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Experimental studies of the processes occuring in ion plating discharges

By H Valizadeh


A theoretical study of the processes occurring in ion plating is carried out and the potential of various mechanisms affecting properties of ion-plated films is studied. Three pieces of apparatus are designed and developed to study the contributions of the mechanisms responsible for the properties of ionplated films.\ud A thorough experimental investigation of the processes occurring in ion plating discharges is carried out

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