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A Chip Device For On-line Assessment In Nano-scale Surface Manufacture

By Shuming Yang

Abstract

This project aims to create a novel system based on interferometry and\ud wavelength spatial scanning techniques using breakthrough micro-/nanotechnology\ud and optical methodologies. The system will be used for online\ud nano-scale surface measurement, which represents an important step\ud change in the fields of surface metrology

Topics: TA
OAI identifier: oai:eprints.hud.ac.uk:5204

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