Workshop on "Robotic assembly of 3D MEMS".

Proceedings of a workshop proposed in IEEE IROS'2007.The increase of MEMS' functionalities often requires the integration of various technologies used for mechanical, optical and electronic subsystems in order to achieve a unique system. These different technologies have usually process incompatibilities and the whole microsystem can not be obtained monolithically and then requires microassembly steps. Microassembly of MEMS based on micrometric components is one of the most promising approaches to achieve high-performance MEMS. Moreover, microassembly also permits to develop suitable MEMS packaging as well as 3D components although microfabrication technologies are usually able to create 2D and "2.5D" components. The study of microassembly methods is consequently a high stake for MEMS technologies growth. Two approaches are currently developped for microassembly: self-assembly and robotic microassembly. In the first one, the assembly is highly parallel but the efficiency and the flexibility still stay low. The robotic approach has the potential to reach precise and reliable assembly with high flexibility. The proposed workshop focuses on this second approach and will take a bearing of the corresponding microrobotic issues. Beyond the microfabrication technologies, performing MEMS microassembly requires, micromanipulation strategies, microworld dynamics and attachment technologies. The design and the fabrication of the microrobot end-effectors as well as the assembled micro-parts require the use of microfabrication technologies. Moreover new micromanipulation strategies are necessary to handle and position micro-parts with sufficiently high accuracy during assembly. The dynamic behaviour of micrometric objects has also to be studied and controlled. Finally, after positioning the micro-part, attachment technologies are necessary

Experimental study on droplet self-alignment assisted robotic microhandling

Tämän diplomityön päätavoite on tutkia kokeellisesti eri prosessiparametrien vaikutusta Teknillisessä korkeakoulussa kehitetyn hybridimenetelmän tuloksiin mikrokokoonpanossa. Menetelmässä yhdistetään robottimikrotarttujan käyttö ja mikrokappaleiden pisara-avusteinen itseorganisoituminen kapillaarivoimien avulla. Työn selvitysosuudessa on kaksi osiota. Ensimmäisessä osiossa tutustutaan mikrokokoluokan erityispiirteisiin ja mikrokokoonpanomenetelmiin sekä robottiavusteisten ja itseorganisoituvuutta käyttävien menetelmien kautta. Toisessa osiossa keskitytään kapillaarivoimaan ja sen sovelluksiin mikrokappaleiden käsittelyssä. Kokeellinen menetelmä ja koelaitteisto esitellään työn toisessa osuudessa. Myös parametrit, joita ovat vapautuspaikan ero lopulliseen paikkaan, nesteen määrä ja palan koko, esitellään tarkemmin. Testien kulun yksityskohdat käsitellään. Kokeellisessa osassa suoritettujen testien tulokset esitetään. Kokoonpanon onnistumistodennäköisyyttä tarkastellaan ja vertaillaan eri prosessiparametrien funktiona. Menetelmän tarkkuutta arvioidaan pyyhkäisyelektronimikroskooppikuvien avulla. Tulokset osoittavat, että tutkitulla robotiikaa ja pisaran itseasennoitumista hyödyntävällä menetelmällä voidaan luotettavasti kokoonpanna mikrokappaleita. Saavutettu tarkkuus (1-2 µm) on vertailukelpoinen itseorganisoitumista käyttävien menetelmien kanssa.The main objective of this thesis is to experimentally study the effect of different process parameters on the results of a hybrid micro assembly method previously developed at TKK. The hybrid method is a combination of robotic micro handling and droplet self-alignment. The survey part of the thesis has two sections. The first part gives an overview of the micro world and the state-of-the-art of micro assembly methods including both robotic and self-assembly methods. The second part concentrates on capillary force and its applications in micro handling. The experimental method, the test set-up and key test parameters are discussed in the second part of the thesis. The key parameters include biases (the initial error in the part location before self-alignment) in three axes, the amount of liquid for self-alignment and the size of the parts. Moreover, the test procedure is described in details. Several sets of tests were conducted and the results are analyzed carefully in the third, experimental part of the thesis. Especially the success rates and areas of success as a function of different parameters are studied and compared. The accuracy of the final assembly is analyzed by a scanning electron microscope. The results show that the hybrid micro assembly method is reliable for assembling micro parts. The study on the effects of the process parameters prove that accuracy requirements of the handling robot are very low while the accuracy obtained with the method is in the range of 1-2 µm, comparable with what has been achieved by self-assembly

Automatic Microassembly of Tissue Engineering Scaffold

Ph.DDOCTOR OF PHILOSOPH

Microclamping principles from the perspective of micrometrology – A review

This paper gives an overview of the field of clamping and gripping principles from the viewpoint of sample fixturing for dimensional metrology for microobjects. The requirements for clamping microcomponents that allow dimensional measurements are therefore explained before principles and solutions of microclamps as found in literature are reviewed and evaluated on basis of these requirements. Results show that there is no single superior clamping principle or method of implementation but rather several effective solutions for specific applications. The core value of this paper is the link between requirements for sample fixturing in dimensional micrometrology and the many approaches already investigated in the field of microclamping. A radar chart and a decision tree summarize and visualize the major aspects of this review. Finally, directions of future key research areas are suggested

Dynamics of freely moving plates connected by a shallow liquid bridge

We study the dynamics of freely moving plates connected by a shallow liquid bridge via analytic and experimental methods. The gap between the plates is used as a small parameter within a lubrication approximation, reducing the problem to an Abel equation of the second kind. Analysis of the governing differential equation yields two novel physical phenomena: (1) An impulse-like peak in the force applied by the liquid bridge on the plates, obtained from a uniform asymptotic solution for small capillary numbers. (2) Both linear and non-linear oscillations of the system for the case of surfaces with low wettability, obtained from small perturbations of the system around the equilibrium point. An experimental setup examining the motion of freely moving plates was constructed, yielding experimental data which compared favorably with the analytic results and specifically displayed the predicted oscillations and impulse-like peak of the applied force. The application of the current analysis to the manipulation of solid bodies and possible future research directions are discussed

Design and realization of a microassembly workstation

With the miniaturization of products to the levels of micrometers and the recent developments in microsystem fabrication technologies, there is a great need for an assembly process for the formation of complex hybrid microsystems. Integration of microcomponents made up of different materials and manufactured using different micro fabrication techniques is still a primary challenge since some of the fundamental problems originating from the small size of parts to be manipulated, high precision necessity and specific problems of the microworld in that field are still not fully investigated. In this thesis, design and development of an open-architecture and reconfigurable microassembly workstation for efficient and reliable assembly of micromachined parts is presented. The workstation is designed to be used as a research tool for investigation of the problems in microassembly. The development of such a workstation includes the design of: (i) a manipulation system consisting of motion stages providing necessary travel range and precision for the realization of assembly tasks, (ii) a vision system to visualize the microworld and the determination of the position and orientation of micro components to be assembled, (iii) a robust control system and necessary fixtures for the end effectors that allow easy change of manipulation tools and make the system ready for the desired task. In addition tele-operated and semi-automated assembly concepts are implemented. The design is verified by implementing tasks in various ranges for micro-parts manipulation. The versatility of the workstation is demonstrated and high accuracy of positioning is shown

Design for microassembly: a methodology for product design and process selection

The thesis presents research carried out in the field of design for microassembly (DFµA), a field that has hereto been characterised by the absence of well defined methodologies intended to facilitate transfer of prototypes from the research lab to production on industrial scale. A DFμA methodology has been developed, serving the purpose of integrating product and micro assembly process development. It aims in particular at increasing the efficiency of the microproduct development process, decreasing the development time and the product and process cost, and enhancing the product quality. Chapter 1 presents the motivations, objectives, and structure of the thesis. The work carried out is inspired by the need to overcome barriers currently existing between the making of single research products and production on an industrial level. The main objective is to contribute to the creating of a novel DFμA that supports product design and process selection, thereby facilitating the efficient assembly of complex three-dimensional miniaturised devices. This is complemented by a range of secondary targets that deal with the development and verification of supporting methods and models related to DFμA. The summary of a comprehensive literature review is given in chapter 2. The survey provides results of studies closely related to the work reported in this thesis and relates that work to a larger ongoing dialogue about the topic of assembly and design in the microworld. Chapter 3 outlines the research approach adopted here for the developing of a DFμA methodology. It carefully analyses the way in which the knowledge gaps identified can be addressed and how the stated objectives can best be achieved. The key contributions made to the developing of a DFμA methodology are presented in chapters 4,5, and 6. The micro assembly process capability model is described first, in Chapter 4. It constitutes the first attempt made at introducing a general framework for capturing of microassembly characteristics. The model developed enables selection and characterisation of microassembly processes. A framework to characterise the model's application to microjoining, -feeding, and -handling is as well suggested. Chapter 5 concerns the actual DFμA methodology. The methodology's layout and structure are introduced in detail. Moreover, the main functions and key phases of the methodology are explained. Special attention is paid to the integration of the microassembly process capability model and to the development of further elements used within the methodology, such as support in product design. Provided in Chapter 6 is a comprehensive analysis of conventional DFA guidelines, intended to explain how the microspecific guidelines have been formulated. The chapter also describes how these are implemented within the overall DFμA methodology. The procedure of validating and illustrating the methodology, which includes applying it to practical test cases, takes place in Chapter 7. The thesis is concluded in Chapter 8, wherein evidence of the originality of the knowledge contribution achieved through the work presented is highlighted. Opportunities for further research work building on th

Design of a Multi-Mode Hybrid Micro-Gripper for Surface Mount Technology Component Assembly

In the last few decades, industrial sectors such as smart manufacturing and aerospace have rapidly developed, contributing to the increase in production of more complex electronic boards based on SMT (Surface Mount Technology). The assembly phases in manufacturing these electronic products require the availability of technological solutions able to deal with many heterogeneous products and components. The small batch production and pre-production are often executed manually or with semi-automated stations. The commercial automated machines currently available offer high performance, but they are highly rigid. Therefore, a great effort is needed to obtain machines and devices with improved reconfigurability and flexibility for minimizing the set-up time and processing the high heterogeneity of components. These high-level objectives can be achieved acting in different ways. Indeed, a work station can be seen as a set of devices able to interact and cooperate to perform a specific task. Therefore, the reconfigurability of a work station can be achieved through reconfigurable and flexible devices and their hardware and software integration and control For this reason, significant efforts should be focused on the conception and development of innovative devices to cope with the continuous downscaling and increasing variety of the products in this growing field. In this context, this paper presents the design and development of a multi-mode hybrid micro-gripper devoted to manipulate and assemble a wide range of micro- and meso-SMT components with different dimensions and proprieties. It exploits two different handling technologies: the vacuum and friction

Development of an expert system for supporting the selection of robot grippers

The aim of this thesis is to lay the basis for the development of an expert system for the selection of robot grippers. This work has started with a review of the literature of the grasping principles, of releasing strategies and of the main problems concerning the automatic assembly or, more in general, the handling. Later, we have studied a set of parameters constituting the input of the expert system, together with a set of rules aimed at choosing the appropriate gripper. The work ends with a series of tests, with a focus on the food industry, reporting the results and discussing the possibility of future developments

International Workshop on MicroFactories (IWMF 2012): 17th-20th June 2012 Tampere Hall Tampere, Finland

This Workshop provides a forum for researchers and practitioners in industry working on the diverse issues of micro and desktop factories, as well as technologies and processes applicable for micro and desktop factories. Micro and desktop factories decrease the need of factory floor space, and reduce energy consumption and improve material and resource utilization thus strongly supporting the new sustainable manufacturing paradigm. They can be seen also as a proper solution to point-of-need manufacturing of customized and personalized products near the point of need