MICROMANIPULATOR-RESONATOR SYSTEM FOR SELECTIVE WEIGHING OF INDIVIDUAL MICROPARTICLES

Over the past decade, MEMS-based cantilever sensors have been widely used in the detection of biomolecules, environmental pollutants, chemicals and pathogens. Cantilever-based sensors rely on attachment of target entities on their surface. The attachment causes either change in surface stress or resonance frequency of the cantilever, which is detected using various schemes that range from optical to piezoelectric. The majority of these sensors rely on probabilistic attachment of multiple target entities to the sensor surface. This introduces uncertainties since the location of the adsorbed target entity can modify the signal generated by the sensor. In addition, it does not allow the measurement of individually selected target entities. The goal of this dissertation is to exploit the cantilever-based sensors\u27 mass sensing capability to develop a supermarket weight scale for the micro world: a scheme that can enable the user to pick an individual target entity and weigh only that particular entity by precisely positioning it on a micro- weight scale

DESIGN AND MICROFABRICATION OF A CMOS-MEMS PIEZORESISTIVE ACCELEROMETER AND A NANO-NEWTON FORCE SENSOR

DESIGN AND MICROFABRICATION OF A CMOS-MEMS PIEZORESISTIVE ACCELEROMETER AND A NANO-NEWTON FORCE SENSOR by Mohd Haris Md Khir Adviser: Hongwei Qu, Ph.D. This thesis work consists of three aspects of research efforts: I. Design, fabrication, and characterization of a CMOS-MEMS piezoresistive accelerometer 2. Design, fabrication, and characterization of a CMOS-MEMS nano-Newton force sensor 3. Observer-based controller design of a nano-Newton force sensor actuator system A low-cost, high-sensitivity CMOS-MEMS piezoresistive accelerometer with large proof mass has been fabricated. Inherent CMOS polysilicon thin film was utilized as piezoresistive material and full Wheatstone bridge was constructed through easy wiring allowed by three metal layers in CMOS thin films. The device fabrication process consists of a standard CMOS process for sensor configuration and a deep reactive ion etching (DRIE) based post-CMOS microfabrication for MEMS structure release. Bulk single-crystal silicon (SCS) substrate was included in the proof mass to increase sensor sensitivity. Using a low operating power of 1.67 m W, the sensitivity was measured as 30.7 mV/g after amplification and 0.077 mV/g prior to amplification. With a total noise floor of 1.03 mg!-!Hz, the minimum detectable acceleration is found to be 32.0 mg for a bandwidth of I kHz which is sufficient for many applications. The second device investigated in this thesis work is a CMOS-MEMS capacitive force sensor capable ofnano-Newton out-of-plane force measurement. Sidewall and fringe capacitance formed by the multiple CMOS metal layers were utilized and fully differential sensing was enabled by common-centroid wiring of the sensing capacitors. Single-crystal silicon (SCS) is incorporated in the entire sensing element for robust structures and reliable sensor deployment in force measurement. A sensitivity of 8 m V /g prior to amplification was observed. With a total noise floor of 0.63 mg!-IHz, the minimum detection acceleration is found to be 19.8 mg, which is equivalent to a sensing force of 449 nN. This work also addresses the design and simulation of an observer-based nonlinear controller employed in a CMOS-MEMS nano-Newton force sensor actuator system. Measurement errors occur when there are in-plane movements of the probe tip; these errors can be controlled by the actuators incorporated within the sensor. Observerbased controller is necessitated in real-world control applications where not all the state variables are accessible for on-line measurements. V

Principle Of Bio-Inspired Insect Wing Rotational Hinge Design

A principle for designing and fabricating bio-inspired miniature artificial insect flapping wing using flexure rotational hinge design is presented. A systematic approach of selecting rotational hinge stiffness value is proposed. Based on the understanding of flapping wing aerodynamics, a dynamic simulation is constructed using the established quasi-steady model and the wing design. Simulations were performed to gain insight on how different parameters affect the wing rotational response. Based on system resonance a model to predict the optimal rotational hinge stiffness based on given wing parameter and flapping wing kinematic is proposed. By varying different wing parameters, the proposed method is shown to be applicable to a wide range of wing designs with different sizes and shapes. With the selected hinge stiffness value, aspects of the rotational joint design is discussed and an integrated wing-hinge structure design using laminated carbon fiber and polymer film is presented. Manufacturing process of such composite structure is developed to achieve high accuracy and repeatability. The yielded hinge stiffness is verified by measurements. To validate the proposed model, flapping wing experiments were conducted. A flapping actuation set up is built using DC motor and a controller is implemented on a microcontroller to track desired wing stroke kinematic. Wing stroke and rotation kinematic were extracted using a high speed camera and the lift generation is evaluated. A total of 49 flapping experiments were presented, experimental data shows good correlation with the model\u27s prediction. With the wing rotational hinge stiffness designed so that the rotational resonant frequency is twice as the stroke frequency, the resulting wing rotation generates near optimal lift. With further simulation, the proposed model shows low sensitivity to wing parameter variation. As a result, giving a design parameter of a flapping wing robot platform, the proposed principle can predict the rotational hinge stiffness that leads to near optimal wing rotation. Further iteration can be done around the selected value and achieve the optimal lift generation

Review of the applications of principles of insect hearing to microscale acoustic engineering challenges

When looking for novel, simple, and energy-efficient solutions to engineering problems, nature has proved to be an incredibly valuable source of inspiration. The development of acoustic sensors has been a prolific field for bioinspired solutions. With a diverse array of evolutionary approaches to the problem of hearing at small scales (some widely different to the traditional concept of "ear"), insects in particular have served as a starting point for several designs. From locusts to moths, through crickets and mosquitoes among many others, the mechanisms found in nature to deal with small-scale acoustic detection and the engineering solutions they have inspired are reviewed. The present article is comprised of three main sections corresponding to the principal problems faced by insects, namely frequency discrimination, which is addressed by tonotopy, whether performed by a specific organ or directly on the tympana; directionality, with solutions including diverse adaptations to tympanal structure; and detection of weak signals, through what is known as active hearing. The three aforementioned problems concern tiny animals as much as human-manufactured microphones and have therefore been widely investigated. Even though bioinspired systems may not always provide perfect performance, they are sure to give us solutions with clever use of resources and minimal post-processing, being serious contenders for the best alternative depending on the requisites of the problem