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Fabrication of Silicon Quarter Wave Plate at Terahertz Frequency

By S.C. Saha, Y. Ma, J.P. Grant, A. Khalid and D.R.S. Cumming


We have developed anisotropically etched artificial dielectric quarter wave plates (QWPs) for use at 1.5 and 2.5 Terahertz. A SU8 anti-reflection coating is used to further improve the transmission coefficient by up to 12%

Year: 2010
DOI identifier: 10.1109/photwtm.2010.5421976
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Provided by: Enlighten
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