Study and manufacturing of biosensors based on plasmonic effects and built on silicon

Abstract: Lab-on-a-chip (or LOC) devices scale down the laboratory processes for detecting illnesses and monitoring sick patients without the need of medical laboratories. Well-known examples of LOC are pregnancy test kits or portable HIV sensors. To be useful, LOC devices must be sensitive, specific, compact, and affordable. These criteria are made possible with a transducer that can convert the biological presence of the target molecule into electrical information. Since the early 2000s, integrated photonics have offered a possible solution for a transducer compatible with LOC needs. In particular, silicon micro-ring resonators represent a compact and sensitive choice to use as a transducer in LOC devices. In agreement with the requirements of LOC devices, the objective of this project is to design and assess the performance of a compact photonic biosensor. The system will be based on integrated photonic transduction. The requirements are that it is compatible with an industrial fabrication platform and fluidic systems, with a sensitivity equal to or higher than the state-of-the-art and simple to functionalize in order to localize the target molecules in the sensitive regions of the sensor. This project details the design, fabrication, and characterization of such a biosensor. We found that ring resonators with a Hybrid Plasmonic Waveguide (HPWG) cross-section fulfill the LOC requirements and outperform the state-of-the-art biosensor. Furthermore, based on a principle called mode lift, we patented new geometry of HPWG, which will be the object of an article. We simulated the HPWG structure to understand the coupling mechanisms of the modes inside the structure (more specifically, the plasmonic and the ridge dielectric modes). The fabrication was possible thanks to the collaboration of the industrial and university cleanrooms. An advantage of industrial production is that we can reproducibly create the geometric components necessary for the LOC in a high-throughput manner, thus lowering the cost per unit cell. Once the 300 mm Si wafers were patterned, the university cleanroom fabrication process adds the metallic waveguides. The Au nanopatterning on the devices characterized in this project was created using the lift-off method. The preliminary measures define the optimal testing liquid (glucose monohydrate) and the uncertainty of the measures. The HPWG samples showed an experimental sensitivity lower than the simulations. After adjusting the fabrication parameters (mainly Au and Cr deposition rates and thicknesses), the second-generation HPWG devices suggest that the mode lift improves the sensitivity for waveguides below cutoff (the sensitivity increases from 210 nm/RIU to 320 nm/RIU when only 10% of the ring resonator has an HPWG section and the rest is a ridge waveguide). Even in the case where ridge waveguides are above the cutoff, the sensitivity increases by 40 nm/RIU when using mode lift. We also showed the compatibility of the fabricated devices’ surface with differential functionalization, by means of fluorescent nanoparticles. Due to time limitations, the presence of the nanoparticles will be measured with the fabricated devices in future experiments.Les dispositifs laboratoire sur puce (ou Lab-on-a-chip ou LOC) visent à miniaturiser les procédés de laboratoires pour la détection des maladies et la surveillance des patients malades, sans avoir besoin de laboratoires médicaux. Deux exemples bien connus de LOC sont les kits de test de grossesse ou les capteurs portables du VIH. Pour être efficaces, les appareils LOC doivent être sensibles, spécifiques à l’analyte concerné, compacts et abordables. Ces critères sont possibles grâce à un transducteur, qui peut convertir la présence biologique de la molécule cible en informations électriques. Depuis le début des années 2000, la photonique intégrée a offert une solution pour un système de transduction compatible avec les besoins du LOC. En particulier, les micro-résonateurs à anneaux en silicium représentent un transducteur compact et sensible adapté aux appareils LOC. En accord avec les exigences des dispositifs LOC, l’objectif de ce projet est de concevoir et d’évaluer les performances d’un biocapteur photonique compact. Le système sera basé sur une transduction photonique intégrée. Les exigences sont : une simple fonctionnalisation, la compatibilité avec une plateforme de fabrication industrielle et des systèmes fluidiques, avec une sensibilité égale ou supérieure à l’état de l’art. Ce projet détaille la conception, la fabrication et la caractérisation d’un tel biocapteur. Nous avons constaté que les résonateurs en anneau avec une section transversale de guide d’ondes hybrides plasmoniques (HPWG) remplissent les exigences LOC et sont compétitifs en comparaison avec l’état de l’art des biocapteurs photoniques. Par ailleurs, basée sur un principe appelé mode lift, une nouvelle géométrie de HPWG a été brevetée et fera l’objet d’un article. Nous avons simulé la structure HPWG pour comprendre les mécanismes de couplage des modes photoniques à l’intérieur de la structure (plus précisément les modes plasmoniques et les modes diélectriques du guide d’onde à ruban). La fabrication a été possible grâce à la collaboration de la salle blanche industrielle de STMicroelectronics et des salles blanches universitaires de l’université de Sherbrooke et de l’Institut de Nanotechnologies de Lyon. Un avantage de la production industrielle est que nous pouvons créer de manière reproductible la géométrie des composants nécessaires pour le LOC à haut débit, réduisant ainsi le coût par unité. Une fois que les wafers de 300 mm ont été structurés, le processus de fabrication en salle blanche universitaire permet d’ajouter le métal des guides d’ondes plasmoniques. La méthode du lift-off a été utilisée pour la nanostructuration Au sur les dispositifs caractérisés dans ce projet. Des mesures préliminaires ont permis de définir le liquide d’essai optimal (glucose monohydrate) ainsi que l’incertitude des mesures. Les échantillons HPWG ont montré une sensibilité expérimentale inférieure aux simulations. Après avoir ajusté les paramètres de fabrication (principalement les taux et les épaisseurs de dépôt d’Au et de Cr), les dispositifs HPWG de deuxième génération suggèrent que le mode lift améliore la sensibilité des guides d’ondes en dessous de la coupure (la sensibilité augmente de 210 nm/RIU à 320 nm/RIU lorsque seulement 10 % du résonateur en anneau a une section HPWG). Même par rapport aux guides d’ondes au-dessus de la coupure, la sensibilité augmente de 40 nm/RIU lors de l’utilisation du mode lift. Nous avons également montré la compatibilité de la surface des appareils fabriqués avec la fonctionnalisation différentielle en utilisant des nanoparticules fluorescentes. Pour des contraintes de temps, la présence des nanoparticules ne sera mesurée que dans des futures expériences

Semiconductor Infrared Devices and Applications

Infrared (IR) technologies—from Herschel’s initial experiment in the 1800s to thermal detector development in the 1900s, followed by defense-focused developments using HgCdTe—have now incorporated a myriad of novel materials for a wide variety of applications in numerous high-impact fields. These include astronomy applications; composition identifications; toxic gas and explosive detection; medical diagnostics; and industrial, commercial, imaging, and security applications. Various types of semiconductor-based (including quantum well, dot, ring, wire, dot in well, hetero and/or homo junction, Type II super lattice, and Schottky) IR (photon) detectors, based on various materials (type IV, III-V, and II-VI), have been developed to satisfy these needs. Currently, room temperature detectors operating over a wide wavelength range from near IR to terahertz are available in various forms, including focal plane array cameras. Recent advances include performance enhancements by using surface Plasmon and ultrafast, high-sensitivity 2D materials for infrared sensing. Specialized detectors with features such as multiband, selectable wavelength, polarization sensitive, high operating temperature, and high performance (including but not limited to very low dark currents) are also being developed. This Special Issue highlights advances in these various types of infrared detectors based on various material systems

EUROSENSORS XVII : book of abstracts

Fundação Calouste Gulbenkien (FCG).Fundação para a Ciência e a Tecnologia (FCT)

Novel Materials and Devices for Terahertz Detection and Emission for Sensing, Imaging and Communication

Technical advancement is required to attain a high data transmission rate, which entails expanding beyond the currently available bandwidth and establishing a new standard for the highest data rates, which mandates a higher frequency range and larger bandwidth. The THz spectrum (0.1-10 THz) has been considered as an emerging next frontier for the future 5G and beyond technology. THz frequencies also offer unique characteristics, such as penetrating most dielectric materials like fabric, plastic, and leather, making them appealing for imaging and sensing applications. Therefore, employing a high-power room temperature, tunable THz emitters, and a high responsivity THz detector is essential. Dyakonov-theory Shur\u27s was applied in this dissertation to achieve tunable THz detection and emission by plasma waves in high carrier density channels of field-effect devices. The first major contribution of this dissertation is developing graphene-based THz plasmonics detector with high responsivity. An upside-down free-standing graphene in a field effect transistor based resonant room temperature THz detector device with significantly improved mobility and gate control has been presented. The highest achieved responsivity is ~3.1kV/W, which is more than 10 times higher than any THz detector reported till now. The active region is predominantly single-layer graphene with multi-grains, even though the fabricated graphene THz detector has the highest responsivity. The challenges encountered during the fabrication and measurement of the graphene-based detector have been described, along with a strategy to overcome them while preserving high graphene mobility. In our new design, a monolayer of hBN underneath the graphene layer has been deposited to increase the mobility and electron concentration rate further. We also investigated the diamond-based FETs for their potential characteristics as a THz emitters and detectors. Diamond\u27s wide bandgap, high breakdown field, and high thermal conductivity attributes make it a potential semiconductor material for high voltage, high power, and high-temperature operation. Diamond is a good choice for THz and sub-THz applications because of its high optical phonon scattering and high momentum relaxation time. Numerical and analytical studies of diamond materials, including p-diamond and n-diamond materials, are presented, indicating their effectiveness as a prospective contender for high temperature and high power-based terahertz applications These detectors are expected to be a strong competitor for future THz on-chip applications due to their high sensitivity, low noise, tunability, compact size, mobility, faster response time, room temperature operation, and lower cost. Furthermore, when plasma wave instabilities are induced with the proper biasing, the same devices can be employed as THz emitters, which are expected to have a higher emission power. Another key contribution is developing a method for detecting counterfeit, damaged, forged, or defective ICs has been devised utilizing a new non-destructive and unobtrusive terahertz testing approach to address the crucial point of hardware cybersecurity and system reliability. The response of MMICs, VLSI, and ULSIC to incident terahertz and sub-terahertz radiation at the circuit pins are measured and analyzed using deep learning. More sophisticated terahertz response profiles and signatures of specific ICs can be created by measuring a more significant number of pins under different frequencies, polarizations, and depth of focus. The proposed method has no effect on ICs operation and could provide precise ICs signatures. The classification process between the secure and unsecure ICs images has been explained using data augmentation and transfer learning-based convolution neural network with ~98% accuracy. A planar nanomatryoshka type core-shell resonator with hybrid toroidal moments is shown both experimentally and analytically, allowing unique characteristics to be explored. This resonator may be utilized for accurate sensing, immunobiosensing, quick switching, narrow-band filters, and other applications

Microelectromechanical Systems and Devices

The advances of microelectromechanical systems (MEMS) and devices have been instrumental in the demonstration of new devices and applications, and even in the creation of new fields of research and development: bioMEMS, actuators, microfluidic devices, RF and optical MEMS. Experience indicates a need for MEMS book covering these materials as well as the most important process steps in bulk micro-machining and modeling. We are very pleased to present this book that contains 18 chapters, written by the experts in the field of MEMS. These chapters are groups into four broad sections of BioMEMS Devices, MEMS characterization and micromachining, RF and Optical MEMS, and MEMS based Actuators. The book starts with the emerging field of bioMEMS, including MEMS coil for retinal prostheses, DNA extraction by micro/bio-fluidics devices and acoustic biosensors. MEMS characterization, micromachining, macromodels, RF and Optical MEMS switches are discussed in next sections. The book concludes with the emphasis on MEMS based actuators

Micro/Nano Structures and Systems

Micro/Nano Structures and Systems: Analysis, Design, Manufacturing, and Reliability is a comprehensive guide that explores the various aspects of micro- and nanostructures and systems. From analysis and design to manufacturing and reliability, this reprint provides a thorough understanding of the latest methods and techniques used in the field. With an emphasis on modern computational and analytical methods and their integration with experimental techniques, this reprint is an invaluable resource for researchers and engineers working in the field of micro- and nanosystems, including micromachines, additive manufacturing at the microscale, micro/nano-electromechanical systems, and more. Written by leading experts in the field, this reprint offers a complete understanding of the physical and mechanical behavior of micro- and nanostructures, making it an essential reference for professionals in this field

Conceptual Study of Rotary-Wing Microrobotics

This thesis presents a novel rotary-wing micro-electro-mechanical systems (MEMS) robot design. Two MEMS wing designs were designed, fabricated and tested including one that possesses features conducive to insect level aerodynamics. Two methods for fabricating an angled wing were also attempted with photoresist and CrystalBond™ to create an angle of attack. One particular design consisted of the wing designs mounted on a gear which are driven by MEMS actuators. MEMS comb drive actuators were analyzed, simulated and tested as a feasible drive system. The comb drive resonators were also designed orthogonally which successfully rotated a gear without wings. With wings attached to the gear, orthogonal MEMS thermal actuators demonstrated wing rotation with limited success. Multi-disciplinary theoretical expressions were formulated to account for necessary mechanical force, allowable mass for lift, and electrical power requirements. The robot design did not achieve flight, but the small pieces presented in this research with minor modifications are promising for a potential complete robot design under 1 cm2 wingspan. The complete robot design would work best in a symmetrical quad-rotor configuration for simpler maneuverability and control. The military’s method to gather surveillance, reconnaissance and intelligence could be transformed given a MEMS rotary-wing robot’s diminutive size and multi-role capabilities

Faculty Publications and Creative Works 1997

One of the ways we recognize our faculty at the University of New Mexico is through this annual publication which highlights our faculty\u27s scholarly and creative activities and achievements and serves as a compendium of UNM faculty efforts during the 1997 calendar year. Faculty Publications and Creative Works strives to illustrate the depth and breadth of research activities performed throughout our University\u27s laboratories, studios and classrooms. We believe that the communication of individual research is a significant method of sharing concepts and thoughts and ultimately inspiring the birth of new of ideas. In support of this, UNM faculty during 1997 produced over 2,770 works, including 2,398 scholarly papers and articles, 72 books, 63 book chapters, 82 reviews, 151 creative works and 4 patents. We are proud of the accomplishments of our faculty which are in part reflected in this book, which illustrates the diversity of intellectual pursuits in support of research and education at the University of New Mexico. Nasir Ahmed Interim Associate Provost for Research and Dean of Graduate Studie