147 research outputs found

    A MEMS-based Benzene Gas Sensor with a Self-heating WO3 Sensing Layer

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    In the study, a MEMS-based benzene gas sensor is presented, consisting of a quartz substrate, a thin-film WO3 sensing layer, an integrated Pt micro-heater, and Pt interdigitated electrodes (IDEs). When benzene is present in the atmosphere, oxidation occurs on the heated WO3 sensing layer. This causes a change in the electrical conductivity of the WO3 film, and hence changes the resistance between the IDEs. The benzene concentration is then computed from the change in the measured resistance. A specific orientation of the WO3 layer is obtained by optimizing the sputtering process parameters. It is found that the sensitivity of the gas sensor is optimized at a working temperature of 300 °C. At the optimal working temperature, the experimental results show that the sensor has a high degree of sensitivity (1.0 KΩ ppm−1), a low detection limit (0.2 ppm) and a rapid response time (35 s)

    Review of Portable and Low-Cost Sensors for the Ambient Air Monitoring of Benzene and Other Volatile Organic Compounds

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    This article presents a literature review of sensors for the monitoring of benzene in ambient air and other volatile organic compounds. Combined with information provided by stakeholders, manufacturers and literature, the review considers commercially available sensors, including PID-based sensors, semiconductor (resistive gas sensors) and portable on-line measuring devices as for example sensor arrays. The bibliographic collection includes the following topics: sensor description, field of application at fixed sites, indoor and ambient air monitoring, range of concentration levels and limit of detection in air, model descriptions of the phenomena involved in the sensor detection process, gaseous interference selectivity of sensors in complex VOC matrix, validation data in lab experiments and under field conditions

    Review of low-cost sensors for the ambient air monitoring of benzene and other volatile organic compounds

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    This report presents a literature review of the state of the art of sensor based monitoring of air quality of benzene and other volatile organic compounds. Combined with information provided by stakeholders, manufacturers and literature, the review considered commercially available sensors, including, PID based sensors, semiconductor (resistive gas sensor) and portable on-line measuring devices (sensor arrays). The bibliographic collection includes the following topics: sensor description, field of application in fixed, mobile, indoor and ambient air monitoring, range of concentration levels and limit of detection in air, model descriptions of the phenomena involved in the sensor detection process, gaseous interference selectivity of sensors in complex VOC matrix, validation data in lab experiments and under field conditions.JRC.C.5-Air and Climat

    Microfabricated Formaldehyde Gas Sensors

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    Formaldehyde is a volatile organic compound that is widely used in textiles, paper, wood composites, and household materials. Formaldehyde will continuously outgas from manufactured wood products such as furniture, with adverse health effects resulting from prolonged low-level exposure. New, microfabricated sensors for formaldehyde have been developed to meet the need for portable, low-power gas detection. This paper reviews recent work including silicon microhotplates for metal oxide-based detection, enzyme-based electrochemical sensors, and nanowire-based sensors. This paper also investigates the promise of polymer-based sensors for low-temperature, low-power operation

    Artificial olfactory system for multi-component analysis of gas mixtures.

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    Gas analysis is an important part of our world and gas sensing technology is becoming more essential for various aspects of our life. A novel approach for gas mixture analysis by using portable gas chromatography in combination with an array of highly integrated and selective metal oxide (MOX) sensors has been studied. We developed a system with small size (7 x 13 x 16 inches), low power consumption (~10 W) and absence of special carrier gases designed for portable field analysis (assuming apriori calibration). Low ppb and even sub-ppb level of detection for some VOCs was achieved during the analysis of 50 ml of gas samples. A detailed description of our innovative design of multi-sensory platforms based on MOX sensors for multidimensional portable gas chromatography is provided in detail in this work. As a part of this effort, we successfully synthesized nanocomposite gas sensors based on SnO2 for selective detection of hydrogen sulfide, mercaptans, alcohols, ketones and heavy hydrocarbons. The morphology of the prepared sensors was closely studied by scanning electron microscopy (SEM), atomic force microscopy (AFM), transition electron microscopy (TEM) and X-Ray diffraction (XRD). Optical and electrical properties of polycrystalline SnO2 were investigated by using UV-Vis spectroscopy, transmission line measurement (TLM) and four probe resistance measurement techniques. Furthermore, more advanced gas sensing performance for detection of benzene, toluene, ethylbenzene, and O-xylene (BTEX) of polycrystalline SnO2 film (30 nm) coated with bimetal Au:Pd (9:1 molar ratio) nanoclusters was measured. Finally, besides the experimental result, the theoretical validation of the detector’s performance was provided based on high catalytic activity of nanocomposite materials and its superior electronic structure for gas detection compared to the polycrystalline SnO2. The theoretical background of gas chemisorption process at the surface of polycrystalline SnO2 was reviewed in this work. Furthermore, one dimensional Poisson equation relates surface energy states ( and ) and the bulk electronic structure ( and ) of polycrystalline SnO2. The main theory of electronic processes on the surface of semiconductors during the gas chemisorption was further applied in a case of nanocomposite materials

    Review—Non-Invasive Monitoring of Human Health by Exhaled Breath Analysis: A Comprehensive Review

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    Exhaled human breath analysis is a very promisingfield of research work having great potential for diagnosis of diseases in non-invasive way. Breath analysis has attracted huge attention in thefield of medical diagnosis and disease monitoring in the last twodecades. VOCs/gases (Volatile Organic Compounds) in exhaled breath bear thefinger-prints of metabolic and biophysicalprocesses going on in human body. It’s a non-invasive, fast, non-hazardous, cost effective, and point of care process for diseasestate monitoring and environmental exposure assessment in human beings. Some VOCs/gases in exhaled breath are bio-markers ofdifferent diseases and their presence in excess amount is indicative of un-healthiness. Breath analysis has the potential for earlydetection of diseases. However, it is still underused and commercial device is yet not available owing to multiferrious challenges.This review is intended to provide an overview of major biomarkers (VOCs/gases) present in exhaled breath, importance of theiranalysis towards disease monitoring, analytical techniques involved, promising materials for breath analysis etc. Finally, relatedchallenges and limitations along with future scope will be touched upon.will be touched upon

    Surface-functionalized chemiresistive films that exploit h-bonding, cation-pi, and metal-halide interactions.

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    The development of gas sensors for detection of volatile organic compounds (VOCs) has been of interest in the sensing field for decades. To date, the use of metal nanoparticle-based chemiresistors for trace VOC detection, particularly gold nanoparticle-based sensors, is of great interest due to their high chemical stability, ease of synthesis, unique optical properties, large surface to volume ratio, and high level of conductivity. Much effort has been devoted towards gold monolayer protected clusters (Au MPCs) as chemiresistors to detect harmful VOCs. The present thesis documents the results of our efforts to exploit the advantages of functionalized Au MPCs chemiresistors for selective VOCs sensing by changing Au MPCs surface functionality. Our concept is to incorporate binding motifs onto Au MPCs to selectively bind target VOCs and thereby improve the sensing capabilities of chemiresistors derived from casting the functionalized Au MPCs on interdigitated electrodes (IDEs). Chapter 1 in this thesis provides a review of nanoparticle-based chemiresistors for VOCs detection, the use of MEMS technology to prepare Au MPCs-based chemiresistors, and surface functionalized Au MPCs for VOCs detection. As inceptive studies, we were able to prepare urea-functionalized Au MPCs that demonstrated remarkable sensitivity and selectivity toward acetone serving as a representative carbonyl VOC. Chapter 2 describes the urea-functionalized Au MPCs approach for acetone sensing. We examined several structural elements of thiol urea ligands to change the degree of H-bonding between adjacent urea motifs on the Au MPCs surface as well as varied the steric properties of terminal groups on the urea-functionalized chains. The responses of the developed sensors were notably affected by the urea functional motifs. A tert-butyl end group on the thiol urea sensors resulted in high sensitivity and selectivity toward acetone and delivered a sensor capable of detecting acetone in air at concentrations from 10 ppb to 10 ppm. Next, we expanded our functionalized Au MPCs-based chemiresistive studies toward detection of aromatic VOCs. We explored metal carboxylate-functionalized Au MPCs chemiresistors as a means to selectively detect aromatic hydrocarbons, such as benzene, toluene, ethylbenzene, and xylene (BTEX), at trace levels in outdoor and indoor air. Here, we exploited the strong cation-π noncovalent interactions between metal cations bound to the Au MPCs-based chemiresistor surface and the π-systems of BTEX as a principal sensing mechanism. In this study, we synthesized alkali-metal carboxylate-functionalized Au MPCs by modifying the surface chemistry of Au MPCs via an oxime ether approach. Chapter 3 includes our alkali-metal carboxylate-functionalized Au MPCs chemiresistor synthesis and their selective binding strategy for aromatic VOCs capturing over non-aromatic VOCs. For our study, Li+, Na+, and K+ ion functionalized Au MPC sensors were developed. The K+- and Na+- functionalized Au MPCs sensors show a higher response to electron rich BTEX VOCs over electron deficient nitrobenzene, cyclohexene, acetone, and methanol vapors. Response of Li+ sensor for all the analytes were very low than the Na+ and K+ ion sensors. The developed sensors response to selected aromatic and non-aromatic VOCs suggests cation-π interactions arising between the positively charged cations and the electron-rich aromatic π-systems. The results open a promising research direction for harnessing cation-π interaction to create aromatic VOC-selective sensors. Chapter 4 details our primary investigation into the use of the unusual binding ability of a cesium cation to vicinal alkyl and vinyl chlorides to detect trichloroethylene (TCE). This chapter describes the sensor response patterns of cesium carboxylate-functionalized Au MPCs chemiresistors on exposure to different alkyl and vinyl chlorides to explore the influence of structural features on TCE detection. The developed Cs+-Au MPCs sensor exhibits a higher response to analytes with vinyl 1,2-dichlorounit than the other chloro analytes. Moreover, TCE exhibits a high sensor response at 1 ppm – 5 ppm vapor concentration than the other declared harmaful chloro analytes. Hence, this study revealed the different binding affinities of cesium cation toward the geminal, vicinal and vinyl halides and how it affects for sensor response. In summary, these results show that the outer ligand structure of thiolate-protected Au MPCs plays a major role in enhancing selectivity and sensitivity toward VOCs and suggests this approach as an effective means for targeting analytes

    Design, Optimization and Characterization of Metal Oxide Nanowire Sensors

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    En aquesta tesi, he estudiat i desenvolupat un mètode de deposició química en fase vapor assistit per aerosol (AACVD), per al creixement directe de nanoagulles d'òxid de tungstè funcionalitzades o intrínseques. Els dipòsits s'han realitzat sobre diferents substrats trasndcutors per a la seva aplicació a la detecció de gasos. Aquesta tècnica ofereix la possibilitat de co-dipositar els metalls amb els òxids metàl•lics emprant una sola etapa de deposició. La síntesi del material nanoestructurat, la fabricació del dispositiu, la caracterització dels materials i la detecció de gasos han estat investigades. El mètode AACVD es va emprar per al creixement i la integració directa de la pel•lícula sensible sobre substrats ceràmics (alúmina), MEMS (micro hotplates) i polimèrics flexibles, el que demostra la seva compatibilitat i idoneïtat per al creixement de nanoestructures d'òxid metàl•lics sobre una àmplia gamma de substrats transductors. A més, el mètode AACVD s'ha implementat també en un reactor de paret freda per créixer les nanoestructures de WO3, emprant l'escalfament localitzat que permeten aconseguir les microresistencias calefactores integrades en alguns dels transdcutors emprats. Totes les pel•lícules sintetitzades en aquesta tesi doctoral es componien de nanoagulles de WO3 pur o de WO3 funcionalitzat amb nanopartícules d'or (Au), platí (Pt), òxid de coure (Cu2O) o pal•ladi (Pd). Es van utilitzar diverses tecnologies d'anàlisi per caracteritzar la morfologia, l'estructura i la composició de les pel•lícules produïdes. Els resultats van mostrar que el nostre mètode és eficaç per al creixement de nanoagulles cristal•lines de WO3 decorades amb nanopartícules de metalls / òxids metàl•lics, a temperatures moderades (és a dir, 380 ° C), amb eficàcia en els seus costos i amb temps de fabricació curts, directament sobre l'element transdcutor amb vista a obtenir sensors de gasos. Els estudis de detecció de gasos han mostrat que aquest nanomaterial híbrid té una excel•lent sensibilitat i selectivitat en comparació amb mostres de WO3 pur. A més, els nanocompostos Cu2O / WO3 i Pd / WO3 han demostrat posseir una excel•lent sensibilitat i selectivitat cap als gasos H2S i H2, respectivament.En esta tesis, he estudiado y desarrollado un método de deposición química en fase vapor asistido por aerosol (AACVD), para el crecimiento directo de nanoagujas de óxido de tungsteno funcionalizadas o intrínsecas. Los depósitos se han realizado sobre distintos sustratos transdcutores para su aplicación a la detección de gases. Esta técnica ofrece la posibilidad de co-depositar los metales con los óxidos metálicos empleando una sola etapa de deposición. La síntesis del material nanoestructurado, la fabricación del dispositivo, la caracterización de los materiales y la detección de gases han sido investigadas. El método AACVD se empleó para el crecimiento y la integración directa de la película de sensible sobre sustratos cerámicos (alúmina), MEMS (micro hotplates) y poliméricos flexibles, lo que demuestra su compatibilidad e idoneidad para el crecimiento de nanoestructuras de óxido metálicos sobre una amplia gama de sustratos transductores. Además, el método AACVD se ha implementado también en un reactor de pared fría para crecer las nanoestructuras de WO3, empleando el calentamiento localizado que permiten conseguir las microresistencias calefactoras integradas en algunos de los transductores empleados. Todas las películas sintetizadas en esta tesis doctoral se componían de nanoagujas de WO3 puro o de WO3 funcionalizado con nanopartículas de oro (Au), platino (Pt), óxido de cobre (Cu2O) o paladio (Pd). Se utilizaron diversas tecnologías de análisis para caracterizar la morfología, la estructura y la composición de las películas producidas. Los resultados mostraron que nuestro método es eficaz para el crecimiento de nanoagujas cristalinas de WO3 decoradas con nanopartículas de metales / óxidos metálicos, a temperaturas moderadas (es decir, 380 ° C), con eficacia en sus costes y con tiempos de fabricación cortos, directamente sobre el elemento trasndcutor con vistas a obtener sensores de gases. Los estudios de detección de gases han mostrado que este nanomaterial híbrido tiene una excelente sensibilidad y selectividad en comparación con muestras de WO3 puro. Además, los nanocompuestos Cu2O / WO3 y Pd / WO3 han demostrado poseer una excelente sensibilidad y selectividad hacia los gases H2S y H2, respectivamente.In this thesis, I have studied and developed aerosol assisted chemical vapour deposition (AACVD) methods for the direct growth of non-functionalized and functionalized tungsten oxide nanoneedles, onto different transducer substrates, for gas sensing applications. This technique gives the possibility to co-deposit metals with metal oxides nanostructures within a single step deposition. The nanostructured material synthesis, device fabrication, material characterization and gas sensing performance have been investigated. AACVD method was employed for the direct growth and integration of the sensing film onto ceramic (alumina), MEMS (silicon micro hotplates) and flexible polymeric substrates, demonstrating its compatibility and suitability for growing metal oxide nanostructures onto a wide spectrum of sensor substrates. Furthermore, AACVD based on the localized heating of substrates employing their embedded resistive microheaters has been also performed and developed for the growth of WO3 nanostructures, using a cold wall reactor. All the synthesized films used in this doctoral thesis were composed of pure WO3 nanoneedles or WO3 nanoneedles functionalized with either gold (Au), platinum (Pt), cuprous oxide (Cu2O) or palladium (Pd) nanoparticles. Various analytical techniques were used to characterize the morphology, the structure and the composition of the produced films. The results showed that our method is effective for growing single crystalline WO3 nanoneedles decorated with metals/metal oxides nanoparticles at moderate temperatures (i.e., 380 °C), with cost effectiveness and short fabrication times, directly onto transducers in view of obtaining gas sensors. The gas sensing studies performed showed that these hybrid nanomaterials have excellent sensitivity and selectivity compared to pristine WO3 samples. Cu2O/WO3 and Pd/WO3 nanocomposites have shown excellent sensitivity and selectivity toward H2S and H2 gases respectively

    Synthesis and gas sensing properties of inorganic semiconducting, p-n heterojunction nanomaterials

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    En aquesta tesis utilitzant principalment Aerosol Assited Chemical Vapor Deposition, AACVD, com a metodologia de síntesis d'òxid de tungstè nanoestructurat s'han fabricat diferents sensors de gasos. Per tal d'estudiar la millora en la selectivitat i la sensibilitat dels sensors de gasos basats en òxid de tungstè aquest s'han decorat, via AACVD, amb nanopartícules d'altres òxids metàl·lics per a crear heterojuncions per tal d'obtenir un increment en la sensibilitat electrònica, les propietats químiques del material o bé ambdues. En particular, s'han treballat en diferents sensors de nanofils d'òxid de tungstè decorats amb nanopartícules d'òxid de níquel, òxid de cobalt i òxid d'iridi resultant en sensors amb un gran increment de resposta i selectivitat cap al sulfur d'hidrogen, per a l'amoníac i per a l'òxid de nitrogen respectivament a concentracions traça. A més a més, s'han estudiat els mecanismes de reacció que tenen lloc entre les espècies d'oxigen adsorbides a la superfície del sensor quan interactua amb un gas. I també s'ha treballat en intentar controlar el potencial de superfície de les capes nanoestructurades per tal de controlar la deriva en la senyal al llarg del temps, quan el sensor està operant, a través d'un control de temperatura.En esta tesis utilizando principalmente Aerosol Assited Chemical Vapor Deposition, AACVD, como metodología de síntesis de óxido de tungsteno nanoestructurado se han fabricado diferentes sensores de gases. Para estudiar la mejora en la selectividad y la sensibilidad de los sensores de gases basados en óxido de tungsteno estos se han decorado, vía AACVD, con nanopartículas de otros óxidos metálicos para crear heterouniones para obtener un incremento en la sensibilidad electrónica, las propiedades químicas del material o bien ambas. En particular, se han trabajado en diferentes sensores de nanohilos de óxido de tungsteno decorados con nanopartículas de óxido de níquel, óxido de cobalto y óxido de iridio resultante en sensores con un gran incremento de respuesta y selectividad hacia el sulfuro de hidrógeno, para el amoníaco y para el óxido de nitrógeno respectivamente a concentraciones traza. Además, se han estudiado los mecanismos de reacción que tienen lugar entre las especies de oxígeno adsorbidas en la superficie del sensor cuando interactúa con un gas. Y también se ha trabajado en intentar controlar el potencial de superficie de las capas nanoestructuradas para controlar la deriva en la señal a lo largo del tiempo, cuando el sensor está trabajando, a través de un control de temperatura.In this thesis, using mainly Aerosol Assited Chemical Vapor Deposition, AACVD, as a synthesis methodology for nanostructured tungsten oxide, different gas sensors have been manufactured. To study the improvement in the selectivity and sensitivity of gas sensors based on tungsten oxide, they have been decorated, via AACVD, with nanoparticles of other metal oxides to create heterojunctions to obtain an increase in electronic sensitivity, in the chemical properties of the material or at the same time in both. Particularly, we have worked on different tungsten oxide nanowire sensors decorated with nanoparticles of nickel oxide, cobalt oxide and iridium oxide resulting in sensors with a large increase in response and selectivity towards hydrogen sulfide, for ammonia. and for nitrogen oxide respectively at trace concentrations. In addition, the reaction mechanisms that take place between oxygen species adsorbed on the sensor surface when it interacts with a gas have been also studied. Furthermore, efforts have been put on trying to control the surface potential of the nanostructured layers to control the drift in the signal over time, when operating the sensors, through temperature control

    Semiconductor Gas Sensors: Materials, Technology, Design, and Application

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    This paper presents an overview of semiconductor materials used in gas sensors, their technology, design, and application. Semiconductor materials include metal oxides, conducting polymers, carbon nanotubes, and 2D materials. Metal oxides are most often the first choice due to their ease of fabrication, low cost, high sensitivity, and stability. Some of their disadvantages are low selectivity and high operating temperature. Conducting polymers have the advantage of a low operating temperature and can detect many organic vapors. They are flexible but affected by humidity. Carbon nanotubes are chemically and mechanically stable and are sensitive towards NO and NH3, but need dopants or modifications to sense other gases. Graphene, transition metal chalcogenides, boron nitride, transition metal carbides/nitrides, metal organic frameworks, and metal oxide nanosheets as 2D materials represent gas-sensing materials of the future, especially in medical devices, such as breath sensing. This overview covers the most used semiconducting materials in gas sensing, their synthesis methods and morphology, especially oxide nanostructures, heterostructures, and 2D materials, as well as sensor technology and design, application in advance electronic circuits and systems, and research challenges from the perspective of emerging technologies. © 2020 by the authors. Licensee MDPI, Basel, Switzerland
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