Study and analysis of surface charge collection and emission spectrum of plasma ashing process

This research presents an important observation on the total surface charge collection using quantox wafers through the measurement of surface voltage (Vs) on wafer surface with contactless Kelvin Probe for changes in parameters during plasma ashing. In this report, it is covered on the plasma characteristics and performance using the optical emission spectroscopy (OES) measurement, the study on how processing condition change can impact the total surface charge collection and also the uniformity of the charges on the wafer surface, using the quantox measurement. In this study, 3 different types of ashers are tested with varying 5 processing parameters, which where the process time, pressure, gas flow, power and temperature. It is seen that changes in the condition of these parameters do impact on the total surface charge collection and also the uniformity of the charges on the wafer surface. Based on the processing conditions, it is observed that Inductively-Coupled Plasma (ICP) asher model is better in terms of total surface charge collection and uniformity compared to Barrel asher model, which has lower total charge collection but with higher non-uniformity due to the machine chamber configuration. On the other hand, Helical Resonator Plasma (HRP) asher model contributes to higher total surface charge collection with the lesser uniformity, which could potential contribute to plasma induced damage (PID)

Charge Fluctuations for a Coulomb Fluid in a Disk on a Pseudosphere

The classical (i.e. non-quantum) equilibrium statistical mechanics of a Coulomb fluid living on a pseudosphere (an infinite surface of constant negative curvature) is considered. The Coulomb fluid occupies a large disk communicating with a reservoir (grand-canonical ensemble). The total charge $Q$ on the disk fluctuates. In a macroscopic description, the charge correlations near the boundary circle can be described as correlations of a surface charge density $\sigma$. In a macroscopic approach, the variance of $Q$ and the correlation function of $\sigma$ are computed; they are universal. These macroscopic results are shown to be valid for two solvable microscopic models, in the limit when the microscopic thickness of the surface charge density goes to zero.Comment: 19 pages, LaTe

How Well Can You Tailor the Charge of Lipid Vesicles?

Knowledge and control of surface charge or potential is important for tailoring colloidal interactions. In this work, we compare widely used zeta potential (ζ) measurements of charged lipid vesicle surface potential to direct measurements using the surface force apparatus (SFA). Our measurements show good agreement between the two techniques. On varying the fraction of anionic lipids dimyristoylphosphatidylserine (DMPS) or dimyristoylphosphatidylglycerol (DMPG) mixed with zwitterionic dimyristoylphosphatidylcholine (DMPC) from 0 to 100 mol % we observed a near-linear increase in membrane surface charge or potential up to 20-30 mol % charged lipids beyond which charge saturation occurred in physiological (high) salt conditions. Similarly, in low salt concentrations, a linear increase in charge/potential was found but only up to ∼5-10 mol % charged lipids beyond which the surface charge or potential leveled off. While a lower degree of ionization is expected due to the lower dielectric constant (ε ∼ 4) of the lipid acyl chain environment, increasing intramembrane electrostatic repulsion between neighboring charged lipid head groups at higher charge loading contributes to charge suppression. Measured potentials in physiological salt solutions were consistent with predictions using the Gouy-Chapman-Stern-Grahame (GCSG) model of the electrical double layer with Langmuir binding of counterions, but in low salt conditions, the model significantly overestimated the surface charge/potential. The much lower ionization in low salt (maximum ∼1-2% of total lipids ionized) instead was consistent with counterion condensation at the bilayer surface which limited the charge that could be obtained. The strong interplay between membrane composition, lipid headgroup ionization, electrolyte concentration, and solution pH complicates exact prediction and tuning of membrane surface charge for applications. However, the theoretical frameworks used here can provide guidelines to understand this interplay and establish a range of achievable potentials for a system and predict the response to triggers like pH and salt concentration changes

Variational approach for electrolyte solutions: from dielectric interfaces to charged nanopores

A variational theory is developed to study electrolyte solutions, composed of interacting point-like ions in a solvent, in the presence of dielectric discontinuities and charges at the boundaries. Three important and non-linear electrostatic effects induced by these interfaces are taken into account: surface charge induced electrostatic field, solvation energies due to the ionic cloud, and image charge repulsion. Our variational equations thus go beyond the mean-field theory. The influence of salt concentration, ion valency, dielectric jumps, and surface charge is studied in two geometries. i) A single neutral air-water interface with an asymmetric electrolyte. A charge separation and thus an electrostatic field gets established due to the different image charge repulsions for coions and counterions. Both charge distributions and surface tension are computed and compared to previous approximate calculations. For symmetric electrolyte solutions close to a charged surface, two zones are characterized. In the first one, with size proportional to the logarithm of the coupling parameter, strong image forces impose a total ion exclusion, while in the second zone the mean-field approach applies. ii) A symmetric electrolyte confined between two dielectric interfaces as a simple model of ion rejection from nanopores. The competition between image charge repulsion and attraction of counterions by the membrane charge is studied. For small surface charge, the counterion partition coefficient decreases with increasing pore size up to a critical pore size, contrary to neutral membranes. For larger pore sizes, the whole system behaves like a neutral pore. The prediction of the variational method is also compared with MC simulations and a good agreement is observed.Comment: This version is accepted for publication in Phys. Rev. E

The origin of Sr segregation at La1-xSrxMnO3 surfaces

A uniform distribution of La and Sr in lanthanum-strontium manganites would lead to charged crystal planes, a charged surface, and arbitrarily large surface energy for a bulk crystal. This divergent energy can be eliminated by depleting the La concentration near the surface. Assuming an exponential form for segregation suggested by experiment, the total electrostatic energy is calculated, depending only upon the decay length and on an effective charge Z* associated with the La ion. It is found to be lower in energy than neutralization of the surface by changing Mn charge states, previously expected, and lower than simply readjusting the La concentration in the surface plane. The actual decay length obtained by minimizing this electrostatic energy is shorter than that observed. The extension of this mechanism to segregation near the surface in other systems is discussed