Development of a Batch Fabrication Process for Chemical Nanosensors: Recent Advancements at NASA Glenn Research Center

A major objective in aerospace sensor development is to produce sensors that are small in size, easy to batch fabricate and low in cost, and have low power consumption. Chemical sensors involving nanostructured materials can provide these characteristics as well as the potential for the development of sensor systems with unique properties and improved performance. However, the fabrication and processing of nanostructures for sensor applications currently is limited by the ability to control their location on the sensor platform, which in turn hinders the progress for batch fabrication. This presentation will discuss the following: the development of a novel room temperature methane (CH4) sensor fabricated using porous tin oxide (SnO2) nanorods as the sensing material, the advantages of using nanomaterials in sensor designs, the challenges encountered with the integration of nanostructures into microsensordevices, and the different methods that have been attempted to address these challenges. An approach for the mass production of sensors with nanostructures using a method developed by our group at the NASA Glenn Research Center to control the alignment of nanostructures onto a sensor platform will also be described

Processing of Nanosensors Using a Sacrificial Template Approach

A new microsensor fabrication approach has been demonstrated based upon the use of nanostructures as templates. The fundamental idea is that existing nanostructures, such as carbon nano tubes or biological structures, have a material structure that can be used advantageously in order to provide new sensor systems but lack the advantages of some materials to, for example, operate at high temperatures. The approach is to start with a template using nanostructures such as a carbon nanotube. This template can then be coated by an oxide material with higher temperature capabilities. Upon heating in air, the carbon nanotube template is burned off, leaving only the metal oxide nanostructure. The resulting structure has a combination of the crystal structure and surface morphology of the carbon nanotube, combined with the material durability and hightemperature- sensing properties of the metal oxide. Further, since the metal oxide nanocrystals are deposited on the carbon nanotube, after burn-off what is left is a metal oxide porous nanostructure. This makes both the interior and the exterior of this nano structured sensor available for gas species detection. This, in effect, increases the surface area available for sensing, which has been shown in the past to significantly increase sensor performance

Whole Wafer Design and Fabrication for the Alignment of Nanostructures for Chemical Sensor Applications

A major objective in aerospace sensor development is to produce sensors that are small in size, easy to batch fabricate and low in cost, and have low power consumption The fabrication of chemical sensors involving nanostructured materials can provide these properties as well as the potential for the development of sensor systems with unique properties and improved performance. However, the fabrication and processing of nanostructures for sensor applications currently is limited in the ability to control their location on the sensor. Currently, our group at NASA Glenn Research Center has demonstrated the controlled placement of nanostructures in sensors using a sawtooth patterned electrode design. With this design the nanostructures are aligned between opposing sawtooth electrodes by applying an alternating current

Integration of Nanostructures into Microsensor Devices on Whole Wafers

Chemical sensors are used in a wide variety of applications, such as environmental monitoring, fire detection, emission monitoring, and health monitoring. The fabrication of chemical sensors involving nanostructured materials holds the potential for the development of sensor systems with unique properties and improved performance. However, the fabrication and processing of nanostructures for sensor applications currently are limited in the ability to control their location on the sensor, which in turn hinders the progress for batch fabrication. This report discusses the advantages of using nanomaterials in sensor designs, some of the challenges encountered with the integration of nanostructures into microsensor / devices, and then briefly describes different methods attempted by other groups to address this issue. Finally, this report will describe how our approach for the controlled alignment of nanostructures onto a sensor platform was applied to demonstrate an approach for the mass production of sensors with nanostructures

Chemical Microsensor Development for Aerospace Applications

Numerous aerospace applications, including low-false-alarm fire detection, environmental monitoring, fuel leak detection, and engine emission monitoring, would benefit greatly from robust and low weight, cost, and power consumption chemical microsensors. NASA Glenn Research Center has been working to develop a variety of chemical microsensors with these attributes to address the aforementioned applications. Chemical microsensors using different material platforms and sensing mechanisms have been produced. Approaches using electrochemical cells, resistors, and Schottky diode platforms, combined with nano-based materials, high temperature solid electrolytes, and room temperature polymer electrolytes have been realized to enable different types of microsensors. By understanding the application needs and chemical gas species to be detected, sensing materials and unique microfabrication processes were selected and applied. The chemical microsensors were designed utilizing simple structures and the least number of microfabrication processes possible, while maintaining high yield and low cost. In this presentation, an overview of carbon dioxide (CO2), oxygen (O2), and hydrogen/hydrocarbons (H2/CxHy) microsensors and their fabrication, testing results, and applications will be described. Particular challenges associated with improving the H2/CxHy microsensor contact wire-bonding pad will be discussed. These microsensors represent our research approach and serve as major tools as we expand our sensor development toolbox. Our ultimate goal is to develop robust chemical microsensor systems for aerospace and commercial applications

Nitric Oxide Microsensors for Engine Emissions, Environmental, and Human Health Monitoring Applications

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Silicon Encapsulated Carbon Nanotubes

A dual stage process of depositing bamboo-like carbon nanotubes (BCNTs) by hot filament chemical vapor deposition (HFCVD) and coating Si using Radio frequency sputtering (RFS) technique. The films were characterized by scanning electron microscopy (SEM), transmission electron microscopy (TEM), Raman spectroscopy, X-ray photoelectron spectroscopy (XPS), and electron field emission studies (EFE). SEM results suggest a dense network of homogeneous silicon-coated BCNTs. From the comprehensive analysis of the results provided by these techniques emerges the picture of Si encapsulated BCNTs

Micro/Nanoscale Chemicalsensor Systems for Aerospace Applications

The aerospace industry requires development of a range of chemical-sensor technologies for applications including emissions monitoring as well as fuel-leak and fire detection. Improvements in sensing technology are necessary to increase safety, reduce emissions, and increase performance. The overall aim is to develop intelligent-vehicle systems that can autonomously monitor their state and respond to environmental changes. A range of chemical sensors is under development to meet these needs, based in part on microfabrication technology which produces sensors of minimal size, weight, and power consumption. We have fabricated a range of sensor platforms, integrated them with hardware to form complete sensor systems, and demonstrated their applicability

2016 National Nanotechnology Initiative Strategic Plan

The National Nanotechnology Initiative (NNI), established in 2001, is now a collaboration of twenty Federal agencies and Cabinet-level departments with shared interests in nanotechnology research, development, and commercialization. These agencies recognize that the ability to understand and harness the novel phenomena that occur at the nanoscale is already leading to revolutionary new materials, devices, and structures. These advances promise to improve human health and quality of life, enhance the U.S. economy, boost job creation, and strengthen our national defense. Since the inception of the NNI, these agencies have invested more than $23 billion in support of cutting-edge research; world-class user facilities for characterization, modeling, and fabrication; and the responsible transfer of nanotechnology-based products from lab to market. As a result of these investments, nanotechnology has become ubiquitous in our daily lives and can be found in a wide variety of commercial products including healthcare products, cosmetics, consumer electronics, apparel, and automobiles. Nanotechnology is poised to revolutionize the way we diagnose and treat diseases such as cancer, help us improve our fitness, and reduce our energy consumption. Under the 21st 15 Century Nanotechnology Research and Development Act of 2003, NNI agencies are required to develop an updated NNI Strategic Plan every three years. This document represents a consensus among NNI agencies on the high-level goals and priorities of the initiative and on specific objectives to be pursued over at least the next three years. The plan provides the framework under which individual agencies conduct their own mission-specific nanotechnology programs, coordinate these activities with those of other NNI agencies, and collaborate