Several experiments carried out in marine environments demonstrate the need for increasing the sampling rate. For this purpose, the use of a commercial PMU IC with additional low-power circuitry is proposed. Three novel circuits with a sampling period of 60 ms are manufactured and experimentally evaluated with a small-scale and low-power WEC. Results show that these configurations improve the harvested energy by 26% in comparison to slow sampling rate configurations. Finally, an EH-powered oceanographic monitoring system with a custom wave measuring algorithm is designed. By using the energy collected by a small-size WEC, this system is capable of transmitting up to 22 messages per day containing data on its location and measured wave parameters.Les plataformes d’observació oceanogràfiques integren sensors que proporcionen dades físiques i biogeoquímiques de l’oceà que ajuden a entendre canvis en l’entorn marí. Un exemple d’aquestes plataformes són les boies de deriva (drifters), que són dispositius autònoms i passius utilitzats en l’àmbit de la recerca climàtica per obtenir dades in-situ de la superfície marina. Aquests instruments són de baix cost, versàtils, fàcils de desplegar i poden cobrir grans superfícies quan s’utilitzen en grup. L’autonomia és un dels principals desafiaments en el disseny de drifters. Per tal d’evitar els costos en la substitució de bateries, s’estudien diferents fonts de captació d’energia com per exemple la solar. Els drifters utilitzats per l’estudi dels corrents marins superficials han d’evitar l’impacte directe del vent ja que afecta al correcte seguiment de les corrents i, per tant, cal que estiguin majoritàriament submergides. Això compromet la viabilitat de l’energia solar, fet que requereix l’estudi d’altres fonts de captació com el propi moviment de la boia causat per les onades. Els convertidors d’energia de les onades (WEC, wave energy converters) compleixen aquesta funció. El moviment dels drifters pot explicar-se bàsicament a través de 3 graus de llibertat oscil·latoris: la translació vertical i la horitzontal i el balanceig. La translació vertical inclou la flotabilitat del dispositiu, que es pot descriure mitjançant el model massamolla- amortidor. Incloure la càrrega hidrodinàmica de l’onada en aquest model el converteix en un sistema no lineal amb una resposta freqüencial que inclou la de l’onada i les naturals del sistema lineal. Una opció per maximitzar l’energia captada és dissenyar el WEC amb una freqüència natural similar a la del moviment de la boia. En aquesta tesis es proposa un model de 4 graus de llibertat per a l’estudi del moviment del drifter. Aquest inclou els 3 graus de llibertat de la boia i el moviment del pèndul relatiu a ella. En paral·lel, es proposen diferents WEC del tipus pendular per drifters de reduïdes dimensions. Un d’aquests WEC consisteix en un doble braç articulat amb massa flotant que genera energia a través del seu moviment relatiu al drifter. S’han dut a terme diferents proves experimentals amb un prototip inferior a 10 cm de diàmetre i 300 g de massa, les quals demostren la seva capacitat de captar centenars de microwatts en condicions marines estàndard. Utilitzar fonts de captació d’energia requereix incloure una unitat gestora de potència (PMU, power management unit) per tal de convertir la seva sortida variable en una font constant i neta que alimenti l’electrònica dels sensors. Les PMU també tenen la funció d’assegurar que es recull la màxima energia mitjançant un algoritme de seguiment del punt de màxima potència. Els WEC requereixen un seguiment d’aquest punt ràpid perquè la seva sortida consta de variacions relativament ràpides. Tanmateix, augmentar la freqüència de mostreig pot reduir l’energia captada. En aquesta tesi, s'analitza a fons aquesta relació utilitzant la tècnica de seguiment de la tensió en circuit obert fraccionada basada en resistències, que és molt adequada per a fonts de baixa potència. Diversos experiments realitzats en el medi marí mostren la necessitat d'augmentar la freqüència de mostreig, així que es proposa l'ús de PMU comercials amb una electrònica addicional de baix consum. S’han fabricat tres circuits diferents amb un període de mostreig de 60 ms i s’han avaluat experimentalment en un WEC de reduïdes dimensions. Els resultats mostren que aquestes configuracions milloren l'energia recollida en un 26% en comparació a PMU amb mostreig més lent. Finalment, s’ha dissenyat un sistema autònom de monitorització marina que inclou un algoritme de mesura d'ones propi. Aquest sistema és capaç de transmetre fins a 22 missatges al diaPostprint (published version

Antenna and rectifier designs for miniaturized radio frequency energy scavenging systems

With ample radio transmitters scattered throughout urban landscape, RF energy scavenging emerges as a promising approach to extract energy from propagating radio waves in the ambient environment to continuously charge low power electronics. With the ability of generating power from RF energy, the need for batteries could be eliminated. The effective distance of a RF energy scavenging system is highly dependent on its conversion efficiency. This results in significant limitations on the mobility and space requirement of conventional RF energy scavenging systems as they operate only in presence of physically large antennas and conversion circuits to achieve acceptable efficiency. This thesis presents a number of novel design strategies in the antenna and rectifier designs for miniaturized RF energy scavenging system. In the first stage, different energy scavenging systems including solar energy scavenging system, thermoelectric energy scavenging system, wind energy scavenging system, kinetic energy scavenging system, radio frequency energy scavenging system and hybrid energy scavenging system are investigated with regard to their principle and performance. Compared with the other systems, RF energy scavenging system has its advantages on system size and power density with relatively stable energy source. For a typical RF energy scavenging system, antenna and rectifier (AC-DC convertor) are the two essential components to extract RF energy and convert to usable electricity. As the antenna occupies most of the area in the RF energy scavenging system, reduction in antenna size is necessary in order to design a miniaturized system. Several antennas with different characteristics are proposed in the second stage. Firstly, ultra-wideband microstrip antennas printed on a thin substrate with a thickness of 0.2 mm are designed for both half-wave and full-wave wideband RF energy scavenging. Ambient RF power is distributed over a wide range of frequency bands. A wideband RF energy scavenging system can extract power from different frequencies to maximize the input power, hence, generating sufficient output power for charging devices. Wideband operation with 4 GHz bandwidth is obtained by the proposed microstrip antenna. Secondly, multi-band planar inverted-F antennas with low profile are proposed for frequency bands of GSM 900, DCS 1800 and Wi-Fi 2.4 GHz, which are the three most promising frequency bands for RF energy scavenging. Compared with previous designs, the triple band antenna has smaller dimensions with higher antenna gain. Thirdly, a novel miniature inverted-F antenna without empty space covering Wi-Fi 2.4 GHz frequency band is presented dedicated for indoor RF energy scavenging. The antenna has dimensions of only 10 × 5 × 3.5 mm3 with appreciable efficiency across the operating frequency range. In the final stage, a passive CMOS charge pump rectifier in 0.35 μm CMOS technology is proposed for AC to DC conversion. Bootstrapping capacitors are employed to reduce the effective threshold voltage drop of the selected MOS transistors. Transistor sizes are optimized to be 200/0.5 μm. The proposed rectifier achieves improvements in both power conversion efficiency and voltage conversion efficiency compared with conventional designs. The design strategies proposed in this thesis contribute towards the realization of miniaturized RF energy scavenging systems