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A novel silicon base piezoresistive pressure sensor using front side etching process

By Chih-Tang Peng


[[abstract]]By applying the etching via technology, this study proposes a novel front-side etching fabrication process for a silicon based piezoresistive pressure sensor to replace the conventional backside bulk micro-machining. The distinguishing features of this novel structure are chip size reduction and fabrication costs degradation. In order to investigate the sensor performance and the sensor packaging effect of the structure proposed in this research, the finite element method was adopted for analyzing the sensor sensitivity and stability. The sensitivity and the stability of the novel sensor after packaging were studied by applying mechanical as well as thermal loading to the sensor. Furthermore, the fabrication process and the sensor performance of the novel pressure sensor were compared with the conventional back-side etching type pressure sensor for the feasibility validation of the novel sensor. The results showed that the novel pressure sensor provides better sensitivity than the conventional one, and the sensor output signal stability can be enhanced by better packaging structure designs proposed in this study. Based on the above findings, this novel structure pressure sensor shows a high potential for membrane type micro-sensor application.[[fileno]]2020233030043[[department]]動機

Topics: Thermal stress, Silicon, Polyimides, Micromachining, Mechanical engineering, Mathematical models, Gages, Finite element method, Etching, Partial pressure sensors, [[classification]]28
Publisher: American Society Of Mechanical Engineers
Year: 2010
DOI identifier: 10.1115/IMECE2003-41092
OAI identifier:
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