It is recognised that surface feature is the one of the most important factors affecting the functionality and reliability of micro/nano scale patterned surfaces. The information in all surface geometrical patterns is contained in the attributes of the individual pattern features and the structural relationships between these features. To extract this information the individual pattern features need to be identified . A stable syntactic extraction technique of significant surface features from what is termed a structured surface has been developed. Different feature extraction techniques applied for the different types of structured surfaces are illustrated [2-3]. Examples have been selected to demonstrate the feasibility and applicability of the surface pattern analysis techniques. Finally, experimental results will be given and discussed in this paper
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