CP 1 Model Order Reduction for the extraction of small signal equivalent circuit models of RF-MEMS

Abstract

Abstract—A reduced order model for the small signal analysis of micromechanical structures (MEMS) has been extracted by applying model order reduction (MOR) to their finite element models. The low-order model conserves the accuracy belonging to the finite element method, while drastically reducing the computational time. Moreover, it gives a description of the device’s terminal behaviour and can therefore be employed for circuit and system level simulations of MEMS devices. Keywords—MOR, electromechanical coupling, harmonic pre-stressed analysis I