Active magnetic bearing for ultra precision flexible electronics production system

Roll-to-roll printing on continuous plastic films could enable the production of flexible electronics at high speed and low cost, but the granularity of feature sizes is limited by the system accuracy. Technologies such as gravure printing and nanoimprint lithography demand a level of rotary motion precision that cannot be achieved with rolling element bearings. Manufacturing tolerances of the rotating parts, thermal drift and process forces in combination with structural compliance add up to additional error motions. In this master by research an active magnetic bearing (AMB) solution is designed for a new, super-sized roll-to-roll flexible electronics production machine, which was so far based on hydrostatic bearings. The magnetic bearing could actively compensate the accumulated synchronous error and maintain high accuracy under all conditions. However, the asynchronous error of a conventional AMB with the required size and power is a problem. In order to reduce the relatively high positioning uncertainty of active magnetic bearings an innovative radial position measurement based on linear, incremental encoders with optical conversion principle is proposed. A commercial encoder scanning head faces a round scale with concentric, coplanar lines on its face. By counting these lines the radial position can be measured. Because such a scale is not readily available, it is made by micro-machining. In experiments, different machining methods are compared. Then a magnetic bearing is built to demonstrate the efficacy of the proposed sensor. As a result, the best measurement noise is 3.5nm at 10kHz and a position uncertainty of approximately 0.25µm has been achieved for the magnetic bearing. These promising results are especially interesting for applications with high precision requirements at low speed of rotation

A Hybrid Controller for Stability Robustness, Performance Robustness, and Disturbance Attenuation of a Maglev System

Devices using magnetic levitation (maglev) offer the potential for friction-free, high-speed, and high-precision operation. Applications include frictionless bearings, high-speed ground transportation systems, wafer distribution systems, high-precision positioning stages, and vibration isolation tables. Maglev systems rely on feedback controllers to maintain stable levitation. Designing such feedback controllers is challenging since mathematically the electromagnetic force is nonlinear and there is no local minimum point on the levitating force function. As a result, maglev systems are open-loop unstable. Additionally, maglev systems experience disturbances and system parameter variations (uncertainties) during operation. A successful controller design for maglev system guarantees stability during levitating despite system nonlinearity, and desirable system performance despite disturbances and system uncertainties. This research investigates five controllers that can achieve stable levitation: PD, PID, lead, model reference control, and LQR/LQG. It proposes an acceleration feedback controller (AFC) design that attenuates disturbance on a maglev system with a PD controller. This research proposes three robust controllers, QFT, Hinf , and QFT/Hinf , followed by a novel AFC-enhanced QFT/Hinf (AQH) controller. The AQH controller allows system robustness and disturbance attenuation to be achieved in one controller design. The controller designs are validated through simulations and experiments. In this research, the disturbances are represented by force disturbances on the levitated object, and the system uncertainties are represented by parameter variations. The experiments are conducted on a 1 DOF maglev testbed, with system performance including stability, disturbance rejection, and robustness being evaluated. Experiments show that the tested controllers can maintain stable levitation. Disturbance attenuation is achieved with the AFC. The robust controllers, QFT, Hinf , QFT/ Hinf, and AQH successfully guarantee system robustness. In addition, AQH controller provides the maglev system with a disturbance attenuation feature. The contributions of this research are the design and implementation of the acceleration feedback controller, the QFT/ Hinf , and the AQH controller. Disturbance attenuation and system robustness are achieved with these controllers. The controllers developed in this research are applicable to similar maglev systems

Synergistic approaches to ultra-precision high performance cutting

Diamond milling allows for the flexible production of optical and high precision parts, but suffers from poor setup and production speeds. This paper presents recent advances that aim towards achieving high performance (HPC) and high speed cutting (HSC) in ultra-precision machining. After a short introduction, the benefits of high speed cutting for both metals and brittle-hard materials are shown. Thereafter, novel mechatronic devices are presented that enable an automated balancing of the applied air bearing spindles and the application of multiple diamond tools on one tool holder and by thus, contribute to HPC. These developments are supplemented by a novel linear guiding system based on electromagnatic levitation that, along with a dedicated model-based control system, enables fast and precise movements of the machine tool. After presenting the recent developments in detail, their synergistic performance is assessed and an outlook to future developments is given. © 2020 The Author

International Symposium on Magnetic Suspension Technology, Part 1

The goal of the symposium was to examine the state of technology of all areas of magnetic suspension and to review related recent developments in sensors and controls approaches, superconducting magnet technology, and design/implementation practices. The symposium included 17 technical sessions in which 55 papers were presented. The technical session covered the areas of bearings, sensors and controls, microgravity and vibration isolation, superconductivity, manufacturing applications, wind tunnel magnetic suspension systems, magnetically levitated trains (MAGLEV), space applications, and large gap magnetic suspension systems

Third International Symposium on Magnetic Suspension Technology

In order to examine the state of technology of all areas of magnetic suspension and to review recent developments in sensors, controls, superconducting magnet technology, and design/implementation practices, the Third International Symposium on Magnetic Suspension Technology was held at the Holiday Inn Capital Plaza in Tallahassee, Florida on 13-15 Dec. 1995. The symposium included 19 sessions in which a total of 55 papers were presented. The technical sessions covered the areas of bearings, superconductivity, vibration isolation, maglev, controls, space applications, general applications, bearing/actuator design, modeling, precision applications, electromagnetic launch and hypersonic maglev, applications of superconductivity, and sensors

Mechatronic Design, Dynamics, Controls, and Metrology of a Long-Stroke Linear Nano-Positioner

Precision motion systems find a broad range of application in various fields such as micro/nano machining tools, lithography scanners, testing and metrology machines, micro-assembly, biotechnology, optics manufacturing, magnetic data-storage, and optical disk drives. In this thesis, an ultraprecision motion stage (nano-positioner) is designed and built based on the concept of a low-cost desktop precision micro machine tool. Linear positioning performance requirements of such a machine tool are used as design objectives. The nano-positioner’s mechatronic design is carried out in such a way to integrate different components towards high performance in terms of high dynamic range, high feedrate, servo accuracy, and geometric accuracy. A self-aligning air-bearing/bushing arrangement is employed for frictionless motion with infinite theoretical resolution, as well as reduced assembly costs and footprint. The air discharge from the air bearings/bushings are also utilized for assistance in the removal of heat dissipated from actuator coils. A voice coil actuator (VCA) is chosen for continuous, non-contact operation, and designed from scratch. A number of dimensional variables of the cylindrical VCA are set according to required forces, motion range, production/assembly tolerances, magnet availability, leakage flux, etc. The remainder of variables is determined according to two novel optimization objectives defined independent of the coil wire gauge, which separately aim for maximum stage acceleration capacity and minimum heat generation per generated force. The actuators are operated in a complementary double configuration for control simplicity which allows for a straightforward and robust design for controller stability. Controller design is carried out at current control and position control levels. Current frequency response of the voice coil actuators is obtained, and they are observed to possess additional high frequency dynamics on top of the expected first order lumped resistance and inductance model. These are attributed to the eddy currents in the stator structure. A closed loop bandwidth of better than 907 [Hz] is achieved using the integrator plus lead current controller. The position controller is designed using the identified overall plant which includes the moving body, current dynamics and the force response. The lead-lag position controller is tuned at 450 [Hz] cross-over frequency and 40 [deg] phase margin. The control error during the tracking of a step trajectory filtered at 40 [Hz] is found to vary between ±5 [nm], indicating a 4 million dynamic range over the 20 [mm] stroke length. Dynamic Error Budgeting (DEB) method has been used to resolve the components of the error, and the largest contributor is found to be the sensor noise. The actual positioning error, which is an ideal signal excluding sensor noise is estimated using the same methodology and disturbance models, and it is found to be 0.680 [nm] root-mean-square (RMS). For the trajectory following case, experiments are carried out with and without a compensation scheme for encoder quadrature detection errors. The compensation is observed to reduce the ±45 [nm] control error to ±15 [nm]. For the assessment of stage performance and the verification of design choices, modal testing and laser interferometric metrology have been applied to the linear nano-positioner. For modal testing, two independent methods are used and their predictions are compared. In the first method, a graphical approach, namely the peak-picking method, is employed to identify modal parameters (natural frequency and damping ratio) and mode shapes. In the second method, a modal testing software package is used to identify the same using automated algorithms. The first mode, which is the most critical one for controller design, is identified at 65 [Hz] as a roll mode, followed by horizontal, vertical, and pitch modes at 450, 484, and 960 [Hz], respectively. The geometric errors of the system are identified using laser interferometric measurements, using various optical setups for linear and angular components. An error budget is formed using these results, together with the estimated thermal errors and servo errors. The accuracy of the stage is determined to be ±5.0 [μm], which had a ±1.1 [μm] non-repeatable component. In the future, the controller structure can be enhanced with an additional pole beyond the crossover frequency, in order to suppress unnecessary oscillations of the control effort signal around the set point due to the encoder noise transmitted to the controller input. Using an estimation of air bearing pitch stiffness from the catalogue values for normal stiffness, the roll mode was predicted at 672 [Hz]. The much lower natural frequency for that mode identified in modal testing (65 [Hz]) can be attributed to the shortcomings of the estimation method, primarily the neglect of the distortion of the supporting air cushion at the bearing interface due to out of plane rotations. In the future, experimental data can be obtained to characterize the air bearing pitch stiffness more accurately. It was observed that the preferred compensation scheme for the encoder quadrature detection errors is unable to match third and fourth harmonics of the encoder measurement error sufficiently. In the future, better compensation methods can be investigated for an improved match. During laser interferometric measurements, measurement uncertainty due to laser beam misalignment and air turbulence were inferred to be high. In the future, better ways to align the laser with the optics, as well as methods for improved assessment and compensation of environmental effects can be investigated

Electromagnetically-driven ultra-fast tool servos for diamond turning

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2005.This electronic version was submitted by the student author. The certified thesis is available in the Institute Archives and Special Collections.Includes bibliographical references (p. 343-351).This thesis presents the design, implementation, and control of a new class of fast tool servos (FTS). The primary thesis contributions include the design and experimental demonstration of: novel ultra-fast electromagnetic actuators, integration of these actuators in a new class of FTS, a novel real-time control computer with 1 million samples per second throughput, MIMO loop shaping techniques for parallel power amplifiers, and a novel configuration and controller tuning method for implementing adaptive feed-forward cancellation control. All of these elements have been successfully used for diamond turning of contoured surfaces. Fast tool servos (FTS) are high bandwidth positioning devices, which, in conjunction with an ultra-precision lathe and diamond tooling, can produce free form surfaces with nanometer-scale resolution, such as required in micro-optical devices and light-enhancing films. The increasing complexity of such surfaces requires more components in shorter spatial wavelengths, and thus drives simultaneously the need for high bandwidth, high acceleration and high accuracy of the FTS. Conventional FTS solutions are based on piezoelectric stacks, which are typically limited to a few micron stroke at 1 kHz operation if not operated in a resonant mode.(cont.) As a promising alternative, this thesis demonstrates electromagnetically driven solutions for fast tool servos. The key new technology in these alternative designs is a new class of ultra fast electromagnetic drivers with thousands of G's acceleration capability in continuous operation. By separating the flux-biasing surfaces from the normal-flux working surfaces, this new driver design has a number of advantages: (1) actuating force linear to both excitation current and displacement, (2) modularity and parallel operating ability, (3) full magnetic stress utilization of normal surfaces, and (4) low heat dissipation. We analyze the operation characteristics, and also provide soft magnetic material selection criteria and motor design guidelines. Based on this ultra fast driver, we designed a linear fast tool servo with the theoretical capability for 1200 G acceleration in continuous operation. To control such positioning devices at bandwidth of over 10 kHz, we developed a real-time computer architecture, utilizing three floating point digital signal processors (DSPs) in conjunction with a field-programmable gate array (FPGA) to significantly increase the processing rate.(cont.) The real-time computer prototype experimentally demonstrated 1 million samples per second real-time control execution with a total latency of 1.9 microseconds when implementing a representative control algorithm of significant complexity. This processing system has capabilities far beyond what is commercially available for such real-time high-accuracy control tasks. The power amplifier driving the FTS must supply 1 kVA (primarily reactive power) with over 100 kHz bandwidth. We present a solution of using 4 power operational amplifiers in parallel, each capable of supplying one fourth of the total power. To address the coupling issues among channels, a decoupling theory is developed to convert the associated MIMO plant into several SISO sub-plants, and thus ease the analog decentralized controller design of the power amplifier current feedback loops. In order to enhance the FTS repetitive position trajectory tracking and disturbance rejection, adaptive feed-forward cancellation is embedded into a conventional motion control loop in our system. We provide a consistent loop shaping framework and intuitive parameter tuning and trade-off guidelines for this controller structure.(cont.) Experimental results with the first prototype FTS using powder iron cores demonstrate 23 kHz closed-loop bandwidth, as low as 1.7 nm RMS error, 30 micron stroke, 500 G peak acceleration at 10 kHz open-loop operation, and 2.1 nm (0.04%) error in tracking a 3 kHz sinusoid of 16 micron p-v. (The full 1200 G capability is expected to be experimentally demonstrated by the second prototype FTS using Ni-Fe tape cores). Using this FTS, we have diamond-turned two-dimensional sinusoidal surfaces in copper and aluminum with 0.5 degree azimuthal spatial period, 160 micron radial spatial period, and 2 micron peak-to-valley amplitude, at 500 RPM spindle speed.by Xiaodong Lu.Ph.D

Computationalcost Reduction of Robust Controllers Foractive Magnetic Bearing Systems

This work developed strategies for reducing the computational complexity of implementing robust controllers for active magnetic bearing (AMB) systems and investigated the use of a novel add-on controller for gyroscopic effect compensation to improve achievable performance with robust controllers. AMB systems are multi-input multi-output (MIMO) systems with many interacting mechanisms that needs to fulfill conflicting performance criteria. That is why robust control techniques are a perfect application for AMB systems as they provide systematic methods to address both robustness and performance objectives. However, robust control techniques generally result in high order controllers that require high-end control hardware for implementation. Such controllers are not desirable by industrial AMB vendors since their hardware is based on embedded systems with limited bandwidths. That is why the computational cost is a major obstacle towards industry adaptation of robust controllers. Two novel strategies are developed to reduce the computational complexity of singlerate robust controllers while preserving robust performance. The first strategy identifies a dual-rate configuration of the controller for implementation. The selection of the dualrate configuration uses the worst-case plant analysis and a novel approach that identifies the largest tolerable perturbations to the controller. The second strategy aims to redesign iv the controller by identifying and removing negligible channels in the context of robust performance via the largest tolerable perturbations to the controller. The developed methods are demonstrated both in simulation and experiment using three different AMB systems, where significant computational savings are achieved without degrading the performance. To improve the achievable performance with robust controllers, a novel add-on controller is developed to compensate the gyroscopic effects in flexible rotor-AMB systems via modal feedback control. The compensation allows for relaxing the robustness requirements in the control problem formulation, potentially enabling better performance. The effectiveness of the developed add-on controller is demonstrated experimentally on two AMB systems with different rotor configurations. The effects of the presence of the add-on controller on the performance controller design is investigated for one of the AMB systems. Slight performance improvements are observed at the cost of increased power consumption and increased computational complexity

Gas Bearings: Modelling, Design and Applications

This book focuses on the modelling and the design process of gas bearings, on the experimental validation of such models, and on their applications. In particular, recent developments about foil bearings, aerostatic bearings, porous bearings, and non-contact precision positioning systems are shown