Finite Element Simulation of Light Propagation in Non-Periodic Mask Patterns

Rigorous electromagnetic field simulations are an essential part for scatterometry and mask pattern design. Today mainly periodic structures are considered in simulations. Non-periodic structures are typically modeled by large, artificially periodified computational domains. For systems with a large radius of influence this leads to very large computational domains to keep the error sufficiently small. In this paper we review recent advances in the rigorous simulation of isolated structures embedded into a surrounding media. We especially address the situation of a layered surrounding media (mask or wafer) with additional infinite inhomogeneities such as resist lines. Further we detail how to extract the far field information needed for the aerial image computation in the non-periodic setting.Comment: Proceedings SPIE conference Photomask Japan (2008

Rigorous Simulations of 3D Patterns on Extreme Ultraviolet Lithography Masks

Simulations of light scattering off an extreme ultraviolet lithography mask with a 2D-periodic absorber pattern are presented. In a detailed convergence study it is shown that accurate results can be attained for relatively large 3D computational domains and in the presence of sidewall-angles and corner-roundings.Comment: SPIE Europe Optical Metrology, Conference Proceeding

Reduced basis method for computational lithography

A bottleneck for computational lithography and optical metrology are long computational times for near field simulations. For design, optimization, and inverse scatterometry usually the same basic layout has to be simulated multiple times for different values of geometrical parameters. The reduced basis method allows to split up the solution process of a parameterized model into an expensive offline and a cheap online part. After constructing the reduced basis offline, the reduced model can be solved online very fast in the order of seconds or below. Error estimators assure the reliability of the reduced basis solution and are used for self adaptive construction of the reduced system. We explain the idea of reduced basis and use the finite element solver JCMsuite constructing the reduced basis system. We present a 3D optimization application from optical proximity correction (OPC).Comment: BACUS Photomask Technology 200

Numerical analysis of nanostructures for enhanced light extraction from OLEDs

Nanostructures, like periodic arrays of scatters or low-index gratings, are used to improve the light outcoupling from organic light-emitting diodes (OLED). In order to optimize geometrical and material properties of such structures, simulations of the outcoupling process are very helpful. The finite element method is best suited for an accurate discretization of the geometry and the singular-like field profile within the structured layer and the emitting layer. However, a finite element simulation of the overall OLED stack is often beyond available computer resources. The main focus of this paper is the simulation of a single dipole source embedded into a twofold infinitely periodic OLED structure. To overcome the numerical burden we apply the Floquet transform, so that the computational domain reduces to the unit cell. The relevant outcoupling data are then gained by inverse Flouqet transforming. This step requires a careful numerical treatment as reported in this paper

A Rigorous Finite-Element Domain Decomposition Method for Electromagnetic Near Field Simulations

Rigorous computer simulations of propagating electromagnetic fields have become an important tool for optical metrology and design of nanostructured optical components. A vectorial finite element method (FEM) is a good choice for an accurate modeling of complicated geometrical features. However, from a numerical point of view solving the arising system of linear equations is very demanding even for medium sized 3D domains. In numerics, a domain decomposition method is a commonly used strategy to overcome this problem. Within this approach the overall computational domain is split up into smaller domains and interface conditions are used to assure continuity of the electromagnetic field. Unfortunately, standard implementations of the domain decomposition method as developed for electrostatic problems are not appropriate for wave propagation problems. In an earlier paper we therefore proposed a domain decomposition method adapted to electromagnetic field wave propagation problems. In this paper we apply this method to 3D mask simulation.Comment: 9 pages, 7 figures, SPIE conference Advanced Lithography / Optical Microlithography XXI (2008

Finite-Element Simulations of Light Propagation through Circular Subwavelength Apertures

Light transmission through circular subwavelength apertures in metallic films with surrounding nanostructures is investigated numerically. Numerical results are obtained with a frequency-domain finite-element method. Convergence of the obtained observables to very low levels of numerical error is demonstrated. Very good agreement to experimental results from the literature is reached, and the utility of the method is demonstrated in the investigation of the influence of geometrical parameters on enhanced transmission through the apertures

FEM investigation of leaky modes in hollow core photonic crystal fibers

Hollow-core holey fibers are promising candidates for low-loss guidance of light in various applications, e.g., for the use in laser guide star adaptive optics systems in optical astronomy. We present an accurate and fast method for the computation of light modes in arbitrarily shaped waveguides. Maxwell's equations are discretized using vectorial finite elements (FEM). We discuss how we utilize concepts like adaptive grid refinement, higher-order finite elements, and transparent boundary conditions for the computation of leaky modes in photonic crystal fibers. Further, we investigate the convergence behavior of our methods. We employ our FEM solver to design hollow-core photonic crystal fibers (HCPCF) whose cores are formed from 19 omitted cladding unit cells. We optimize the fiber geometry for minimal attenuation using multidimensional optimization taking into account radiation loss (leaky modes).Comment: 8 page