4,290 research outputs found
Fabrication of micro-structures for optically driven micromachines using two-photon photopolymerization of UV curing resins
Two-photon photopolymerization of UV curing resins is an attractive method
for the fabrication of microscopic transparent objects with size in the tens of
micrometers range. We have been using this method to produce three-dimensional
structures for optical micromanipulation, in an optical system based on a
femtosecond laser. By carefully adjusting the laser power and the exposure time
we were able to create micro-objects with well-defined 3D features and with
resolution below the diffraction limit of light. We discuss the performance and
capabilities of a microfabrication system, with some examples of its products.Comment: 12 pages, 10 figure
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EFAB: Batch Production of Functional, Fully-Dense Metal Parts with Micron-Scale Features
EFAB (Electrochemical FABrication) is a new SFF process with the potential to economically fabricate
prototypes or mass production quantities of functional, mesoscale-microscale parts and mechanisms. EFAB
generates an entire layer simultaneously-versus serially, as with most SFF. Based on electrodeposition,
EFAB allows ultra-thin layers (2-10 microns, or even submicron) that minimize stairsteps, and generates a
net-shape, fully-dense metal structure that can be homogeneous and isotropic. Minimum feature width is
approximately 25 microns, and can be reduced further. EFAB can be used to manufacture micromachines
and microelectromechanical systems (MEMS), offering significant advantages over current processes: e.g.,
true 3-D geometry, IC compatibility, low capital investment, and process automation.Mechanical Engineerin
Enhancements of MEMS design flow for Automotive and Optoelectronic applications
In the latest years we have been witnesses of a very rapidly and amazing grown of MicroElectroMechanical systems (MEMS) which nowadays represent the outstanding state-of-the art in a wide variety of applications from automotive to commercial, biomedical and optical (MicroOptoElectroMechanicalSystems).
The increasing success of MEMS is found in their high miniaturization capability, thus allowing an easy integration with electronic circuits, their low manufacturing costs (that comes directly from low unit pricing and indirectly from cutting service and maintaining costs) and low power consumption.
With the always growing interest around MEMS devices the necessity arises for MEMS designers to define a MEMS design flow. Indeed it is widely accepted that in any complex engineering design process, a well defined and documented design flow or procedure is vital.
The top-level goal of a MEMS/MOEMS design flow is to enable complex engineering design in the shortest time and with the lowest number of fabrication iterations, preferably only one. These two characteristics are the measures of a good flow, because they translate directly to the industry-desirable reductions of the metrics “time to market” and “costs”.
Like most engineering flows, the MEMS design flow begins with the product definition that generally involves a feasibility study and the elaboration of the device specifications. Once the MEMS specifications are set, a Finite Element Method (FEM) model is developed in order to study its physical behaviour and to extract the characteristic device parameters. These latter are used to develop a high level MEMS model which is necessary to the design of the sensor read out electronics. Once the MEMS geometry is completely defined and matches the device specifications, the device layout must be generated, and finally the MEMS sensor is fabricated.
In order to have a MEMS sensor working according to specifications at first production run is essential that the MEMS design flow is as close as possible to the optimum design flow.
The key factors in the MEMS design flow are the development of a sensor model as close as possible to the real device and the layout realization. This research work addresses these two aspects by developing optimized custom tools (a tool for layout check (LVS) and a tool for parasitic capacitances extraction) and new methodologies (a methodology for post layout simulations) which support the designer during the crucial steps of the design process as well as by presenting the models of two cases studies belonging to leading MEMS applications (a micromirror for laser projection system and a control loop for the shock immunity enhancement in gyroscopes for automotive applications)
Design, evaluation, and control of nexus: a multiscale additive manufacturing platform with integrated 3D printing and robotic assembly.
Additive manufacturing (AM) technology is an emerging approach to creating three-dimensional (3D) objects and has seen numerous applications in medical implants, transportation, aerospace, energy, consumer products, etc. Compared with manufacturing by forming and machining, additive manufacturing techniques provide more rapid, economical, efficient, reliable, and complex manufacturing processes. However, additive manufacturing also has limitations on print strength and dimensional tolerance, while traditional additive manufacturing hardware platforms for 3D printing have limited flexibility. In particular, part geometry and materials are limited to most 3D printing hardware. In addition, for multiscale and complex products, samples must be printed, fabricated, and transferred among different additive manufacturing platforms in different locations, which leads to high cost, long process time, and low yield of products. This thesis investigates methods to design, evaluate, and control the NeXus, which is a novel custom robotic platform for multiscale additive manufacturing with integrated 3D printing and robotic assembly. NeXus can be used to prototype miniature devices and systems, such as wearable MEMS sensor fabrics, microrobots for wafer-scale microfactories, tactile robot skins, next generation energy storage (solar cells), nanostructure plasmonic devices, and biosensors. The NeXus has the flexibility to fixture, position, transport, and assemble components across a wide spectrum of length scales (Macro-Meso-Micro-Nano, 1m to 100nm) and provides unparalleled additive process capabilities such as 3D printing through both aerosol jetting and ultrasonic bonding and forming, thin-film photonic sintering, fiber loom weaving, and in-situ Micro-Electro-Mechanical System (MEMS) packaging and interconnect formation. The NeXus system has a footprint of around 4m x 3.5m x 2.4m (X-Y-Z) and includes two industrial robotic arms, precision positioners, multiple manipulation tools, and additive manufacturing processes and packaging capabilities. The design of the NeXus platform adopted the Lean Robotic Micromanufacturing (LRM) design principles and simulation tools to mitigate development risks. The NeXus has more than 50 degrees of freedom (DOF) from different instruments, precise evaluation of the custom robots and positioners is indispensable before employing them in complex and multiscale applications. The integration and control of multi-functional instruments is also a challenge in the NeXus system due to different communication protocols and compatibility. Thus, the NeXus system is controlled by National Instruments (NI) LabVIEW real-time operating system (RTOS) with NI PXI controller and a LabVIEW State Machine User Interface (SMUI) and was programmed considering the synchronization of various instruments and sequencing of additive manufacturing processes for different tasks. The operation sequences of each robot along with relevant tools must be organized in safe mode to avoid crashes and damage to tools during robots’ motions. This thesis also describes two demonstrators that are realized by the NeXus system in detail: skin tactile sensor arrays and electronic textiles. The fabrication process of the skin tactile sensor uses the automated manufacturing line in the NeXus with pattern design, precise calibration, synchronization of an Aerosol Jet printer, and a custom positioner. The fabrication process for electronic textiles is a combination of MEMS fabrication techniques in the cleanroom and the collaboration of multiple NeXus robots including two industrial robotic arms and a custom high-precision positioner for the deterministic alignment process
Testing microelectronic biofluidic systems
According to the 2005 International Technology Roadmap for Semiconductors, the integration of emerging nondigital CMOS technologies will require radically different test methods, posing a major challenge for designers and test engineers. One such technology is microelectronic fluidic (MEF) arrays, which have rapidly gained importance in many biological, pharmaceutical, and industrial applications. The advantages of these systems, such as operation speed, use of very small amounts of liquid, on-board droplet detection, signal conditioning, and vast digital signal processing, make them very promising. However, testable design of these devices in a mass-production environment is still in its infancy, hampering their low-cost introduction to the market. This article describes analog and digital MEF design and testing method
Analysis of effective mechanical properties of thin films used in microelectromechanical systems
This research aims at analyzing the effective mechanical properties of thin film materials that are used in MEMS. Using the effective mechanical properties, reliable simulations of new or slightly altered designs can be performed successfully. The main reason for investigating effective material properties of MEMS devices is that the existing techniques can not provide consistent prediction of the mechanical properties without time-consuming and costly physical prototyping if the device or the fabrication recipe is slightly altered. To achieve this goal, two approaches were investigated: soft computing and analytical. In the soft computing approach, the effective material properties are empirically modeled and estimated based on experimental data and the relationships between the parameters affecting the mechanical properties of devices are discovered. In this approach, 2D-search, Micro Genetic Algorithms, Neural networks, and Radial Basis Functions Networks were explored for the search of the effective material properties of the thin films with the help of a Finite Element Analysis (FEA) and modeling the mechanical behavior such that the effective material properties can be estimated for a new device. In the analytical approach, the physical behavior of the thin films is modeled analytically using standard elastic theories such as Stoney’s formulae. As a case study, bilayer cantilevers of various dimensions were fabricated for extracting the effective Young’s modulus of thin film materials: Aluminum, TetraEthylOrthoSilicate (TEOS)-based SiO2, and Polyimide. In addition, a Matlab® graphical user interface (GUI), STEAM, is developed which interfaces with Ansys®. In STEAM, a fuzzy confidence factor is also developed to validate the reliability of the estimates based on factors such as facility and recipe-dependent variables. The results obtained from both approaches generated comparable effective material properties which are in accord with the experimental measurements. The results show that effective material properties of thin films can be estimated so that reliable MEMS devices can be designed without timely and costly physical prototyping
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Compensation Zone Approach to Avoid Z Errors in Mask Projection Stereolithography Builds
Print-through results in unwanted polymerization occurring beneath a part cured using
Mask Projection Stereolithography (MPSLA) and thus creates error in its Z dimension. In this
paper, the "Compensation zone approach" is proposed to avoid this error. This approach entails
modifying the geometry of the part to be cured. A volume (Compensation zone) is subtracted
from underneath the CAD model in order to compensate for the increase in the Z dimension that
would occur due to Print-through. Three process variables have been identified: Thickness of
Compensation zone, Thickness of every layer and Exposure distribution across every image used
to cure a layer. Analytical relations have been formulated between these process variables in
order to obtain dimensionally accurate parts. The Compensation zone approach is demonstrated
on an example problem.Mechanical Engineerin
Hybrid Micro-Electro-Mechanical Tunable Filter
While advantages such as good thermal stability and processing-chemical compatibilities exist for common monolithic-integrated micro-electro-mechanically tunable filters (MEM-TF) and MEM-tunable vertical cavity surface emitting lasers (MT-VCSEL), they often require full processing to determine device characteristics. Alternatively, the MEM actuators and the optical parts may be fabricated separately, then subsequently bonded. This hybrid approach potentially increases design flexibility. Since hybrid techniques allow integration of heterogeneous material systems, best of breed compound optoelectronic devices may be customized to enable materials groups to be optimized for tasks they are best suited. Thus, as a first step toward a hybrid (AlxGa1-xAs-polySi) MT-VCSEL, this dissertation reports the design, fabrication, and demonstration of an electrostatically actuated hybrid MEM-TF. A 250x250-µm2, 4.92-µm-thick, Al0.4Ga0.6As-GaAs distributed Bragg reflector was successfully flip-bonded to a polySi piston electrostatic actuator using SU-8 photoresist as bonding adhesive. The device demonstrated 53nm (936.5 - 989.5nm) of resonant wavelength tuning over the actuation voltage range of 0 to 10 V
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