133 research outputs found
Finite Size Effects in Highly Scaled Ruthenium Interconnects
Ru has been considered a candidate to replace Cu-based interconnects in VLSI
circuits. Here, a methodology is proposed to predict the resistivity of (Ru)
interconnects. First, the dependence of the Ru thin film resistivity on the
film thickness is modeled by the semiclassical Mayadas-Shatzkes (MS) approach.
The fitting parameters thus obtained are then used as input in a modified MS
model for nanowires to calculate wire resistivities. Predicted experimental
resistivities agreed within about 10%. The results further indicate that grain
boundary scattering was the dominant scattering mechanism in scaled Ru
interconnects.Comment: 4 pages. 2 figure
Temperature-Dependent Resistivity of Alternative Metal Thin Films
The temperature coefficients of the resistivity (TCR) of Cu, Ru, Co, Ir, and
W thin films have been investigated as a function of film thickness below 10
nm. Ru, Co, and Ir show bulk-like TCR values that are rather independent of the
thickness whereas the TCR of Cu increases strongly with decreasing thickness.
Thin W films show negative TCR values, which can be linked to high disorder.
The results are qualitatively consistent with a temperature-dependent
semiclassical thin film resistivity model that takes into account phonon,
surface, and grain boundary scattering.Comment: 11 pages, 4 figure
Reservoir quality controls on Rotliegend fluvio-aeolian wells in Germany and the Netherlands, Southern Permian Basin – Impact of grain coatings and cements
Reservoir quality in sandstones can be a function of temperature, pressure, and chemical alterations over time. Some intrinsic properties of sandstones can additionally impact the evolution of reservoir quality. The detrital composition, depositional environment, and properties controlled thereby, dictate some of the diagenetic changes. Extrinsic processes, like external fluids, e.g. from hydrothermal events or dewatering of clay minerals, can additionally result in changes of reservoir quality. One of these properties are grain coatings on quartz grains, which can strongly affect pore cementation by quartz overgrowths. To predict and infer the quality of undrilled reservoirs, constraints are needed to predict their occurrence. We analyse two reservoir settings in the Southern Permian Basin and delineate the impact of depositional systems, lithologies, detrital and authigenic composition on reservoir quality and with regard to grain coatings. Results highlight the importance of diagenetic alterations and the source area in regards to burial development in different parts of the Southern Permian Basin. Samples from the Rotliegend Bahnsen Sandstone Member from Germany and the Slochteren Sandstone Formation from the Netherlands have been petrographically and petrophysically analysed and linked to depositional environments. Our data shows that the emplacement and presence of grain coating minerals cannot be simply linked to the depositional environment or processes controlled thereby (e.g. grain size and sorting), neither on a reservoir-, nor on a basin scale. The dissolution of alumosilicates additionally has no consistent impact on the authigenesis of chloritic grain coatings on the reservoir- or basin scale in this study. This implies the necessity of sample specific analyses and importance of the assessment of diagenetic alterations when analysing, modelling, or predicting reservoir quality in similar settings worldwide
Large anisotropic uniaxial pressure dependencies of Tc in single crystalline Ba(Fe0.92Co0.08)2As2
Using high-resolution dilatometry, we study the thermodynamic response of the
lattice parameters to superconducting order in a self-flux grown
Ba(Fe0.92Co0.08)2As2 single crystal. The uniaxial pressure dependencies of the
critical temperature of Tc, calculated using our thermal expansion and specific
heat data via the Ehrenfest relation, are found to be quite large and very
anisotropic (dTc/dpa = 3.1(1) K/GPa and dTc/dpc = - 7.0(2) K/GPa). Our results
show that there is a strong coupling of the c/a ratio to superconducting order,
which demonstrates that Tc is far from the optimal value. A surprising
similarity with the uniaxial pressure effects in several other layered
superconductors is discussed.Comment: 11 pages, 4 Figure
First principles-based screening method for resistivity scaling of anisotropic metals
The resistivity scaling of metals is a crucial factor for further downscaling
of interconnects in nanoelectronic devices that affects signal delay, heat
production, and energy consumption. Here, we present a screening method for
metals with highly anisotropic band structures near the Fermi level with the
aim to select promising materials in terms of their electronic transport
properties and their resistivity scaling at the nanoscale. For this, we
consider a temperature-dependent transport tensor, based on band structures
obtained from first principles. This transport tensor allows for a
straightforward comparison between different anisotropic metals in
nanostructures with different lattice orientations. By evaluating the
temperature dependence of the tensor components, we also find strong deviations
from the zero-temperature transport properties at standard operating
temperature conditions around room temperature.Comment: 25 pages, 8 figure
Selection of Alternative Local Interconnect Metals: Beyond Traditional Criteria Towards Sustainable and Secure Supply Chains
In response to aggressive scaling demands in semiconductor manufacturing and
the growing need to apply sustainable practices, this paper presents a holistic
sustainability assessment framework for evaluating alternative metals for
advanced applications. The framework, consisting of seven sustainability
aspects, aims to guide researchers and industry stakeholders towards decisions
fostering a more sustainable and secure future for microelectronics. This study
applies the framework to assess the sustainability of alternative local
interconnect metals. The framework identifies five metals (Ti, Al, Ni, Co, and
Mo) with relatively favourable performance in at least six out of nine specific
indicators, while others (Pt, Ru, Ir, Rh, and Pd) exhibit poorer sustainability
metrics. The study recommends further analyses, suggesting the incorporation of
case-specific functional units and the use of normalization and weighting
factors for a comprehensive evaluation. Coupled with traditional technological
assessments, this framework equips decision-makers with essential tools to
broaden criteria for selecting alternative metals, aligning semiconductor
manufacturing with broader sustainability objectives.Comment: 20 pages, 5 Figures, 5 Tables, 12 equation
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