GaN Nanowire Schottky Barrier Diodes

A new concept of vertical gallium nitride (GaN) Schottky barrier diode based on nanowire (NW) structures and the principle of dielectric REduced SURface Field (RESURF) is proposed in this paper. High-threading dislocation density in GaN epitaxy grown on foreign substrates has hindered the development and commercialization of vertical GaN power devices. The proposed NW structure, previously explored for LEDs offers an opportunity to reduce defect density and fabricate low cost vertical GaN power devices on silicon (Si) substrates. In this paper, we investigate the static characteristics of high-voltage GaN NW Schottky diodes using 3-D TCAD device simulation. The NW architecture theoretically achieves blocking voltages upward of 700 V with very low specific on-resistance. Two different methods of device fabrication are discussed. Preliminary experimental results are reported on device samples fabricated using one of the proposed methods. The fabricated Schottky diodes exhibit a breakdown voltage of around 100 V and no signs of current collapse. Although more work is needed to further explore the nano-GaN concept, the preliminary results indicate that superior tradeoff between the breakdown voltage and specific on-resistance can be achieved, all on a vertical architecture and a foreign substrate. The proposed NW approach has the potential to deliver low cost reliable GaN power devices, circumventing the limitations of today's high electron mobility transistors (HEMTs) technology and vertical GaN on GaN devices

Optimization of power MOSFET devices suitable for integrated circuits

Táto doktorská práca sa zaoberá návrhom laterálnych výkonových tranzistorov s nízkym špecifickým odporom pri zapnutom stave, vhodných pre integráciu do Integrovaných Obvodov.This doctoral thesis deals with the design of lateral power transistor with lower specific on-resistance for integration into IC.The new model of MOSFET with waffle gate pattern is there described. For first, time the conformal transformation the Schwarz-Christoffel mapping has been used for the description of nonhomogeneous current distribution in the channel area of MOSFET with waffle gate pattern. In addition base on the figure of merit definition Area Increment (AI) the topological theoretical limit of MOSFET with waffle gate pattern has been a first time defined

Novel Developments and Challenges for the SiC Power Devices

Silicon Carbide (SiC) is believed to be a revolutionary semiconductor material for power devices of the future; many SiC power devices have emerged as superior alternative power switch technology, especially in harsh environments with high temperature or high electric field. In this chapter, the challenges and recent developments of SiC power devices are discussed. The first part is focused on SiC power diodes including SiC Schottky barrier diode (SBD), SiC PiN diodes (PiN,) SiC junction/Schottky diodes (JBS), then SiC UMOSFETs, DMOSFETs and several MESFETs are introduced, and the third part is about SiC bipolar devices such as BJT and IGBT. Finally, the challenges during the development of SiC power devices, especially about its material growth and packaging are discussed

Tunnel MOS Heterostructure Field Effect Transistor for RF Switching Applications

GaN RF switches are widely used in today’s communication systems. With digital communications getting more and more popular nowadays, the need for improving the performance of involved RF switches is inevitable. Designing low ON-state resistance GaN switches are exceedingly important to improve the switch insertion loss, isolation and power loss. Moreover, considerations need to be taken into account to improve the switching speed of the involved GaN HEMTs. In this dissertation, a new GaN HEMT structure called “Tunnel MOS Heterostructure FET (TMOSHFET)” is introduced which has lower ON-state resistance and faster switching speed compared to conventional AlGaN/GaN HEMTs. In the switch ON process, the channel of this device is charged up by electron tunneling from a layer underneath the channel as opposed to typical AlGaN/GaN HEMTs in which electron injection from the source is charging up the channel. The tunneling nature of this process together with the shorter travel distance of electrons in TMOSHFET provide for a faster switching speed. In order to understand the tunneling mechanisms in TMOSHFET, the fabrication of AlGaN/GaN Schottky Barrier Diodes (SBDs) with various AlGaN thicknesses is demonstrated on Si (111) substrate. The impacts of SF6 dry etching on the trap density and trap state energy of AlGaN surface are investigated using the GP/w- w method. Various tunneling mechanisms at different biases are then characterized in samples and compared with each other. To improve the source and drain resistances in TMOSHFET, a model is generated to optimize the 2DEG density and electric field in AlGaN/GaN heterostructure based on Al mole fraction, AlGaN thickness and the thickness of SiN passivation layer and it is experimentally verified by non-contact Hall 2DEG density measurements. The spontaneous and piezoelectric polarizations together with strain relaxation have been implemented into the model, taking into account the annealing effects. From the experimental data on obtained parameters, the operation and device parameterization of the TMOSHFET is outlined and design considerations to improve the device R_(ON)-V_(BR) figure of merit are discussed

Temperature Dependent Analytical Modeling, Simulation and Characterizations of HEMTs in Gallium Nitride Process

Research is being conducted for a high-performance building block for high frequency and high temperature applications that combine lower costs with improved performance and manufacturability. Researchers have focused their attention on new semiconductor materials for use in device technology to address system improvements. Of the contenders, silicon carbide (SiC), gallium nitride (GaN), and diamond are emerging as the front-runners. GaN-based electronic devices, AlGaN/GaN heterojunction field effect transistors (HFETs), are the leading candidates for achieving ultra-high frequency and high-power amplifiers. Recent advances in device and amplifier performance support this claim. GaN is comparable to the other prominent material options for high-performance devices. The dissertation presents the work on analytical modeling and simulation of GaN high power HEMT and MOS gate HEMT, model verification with test data and device characterization at elevated temperatures. The model takes into account the carrier mobility, the doping densities, the saturation velocity, and the thickness of different layers. Considering the GaN material processing limitations and feedback from the simulation results, an application specific AlGaN/GaN RF power HEMT structure has been proposed. The doping concentrations and the thickness of various layers are selected to provide adequate channel charge density for the proposed devices. A good agreement between the analytical model, and the experimental data is demonstrated. The proposed temperature model can operate at higher voltages and shows stable operation of the devices at higher temperatures. The investigated temperature range is from 1000K to 6000K. The temperature models include the effect of temperature variation on the threshold voltage, carrier mobility, bandgap and saturation velocity. The calculated values of the critical parameters suggest that the proposed device can operate in the GHz range for temperature up to 6000K, which indicates that the device could survive in extreme environments. The models developed in this research will not only help the wide bandgap device researchers in the device behavioral study but will also provide valuable information for circuit designers

GaN-based power devices: Physics, reliability, and perspectives

Over the last decade, gallium nitride (GaN) has emerged as an excellent material for the fabrication of power devices. Among the semicon- ductors for which power devices are already available in the market, GaN has the widest energy gap, the largest critical field, and the highest saturation velocity, thus representing an excellent material for the fabrication of high-speed/high-voltage components. The presence of spon- taneous and piezoelectric polarization allows us to create a two-dimensional electron gas, with high mobility and large channel density, in the absence of any doping, thanks to the use of AlGaN/GaN heterostructures. This contributes to minimize resistive losses; at the same time, for GaN transistors, switching losses are very low, thanks to the small parasitic capacitances and switching charges. Device scaling and monolithic integration enable a high-frequency operation, with consequent advantages in terms of miniaturization. For high power/high- voltage operation, vertical device architectures are being proposed and investigated, and three-dimensional structures—fin-shaped, trench- structured, nanowire-based—are demonstrating great potential. Contrary to Si, GaN is a relatively young material: trapping and degradation processes must be understood and described in detail, with the aim of optimizing device stability and reliability. This Tutorial describes the physics, technology, and reliability of GaN-based power devices: in the first part of the article, starting from a discussion of the main proper- ties of the material, the characteristics of lateral and vertical GaN transistors are discussed in detail to provide guidance in this complex and interesting field. The second part of the paper focuses on trapping and reliability aspects: the physical origin of traps in GaN and the main degradation mechanisms are discussed in detail. The wide set of referenced papers and the insight into the most relevant aspects gives the reader a comprehensive overview on the present and next-generation GaN electronics