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Recent Advances in Electron Tomography: TEM and HAADF-STEM Tomography for Materials Science and IC Applications

By C Kubel, A Voigt, R Schoenmakers, M Otten, D Su, T Lee, A Carlsson, H Engelmann and J Bradley

Abstract

Electron tomograph tomography is a well y well-established technique for three-dimensional structure determination of (almost) amorphous specimens in life science applications. With the recent advances in nanotechnology and the semiconductor industry, there is also an increasing need for high-resolution 3D structural information in physical sciences. In this paper, we evaluate the capabilities and limitations of TEM and HAADF-STEM tomography for the 3D structural characterization of partially crystalline to highly crystalline materials. Our analysis of catalysts, a hydrogen storage material, and different semiconductor devices shows that features with a diameter as small as 1-2 nm can be resolved in 3D by electron tomography. For partially crystalline materials with small single crystalline domains, TEM tomography provides reliable 3D structural information. HAADF-STEM tomography is more versatile and can also be used for high-resolution 3D imaging of highly crystalline materials such as semiconductor devices

Topics: 99 General And Miscellaneous//Mathematics, Computing, And Information Science, Semiconductor Devices, 08 Hydrogen, 36 Materials Science, Catalysts, Electrons, Tomography, Hydrogen Storage
Publisher: Lawrence Livermore National Laboratory
Year: 2005
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Provided by: UNT Digital Library
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