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Measurement and characterisation of micro nano-scale structured surfaces

By Hao Zhu, Liam Blunt, Xiang Jiang and Xiao Shaojun

Abstract

This project aims to investigate basic surface metrology techniques for micro/nano-scale structured surfaces, especially MEMS surfaces. The project will focus on developing a methodology for preparing and conducting the measurement of MEMS surfaces, and furthermore to study the pattern recognition and characterisation of basic geometry specification of those micro-structures

Topics: T1
OAI identifier: oai:eprints.hud.ac.uk:5219

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