Hydrodynamic focusing micropump module with PDMS/nickel-particle composite diaphragms for microfluidic systems

In this research, a rapid prototype of multi-fluidic speed-modulating (MFSM) micropump which enables modulation of hydrodynamic focusing in micro-fluidic flow has been designed, fabricated, and characterized. The size of the entire module is 33 mm x 25 mm x 8 mm and comprises of three MFSM micropumps to achieve hydrodynamic focusing. These pumps are simultaneously operated by the same actuation source. Each micropump consists of Tesla-type valves in the bottom layer and PDMS/Ni-particle composite (PNPC) diaphragm in the middle layer. The deflection of the diaphragm is obtained by the external pneumatic force, and the permanent magnet controls the displacement resulting from interaction between the magnetic field and the PNPC diaphragm. Analyses of the magnetic modulation force, the flow rate of the MFSM micropump, and the hydrodynamic focused channel modulation are presented. The individual micropump can pump DI water at flow rate of 107 ìl/min, and the combination of the three micropumps is able to make the flow rate of 321 ìl/min within a hydrodynamic focusing channel. This research successfully examines the possibility of modulation of a neighboring channel flow rate through interaction with a magnetic force field to achieve hydrodynamic focusing of flow in the central channel. With appropriate magnetic interaction with diaphragm, the central channel flow width can also be varied. This technique can be utilized for possible application in drug delivery system (DDS), lab-on-a-chip (LOC) or micro total analysis system (ìTAS), and in a point of care testing (POCT) system

Design and Fabrication of Compact MEMS Electromagnetic Micro-Actuator with Planar Micro-Coil Based on PCB

This paper reports a compact design of electromagnetically driven MEMS micro-actuator utilizing planar electromagnetic coil on PCB (Printed Circuit Board). The micro-actuator device consists of an NdFeB permanent magnet, thin silicon membrane and planar micro-coil which fabricated using simple standard MEMS techniques with additional bonding step. Two planar coils designs including planar parallel and spiral coil structure with various coil geometry are chosen for the study. Analysis of the device involves the investigation of electromagnetic and mechanical properties using finite element analysis (FEA), the measurement of the membrane deflection and functionality test. The measurement results show that the thin silicon membrane is able to deform as much as 12.87 µm using planar spiral micro-coil. Reasonable match between simulation and measurement of about 82.5% has been revealed. The dynamic response test on actuator driven by parallel planar coil shows that silicon membrane effectively deformed in 40 s for an input electrical power of only 150 mW. It is also concluded that planar parallel coil is considered for the simple structure and easy fabrication of the actuator system. This study will provide important parameters for the development of compact and simple electromagnetic micro-actuator system for fluidic injection system in lab-on-chip

Nonreciprocity Applications in Acoustics and Microfluidic Systems

Breaking reciprocity in linear acoustic systems and designing a novel actuator for the nonreciprocal valveless pumps are studied in this dissertation. The first part was started by deriving the acoustic governing equations in a moving wave propagation medium. It was shown thatthe Coriolis acceleration term appears ina cross-product term with the wave vector. It means the main reason for breaking reciprocity in the circular fluid flow is the Coriolis acceleration term. Finally, the governing equations were solved numerically by COMSOL Multiphysics software. Moreover, Green`s second identity was used as a complimentary method to prove breaking reciprocityin such a system with moving medium. It is concluded that the non-reciprocity is magnified by increasing the angular velocity of the fluid system. The second part of this thesis is about achieving non-reciprocity utilizing the arrangement of a nozzle and diffuser as the inlet and outlet ports. This part’s goal is to design a novel flexible actuator design for a valveless pump. The actuation mechanism which is novel in its own term, uses liquid metal called galinstan, a non-magnetic but electrically conducting alloy. In the designed device, an alternating current (AC) is applied onto a microchannel filled with galinstan. This device is placed between two permanent magnets with opposing poles. Due to the Lorentz force law, there will be radial in-plane forces on the polymeric flexible substrate. These in-plane forces radially contract and expand the circular diaphragm to provide an upward and downward out of plane bending moment, which causes an oscillatory reciprocating movement similar to a piezoelectric actuator`s movement. Compared to the traditional piezo electric materials such as Lead Zirconate Titanate (PZT), this actuator has numerous advantages such as being flexible, having the ability to be scaled down, being formed as an integrated structure, and being fabricated by a considerably simple process. The prototype of the pump could be fabricated easily with Platinum Silicone rubber and some low-cost 3D printed elements. Although the prototype has been fabricated in a relatively large size, it is considered as a proper conceptual model representing the performance of the pump

A fluorescent oil detection device

On April 20th 2010, the largest offshore oil spill in U.S. history happened in the Gulf of Mexico. It is estimated total more than 4 million barrels oil spilled to Gulf of Mexico. More than two million gallons had been used. This had made the threat to coastal and sea ecosystem even greater and long term. Real-time monitoring is also a critical topic for oil spill response. In-situ monitoring devices are needed for rapid collection of real-time data. A new generation of instruments for spilled oil detection is reported in this paper. The main hypothesis in this research is that the sensitivity of the new instrument based on a micro-fluidic-optic chip can be higher than its conventional sized counterparts. The adoption of the micro-fluidic-optic chip helped to miniaturize the sample extraction unit and also to integrate the optical detection on the same chip substrate. Only the monitoring and displaying unit and the power supply were external to the micro-fluidic-optic chip. In this way, the micro-fluidic-optic chip is replaceable and can be disposable. This also helps to eliminate the need for cleaning the fluidic components, which may be very difficult in micro-scales because of surface tension and flow resistances. Liquid-Liquid extraction unit for sample pre-concentration and micro-optic components for fluorescence detection are the key microfluidic components and have been designed and fabricated on a single disposable chip. In the Liquid-Liquid extraction system, different designs are compared and electromagnetically actuated micro-valves and peristaltic pumps have been designed and fabricated to control the aqueous sample fluid and the organic phase solution. In the micro-optic detection system, different designs are compared and an out-of-plane lens was designed, fabricated, and integrated to enhance the measurement sensitivity. The experimental results of the integrated system have proved that the liquid-liquid extraction functioned very well and the overall measurement sensitivity of the system has been increased more than six hundred percent. An overall oil detection sensitivity blow 1ppm has been achieved. The research work presented in this dissertation has proved the feasibility of this novel oil detection instrument based on micro-fluidic-optic chip. This detection system may also be used for detection of other samples that can be measured based on fluoresce principles

Magnetoactive Elastomer Solenoid Development and Implementation in Underwater Jet Propulsion

The objective of this research was to develop and implement an elastomer solenoid capable of generating underwater jet propulsion for soft robot actuation. This is significant in pushing forward the progress of soft robotics by proving the viability of a new soft actuation method in addition to proving the viability of using silicone and magnetic particles as the driving mechanism for a soft actuator. The two primary aims were to effectively manufacture an elastomer solenoid core and to incorporate that core with a flexible diaphragm that actuates when a voltage is applied. This combination creates a pulse of water that is pumped out of an orifice. In practice, this was a success. The propagated magnetic field in the elastomer core was very apparent in air and displacements of 2.7 cm could be achieved for a 100 mm wide diaphragm. Underwater, the added damping force of the fluid limited the displacement of the diaphragm, however; the final device was able to pump water at 250 ml/min out of an orifice

Ionic Polymer Actuators: Principle, Fabrication and Applications

Ionic-polymer based actuators have the advantages of low voltage and power requirements, being easily processable, flexibility, soft action and bio-mimetic activation, which are of considerable interests for applications in biomedical micro-devices and soft robotics. In this chapter, we firstly review the development of ionic polymer actuator and reveal the universal architecture and mechanism of ionic polymer actuators. We then introduce two kinds of typical polymer actuators: ionic polymer-metal composites (IPMC) and bucky gel actuator (BGA), including their basic principle, fabrication process and typical applications. The aim of this chapter is to give some perspectives on IPMC and BGA and provide a way and case in using this actuator for real applications

Integration technologies for implantable microsystems

Microsystems targeted for implantation require careful consideration of power, thermals, size, reliability, and biocompatibility. The presented research explored appropriate integration technologies for an implantable drug delivery system suitable for use in mice weighing less than 20 grams. Microsystems technology advancements include in situ pump diaphragm formation; integrated, low volume microfluidic coupling technologies; and incorporation of a low voltage, low-power pump actuation with a zero-power off state. Utility of the developed integration technologies have been tested through in vitro reliability and validation experiments. A four-chamber peristaltic pump was created using micromachining (e.g. thin film deposition and Si etching) and direct write techniques. A novel phase change material based actuator was designed and fabricated to deflect deformable diaphragms into and out of four pump chambers while the diaphragms isolated the pumped fluid from the working material. Polyimide capillary tubing with 140-μm OD was integrated in-plane and acted as fluidic interconnects to a drug supply and to the pharmaceutical delivery site. Parylene C conformal coating and the design for gap occlusion provided sealed, flexible tubing connections to the micropump. The per chamber actuation power of 10.1 mW at 0.083 Hz resulted in fluid flow of over 100 nL/min with an efficiency of 11 mJ/nL

Implantable Microsystem Technologies For Nanoliter-Resolution Inner Ear Drug Delivery

Advances in protective and restorative biotherapies have created new opportunities to use site-directed, programmable drug delivery systems to treat auditory and vestibular disorders. Successful therapy development that leverages the transgenic, knock-in, and knock-out variants of mouse models of human disease requires advanced microsystems specifically designed to function with nanoliter precision and with system volumes suitable for implantation. The present work demonstrates a novel biocompatible, implantable, and scalable microsystem consisted of a thermal phase-change peristaltic micropump with wireless control and a refillable reservoir. The micropump is fabricated around a catheter microtubing (250 μm OD, 125 μm ID) that provided a biocompatible leak-free flow path while avoiding complicated microfluidic interconnects. Direct-write micro-scale printing technology was used to build the mechanical components of the pump around the microtubing directly on the back of a printed circuit board assembly. In vitro characterization results indicated nanoliter resolution control over the desired flow rates of 10–100 nL/min by changing the actuation frequency, with negligible deviations in presence of up to 10× greater than physiological backpressures and ±3°C ambient temperature variation. A biocompatibility study was performed to evaluate material suitability for chronic subcutaneous implantation and clinical translational development. A stand-alone, refillable, in-plane, scalable, and fully implantable microreservoir platform was designed and fabricated to be integrated with the micropump. The microreservoir consists two main components: a cavity for storing the drug and a septum for refilling. The cavity membrane is fabricated with thin Parylene-C layers, using a polyethylene glycol (PEG) sacrificial layer. The septum thickness is minimized by pre-compression down to 1 mm. The results of in vitro characterization indicated negligible restoring force for the optimized cavity membrane and thousands of punctures through the septum without leakage. The micropump and microreservoir were integrated into microsystems which were implanted in mice. The microtubing was implanted into the round window membrane niche for infusion of a known ototoxic compound (sodium salicylate) at 50 nL/min for 20 min. Real-time shifts in distortion product otoacoustic emission thresholds and amplitudes were measured during the infusion. The results match with syringe pump gold standard. For the first time a miniature and yet scalable microsystem for inner ear drug delivery was developed, enabling drug discovery opportunities and translation to human

DESIGN, FABRICATION, AND TESTING OF A PDMS MICROPUMP WITH MOVING MEMBRANES

This paper will discuss the design, fabrication, and testing of a Poly(dimethylsiloxane) (PDMS) microfluidic pump. PDMS is commonly described as a soft polymer with very appealing chemical and physical properties such as optical transparency, low permeability to water, elasticity, low electrical conductivity, and flexible surface chemistry. PDMS microfluidic device fabrication is done easily with the use of soft lithography and rapid prototyping. PDMS microfluidic devices make it easier to integrate components and interface devices with particular users, than using typically harder materials such as glass and silicon. Fabrication and design of single and multilayer PDMS microfluidic devices is much easier and straightforward than traditional methods. A novel design of a PDMS micropump with multiple vibrating membranes has been developed for application in drug delivery and molecule sorting. The PDMS micropump consists of three nozzle/diffuser elements with vibrating membranes, which are used to create pressure difference in the pump chamber. Preliminary analysis of the fluidic characteristics of the micropump was analyzed with ANSYS to investigate the transient responses of fluid velocity, pressure distributions, and flow rate during the operating cycle of the micropump. The design simulation results showed that the movement of the wall membranes combined with rectification behavior of three nozzle/diffuser elements can minimize back flow and improve net flow in one direction. To prove that the theoretical design is valid, the fabrication and testing process of the micropump has been carried out and completed. This paper will discuss in depth the design, fabrication, and testing of the PDMS micropump