Design Consideration And Impact Of Gate Length Variation On Junctionless Strained Double Gate MOSFET

Aggressive scaling of Metal-oxide-semiconductor Field Effect Transistors (MOSFET) have been conducted over the past several decades and now is becoming more intricate due to its scaling limit and short channel effects (SCE). To overcome this adversity, a lot of new transistor structures have been proposed, including multi gate structure, high-k/metal gate stack, strained channel, fully-depleted body and junctionless configuration. This paper describes a comprehensive 2-D simulation design of a proposed transistor that employs all the aforementioned structures, named as Junctionless Strained Double Gate MOSFETs (JLSDGM). Variation in critical design parameter such as gate length (Lg) is considered and its impact on the output properties is comprehensively investigated. The results shows that the variation in gate length (Lg) does contributes a significant impact on the drain current (ID), on-current (ION), off-current (IOFF), ION/IOFF ratio, subthreshold swing (SS) and transconductance (gm). The JLSDGM device with the least investigated gate length (4nm) still provides remarkable device properties in which both ION and gm(max) are measured at 1680 µA/µm and 2.79 mS/µm respectively

Analytical current Model for Dual Material Double Gate Junctionless Transistor

A Transistor model with bulk current is proposed in this article for long channel dual material double gate junction less transistor. The influence of different device parameters such as body thickness, channel length, oxide thickness, and the doping density on bulk current is investigated. The proposed model is validated and compared with simulated data using Cogenda TCAD. The model is designed by Poison’s equation and depletion approximation. Current driving capability of MOSFET is improved by dual material gate compare to single material gate

Multigate MOSFETs for digital performance and high linearity, and their fabrication techniques

The aggressive downscaling of complementary metal–oxide–semiconductor (CMOS) technology is facing great challenges to overcome severe short-channel effects. Multigate MOSFETs are one of the most promising candidates for scaling beyond Si CMOS, due to better electrostatic control as compared to conventional planar MOSFETs. Conventional dry etching-induced surface damage is one of the main sources of performance degradation for multigate transistors, especially for III-V high mobility materials. It is also challenging to increase the fin aspect ratio by dry etching because of the non-ideal anisotropic etching profile. Here, we report a novel method, inverse metal-assisted chemical etching (i-MacEtch), in lieu of conventional RIE etching, for 3D fin channel formation. InP junctionless FinFETs with record high-aspect-ratio (~ 50:1) fins are demonstrated by this method for the first time. The i-MacEtch process flow eliminates dry-etching-induced plasma damage, high energy ion implantation damage, and high temperature annealing, allowing for the fabrication of InP fin channels with atomically smooth sidewalls. The sidewall features resulting from this unique and simplified process ensure high interface quality between high-k dielectric layer and InP fin channel. Experimental and theoretical analyses show that high-aspect-ratio FinFETs, which could deliver more current per area under much relaxed horizontal geometry requirements, are promising in pushing the technology node ahead where conventional scaling has met its physical limits. The performance of the FinFET was further investigated through numerical simulation. A new kind of FinFET with asymmetric gate and source/drain contacts has been proposed and simulated. By benchmarking with conventional symmetric FinFET, better short-channel behavior with much higher current density is confirmed. The design guidelines are provided. The overall circuit delay can be minimized by optimizing gate lengths according to different local parasites among circuits in interconnection-delay-dominated SoC applications. Continued transistor scaling requires even stronger gate electrostatic control over the channel. The ultimate scaling structure would be gate-all-around nanowire MOSFETs. We demonstrate III-V junctionless gate-all-around (GAA) nanowire (NW) MOSFETs for the first time. For the first time, source/drain (S/D) resistance and thermal budget are minimized by regrowth using metalorganic chemical vapor deposition (MOCVD) in III-V MOSFETs. The fabricated short-channel (Lg=80 nm) GaAs GAA NWFETs with extremely narrow nanowire width (WNW= 9 nm) show excellent transconductance (gm) linearity at biases (300 mV), characterized by the high third intercept point (2.6 dBm). The high linearity is especially important for low power applications because it is insensitive to bias conditions

Modeling & Simulation of High Performance Nanoscale MOSFETs

Silicon-on-insulator (SOI) has been the forerunner of the CMOS technology in the last few decades offering superior CMOS devices with higher speed, higher density and reduced second order effects for submicron VLSI applications.A new type of transistor without junctions and no doping concentration gradients is analysed and demonstrated. These device structures address the challenge of short channel effects (SCEs) resulting with scaling of transistor dimensions and higher performance for deep submicron VLSI integration. Recent experimental studies have invigorated interest in partially depleted (PD) SOI devices because of their potentially superior scalability relative to bulk silicon CMOS devices. SELBOX structure offer an alternative way of suppressing kink effect and self heating effects in PD-SOI devices with a proper selection of oxide gap length. Also in order to mitigate the difficulties in fabrication of ultra thin devices for the semiconductor industry, resulting from scaling of gate length in MOSFET, a new device structure called junctionless (JL) transistors have recently been reported as an alternative device. In conclusion, extensive numerical simulation studies were used to explore and compare the electrical characteristics of SELBOX SOI MOSFET with a conventional single-material gate (SMG) bulk MOSFET. The proposed work investigates the DC and AC characteristics of the junctionless transistors. Also the performance analysis of JL transistors is compared and presented with the conventional DG MOSFET structure. The results presented in this work are expected to provide incentive for further experimental exploration

A study of silicon and germanium junctionless transistors

Technology boosters, such as strain, HKMG and FinFET, have been introduced into semiconductor industry to extend Moore’s law beyond 130 nm technology nodes. New device structures and channel materials are highly demanded to keep performance enhancement when the device scales beyond 22 nm. In this work, the properties and feasibility of the proposed Junctionless transistor (JNT) have been evaluated for both Silicon and Germanium channels. The performance of Silicon JNTs with 22 nm gate length have been characterized at elevated temperature and stressed conditions. Furthermore, steep Subthreshold Slopes (SS) in JNT and IM devices are compared. It is observed that the floating body in JNT is relatively dynamic comparing with that in IM devices and proper design of the device structure may further reduce the VD for a sub- 60 mV/dec subthreshold slope. Diode configuration of the JNT has also been evaluated, which demonstrates the first diode without junctions. In order to extend JNT structure into the high mobility material Germanium (Ge), a full process has been develop for Ge JNT. Germanium-on-Insulator (GeOI) wafers were fabricated using Smart-Cut with low temperature direct wafer bonding method. Regarding the lithography and pattern transfer, a top-down process of sub-50-nm width Ge nanowires is developed in this chapter and Ge nanowires with 35 nm width and 50 nm depth are obtained. The oxidation behaviour of Ge by RTO has been investigated and high-k passivation scheme using thermally grown GeO2 has been developed. With all developed modules, JNT with Ge channels have been fabricated by the CMOScompatible top-down process. The transistors exhibit the lowest subthreshold slope to date for Ge JNT. The devices with a gate length of 3 μm exhibit a SS of 216 mV/dec with an ION/IOFF current ratio of 1.2×103 at VD = -1 V and DIBL of 87 mV/V

A comprehensive Analysis of Nanoscale Transistor Based Biosensor: A Review

Imperative introduction of biosensor in the field of medicine, defence, food safety, security and environmental contamination detection acquired paramount attraction. Thus the foundation of the fame of biosensors in detecting wide scope of biomolecules in innumerable fields has driven researchers in advancement of biosensor and enhancing more updates in devices. Among all semiconductor-FET based biosensors grab attraction due to their miniaturization,mass production, ultra-sensitive in nature, improved lifetime, rapid response and reduce thermal budgets. In this review, field effect based biosensors sensitive to ions their principle model along with pros and cons of different structures. Various performance characteristics for semiconductor based biosensor are explored along with detection of label free analytes such as tuberculosis, glucose, antigen 85-B with ISFET. Following with comprehensive detail on MOSFET junction less Silicon based Dual Gate Biosensor with their design parameters for biosensing of neutral and charged analytes with results summarized in table. Drawbacks of dual gate structure introduce cylindrical structures summarized in table with device parameters and respective sensitivity. Role of analytes size in choosing the cavity width and position of analytes influence the sensitivity is recorded. Recent advancement on selectivity, sensitivity and switching results the gate and channel engineering thus compound semiconductor came in picture. In last section challenges with solution and importance of III-V compound channel as scope in biosensor with taking the benefits of fabrication of III-V compound MOSFETs. Semiconductor compound properties are summarized in table for various applications in recent use

A comprehensive Analysis of Nanoscale Transistor Based Biosensor: A Review

304-318Imperative introduction of biosensor in the field of medicine, defence, food safety, security and environmental contamination detection acquired paramount attraction. Thus the foundation of the fame of biosensors in detecting wide scope of biomolecules in innumerable fields has driven researchers in advancement of biosensor and enhancing more updates in devices. Among all semiconductor-FET based biosensors grab attraction due to their miniaturization, mass production, ultra-sensitive in nature, improved lifetime, rapid response and reduce thermal budgets. In this review, field effect based biosensors sensitive to ions their principle model along with pros and cons of different structures. Various performance characteristics for semiconductor based biosensor are explored along with detection of label free analytes such as tuberculosis, glucose, antigen 85-B with ISFET. Following with comprehensive detail on MOSFET junction less Silicon based Dual Gate Biosensor with their design parameters for biosensing of neutral and charged analytes with results summarized in table. Drawbacks of dual gate structure introduce cylindrical structures summarized in table with device parameters and respective sensitivity. Role of analytes size in choosing the cavity width and position of analytes influence the sensitivity is recorded. Recent advancement on selectivity, sensitivity and switching results the gate and channel engineering thus compound semiconductor came in picture. In last section challenges with solution and importance of III-V compound channel as scope in biosensor with taking the benefits of fabrication of III-V compound MOSFETs. Semiconductor compound properties are summarized in table for various applications in recent use

Electronic Nanodevices

The start of high-volume production of field-effect transistors with a feature size below 100 nm at the end of the 20th century signaled the transition from microelectronics to nanoelectronics. Since then, downscaling in the semiconductor industry has continued until the recent development of sub-10 nm technologies. The new phenomena and issues as well as the technological challenges of the fabrication and manipulation at the nanoscale have spurred an intense theoretical and experimental research activity. New device structures, operating principles, materials, and measurement techniques have emerged, and new approaches to electronic transport and device modeling have become necessary. Examples are the introduction of vertical MOSFETs in addition to the planar ones to enable the multi-gate approach as well as the development of new tunneling, high-electron mobility, and single-electron devices. The search for new materials such as nanowires, nanotubes, and 2D materials for the transistor channel, dielectrics, and interconnects has been part of the process. New electronic devices, often consisting of nanoscale heterojunctions, have been developed for light emission, transmission, and detection in optoelectronic and photonic systems, as well for new chemical, biological, and environmental sensors. This Special Issue focuses on the design, fabrication, modeling, and demonstration of nanodevices for electronic, optoelectronic, and sensing applications

PERFORMANCE AND A NEW 2-D ANALYTICAL MODELING OF A DUAL-HALO DUAL-DIELECTRIC TRIPLE-MATERIAL SURROUNDING-GATE-ALL-AROUND (DH-DD-TM-SGAA) MOSFET

This proposed work covers the effect of dual halo structure with dual dielectric. A 2-D analytical model for potential distribution, threshold voltage, electric field and sub-threshold swing has been described through the Poisson’s equation solution for a novel structure known as dual-halo dual-dielectric triple-material surrounding-gate MOSFET to diminish short channel effects. The new device has been incorporated with Dual halo near the source and drain sides, while the electrode at the gate incorporates three dissimilar work function metals. A relative estimation of short channel effects (SCEs) for DHDD-TM-SG, triple-material surrounding-gate (TM-SG) and single-halo triplematerial surrounding-gate (SH-TM-SG) MOSFETs has also been carried out in terms of threshold-voltage-roll-off, drain induced barrier lowering, hot carrier effects, and also sub-threshold swing. The proposed novel structure significantly reduces the SCEs. Therefore, DH-DD-TM-SG MOSFETs have superior performance than TM-SG and SH-TM-SG MOSFETs. The efficiency of the Dual halo-doped device is investigated. The proposed model demonstrates its validity by a comparing the simulated results from already published devices obtained by using TCAD Silvaco

Function Implementation in a Multi-Gate Junctionless FET Structure

Title from PDF of title page, viewed September 18, 2023Dissertation advisor: Mostafizur RahmanVitaIncludes bibliographical references (pages 95-117)Dissertation (Ph.D.)--Department of Computer Science and Electrical Engineering, Department of Physics and Astronomy. University of Missouri--Kansas City, 2023This dissertation explores designing and implementing a multi-gate junctionless field-effect transistor (JLFET) structure and its potential applications beyond conventional devices. The JLFET is a promising alternative to conventional transistors due to its simplified fabrication process and improved electrical characteristics. However, previous research has focused primarily on the device's performance at the individual transistor level, neglecting its potential for implementing complex functions. This dissertation fills this research gap by investigating the function implementation capabilities of the JLFET structure and proposing novel circuit designs based on this technology. The first part of this dissertation presents a comprehensive review of the existing literature on JLFETs, including their fabrication techniques, operating principles, and performance metrics. It highlights the advantages of JLFETs over traditional metal-oxide-semiconductor field-effect transistors (MOSFETs) and discusses the challenges associated with their implementation. Additionally, the review explores the limitations of conventional transistor technologies, emphasizing the need for exploring alternative device architectures. Building upon the theoretical foundation, the dissertation presents a detailed analysis of the multi-gate JLFET structure and its potential for realizing advanced functions. The study explores the impact of different design parameters, such as channel length, gate oxide thickness, and doping profiles, on the device performance. It investigates the trade-offs between power consumption, speed, and noise immunity, and proposes design guidelines for optimizing the function implementation capabilities of the JLFET. To demonstrate the practical applicability of the JLFET structure, this dissertation introduces several novel circuit designs based on this technology. These designs leverage the unique characteristics of the JLFET, such as its steep subthreshold slope and improved on/off current ratio, to implement complex functions efficiently. The proposed circuits include arithmetic units, memory cells, and digital logic gates. Detailed simulations and analyses are conducted to evaluate their performance, power consumption, and scalability. Furthermore, this dissertation explores the potential of the JLFET structure for emerging technologies, such as neuromorphic computing and bioelectronics. It investigates how the JLFET can be employed to realize energy-efficient and biocompatible devices for applications in artificial intelligence and biomedical engineering. The study investigates the compatibility of the JLFET with various materials and substrates, as well as its integration with other functional components. In conclusion, this dissertation contributes to the field of nanoelectronics by providing a comprehensive investigation into the function implementation capabilities of the multi-gate JLFET structure. It highlights the potential of this device beyond its individual transistor performance and proposes novel circuit designs based on this technology. The findings of this research pave the way for the development of advanced electronic systems that are more energy-efficient, faster, and compatible with emerging applications in diverse fields.Introduction -- Literature review -- Crosstalk principle -- Experiment of crosstalk -- Device architecture -- Simulation & results -- Conclusio