Fabrication of Silicon Quarter Wave Plate at Terahertz Frequency
We have developed anisotropically etched artificial dielectric quarter wave plates (QWPs) for use at 1.5 and 2.5 Terahertz. A SU8 anti-reflection coating is used to further improve the transmission coefficient by up to 12%
DOI identifier: 10.1109/photwtm.2010.5421976
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