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Growth behavior of titanium dioxide thin films at different precursor temperatures

By Sang-Hun Nam, Sang-Jin Cho and Jin-Hyo Boo

Abstract

The hydrophilic TiO2 films were successfully deposited on slide glass substrates using titanium tetraisopropoxide as a single precursor without carriers or bubbling gases by a metal-organic chemical vapor deposition method. The TiO2 films were employed by scanning electron microscopy, Fourier transform infrared spectrometry, UV-Visible [UV-Vis] spectroscopy, X-ray diffraction, contact angle measurement, and atomic force microscopy. The temperature of the substrate was 500°C, and the temperatures of the precursor were kept at 75°C (sample A) and 60°C (sample B) during the TiO2 film growth. The TiO2 films were characterized by contact angle measurement and UV-Vis spectroscopy. Sample B has a very low contact angle of almost zero due to a superhydrophilic TiO2 surface, and transmittance is 76.85% at the range of 400 to 700 nm, so this condition is very optimal for hydrophilic TiO2 film deposition. However, when the temperature of the precursor is lower than 50°C or higher than 75°C, TiO2 could not be deposited on the substrate and a cloudy TiO2 film was formed due to the increase of surface roughness, respectively

Topics: Nano Express
Publisher: Springer
OAI identifier: oai:pubmedcentral.nih.gov:3296554
Provided by: PubMed Central

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Citations

  1. (1998). A role of energetic ions in RF-biased PECVD of TiO2. Vacuum
  2. (1980). Conversion of carbohydrate into hydrogen fuel by a photocatalytic process. Nature
  3. (1997). Deposition of SiO2 and TiO2 thin films by plasma enhanced chemical vapor deposition for antireflection coating. J Non-Cryst Solids
  4. (1971). Electrochemical evidence for the mechanism of the primary stage of photosynthesis. Bull Chem Soc Jpn
  5. (1977). Electronic band structure of titanium dioxide. Phys Rev B
  6. (1994). F: Electrical and optical properties of TiO2 anatase thin films.
  7. (1995). GL: Gas-phase kinetics for TiO2 CVD: hot-wall reactor results. Thin Solid Films
  8. (1991). Gratzel M: A low-cost, high-efficiency solar cell based on dyesensitized colloidal TiO2 films. Nature (London)
  9. (1995). Gratznel M: Light-induced redox reactions in nanocrystalline systems. Chem Rev
  10. (1972). Honda K: Electrochemical photolysis of water at a semiconductor electrode. Nature
  11. (1995). Jr: Photocatalysis on TiO2 surfaces: principles, mechanisms, and selected results. Chem Rev
  12. (1997). Light-induced amphiphilic surfaces. Nature
  13. (1971). Materials Handbook
  14. (1997). Photoelectrochemical study of thin anatase TiO2 films prepared by metallorganic chemical vapor deposition. J Electrochem Soc
  15. (1997). Tanemura S: Plasma luminescence generated in laser evaporation of dielectrics.

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