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Silicon-on-insulator thermo-optic variable attenuator module with fast response

By Li YT, Chen YY, Chen SW, Yu JZ and Peoples R China. Beijing 100083 State Key Lab Integrated Optoelect Inst Semicond Chinese Acad Sci YT Li


A thermo-optic variable optical attenuator module composed of a silicon-on-insulator attenuator chip and driving circuit was designed and fabricated. The module exhibited a maximum attenuation of 21.8 dB and a response time of 10 mu s. (c) 2005 Society of Photo-Optical Instrumentation Engineers

Topics: Thermo-optic, 光电子学
Year: 2005
DOI identifier: 10.1117/1.1922328
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