Analytical Modeling of Ultrashort-Channel MOS Transistors

Les geometries de transistors d'avui són al rang de nanòmetres d'un sol dígit. En conseqüència, les funcionalitats dels dispositius es veuen afectades negativament pels efectes de canal curt i de mecànica quàntica (SCE i QMEs). Una transició de la geometria del transistor d'efecte de camp de tipus FinFET a Gate-All-Around (GAA) FETs com FETs de nanofils cilíndrics (NW) i de nanoplaques de silici (SiNS) es preveuen en els propers nodes tecnològics per suprimir els SCE i garantir una major miniaturització del MOSFET Aquesta dissertació se centra en el modelat analític de FETs de tipus NW i SiNS de canal ultracurt.S'introdueix un concepte de dimensions de doble porta (DG) equivalent per transferir un model de potencial de DG analític a FET de NW. Un model de corrent de DG compacte es modifica aprofitant la simetria rotacional dels FET de NW. L'efecte del confinament quàntic (QC) és implementat considerant l'eixamplament addicional de la banda prohibida al càlcul d'una concentració de portadors de càrrega intrínseca efectiva i al càlcul del voltatge llindar. L'efecte de corrent túnel directe de font a drenador (DSDT) a SiNS FET ultraescalats es modela amb el nou mètode de wavelets. Aquest model calcula analíticament la probabilitat de tunelització per a cada energia de l'electró, aproximant la forma de la barrera potencial mitjançant una barrera rectangular amb una altura de barrera equivalent. A causa de la fórmula de corrent túnel de Tsu-Esaki no analíticament integrable, es presenta un mètode analític anomenat model quasi-compacte (QCM). Aquest enfocament requereix, entre altres aproximacions, una iteració de Newton i una interpolació lineal de la densitat de corrent amb efecte túnel. A més, es realitza una anàlisi criogènica de temperatura i dopatge. S'investiga la forta influència de la distància del nivell de Fermi a la font des de la vora de la banda de conducció sobre el pendent subumbral, el corrent i la reducció de la barrera induïda per drenador (DIBL). A més, es demostra i explica la fusió de dos efectes relacionats amb el pendent subumbral i el DIBL. La validesa del concepte de dimensions DG equivalents es demostra mitjançant el mesurament i les dades de simulació de TCAD Sentaurus, mentre que el mètode de wavelets es verifica mitjançant simulacions NanoMOS NEGF.Las geometrías de transistores de hoy están en el rango de nanómetros de un solo dígito. En consecuencia, las funcionalidades de los dispositivos se ven afectadas negativamente por los efectos de canal corto y de mecánica cuántica (SCE y QMEs). Una transición de la geometría del transistor de efecto de campo de tipo FinFET a Gate-All -Around (GAA) FETs tales como FETs de nanohilos cilíndricos (NW) y de nanoplacas de silicio (SiNS) se prevén en los próximos nodos tecnológicos para suprimir los SCE y garantizar una mayor miniaturización del MOSFET. Esta disertación se centra en el modelado analítico de FETs de tipo NW y SiNS de canal ultracorto. Se introduce un concepto de dimensiones de doble puerta (DG) equivalente para transferir un modelo de potencial de DG analítico a FET de NW. Un modelo de corriente de DG compacto se modifica aprovechando la simetría rotacional de los FET de NW. El efecto del confinamiento cuántico (QC) es implementado considerando el ensanchamiento adicional de la banda prohibida en el cálculo de una concentración de portadores de carga intrínseca efectiva y en el cálculo del voltaje de umbral. El efecto de corriente túnel directa de fuente a drenador (DSDT) en SiNS FET ultraescalados se modela con el nuevo método de wavelets. Este modelo calcula analíticamente la probabilidad de tunelización para cada energía del electrón aproximando la forma de la barrera de potencial mediante una barrera rectangular con una altura de barrera equivalente. Usando la fórmula de corriente túnel de Tsu-Esaki no analíticamente integrable, se presenta un método analítico denominado modelo cuasi-compacto (QCM), querequiere una iteración de Newton y una interpolación lineal de la densidad de corriente de efecto túnel. Además, se realiza un análisis criogénico en temperatura y dopaje. Se investiga la fuerte influencia del nivel de Fermi de la fuente la sobre la pendiente subumbral, la corriente y la reducción del efecto DIBL. Además, se demuestra y explica la fusión de dos efectos relacionados con la pendiente subumbral y el DIBL. La validez del concepto de dimensiones DG equivalentes se demuestra mediante datos de mediciones y de simulaciones TCAD Sentaurus, mientras que el método de wavelets se verifica mediante simulaciones NanoMOS NEGF.Today's transistor geometries are in the single-digit nanometer range. Consequently, device functionalities are negatively affected by short-channel and quantum mechanical effects (SCEs & QMEs). A transition from fin field-effect transistor (FinFET) geometry to gate-all-around (GAA) FETs such as cylindrical nanowire (NW) and silicon nanosheet (SiNS) FETs is envisioned in the upcoming technology nodes to suppress SCEs and ensure further MOSFET miniaturization. This dissertation focuses on the analytical modeling of ultrashort-channel NW and SiNS FETs. An equivalent double-gate (DG) dimensions concept is introduced to transfer an analytical DG potential model to NW FETs. A compact DG current model is modified by exploiting the rotational symmetry of NW FETs. The effect of quantum confinement (QC) is implemented by considering the additional bandgap widening in the calculation of an effective intrinsic charge carrier concentration and in the calculation of the threshold voltage. The effect of direct source-to-drain tunneling (DSDT) current in ultrascaled SiNS FETs is modeled with the new wavelet approach. This model calculates the tunneling probability analytically for each electron energy by approximating the potential barrier shape by a rectangular barrier with an equivalent barrier height. Due to the nonanalytically integrable Tsu-Esaki tunneling formula an analytical approach named quasi-compact model (QCM) is presented. This approach requires, among other approximations, a Newton iteration, and a linear interpolation of the tunneling current density. Furthermore, a cryogenic temperature and doping analysis is performed. The strong influence of the distance of the source related Fermi level from the conduction band edge on the subthreshold swing, current, and drain-induced barrier lowering (DIBL) saturation is investigated. Also, the merging of two subthreshold swing and DIBL effects is demonstrated and explained. The validity of the equivalent DG dimensions concept is proven by measurement and TCAD Sentaurus simulation data, while the wavelet approach is verified by NanoMOS NEGF simulations

Vertical Integration of Germanium Nanowires on Silicon Substrates for Nanoelectronics.

Rapid development of semiconductor industry in recent years has been primarily driven by continuous scaling. As the size of the transistors approaches tens of nanometers, we are faced with challenges due to technological and economic reasons. To this end, unconventional semiconductor materials and novel device structures have attracted a lot of interests as promising candidates to replace the Si-channel MOSFET and help extend Moore’s law. In this dissertation, we focus on chemically-synthesized germanium nanowires, and investigate their potential as electronic devices, especially when vertically integrated on a Si substrate. The contributions of the work are as follows: First, the Vapor-Liquid-Solid method for growing Ge nanowires on (111) Si substrates is explored. In addition to the growth of vertical, taper-free, intrinsic Ge nanowires, strategies for doping the nanowires, forming a radial heterojunction and controlling growth sites are also discussed. Second, the Ge/Si heterojunction obtained via nanowire growth is examined by transmission electron microscopy. We confirm the epitaxial nature of the heterojunction despite the 4% lattice mismatch and determine the transition width to be 10-15 nm. Vertical heterodiodes with independently-tuned doping profile in both Ge and Si are demonstrated. Different devices are obtained, including: (1) a rectifying diode with >1,000,000 on/off ratio and ideality factor of 1.16; (2) a tunnel diode with room temperature negative differential resistance, peak current density of 4.57 kA/cm2 and reversed-bias tunnel current of 3.2 µA/µm; (3) a non-ohmic contact due to large valence band offset between Ge and Si. All observed behaviors are very well supported by theoretical analysis of the devices. In addition, a vertical junctionless transistor with Ge/Si core/shell nanowire channel and surrounding gate is demonstrated. High performance p-type transistor behavior with on state current density of 750 µA/µm and mobility of 282 cm2/V∙s is achieved. Moreover, an analytical model is developed to quantitatively explain the measured data and excellent agreement is obtained. Finally, progress towards the realization of a nanowire tunnel transistor is reported. A physical model for nanowire tunnel transistors is proposed. Preliminary experimental results verified that the device concept works although further optimization is still required to boost its performance.PhDElectrical EngineeringUniversity of Michigan, Horace H. Rackham School of Graduate Studieshttp://deepblue.lib.umich.edu/bitstream/2027.42/120872/1/linchen_1.pd

Modelling and simulation study of NMOS Si nanowire transistors

Nanowire transistors (NWTs) represent a potential alternative to Silicon FinFET technology in the 5nm CMOS technology generation and beyond. Their gate length can be scaled beyond the limitations of FinFET gate length scaling to maintain superior off-state leakage current and performance thanks to better electrostatic control through the semiconductor nanowire channels by gate-all-around (GAA) architecture. Furthermore, it is possible to stack nanowires to enhance the drive current per footprint. Based on these considerations, vertically-stacked lateral NWTs have been included in the latest edition of the International Technology Roadmap for Semiconductors (ITRS) to allow for further performance enhancement and gate pitch scaling, which are key criteria of merit for the new CMOS technology generation. However, electrostatic confinement and the transport behaviour in these devices are more complex, especially in or beyond the 5nm CMOS technology generation. At the heart of this thesis is the model-based research of aggressively-scaled NWTs suitable for implementation in or beyond the 5nm CMOS technology generation, including their physical and operational limitations and intrinsic parameter fluctuations. The Ensemble Monte Carlo approach with Poisson-Schrödinger (PS) quantum corrections was adopted for the purpose of predictive performance evaluation of NWTs. The ratio of the major to the minor ellipsoidal cross-section axis (cross-sectional aspect ratio - AR) has been identified as a significant contributing factor in device performance. Until now, semiconductor industry players have carried out experimental research on NWTs with two different cross-sections: circular cylinder (or elliptical) NWTs and nanosheet (or nanoslab) NWTs. Each version has its own benefits and drawbacks; however, the key difference between these two versions is the cross-sectional AR. Several critical design questions, including the optimal NWT cross-sectional aspect ratio, remain unanswered. To answer these questions, the AR of a GAA NWT has been investigated in detail in this research maintaining the cross-sectional area constant. Signatures of isotropic charge distributions within Si NWTs were observed, exhibiting the same attributes as the golden ratio (Phi), the significance of which is well-known in the fields of art and architecture. To address the gap in the existing literature, which largely explores NWT scaling using single-channel simulation, thorough simulations of multiple channels vertically-stacked NWTs have been carried out with different cross-sectional shapes and channel lengths. Contact resistance, non-equilibrium transport and quantum confinement effects have been taken into account during the simulations in order to realistically access performance and scalability. Finally, the individual and combined effects of key statistical variability (SV) sources on threshold voltage (VT), subthreshold slope (SS), ON-current (Ion) and drain-induced barrier lowering (DIBL) have been simulated and discussed. The results indicate that the variability of NWTs is impacted by device architecture and dimensions, with a significant reduction in SV found in NWTs with optimal aspect ratios. Furthermore, a reduction in the variability of the threshold voltage has been observed in vertically-stacked NWTs due to the cancelling-out of variability in double and triple lateral channel NWTs

Miniaturized Transistors

What is the future of CMOS? Sustaining increased transistor densities along the path of Moore's Law has become increasingly challenging with limited power budgets, interconnect bandwidths, and fabrication capabilities. In the last decade alone, transistors have undergone significant design makeovers; from planar transistors of ten years ago, technological advancements have accelerated to today's FinFETs, which hardly resemble their bulky ancestors. FinFETs could potentially take us to the 5-nm node, but what comes after it? From gate-all-around devices to single electron transistors and two-dimensional semiconductors, a torrent of research is being carried out in order to design the next transistor generation, engineer the optimal materials, improve the fabrication technology, and properly model future devices. We invite insight from investigators and scientists in the field to showcase their work in this Special Issue with research papers, short communications, and review articles that focus on trends in micro- and nanotechnology from fundamental research to applications

Simulation of FinFET Structures

The intensive downscaling of MOS transistors has been the major driving force behind the aggressive increases in transistor density and performance, leading to more chip functionality at higher speeds. While on the other side the reduction in MOSFET dimensions leads to the close proximity between source and drain, which in turn reduces the ability of the gate electrode to control the potential distribution and current flow in the channel region and also results in some undesirable effects called the short-channel effects. These limitations associated with downscaling of MOSFET device geometries have lead device designers and researchers to number of innovative techniques which include the use of different device structures, different channel materials, different gate-oxide materials, different processes such as shallow trench isolation, source/drain silicidation, lightly doped extensions etc. to enable controlled device scaling to smaller dimensions. A lot of research and development works have been done in these and related fields and more remains to be carried out in order to exploit these devices for the wider applications

Modeling and Simulation of Subthreshold Characteristics of Short-Channel Fully-Depleted Recessed-Source/Drain SOI MOSFETs

Non-conventional metal-oxide-semiconductor (MOS) devices have attracted researchers‟ attention for future ultra-large-scale-integration (ULSI) applications since the channel length of conventional MOS devices approached the physical limit. Among the non-conventional CMOS devices which are currently being pursued for the future ULSI, the fully-depleted (FD) SOI MOSFET is a serious contender as the SOI MOSFETs possess some unique features such as enhanced short-channel effects immunity, low substrate leakage current, and compatibility with the planar CMOS technology. However, due to the ultra-thin source and drain regions, FD SOI MOSFETs possess large series resistance which leads to the poor current drive capability of the device despite having excellent short-channel characteristics. To overcome this large series resistance problem, the source/drain area may be increased by extending S/D either upward or downward. Hence, elevated-source/drain (E-S/D) and recessed-source/drain (Re-S/D) are the two structures which can be used to minimize the series resistance problem. Due to the undesirable issues such as parasitic capacitance, current crowding effects, etc. with E-S/D structure, the Re-S/D structure is a better choice. The FD Re-S/D SOI MOSFET may be an attractive option for sub-45nm regime because of its low parasitic capacitances, reduced series resistance, high drive current, very high switching speed and compatibility with the planar CMOS technology. The present dissertation is to deal with the theoretical modeling and computer-based simulation of the FD SOI MOSFETs in general, and recessed source/drain (Re-S/D) ultra-thin-body (UTB) SOI MOSFETs in particular. The current drive capability of Re-S/D UTB SOI MOSFETs can be further improved by adopting the dual-metal-gate (DMG) structure in place of the conventional single-metal-gate-structure. However, it will be interesting to see how the presence of two metals as gate contact changes the subthreshold characteristics of the device. Hence, the effects of adopting DMG structure on the threshold voltage, subthreshold swing and leakage current of Re-S/D UTB SOI MOSFETs have been studied in this dissertation. Further, high-k dielectric materials are used in ultra-scaled MOS devices in order to cut down the quantum mechanical tunneling of carriers. However, a physically thick gate dielectric causes fringing field induced performance degradation. Therefore, the impact of high-k dielectric materials on subthreshold characteristics of Re-S/D SOI MOSFETs needs to be investigated. In this dissertation, various subthreshold characteristics of the device with high-k gate dielectric and metal gate electrode have been investigated in detail. Moreover, considering the variability problem of threshold voltage in ultra-scaled devices, the presence of a back-gate bias voltage may be useful for ultimate tuning of the threshold voltage and other characteristics. Hence, the impact of back-gate bias on the important subthreshold characteristics such as threshold voltage, subthreshold swing and leakage currents of Re-S/D UTB SOI MOSFETs has been thoroughly analyzed in this dissertation. The validity of the analytical models are verified by comparing model results with the numerical simulation results obtained from ATLAS™, a device simulator from SILVACO Inc

Novel Approaches to Power Efficient GaN and Negative Capacitance Devices

Recent emergence of data-driven and computation hungry algorithms has fuelled the demand for energy and processing power at an unprecedented rate. Semiconductor industry is, therefore, under constant pressure towards developing energy efficient devices. A Shift towards materials with higher figure-of-merit compared to Si, such as GaN for power conversion is one of the options currently being pursued. A minimisation in parasitic and static power losses in GaN can be brought about by realising on-chip CMOS based gate drivers for GaN power devices. At present, p-channel MOSHFETs in GaN show poor performance due to the low mobility and the severe trade-off between |ION| and |Vth|. For the first time, it is shown that despite a poor hole mobility, it is possible to improve the on-current as well as minimise |ION| - |Vth| trade-off, by adopting a combination of techniques: using an AlGaN cap, biased two-dimensional electron gas, and shrinking source-gate and gate-drain access region and channel lengths. As part of this work, a novel vertical p-channel heterojunction tunnel FET (TFET) utilising polarisation induced tunnel junction (PITJ) is also explored, which unlike common TFETs, shows non-ambipolar transfer characteristics and a better electrostatic control over the tunneling region via the gate. Meeting the ever-increasing demand for computation would require continuous scaling of transistor physical dimensions and supply voltage. While a further reduction in physical dimension is expected to come from adopting a vertical integration scheme, scaling in supply voltage would require achieving sub-60 mV/dec of subthreshold swing. The two common approaches to achieve this are TFETs and negative capacitance (NC) FETs, where the NC operation is commonly associated with ferroelectric materials. This work develops a model to explain sub-60 mV/dec, observed in Ta2O5/ZnO thin-film-transistors, which is governed by the motion of oxygen ions inside Ta2O5, leading to NC under dynamic gate bias sweep

Design evolution of dual-material gate structure in cylindrical surrounding double-gate (CSDG) MOSFET using physics-based analytical modeling.

Doctoral Degree. University of KwaZulu- Natal, Durban.The Metal Oxide Semiconductor Field Effect Transistor (MOSFET) is the fundamental component in present Micro and Nano-electronics device applications, such as switching, memory devices, communication devices, etc. MOSFET’s dimension has shrunk down following Moore’s law to attain high-speed operation and packing density integration. The scaling of conventional MOSFET has been the most prominent technological challenge in the past few years because the decreasing device dimensions increase the charge sharing from the source to the drain and that in turn give rises to the reduced gate-control over the channel, hot carrier induced degradation, and other SCEs. These undesired effects devaluate the device performance that compels optimum device design analysis for particular operating conditions. Therefore, several innovative device design/architectures, including Double-gate, FinFET, Surrounding gate MOSFET, etc., have been developed to mitigate device scaling challenges. Comprehensive research can be traced long for one such promising gate-all-around MOSFET, i.e., Cylindrical Surrounding Double-Gate (CSDG) MOSFET centrally hollow concentric structure, provides an additional internal control gate that improves the device electrical performance and offers easy accessibility. There have been several developments in terms of improvements, and applications of CSDG MOSFET have been practiced since after its evolution. This thesis’s work has been targeted to incorporate the gate material engineering in the CSDG structure after appropriate analysis of device physics-based modeling. In particular to the proposed structure, the electric field, pinch off capacitance, and after that thickness of the device parameters’ dependence have been mathematically derived from attaining the objective. Finally, a model based on a dual-material gate in CSDG MOSFET has been proposed. The electrical field in CSDG MOSFET has been analyzed in detail using a mathematical derivation of device physics, including the Surface-Potential, threshold voltage, and the gate-oxide capacitances of the internal and external part of the device. Further, the gate-oxide capacitance of CSDG MOSFET, particularly to the device pinch-off condition, has been derived. Since the device operation and analysis at the shorter channel are not similar to conventional long-channel MOSFETs, the depletion-width variation has been studied. The identified notion has been applied to derive the approximate numerical solution and silicon thickness inducing parameters for CSDG MOSFET to deploy the improvements in the device performance and novel design modifications. As the gate-material and gate-stack engineering is an alternative to overcome the device performance degradation by enhancing the charge transport efficiency, the CSDG MOSFET in a novel Dual-Metal Gate (DMG) structure design has been proposed and analyzed using the solution of 2D Poisson’s equations in the geometrical boundary conditions of the device. The model expressions obtained solution using the proposed structure has been compared with a single metal gate structure. Finally, it has been analyzed that the proposed model exhibits an excellent match with the analytical model. The obtained DMG device structure advances the carrier velocity and transport efficiency, resulting in the surface-potential profile caused by dissimilar gate metal work-function. The superior device characteristics obtained employing a dual-material structure in CSDG are promising and can reduce the threshold voltage roll-off, suppress the hot-carrier effects and SCEs

Compact Modeling of Intrinsic Capacitances in Double-Gate Tunnel-FETs

La miniaturització dels MOSFET en els circuits integrats ha elevat la tecnologia microelectrònica. Aquesta tendència també augmenta el grau de complexitat d'aquests circuits i els seus components bàsics. En els MOSFET convencionals, el corrent es basa en l'emissió termoiònica de portadors de càrrega, que per això limita el pendent subumbral en aquests transistors a 60 mV / dec. Per tant, per superar aquest límit i continuar amb la miniaturització per mantenir el ritme de la llei de Moore, es requereixen estructures alternatives. Entre aquestes, el transistor d'efecte de camp per túnel (TFET) es considera un possible successor de l'MOSFET. A causa del seu mecanisme alternatiu de transport de corrent, conegut com a túnel de banda a banda (B2B), el pendent subumbral en TFET pot fer-se inferior al límit de 60 mV / dec. Per comprendre i estimar el comportament dels TFET, no només com un element únic sinó també a nivell de circuit, es requereix un model compacte d'aquest dispositiu. En aquesta tesi es presenta un model basat en càrrega per descriure el comportament capacitiu d'un TFET de doble porta (DG TFET). No obstant això, la simplicitat i la flexibilitat de el model permeten usar-lo per a un altre tipus d'estructures TFET, com els TFET planars o de nanofils d'una sola porta (SG TFETs). El model és verificat amb les simulacions TCAD, així com amb mesures experimentals de TFET fabricats. El model de capacitància també inclou l'efecte dels elements paràsits. A més, en el context d'aquest treball també s'investiga la influència dels contactes de barrera Schottky en el comportament capacitiu dels TFET. Aquest model finalment es combina amb un model DC compacte existent per formar un model TFET compacte complet. A continuació, el model compacte s'implementa per a simulacions transitòries de circuits oscil·ladors d'anell basats en TFET.La miniaturización de los MOSFET en los circuitos integrados ha elevado la tecnología microelectrónica. Esta tendencia también aumenta el grado de complejidad de estos circuitos y sus componentes básicos. En los MOSFET convencionales, la corriente se basa en la emisión termoiónica de portadores de carga, que por ello limita la pendiente subumbral en estos transistores a 60 mV/dec. Por tanto, para superar este límite y continuar con la miniaturización para mantener el ritmo de la ley de Moore, se requieren estructuras alternativas. Entre estas, el transistor de efecto de campo por túnel (TFET) se considera un posible sucesor del MOSFET. Debido a su mecanismo alternativo de transporte de corriente, conocido como túnel de banda a banda (B2B), la pendiente subumbral en TFET puede hacerse inferior al límite de 60 mV/dec. Para comprender y estimar el comportamiento de los TFET, no sólo como un elemento único sino también a nivel de circuito, se requiere un modelo compacto de este dispositivo. En esta tesis se presenta un modelo basado en carga para describir el comportamiento capacitivo de un TFET de doble puerta (DG TFET). Sin embargo, la simplicidad y la flexibilidad del modelo permiten usarlo para otro tipo de estructuras TFET, como los TFET planares o de nanohílos de una sola puerta (SG TFETs). El modelo es verificado con las simulaciones TCAD, así como con medidas experimentales de TFET fabricados. El modelo de capacitancia también incluye el efecto de los elementos parásitos. Además, en el contexto de este trabajo también se investiga la influencia de los contactos de barrera Schottky en el comportamiento capacitivo de los TFET. Este modelo finalmente se combina con un modelo DC compacto existente para formar un modelo TFET compacto completo. A continuación, el modelo compacto se implementa para simulaciones transitorias de circuitos osciladores de anillo basados en TFET.Miniaturization of the MOSFETs on the integrated circuits has elevated the microelectronic technology. This trend also increases the degree of complexity of these circuits and their building blocks. In conventional MOSFETs the current is based on the thermionic—emission of charge carrier, which therefore limits the subthreshold swing in these transistors to 60 mV/dec. Hence, to overcome this limit and continue with down scaling to keep pace with the Moor’s law, alternative structures are required. Among these, the tunnel—field—effect transistor (TFET) is considered as a potential successor of the MOSFET. Due to its alternative current transport mechanism, known as band—to—band (B2B) tunneling, the subthreshold swing in TFETs can overcome the 60 mV/dec limit. In order to comprehend and estimate the behavior of TFETs, not only as a single element but also on the circuit level, a compact model of this device is required. In this dissertation a charge –based model to describes the capacitive behavior of a double—gate (DG) TFET is presented. However, simplicity and flexibility of the model allow to use it for other type of TFET structures such as single—gate (SG) planar or nanowire TFETs. The model is verified with the TCAD simulations as well as the measurement data of fabricated TFETs. The capacitance model also includes the effect of the parasitic elements. Furthermore, in the context of this work also the influence of Schottky barrier contacts on the capacitive behavior of TFETs is investigated. This model is finally combined with an existing compact DC model to form a complete compact TFET model. The compact model is then implemented for transient simulations of TFET—based inverter and ring—oscillator circuits

Modelling and Simulation of Silicon Nanowire-Based Electron Devices for Computation and Sensing

Silicon Nanowires (SiNWs) are considered the fundamental component blocks of future nanoelectronics. Many interesting properties have gained them such a prominent position in the investigation in recent decades. Large surface-to-volume ratio, bio-compatibility, band-gap tuning are among the most appealing features of SiNWs. More importantly, in the ongoing process of dimension miniaturization, SiNWs compatibility with the existing and reliable silicon technology stands as a fundamental advantage. Consequently, the employment of SiNWs spred in several application fields: from computational logic where SiNWs are used to realize transistors, to bio-chemical sensing and nanophotonic applications. In this thesis work we concentrate our attention on the employment of SiNWs in computational logic and bio-chemical sensing. In particular, we aim at giving a contribution in the modelling and simulation of SiNW-based electron devices. Given the current intense investigation of new devices, the modelling of their electrical behaviour is strongly required. On one side, modelling procedures could give an insight on the physical phenomena of transport in nanometer scale systems where quantum effects are dominant. On the other side, the availability of compact models for actual devices can be of undeniable help in the future design process. This work is divided into two parts. After a brief introduction on Silicon Nanowires, the main fabrication techniques and their properties, the first part is dedicated to the modelling of Multiple-Independent Gate Transistors, a new generation of devices arisen from the composition of Gate-All-Around Transistors, finFETs and Double-Gate Transistors. Interesting applications resulting from their employment are Vertically-stacked Silicon Nanowire FETs, known to have an ambipolar behaviour, and Silicon Nanowire Arrays. We will present a compact numerical model for composite Multiple-Independent Gate Transistors which allows to compute current and voltages in complex structures. Validation of the model through simulation proves the accuracy and the computational efficiency of the resulting model. The second part of the thesis work is instead devoted to Silicon Nanowires for bio-chemical sensing. In this respect, major attention is given to Porous Silicon (PS), a non-crystalline material which demonstrated peculiar features apt for sensing. Given its not regular microscopic morphology made of a complex network of crystalline and non-crystalline regions, PS has large surface-to-volume ratio and a relevant chemical reactivity at room temperature. In this work we start from the fabrication of PS nanowires at Istituto Nazionale di Ricerca Metrologica in Torino (I.N.Ri.M.) to devise two main models for PSNWs which can be used to understand the effects of porosity on electron transport in these structures. The two modelling procedures have different validity regimes and efficiently take into account quantum effects. Their description and results are presented. The last part of the thesis is devoted to the impact of surface interaction of molecular compounds and dielectric materials on the transport properties of SiNWs. Knowing how molecules interact with silicon atoms and how the conductance of the wire is affected is indeed the core of SiNWs used for bio-chemical sensing. In order to study the phenomena involved, we performed ab-initio simulations of silicon surface interacting with SO2 and NO2 via the SIESTA package, implementing DFT code. The calculations were performed at Institut de Ciencia De Materials de Barcelona (ICMAB-CSIC) using their computational resources. The results of this simulation step are then exploited to perform simulation of systems made of an enormous quantity of atoms. Due to their large dimensions, atomistic simulations are not affordable and other approaches are necessary. Consequently, calculations with physics-based softwares on a larger spatial scale were adopted. The description of the obtained results occupies the last part of the work together with the discussion of the main theoretical insight gained with the conducted study