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In situ absolute air, O3 and NO densities in the effluent of a cold RF argon atmospheric pressure plasma jet obtained by molecular beam mass spectrometry

By BTJ van Ham, S Sven Hofmann, R Ronny Brandenburg and PJ Peter Bruggeman


A molecular beam mass spectrometer has been calibrated and used to measure the air entrainment, nitric oxide and ozone concentrations in the effluent of a cold atmospheric pressure argon RF driven plasma jet. The approaches for calibrating the mass spectrometer for different species are described in detail. Gas phase densities of ozone and nitric oxide up to 7.5 ppm and 4 ppm, respectively, have been measured in the far effluent of the argon plasma jet. The difference in air entrainment when the plasma is undisturbed or is close to a well, which is the case for e.g. in vitro plasma–cell interaction studies, is shown. In addition, an exponential decay of the positive ion flux as a function of distance in the effluent is obtained. Furthermore, the effect of plasma power, duty cycle and air and O2 admixtures introduced into the argon flow on the NO and O3 production is presented, including the possibility of independent control of the NO and O3 flux from the jet

Publisher: 'AIP Publishing'
Year: 2014
DOI identifier: 10.1088/0022-3727/47/22/224013
OAI identifier:
Provided by: Repository TU/e
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